US6778257B2 — Imaging apparatus

Claim 1

Independent Claim 150 words

An imaging apparatus comprising: a radiation system configured to provide a beam of radiation; a programmable patterning structure configured to pattern the beam according to a desired pattern, the programmable patterning structure including a plurality of separate patterning sub-elements, each sub-element being configured to generate a patterned sub-beam; a combining structure configured to combine the plurality of patterned sub-beams into a single patterned image; at least one optical system arranged in an optical path between a corresponding one of the plurality of separate patterning sub-elements and the combining structure; a substrate table configured to hold a substrate; and a projection system configured to project the patterned image onto a target portion of the substrate, wherein at least one patterning sub-element is configured to generate a patterned sub-beam whose cross-section contains regions of different intensities, and wherein said combining structure comprises at least one among a reflector and a beam splitter.

Claim 2

Dependent Claim 150 words

An imaging apparatus comprising: a radiation system configured to provide a beam of radiation; a programmable patterning structure configured to pattern the beam according to a desired pattern, the programmable patterning structure including a plurality of separate patterning sub-elements, each sub-element being configured to generate a patterned sub-beam; a combining structure configured to combine the plurality of patterned sub-beams into a single patterned image; at least one optical system arranged in an optical path between a corresponding one of the plurality of separate patterning sub-elements and the combining structure; a substrate table configured to hold a substrate; and a projection system configured to project the patterned image onto a target portion of the substrate, wherein at least one patterning sub-element is configured to generate a patterned sub-beam whose cross-section contains regions of different intensities, and wherein said combining structure comprises at least one among a reflector and a beam splitter.

Claim 3

Dependent Claim 49 words

The imaging apparatus according to claim 1 , wherein said combining structure comprises a plurality of separate optical channels, each optical channel corresponding to one of said separate patterning sub-elements and being configured to project an image of said patterning sub-element into an object plane of said projection system.

Claim 4

Dependent Claim 26 words

The imaging apparatus according to claim 2 , wherein said plurality of separate optical channels are arranged to project reduced images of said separate patterning sub-elements.

Claim 5

Dependent Claim 16 words

The imaging apparatus according to claim 1 , wherein said combining structure includes a beam splitter.

Claim 6

Dependent Claim 133 words

The imaging apparatus according to claim 1 , wherein said programmable patterning structure comprises first to fourth separate patterning sub-elements, and wherein said combining structure comprises first to third beam splitters, and wherein said first beam splitter is configured to combine patterned sub-beams from said first and second separate patterning sub-elements to form a first combined beam, and wherein said second beam splitter is configured to combine a patterned sub-beam from said third separate patterning sub-element with the first combined beam to form a second combined beam, and wherein said third beam splitter is configured to combine a patterned sub-beam from said fourth separate patterning sub-element with the second combined beam to form a third combined beam, and wherein said projection system is configured to projected the third combined beam onto the substrate.

Claim 7

Dependent Claim 124 words

The imaging apparatus according to claim 1 , wherein said programmable patterning structure comprises first to fourth separate patterning sub-elements, and wherein said combining structure comprises first to third beam splitters, and wherein said first beam splitter is configured to combine patterned sub-beams from said first and second separate patterning sub-elements to form a first combined beam, and wherein said second beam splitter is configured to combine patterned sub-beams from said third and fourth separate patterning sub-elements to form a second combined beam, and wherein said third beam splitter is configured to combine the first combined beam with the second combined beam to form a third combined beam, and wherein said projection system is configured to projected the third combined beam onto the substrate.

Claim 8

Dependent Claim 83 words

The imaging apparatus according to claim 1 , wherein said separate patterning sub-elements are arranged around an imaginary circle parallel to the object plane, and wherein said apparatus comprises a plurality of optical systems, each optical system corresponding to one of said separate patterning sub-elements and having an optical axis extending generally radially of said imaginary circle, and a corresponding plurality of folding mirrors, each folding mirror configured to direct a beam output by said corresponding optical system to intersect the object plane.

Claim 9

Dependent Claim 44 words

The imaging apparatus according to claim 7 , further comprising an additional separate patterning sub-element and an additional optical system having an optical axis intersecting said object plane and configured to project an image of said additional separate patterning sub-element onto the object plane.

Claim 10

Dependent Claim 25 words

The imaging apparatus according to claim 7 , wherein each optical system is configured to process a corresponding one of the plurality of patterned sub-beams.

Claim 11

Dependent Claim 24 words

The imaging apparatus according to claim 1 , wherein said combining structure comprises a segmented lens forming the first element in said projection system.

Claim 12

Dependent Claim 22 words

The imaging apparatus according to claim 1 , wherein each separate patterning sub-element comprises an array of individually controllable radiation modulating devices.

Claim 13

Dependent Claim 25 words

The imaging apparatus according to claim 11 , wherein said plurality of separate patterning sub-elements are mounted in a staggered array on a carrier plate.

Claim 14

Dependent Claim 42 words

The imaging apparatus according to claim 1 , wherein each of said separate patterning sub-elements comprises a carrier plate having mounted thereon a plurality of separate arrays of individually controllable radiation modulating devices, said separate arrays being mounted in a staggered array.

Claim 15

Dependent Claim 33 words

The imaging apparatus according to claim 11 , wherein each of said individually controllable radiation modulating devices comprises at least one among a pixel of a liquid crystal device and a moveable mirror.

Claim 16

Dependent Claim 123 words

The imaging apparatus according to claim 1 , wherein said substrate table is further configured to scan the substrate in a first direction during exposure of the target portion, and wherein the single patterned image includes a staggered array having at least first and second rows of sub-images, each sub-image corresponding to one among the plurality of patterned sub-beams, and wherein each of the first and second rows extends in a second direction perpendicular to the first direction, and wherein the dimensions of the sub-images in the second direction are greater than the spaces between adjacent sub-images in the second direction, and wherein the sub-images of the second row are aligned along the first direction with spaces between sub-images of the first row.

Claim 17

Dependent Claim 129 words

The imaging apparatus according to claim 15 , wherein the staggered array has third and fourth rows of sub-images, and wherein each of the third and fourth rows extends in a second direction perpendicular to the first direction, and wherein the first and third rows are on opposite sides of the second row, and wherein sub-images of the third row are offset from sub-images of the first row along said second direction by a first offset distance less than the length in the second direction of one of the sub-images, and wherein the second and fourth rows are on opposite sides of the third row, and wherein sub-images of the fourth row are offset from sub-images of the second row along said second direction by the first offset distance.

Claim 18

Dependent Claim 28 words

The imaging apparatus according to claim 15 , wherein each of the sub-images includes a staggered array of images of separate arrays of individually controllable radiation modulating devices.

Claim 19

Dependent Claim 21 words

The imaging apparatus according to claim 1 , wherein said combining structure comprises a three-way beam splitter and two folding mirrors.

Claim 20

Dependent Claim 19 words

The imaging apparatus according to claim 1 , wherein said at least one optical system includes a contrast aperture.

Claim 21

Dependent Claim 18 words

The imaging apparatus according to claim 1 , wherein said at least one optical system includes Scheimpflug optics.

Claim 22

Dependent Claim 26 words

The imaging apparatus according to claim 1 , wherein said at least one optical system is configured to reduce an image of the corresponding patterning sub-element.

Claim 23

Independent Claim 122 words

A device manufacturing method, said method comprising: using a radiation system to provide a beam of radiation; generating a plurality of patterned sub-beams based on the beam, at least one sub-beam having a cross-section that contains regions of different intensities; combining the plurality of patterned sub-beams into a single patterned image; passing at least one of the patterned sub-beams through an optical system prior to said combining, and projecting the patterned image onto a target portion of a layer of radiation-sensitive material that at least partially covers a substrate, wherein said combining includes at least one among (1) using a reflector to reflect the at least one patterned sub-beam and (2) passing the at least one patterned sub-beam through a beam splitter.

Claim 24

Independent Claim 122 words

A device manufacturing method, said method comprising: using a radiation system to provide a beam of radiation; generating a plurality of patterned sub-beams based on the beam, at least one sub-beam having a cross-section that contains regions of different intensities; combining the plurality of patterned sub-beams into a single patterned image; passing at least one of the patterned sub-beams through an optical system prior to said combining, and projecting the patterned image onto a target portion of a layer of radiation-sensitive material that at least partially covers a substrate, wherein said combining includes at least one among (1) using a reflector to reflect the at least one patterned sub-beam and (2) passing the at least one patterned sub-beam through a beam splitter.

Claim 25

Dependent Claim 120 words

The device manufacturing method according to claim 22 , said method further comprising scanning the substrate in a first direction during exposure of the target portion, and wherein the single patterned image includes a staggered array having at least first and second rows of sub-images, each sub-image corresponding to one among the plurality of patterned sub-beams, and wherein each of the first and second rows extends in a second direction perpendicular to the first direction, and wherein the dimensions of the sub-images in the second direction are greater than the spaces between adjacent sub-images in the second direction, and wherein the sub-images of the second row are aligned along the first direction with spaces between sub-images of the first row.

Claim 26

Dependent Claim 11 words

A device manufactured according to the method of claim 22 .

Claim 27

Dependent Claim 32 words

The device manufacturing method according to claim 22 , wherein said passing at least one of the patterned sub-beams through an optical system includes reducing an image of the corresponding patterning sub-element.

Claim 28

Dependent Claim 32 words

The device manufacturing method according to claim 22 , wherein said passing at least one of the patterned sub-beams through an optical system includes passing the patterned sub-beam through a contrast aperture.

Claim 29

Dependent Claim 25 words

The device manufacturing method according to claim 22 , wherein said combining includes passing at least three of the patterned sub-beams through a single beam-splitter.

Claim 30

Dependent Claim 22 words

The device manufacturing method according to claim 22 , wherein said combining includes projecting the patterned image onto a segmented lens element.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2007-08-17	2008-02-16	2008-08-17	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2011-08-17	2012-02-16	2012-08-17	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2015-08-17	2016-02-16	2016-08-17	$7700.00	Window Closed / Lapsed

Imaging apparatus

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