US4950862A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Laser machining apparatus using focusing lens-array
Assignee: Laserfront Technologies Inc
•
Filing: 1989-10-12
•
Granted: 1990-08-21
•
Expires: 2009-10-12
Abstract
Abstract A laser beam machining apparatus for finely machining a semiconductor circuit or similar workpiece on a stage including a scanning mirror for directing the beam, scanning lens for converting the beam to a beam substantially perpendicular to the workpiece, lens array unit and mask for focusing the beam, driving means for X-Y movement of the lens array unit and control means for controlling the mirror driving means and stage.
Inventors
- 👤 Toshikazu Kajikawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 17:25
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/02; B23K26/04
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
253 words
A laser machining apparatus for machining a workpiece by focusing a laser beam to a desired position on a surface of said workpiece, comprising: a laser beam source for emitting the laser beam; scanning means for steering the laser beam from said laser beam source in a first direction; scanning lens means for converting the laser beam steered by said scanning means into a beam which is substantially perpendicular to the surface of the workpiece; a lens array unit having a plurality of miniature focusing lenses which are arranged in an array in the first direction for focusing a part of the laser beam from said scanning lens means to the desired position; a stage movable in a second direction perpendicular to the first direction while being loaded with the workpiece; first driving means for moving said lens array unit in the first direction by a small amount; second driving means for driving said stage; and control means for controlling said scanning means, said first driving means, and said second driving means; said control means controlling said scanning means such that an optical axis of the laser beam incident to said lens array unit is located in close proximity to the desired position on the workpiece; said control means controlling said first driving means such that an optical axis of one of said focusing lenses of said lens array unit coincides with the desired position; said control means controlling said second driving means such that said stage is positioned in the second direction.
Claim 2
Dependent Claim
253 words
A laser machining apparatus for machining a workpiece by focusing a laser beam to a desired position on a surface of said workpiece, comprising: a laser beam source for emitting the laser beam; scanning means for steering the laser beam from said laser beam source in a first direction; scanning lens means for converting the laser beam steered by said scanning means into a beam which is substantially perpendicular to the surface of the workpiece; a lens array unit having a plurality of miniature focusing lenses which are arranged in an array in the first direction for focusing a part of the laser beam from said scanning lens means to the desired position; a stage movable in a second direction perpendicular to the first direction while being loaded with the workpiece; first driving means for moving said lens array unit in the first direction by a small amount; second driving means for driving said stage; and control means for controlling said scanning means, said first driving means, and said second driving means; said control means controlling said scanning means such that an optical axis of the laser beam incident to said lens array unit is located in close proximity to the desired position on the workpiece; said control means controlling said first driving means such that an optical axis of one of said focusing lenses of said lens array unit coincides with the desired position; said control means controlling said second driving means such that said stage is positioned in the second direction.
Claim 3
Dependent Claim
39 words
An apparatus as claimed in claim 1, wherein said scanning means comprises a mirror for reflecting the laser beam from said laser beam source, said mirror being rotatable to steer the reflected laser beam in the first axis direction.
Claim 4
Dependent Claim
55 words
An apparatus as claimed in claim 2, wherein said scanning lens means comprises an fθ lens a focus of which is coincident with a point on said mirror where the laser beam from said laser beam source is incident, said point being coincident with a center of rotation of a reflecting surface of said mirror.
Claim 5
Dependent Claim
41 words
An apparatus as claimed in claim 1, further comprising a mask which screens a surface of said lens array unit to which the laser beam is incident, said mask being open at and around optical axes of said miniature focusing lenses.
Claim 6
Dependent Claim
91 words
An apparatus as claimed in claim 1, wherein said control means comprises: means for generating first axis data and second axis data respectively representative of a position of the desired position on the workpiece in the first direction and a position of said desired position in the second direction; means for controlling said scanning means in response to the first axis data; means for controlling said first driving means in response to the first axis data; and means for controlling said second driving means in response to the second axis data.
Claim 7
Dependent Claim
229 words
A laser machining apparatus for machining a desired position on a surface of a workpiece by focusing a laser beam to said desired position, comprising: a laser beam source for emitting the laser beam; scanning means for steering the laser beam from said laser beam source in a first direction and a second direction perpendicular to said first direction; scanning lens means for converting the laser beam steered by said scanning means into a beam which is substantially perpendicular to the surface of the workpiece; a lens array unit having a plurality of miniature focusing lenses which are arranged in a two-dimensional array in the first direction and the second direction for focusing a part of the laser beam from said scanning lens means to the desired position; a stationary stage loaded with the workpiece; driving means for moving said lens array unit in the first direction and the second direction by a small amount; and control means for controlling said scanning means and said driving means; said control means controlling said scanning means such that an optical axis of the laser beam incident to said lens array unit is located in close proximity to the desired position on the workpiece; said control means controlling said driving means such that an optical axis of one of said focusing lenses of said lens array unit coincides with the desired position.
Claim 8
Dependent Claim
229 words
A laser machining apparatus for machining a desired position on a surface of a workpiece by focusing a laser beam to said desired position, comprising: a laser beam source for emitting the laser beam; scanning means for steering the laser beam from said laser beam source in a first direction and a second direction perpendicular to said first direction; scanning lens means for converting the laser beam steered by said scanning means into a beam which is substantially perpendicular to the surface of the workpiece; a lens array unit having a plurality of miniature focusing lenses which are arranged in a two-dimensional array in the first direction and the second direction for focusing a part of the laser beam from said scanning lens means to the desired position; a stationary stage loaded with the workpiece; driving means for moving said lens array unit in the first direction and the second direction by a small amount; and control means for controlling said scanning means and said driving means; said control means controlling said scanning means such that an optical axis of the laser beam incident to said lens array unit is located in close proximity to the desired position on the workpiece; said control means controlling said driving means such that an optical axis of one of said focusing lenses of said lens array unit coincides with the desired position.
Claim 9
Dependent Claim
44 words
An apparatus as claimed in claim 6, wherein said scanning means comprises at least one mirror for reflecting the laser beam from said laser beam source, said mirror being rotatable to steer the reflected laser beam in the first direction and the second direction.
Claim 10
Dependent Claim
54 words
An apparatus as claimed in claim 7, wherein said scanning lens comprises an fθ lens a focus of which is coincident with a point on said mirror where the laser beam from said laser beam source is incident, said point being coincident with a center of rotation of a reflecting surface of said mirror.
Claim 11
Dependent Claim
41 words
An apparatus as claimed in claim 6, further comprising a mask which screens a surface of said lens array unit to which the laser beam is incident, said mask being open at and around optical axis of said miniature focusing lenses.
Claim 12
Dependent Claim
70 words
An apparatus as claimed in claim 1, wherein said control means comprises: means for generating first axis data and second axis data respectively representative of a position of the desired position on the workpiece in the first direction and a position of said desired position in the second direction; and means for controlling said scanning means and said driving means in response to the first data and the second data.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-08-20 | 1994-02-19 | 1994-08-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-08-20 | 1998-02-19 | 1998-08-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-08-20 | 2002-02-19 | 2002-08-21 | $7700.00 | Window Closed / Lapsed |