US7292313B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus and method for providing fluid for immersion lithography
Assignee: Nikon Corp
•
Filing: 2006-02-28
•
Granted: 2007-11-06
•
Expires: 2026-02-28
Abstract
Abstract Systems and methods control the fluid flow and pressure to provide stable conditions for immersion lithography. A fluid is provided in a space between a lens and a substrate during the immersion lithography process. Fluid is supplied to the space and is recovered from the space through a porous member in fluidic communication with the space. Maintaining the pressure in the porous member under the bubble point of the porous member can eliminate noise created by mixing air with the fluid during fluid recovery. The method can include drawing the fluid from the space via a recovery flow line through a porous member, and maintaining a pressure of the fluid in the porous member below a bubble point of the porous member during drawing of the fluid from the space.
Inventors
- 👤 Alex Ka Tim Poon
- 👤 Leonard Wai Fung Kho
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 15:54
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70341; G03F7/20; G03F7/2041; G03F7/70358; G03F7/708; G03F7/70808; G03F7/70858
Claims Analysis
Total Claims: 50
Claim 1
Independent Claim
65 words
A method of recovering a fluid from a space between a lens and a substrate in an immersion lithography system, the method comprising: drawing the fluid from the space via a recovery flow line through a porous member; and maintaining a pressure of the fluid in the porous member below a bubble point of the porous member during drawing of the fluid from the space.
Claim 2
Independent Claim
65 words
A method of recovering a fluid from a space between a lens and a substrate in an immersion lithography system, the method comprising: drawing the fluid from the space via a recovery flow line through a porous member; and maintaining a pressure of the fluid in the porous member below a bubble point of the porous member during drawing of the fluid from the space.
Claim 3
Dependent Claim
30 words
The method of claim 1 , wherein maintaining the pressure comprises: directing the fluid drawn from the space through the porous member via the recovery flow line to a container.
Claim 4
Dependent Claim
22 words
The method of claim 2 , wherein maintaining the pressure further comprises moving the fluid from the container to a collection tank.
Claim 5
Dependent Claim
22 words
The method of claim 3 , wherein the fluid is moved down by gravity to the collection tank disposed below the container.
Claim 6
Dependent Claim
13 words
The method of claim 2 , wherein the container includes an overflow container.
Claim 7
Dependent Claim
17 words
The method of claim 2 , wherein maintaining the pressure comprises regulating a pressure in the container.
Claim 8
Dependent Claim
22 words
The method of claim 2 , wherein maintaining the pressure comprises keeping a constant height of the fluid above the porous member.
Claim 9
Dependent Claim
66 words
The method of claim 1 , wherein maintaining the pressure comprises: drawing the fluid from the space through the porous member to a fluid buffer; sensing a pressure or a fluid level at the fluid buffer; and controlling the fluid flow drawn from the space via the recovery flow line through the porous member based on the sensed pressure or fluid level at the fluid buffer.
Claim 10
Dependent Claim
27 words
The method of claim 8 , wherein controlling the fluid flow comprises controlling a variable valve disposed in the recovery flow line downstream of the porous member.
Claim 11
Dependent Claim
66 words
The method of claim 1 , wherein maintaining the pressure comprises: providing a fluid buffer; drawing the fluid from the space through the porous member to the fluid buffer; sensing a pressure or a fluid level at the fluid buffer; and controlling a vacuum pressure at the recovery flow line through the porous member based on the sensed pressure or fluid level at the fluid buffer.
Claim 12
Dependent Claim
34 words
The method of claim 10 , wherein controlling the vacuum pressure comprises controlling a vacuum regulator for adjusting a vacuum pressure in a collection tank that is fluidicly coupled with the recovery flow line.
Claim 13
Dependent Claim
33 words
The method of claim 1 , wherein maintaining the pressure comprises: drawing the fluid from the space through the porous member to a first tank; and regulating a pressure in the first tank.
Claim 14
Dependent Claim
23 words
The method of claim 12 , wherein maintaining the pressure further comprises moving the fluid from the first tank to a second tank.
Claim 15
Dependent Claim
23 words
The method of claim 13 , wherein the fluid is moved down by gravity to the second tank disposed below the first tank.
Claim 16
Dependent Claim
23 words
The method of claim 12 , wherein maintaining the pressure further comprises sensing a pressure or a fluid level in the first tank.
Claim 17
Dependent Claim
36 words
The method of claim 15 , wherein maintaining the pressure further comprises controlling the fluid flow drawn from the space to a second tank through the porous member based on the sensed pressure or fluid level.
Claim 18
Dependent Claim
28 words
The method of claim 16 , wherein the fluid drawn from the space via the porous member is moved to the second tank through the recovery flow line.
Claim 19
Dependent Claim
23 words
The method of claim 12 , wherein maintaining the pressure further comprises maintaining a pressure or a fluid level in the first tank.
Claim 20
Independent Claim
94 words
An apparatus for recovering a fluid from a space between a lens and a substrate in an immersion lithography system, the apparatus comprising: a porous member fluidicly coupled with the space and with a recovery flow line to draw fluid from the space via the porous member to the recovery flow line; and a pressure control system fluidicly coupled with the porous member to maintain a pressure at the surface of the porous member below a bubble point of the porous member during drawing of the fluid from the space via the porous member.
Claim 21
Independent Claim
94 words
An apparatus for recovering a fluid from a space between a lens and a substrate in an immersion lithography system, the apparatus comprising: a porous member fluidicly coupled with the space and with a recovery flow line to draw fluid from the space via the porous member to the recovery flow line; and a pressure control system fluidicly coupled with the porous member to maintain a pressure at the surface of the porous member below a bubble point of the porous member during drawing of the fluid from the space via the porous member.
Claim 22
Dependent Claim
31 words
The apparatus of claim 19 , wherein the pressure control system comprises: a container fluidicly coupled with the porous member; and a vacuum regulator that regulates a pressure in the container.
Claim 23
Dependent Claim
19 words
The apparatus of claim 20 , further comprising a collection tank fluidicly coupled to and disposed below the container.
Claim 24
Dependent Claim
95 words
The apparatus of claim 19 , wherein the pressure control system comprises: a fluid buffer fluidicly coupled with the porous member; a sensor that senses a pressure or a fluid level at the fluid buffer; and a controller that adjusts a flow rate of the fluid drawn from the space through the recovery flow line, based on a sensor signal supplied from the sensor, to maintain a pressure at the surface of the porous member below a bubble point of the porous member during drawing of the fluid from the space via the porous member.
Claim 25
Dependent Claim
44 words
The apparatus of claim 22 , wherein the pressure control system comprises a valve disposed downstream of the porous member, and wherein the controller controls the valve to adjust the flow rate of the fluid drawn from the space through the recovery flow line.
Claim 26
Dependent Claim
72 words
The apparatus of claim 22 , wherein the pressure control system comprises: a collection tank fluidicly coupled to the recovery flow line; and a controllable vacuum regulator that regulates a pressure in the collection tank; wherein the controller controls the controllable vacuum regulator to adjust the flow rate of the fluid drawn from the space through the recovery flow line to the collection tank by controlling the pressure in the collection tank.
Claim 27
Dependent Claim
21 words
The apparatus of claim 22 , further comprising a fluid supply or a fluid recovery fluidicly coupled with the fluid buffer.
Claim 28
Dependent Claim
29 words
The apparatus of claim 19 , wherein the porous member is selected from the group consisting of a mesh, a porous material, and a member having etched holes therein.
Claim 29
Dependent Claim
13 words
The apparatus of claim 20 , wherein the container includes an overflow container.
Claim 30
Dependent Claim
33 words
The apparatus of claim 19 , wherein the pressure control system comprises: a first tank fluidicly coupled to the porous member; and a vacuum regulator which regulates a pressure in the first tank.
Claim 31
Dependent Claim
19 words
The apparatus of claim 28 , wherein the fluid is moved from the first tank to a second tank.
Claim 32
Dependent Claim
23 words
The apparatus of claim 29 , wherein the fluid is moved down by gravity to the second tank disposed below the first tank.
Claim 33
Dependent Claim
26 words
The apparatus of claim 28 , wherein the pressure control system comprises a sensor which senses a pressure or a fluid level in the first tank.
Claim 34
Dependent Claim
35 words
The apparatus of claim 31 , wherein the pressure control system controls the fluid flow drawn from the space to a second tank through the porous member based on the sensed pressure or fluid level.
Claim 35
Dependent Claim
26 words
The apparatus of claim 28 , wherein the pressure control system maintains a pressure or a fluid level in the first tank at a preset value.
Claim 36
Independent Claim
100 words
An apparatus comprising: an optical projection system having a last optical element, the optical projection system projecting an image onto a workpiece through an immersion liquid filled in a space between the last optical element and the workpiece; a stage that supports the workpiece adjacent to the optical projection system when the image is being projected onto the workpiece; a porous member, positioned adjacent to the space, the porous member recovering fluid exiting the space; and a control system that maintains a pressure on the porous member, the pressure being at or below a bubble point of the porous member.
Claim 37
Independent Claim
100 words
An apparatus comprising: an optical projection system having a last optical element, the optical projection system projecting an image onto a workpiece through an immersion liquid filled in a space between the last optical element and the workpiece; a stage that supports the workpiece adjacent to the optical projection system when the image is being projected onto the workpiece; a porous member, positioned adjacent to the space, the porous member recovering fluid exiting the space; and a control system that maintains a pressure on the porous member, the pressure being at or below a bubble point of the porous member.
Claim 38
Dependent Claim
30 words
The apparatus of claim 34 , wherein the control system comprises: a container fluidicly coupled with the porous member; and a vacuum regulator that regulates a pressure in the container.
Claim 39
Dependent Claim
19 words
The apparatus of claim 35 , further comprising a collection tank fluidicly coupled to and disposed below the container.
Claim 40
Dependent Claim
13 words
The apparatus of claim 35 , wherein the container includes an overflow container.
Claim 41
Dependent Claim
94 words
The apparatus of claim 34 , wherein the control system comprises: a fluid buffer fluidicly coupled with the porous member; a sensor that senses a pressure or a fluid level at the fluid buffer; and a controller that adjusts a flow rate of the fluid drawn from the space through a recovery flow line, based on a sensor signal supplied from the sensor, to maintain a pressure at the surface of the porous member below a bubble point of the porous member during drawing of the fluid from the space via the porous member.
Claim 42
Dependent Claim
43 words
The apparatus of claim 38 , wherein the control system comprises a valve disposed downstream of the porous member, and wherein the controller controls the valve to adjust the flow rate of the fluid drawn from the space through the recovery flow line.
Claim 43
Dependent Claim
71 words
The apparatus of claim 38 , wherein the control system comprises: a collection tank fluidicly coupled to the recovery flow line; and a controllable vacuum regulator that regulates a pressure in the collection tank; wherein the controller controls the controllable vacuum regulator to adjust the flow rate of the fluid drawn from the space through the recovery flow line to the collection tank by controlling the pressure in the collection tank.
Claim 44
Dependent Claim
21 words
The apparatus of claim 38 , further comprising a fluid supply or a fluid recovery fluidicly coupled with the fluid buffer.
Claim 45
Dependent Claim
32 words
The apparatus of claim 34 , wherein the control system comprises: a first tank fluidicly coupled to the porous member; and a vacuum regulator which regulates a pressure in the first tank.
Claim 46
Dependent Claim
19 words
The apparatus of claim 42 , wherein the fluid is moved from the first tank to a second tank.
Claim 47
Dependent Claim
23 words
The apparatus of claim 43 , wherein the fluid is moved down by gravity to the second tank disposed below the first tank.
Claim 48
Dependent Claim
25 words
The apparatus of claim 42 , wherein the control system comprises a sensor which senses a pressure or a fluid level in the first tank.
Claim 49
Dependent Claim
34 words
The apparatus of claim 45 , wherein the control system controls the fluid flow drawn from the space to a second tank through the porous member based on the sensed pressure or fluid level.
Claim 50
Dependent Claim
25 words
The apparatus of claim 42 , wherein the control system maintains a pressure or a fluid level in the first tank at a preset value.
References Cited (Backward Citations)
US4346164A
Cited
US4480910A
Cited
US5610683A
Cited
US5715039A
Cited
US5825043A
Cited
US6341007B1
Cited
US6262796B1
Cited
WO1999049504A1
Cited
US20050190455A1
Cited
US20050117224A1
Cited
US20030030916A1
Cited
US20020163629A1
Cited
WO2002091078A1
Cited
US20030174408A1
Cited
US20050030506A1
Cited
US20050141098A1
Cited
WO2003077037A1
Cited
US20040000627A1
Cited
WO2004019128A2
Cited
US20050217137A1
Cited
US20050217703A1
Cited
US20050217135A1
Cited
US20050145265A1
Cited
US20040075895A1
Cited
US20040207824A1
Cited
US20040160582A1
Cited
US20040165159A1
Cited
US20040211920A1
Cited
US20050036121A1
Cited
US20040136494A1
Cited
US20040169834A1
Cited
US20040114117A1
Cited
US20040109237A1
Cited
US20040119954A1
Cited
WO2004055803A1
Cited
WO2004057589A1
Cited
WO2004057590A1
Cited
US20040118184A1
Cited
US20040125351A1
Cited
US20040180294A1
Cited
WO2004077154A2
Cited
US20040169924A1
Cited
US20040227923A1
Cited
WO2004081666A1
Cited
US20040180299A1
Cited
WO2005001432A2
Cited
WO2004093159A2
Cited
WO2004093160A2
Cited
WO2004090633A2
Cited
WO2004092833A2
Cited
WO2004090634A2
Cited
WO2004092830A2
Cited
WO2004090577A2
Cited
WO2004093130A2
Cited
WO2004095135A2
Cited
US20040224265A1
Cited
US20040224525A1
Cited
US20050007569A1
Cited
US20040233405A1
Cited
US20050007570A1
Cited
US20050264778A1
Cited
US20050024609A1
Cited
US20040253547A1
Cited
US20040253548A1
Cited
US20040257544A1
Cited
US20040259040A1
Cited
US20040259008A1
Cited
WO2005003864A2
Cited
US20050134817A1
Cited
US20050030497A1
Cited
WO2005001572A2
Cited
US20050018155A1
Cited
US20050002004A1
Cited
US20040263808A1
Cited
US20040263809A1
Cited
US20050018156A1
Cited
WO2005006026A2
Cited
US20050046813A1
Cited
WO2005008339A2
Cited
US20050041225A1
Cited
WO2005013008A2
Cited
US20050030498A1
Cited
US20050042554A1
Cited
WO2005017625A2
Cited
US20050037269A1
Cited
US20050036183A1
Cited
US20050036184A1
Cited
WO2005015283A1
Cited
US20050036213A1
Cited
WO2005019935A2
Cited
WO2005024325A2
Cited
US20050094116A1
Cited
US20050046934A1
Cited
WO2005022266A2
Cited
US20050048223A1
Cited
WO2005024517A2
Cited
US20050068639A1
Cited
WO2005034174A2
Cited
US20050073670A1
Cited
US20050084794A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2010-11-05 | 2011-05-07 | 2011-11-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2014-11-05 | 2015-05-07 | 2015-11-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2018-11-05 | 2019-05-07 | 2019-11-06 | $7700.00 | Window Closed / Lapsed |