Patent US8891059B2 successfully refreshed from Google Patents.
US8891059B2
Active / In Force
US
⏱️ 4.8 years remaining
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
Assignee: Nikon Corp
•
Filing: 2011-08-18
•
Granted: 2014-11-18
•
Expires: 2031-08-18
Abstract
Abstract A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system is provided with: a first opening; a gap portion that is provided so that a liquid on an object that opposes the first opening can flow into the gap portion through the first opening; a liquid recovery part that suctions, through a porous member, at least part of the liquid that flows into the gap portion; and a second opening that is different from the first opening. The gap portion is open to the atmosphere through the second opening.
Inventors
- 👤 Hiroyuki Nagasaka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 16:41
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/70; G03F7/70216; G03F7/70341; G03B; G03B27/00; G03B27/32; G03B27/52; H; H10; H10P; H10P76/00
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
264 words
A liquid recovery system that is used by a liquid immersion exposure apparatus in which an exposure light is projected onto a substrate by a projection optical system, the liquid recovery system comprising: a member that surrounds a final optical element of the projection optical system, the member disposed above the substrate and including an aperture through which the exposure light is projected from the final optical element onto the substrate during exposure of the substrate; a first opening that is different from the aperture and that is disposed in a lower surface of the member which directly faces the substrate during the exposure operation, the first opening surrounding the aperture of the member; a space within the member higher than the first opening and into which a liquid on an object that directly opposes the first opening flows after the liquid passes through the first opening; a liquid removal outlet that communicates with the space and that suctions at least part of the liquid in the space into a flow channel of the member, the liquid removal outlet located higher than the first opening and the substrate, the liquid removal outlet not directly opposing the substrate, and the liquid removal outlet configured to limit a gas in the space from being sucked into the flow channel through the liquid removal outlet; and a second opening that communicates with the space and through which the gas in the space flows from the space, the second opening being different from the first opening and the second opening being disposed higher than the liquid removal outlet.
Claim 2
Dependent Claim
264 words
A liquid recovery system that is used by a liquid immersion exposure apparatus in which an exposure light is projected onto a substrate by a projection optical system, the liquid recovery system comprising: a member that surrounds a final optical element of the projection optical system, the member disposed above the substrate and including an aperture through which the exposure light is projected from the final optical element onto the substrate during exposure of the substrate; a first opening that is different from the aperture and that is disposed in a lower surface of the member which directly faces the substrate during the exposure operation, the first opening surrounding the aperture of the member; a space within the member higher than the first opening and into which a liquid on an object that directly opposes the first opening flows after the liquid passes through the first opening; a liquid removal outlet that communicates with the space and that suctions at least part of the liquid in the space into a flow channel of the member, the liquid removal outlet located higher than the first opening and the substrate, the liquid removal outlet not directly opposing the substrate, and the liquid removal outlet configured to limit a gas in the space from being sucked into the flow channel through the liquid removal outlet; and a second opening that communicates with the space and through which the gas in the space flows from the space, the second opening being different from the first opening and the second opening being disposed higher than the liquid removal outlet.
Claim 3
Dependent Claim
15 words
The liquid recovery system of claim 1 , wherein the first opening is shaped annular.
Claim 4
Dependent Claim
31 words
The liquid recovery system of claim 1 , wherein the liquid removal outlet includes a porous member to limit the gas in the space from being sucked into the flow channel.
Claim 5
Dependent Claim
19 words
The liquid recovery system of claim 1 , wherein the second opening is disposed above the liquid removal outlet.
Claim 6
Dependent Claim
33 words
The liquid recovery system of claim 1 , wherein the space includes a capillary passage into which the liquid on the object that opposes the first opening can flow via the first opening.
Claim 7
Dependent Claim
30 words
The liquid recovery system of claim 1 , wherein the second opening is disposed such that the liquid in the space does not come into contact with the second opening.
Claim 8
Dependent Claim
41 words
The liquid recovery system of claim 1 , wherein the liquid removal outlet and the second opening are configured to suction the liquid into the flow channel in a same direction as the flow of the gas through the second opening.
Claim 9
Dependent Claim
44 words
An immersion exposing method that exposes a substrate, comprising: exposing the substrate with exposure light through a liquid on the substrate; and recovering the liquid on the substrate using the liquid recovery system according to claim 1 , during the exposure of the substrate.
Claim 10
Dependent Claim
260 words
An immersion exposure apparatus that exposes a substrate, the immersion exposure apparatus comprising: an optical member, which comprises an emergent surface that emits exposure light; and a liquid recover system that comprises: a member that surrounds the optical member, the member disposed above the substrate and including an aperture through which the exposure light is projected from the emergent surface of the optical member onto the substrate during exposure of the substrate; a first opening that is different from the aperture and that is disposed in a lower surface of the member which directly faces the substrate during the exposure operation, the first opening surrounding the aperture of the member; a space within the member higher than the first opening and into which a liquid on the substrate that directly opposes the first opening flows after the liquid passes through the first opening; a liquid removal outlet that communicates with the space and that suctions at least part of the liquid in the space into a flow channel of the member, the liquid removal outlet located higher than the first opening and the substrate, the liquid removal outlet not directly opposing the substrate, and the liquid removal outlet configured to limit a gas in the space from being sucked into the flow channel through the liquid removal outlet; and a second opening that communicates with the space and through which the gas in the space flows from the space, the second opening being different from the first opening and the second opening is disposed higher than the liquid removal outlet.
Claim 11
Dependent Claim
260 words
An immersion exposure apparatus that exposes a substrate, the immersion exposure apparatus comprising: an optical member, which comprises an emergent surface that emits exposure light; and a liquid recover system that comprises: a member that surrounds the optical member, the member disposed above the substrate and including an aperture through which the exposure light is projected from the emergent surface of the optical member onto the substrate during exposure of the substrate; a first opening that is different from the aperture and that is disposed in a lower surface of the member which directly faces the substrate during the exposure operation, the first opening surrounding the aperture of the member; a space within the member higher than the first opening and into which a liquid on the substrate that directly opposes the first opening flows after the liquid passes through the first opening; a liquid removal outlet that communicates with the space and that suctions at least part of the liquid in the space into a flow channel of the member, the liquid removal outlet located higher than the first opening and the substrate, the liquid removal outlet not directly opposing the substrate, and the liquid removal outlet configured to limit a gas in the space from being sucked into the flow channel through the liquid removal outlet; and a second opening that communicates with the space and through which the gas in the space flows from the space, the second opening being different from the first opening and the second opening is disposed higher than the liquid removal outlet.
Claim 12
Dependent Claim
15 words
The immersion exposure apparatus of claim 9 , wherein the first opening is shaped annular.
Claim 13
Dependent Claim
31 words
The immersion exposure apparatus of claim 9 , wherein the liquid removal outlet includes a porous member to limit the gas in the space from being sucked into the flow channel.
Claim 14
Dependent Claim
19 words
The immersion exposure apparatus of claim 9 , wherein the second opening is disposed above the liquid removal outlet.
Claim 15
Dependent Claim
33 words
The immersion exposure apparatus of claim 9 , wherein the space includes a capillary passage into which the liquid on the object that opposes the first opening can flow via the first opening.
Claim 16
Dependent Claim
30 words
The immersion exposure apparatus of claim 9 , wherein the second opening is disposed such that the liquid in the space does not come into contact with the second opening.
Claim 17
Dependent Claim
41 words
The immersion exposure apparatus of claim 9 , wherein the liquid removal outlet and the second opening are configured to suction the liquid into the flow channel in a same direction as the flow of the gas through the second opening.
Claim 18
Dependent Claim
23 words
A device fabricating method, comprising: exposing a substrate using the immersion exposure apparatus according to claim 9 ; and developing the exposed substrate.
Claim 19
Dependent Claim
237 words
A liquid recovery method that is used by a liquid immersion exposure apparatus in which an exposure light is projected onto a substrate by a projection optical system, the method comprising the steps of: removing a liquid from an object through a first opening that is provided in a lower surface of a member that surrounds a final optical element of the projection optical system, the member disposed above the substrate and including an aperture through which the exposure light is projected from the final optical element onto the substrate during exposure of the substrate, the first opening being different from the aperture and surrounding the aperture of the member, the liquid that is removed from the object through the first opening, which directly opposes the object, passing into a space within the member, the space being higher than the first opening; suctioning at least a part of the liquid in the space through a liquid removal outlet and into a flow channel, the liquid removal outlet communicating with the space, being located higher than the first opening and the substrate, and not directly opposing the substrate; limiting a gas in the space from being suctioned into the flow channel; and discharging the gas in the space through a second opening that communicates with the space, the second opening being different from the first opening, and the second opening being disposed higher than the liquid removal outlet.
Claim 20
Dependent Claim
237 words
A liquid recovery method that is used by a liquid immersion exposure apparatus in which an exposure light is projected onto a substrate by a projection optical system, the method comprising the steps of: removing a liquid from an object through a first opening that is provided in a lower surface of a member that surrounds a final optical element of the projection optical system, the member disposed above the substrate and including an aperture through which the exposure light is projected from the final optical element onto the substrate during exposure of the substrate, the first opening being different from the aperture and surrounding the aperture of the member, the liquid that is removed from the object through the first opening, which directly opposes the object, passing into a space within the member, the space being higher than the first opening; suctioning at least a part of the liquid in the space through a liquid removal outlet and into a flow channel, the liquid removal outlet communicating with the space, being located higher than the first opening and the substrate, and not directly opposing the substrate; limiting a gas in the space from being suctioned into the flow channel; and discharging the gas in the space through a second opening that communicates with the space, the second opening being different from the first opening, and the second opening being disposed higher than the liquid removal outlet.
Claim 21
Dependent Claim
30 words
The liquid recovery method of claim 17 , wherein the gas is limited from being suctioned into the flow channel by using a porous member in the liquid removal outlet.
Claim 22
Dependent Claim
19 words
The liquid recovery method of claim 17 , wherein the second opening is disposed above the liquid removal outlet.
Claim 23
Dependent Claim
32 words
The liquid recovery method of claim 17 , the liquid on the object that opposes the first opening is removed via the first opening through a capillary passage included in the space.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2017-11-17 | 2018-05-19 | 2018-11-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2021-11-17 | 2022-05-19 | 2022-11-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2025-11-17 | 2026-05-19 | 2026-11-18 | $7700.00 | Surcharge Window Open |