US5674414A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus of irradiating a surface of a workpiece with a plurality of beams
Assignee: Carl Zeiss AG
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Filing: 1995-04-14
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Granted: 1997-10-07
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Expires: 2015-04-14
Abstract
Abstract A method and apparatus for irradiating a surface of a workpiece utilizing several discrete component beams. The irradiation exposes a photosensitive layer on a surface of a workpiece to be processed. A deflecting device is provided having a plurality of elements assigned to corresponding ones of the component beams. Each component beam is directed individually or in combination with other component beams by the deflecting device. In this way, different points and zones on the surface of the workpiece to be processed can be irradiated simultaneously.
Inventors
- 👤 Jurgen Schweizer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 14:30
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/02; B23K26/06; B23K26/067; B23K26/03; B23K26/032; B23K26/0604; B23K26/064; B23K26/0643; B23K26/0648; B23K26/0665; B23K26/0673; G; G02; G02B; G02B26/00; G02B26/08; G02B26/0816; G02B27/00; G02B27/10; G02B27/106; G02B27/108; G02B27/12; G02B27/123; G02B27/14; G02B27/143; G02B27/144; G02B27/145; G03; G03F; G03F7/00; G03F7/70; G03F7/70383; G03F7/704
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
106 words
A method of irradiating a workpiece having a photosensitive layer formed thereon, the method comprising the steps of: forming a plurality of discrete component beams which are separate from each other; providing a deflecting device having a plurality of movable deflecting elements corresponding to respective ones of said component beams for individually and adjustably directing each of said component beams; and, controlling said deflecting elements to deflect each of said component beams individually onto said photosensitive layer so as to simultaneously irradiate respectively different points or zones on the surface of said workpiece with corresponding ones of said discrete component beams thereby exposing said photosensitive layer.
Claim 2
Independent Claim
106 words
A method of irradiating a workpiece having a photosensitive layer formed thereon, the method comprising the steps of: forming a plurality of discrete component beams which are separate from each other; providing a deflecting device having a plurality of movable deflecting elements corresponding to respective ones of said component beams for individually and adjustably directing each of said component beams; and, controlling said deflecting elements to deflect each of said component beams individually onto said photosensitive layer so as to simultaneously irradiate respectively different points or zones on the surface of said workpiece with corresponding ones of said discrete component beams thereby exposing said photosensitive layer.
Claim 3
Dependent Claim
37 words
The method of claim 1, wherein said individual elements have respective positions; and, said method comprising the further step of shifting each of said deflecting elements discretely at least in one coordinate direction at the position thereof.
Claim 4
Dependent Claim
23 words
The method of claim 1, wherein said component beams are determined relative to each other or arranged symmetrically ahead of said deflecting device.
Claim 5
Dependent Claim
17 words
The method of claim 1, wherein the light of a laser is used as said component beams.
Claim 6
Dependent Claim
28 words
The method of claim 4, comprising the further step of homogenizing said light of said laser with a beam homogenizer before said laser light impinges upon said workpiece.
Claim 7
Dependent Claim
45 words
The method of claim 1, wherein a supply device includes a laser for generating laser radiation for said discrete component beams, the method comprising the further step of selecting the intensity of the laser radiation so that no unintended exposure of adjoining areas takes place.
Claim 8
Dependent Claim
36 words
The method of claim 1, wherein a radiation distributing device having an array is provided; and, wherein the method comprises the further step of distributing said component beams in three dimensions utilizing said radiation distributing device.
Claim 9
Dependent Claim
42 words
The method of claim 1, comprising the further steps of: providing a material irradiating apparatus; and, introducing a printed circuit board into said material irradiating apparatus for irradiating said printed circuit board, said printed circuit board being coated with photosensitive resist material.
Claim 10
Dependent Claim
27 words
The method of claim 8, wherein the wavelength of the radiation of the irradiating beams lies in a range of between 300 and 400 nm when exposing.
Claim 11
Dependent Claim
37 words
The method of claim 1, wherein said workpiece has a surface defining a processing plane and wherein said method comprises the further step of imparting a variable beam diameter to the irradiating beams utilizing a zoom system.
Claim 12
Dependent Claim
30 words
The method of claim 1, wherein material is removed and an exposure takes place sequentially or simultaneously of a photosensitive layer on a surface of a workpiece to be processed.
Claim 13
Dependent Claim
25 words
The method of claim 1, further comprising the step of holding said workpiece in a stationary position during the irradiation of said photosensitive layer thereof.
Claim 14
Dependent Claim
96 words
An arrangement of irradiating a workpiece having a photosensitive layer formed thereon, the arrangement comprising: means for forming a plurality of discrete component beams which are separate from each other; a deflecting device having a plurality of movable deflecting elements corresponding to respective ones of said component beams; and, means for controlling said deflecting elements to deflect each of said component beams individually onto said photosensitive layer so as to simultaneously irradiate respectively different points or zones on the surface of said workpiece with corresponding ones of said discrete component beams thereby exposing said photosensitive layer.
Claim 15
Dependent Claim
96 words
An arrangement of irradiating a workpiece having a photosensitive layer formed thereon, the arrangement comprising: means for forming a plurality of discrete component beams which are separate from each other; a deflecting device having a plurality of movable deflecting elements corresponding to respective ones of said component beams; and, means for controlling said deflecting elements to deflect each of said component beams individually onto said photosensitive layer so as to simultaneously irradiate respectively different points or zones on the surface of said workpiece with corresponding ones of said discrete component beams thereby exposing said photosensitive layer.
Claim 16
Dependent Claim
24 words
The arrangement of claim 13, further comprising means for holding said workpiece in a stationary position during the irradiation of said photosensitive layer thereof.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-10-06 | 2001-04-07 | 2001-10-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-10-06 | 2005-04-07 | 2005-10-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-10-06 | 2009-04-07 | 2009-10-07 | $7700.00 | Window Closed / Lapsed |