US7023610B2
Expired / Lapsed
US
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Ultraviolet laser apparatus and exposure apparatus using same
Assignee: Nikon Corp
•
Filing: 2003-02-19
•
Granted: 2006-04-04
•
Expires: 2023-02-19
Abstract
Abstract An ultraviolet laser apparatus having a single-wavelength oscillating laser generating laser light between an infrared band and a visible band, an optical amplifier for amplifying the laser light, and a wavelength converting portion converting the amplified laser light into ultraviolet light using a non-linear optical crystal. An exposure apparatus transfers a pattern image of a mask onto a substrate and includes a light source having a laser apparatus emitting laser light having a single wavelength, a first fiber optical amplifier for amplifying the laser light, a light dividing device for dividing or branching the amplified laser light into plural lights, and second fiber optical amplifiers for amplifying the plural divided or branched lights, respectively, and a transmission optical system for transmitting the laser light emitted from the light source to the exposure apparatus.
Inventors
- 👤 Tomoko Ohtsuki
- 👤 Soichi Owa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 18:30
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/10; H01S3/106; H01S3/108; H01S3/109; H01S3/05; H01S3/06; H01S3/063; H01S3/067; G; G02; G02B; G02B6/00; G02B6/10; G02B6/14; G02B6/24; G02B6/26; G02B6/32; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/1303; G02F1/35; G02F1/3501; G02F1/353; G03; G03F; G03F7/00; G03F7/70; G03F7/70008; G03F7/70025; G03F7/70483; G03F7/7055; G03F7/70575; H01S3/06754; H01S3/06758; H01S3/23; H01S3/2383; G02F1/3503; G02F1/354; G02F1/37; H01S3/005; H01S3/0057; H01S3/0064; H01S3/0078; H01S3/0085; H01S3/06708; H01S3/06716; H01S3/06729; H01S3/06745; H01S3/06762; H01S3/06766; H01S3/09; H01S3/091; H01S3/094; H01S3/094003; H01S3/094011; H01S3/0941; H01S3/09415; H01S3/14; H01S3/16; H01S3/1601; H01S3/1603; H01S3/1608
Claims Analysis
Total Claims: 91
Claim 1
Independent Claim
79 words
A laser apparatus comprising: a laser generating portion that generates pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm; an optical amplifier optically connected with the laser generating portion, that includes a plurality of fiber optical amplifiers to amplify the pulse light in plural times; and a wavelength converting portion optically connected with the optical amplifier, that includes a plurality of non-linear optical crystals to wavelength-convert the amplified pulse light into ultraviolet light.
Claim 2
Dependent Claim
79 words
A laser apparatus comprising: a laser generating portion that generates pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm; an optical amplifier optically connected with the laser generating portion, that includes a plurality of fiber optical amplifiers to amplify the pulse light in plural times; and a wavelength converting portion optically connected with the optical amplifier, that includes a plurality of non-linear optical crystals to wavelength-convert the amplified pulse light into ultraviolet light.
Claim 3
Dependent Claim
36 words
An apparatus according to claim 1 , further comprising: a temperature controlling device connected with said wavelength convening portion to control temperature of at least one of said plurality of non-linear optical crystals or combinations thereof.
Claim 4
Dependent Claim
29 words
An apparatus according to claim 1 , wherein said plurality of non-linear optical crystals includes at least one non-linear optical crystal which is used for NCPM (Non-Critical Phase Matching).
Claim 5
Dependent Claim
21 words
An apparatus according to claim 3 , wherein at least a portion of said optical amplifier is exchangeable as a unit.
Claim 6
Dependent Claim
49 words
An apparatus according to claim 3 , wherein said laser generating portion includes a single-wavelength oscillating laser that pulse-emits light having a first pulse width and a light modulator that generates said pulse light having a second pulse width narrower than the first pulse width with the pulse-emitted light.
Claim 7
Dependent Claim
34 words
An apparatus according to claim 3 , wherein said laser generating portion includes a single-wavelength oscillating laser that emits continuous light and a light modulator that converts the continuous light into said pulse light.
Claim 8
Dependent Claim
40 words
An apparatus according to claim 1 , further comprising: an adjusting device connected with at least one of said laser generating portion and/or said optical amplifier to adjust an emission property of said ultraviolet light from said wavelength converting portion.
Claim 9
Dependent Claim
32 words
An apparatus according to claim 7 , wherein said adjusting device adjusts at least one of intensity, center wavelength, wavelength width and/or oscillation interval of said ultraviolet light as said emission property.
Claim 10
Dependent Claim
32 words
An apparatus according to claim 8 , wherein said laser generating portion includes a single-wavelength oscillating laser and/or a light modulator, at least one of which is connected with said adjusting device.
Claim 11
Dependent Claim
43 words
An apparatus according to claim 9 , wherein said adjusting device adjusts said emission property by controlling at least one of temperature of said single-wavelength oscillating laser, a control parameter of said single-wavelength oscillating laser, and/or a control parameter of said light modulator.
Claim 12
Dependent Claim
36 words
An apparatus according to claim 10 , wherein said adjusting device adjusts the intensity of said ultraviolet light by means of at least one of said single-wavelength oscillating laser, said light modulator and/or said optical amplifier.
Claim 13
Dependent Claim
38 words
An apparatus according to claim 11 , wherein said adjusting device detects light of which a wavelength is different from that of said ultraviolet light to operate said adjustment of said emission property based on the detected result.
Claim 14
Dependent Claim
33 words
An apparatus according to claim 12 , wherein said adjusting device detects ultraviolet light generated from said wavelength converting portion to operate said adjustment of said emission property based on the detected result.
Claim 15
Dependent Claim
20 words
An apparatus according to claim 7 , wherein said plurality of fiber optical amplifiers includes an erbium doped fiber amplifier.
Claim 16
Dependent Claim
23 words
An apparatus according to claim 7 , wherein said plurality of fiber optical amplifiers includes a fiber amplifier doped by erbium and ytterbium.
Claim 17
Dependent Claim
36 words
An apparatus according to claim 7 , wherein at least one of said plurality of fiber optical amplifiers or combinations thereof comprises one of a quartz fiber, a silicate group fiber and a fluoride group fiber.
Claim 18
Dependent Claim
25 words
An apparatus according to claim 7 , wherein at least one of said plurality of fiber optical amplifiers or combinations thereof comprises a ZBLAN fiber.
Claim 19
Dependent Claim
21 words
An apparatus according to claim 7 , wherein said plurality of fiber optical amplifiers includes a large mode diameter fiber amplifier.
Claim 20
Dependent Claim
40 words
An apparatus according to claim 7 , wherein said laser generating portion includes a single-wavelength oscillating laser that comprises a DFB semiconductor laser or a fiber laser having an oscillating wavelength within said range from 1.51 μm to 1.59 μm.
Claim 21
Dependent Claim
18 words
An apparatus according to claim 7 , wherein said ultraviolet light has a wavelength less than 200 nm.
Claim 22
Dependent Claim
30 words
An apparatus according to claim 20 , wherein said wavelength converting portion generates ultraviolet light having 8-times or 10-times high harmonic wave which is obtained from said amplified pulse light.
Claim 23
Dependent Claim
30 words
An apparatus according to claim 21 , wherein said wavelength converting portion generates the 8-times high harmonic wave having a wavelength within a range from 189 nm to 199 nm.
Claim 24
Dependent Claim
52 words
An apparatus according to claim 22 , wherein said laser generating portion generates the pulse light having an oscillating wavelength within a range from 1.544 μm to 1.552 μm, and said wavelength converting portion generates the 8-times high harmonic wave having the wavelength within a range from 193 nm to 194 nm.
Claim 25
Dependent Claim
30 words
An apparatus according to claim 21 , wherein said wavelength converting portion generates the 10-times high harmonic wave having a wavelength within a range from 151 nm to 159 nm.
Claim 26
Dependent Claim
52 words
An apparatus according to claim 24 , wherein said laser generating portion generates the pulse light having an oscillating wavelength within a range from 1.57 μm to 1.58 μm, and said wavelength converting portion generates the 10-times high harmonic wave having the wavelength within a range from 157 nm to 158 nm.
Claim 27
Dependent Claim
22 words
An exposure apparatus comprising: a laser apparatus according to claim 1 ; and an illumination system optically connected with the laser apparatus.
Claim 28
Dependent Claim
40 words
An apparatus according to claim 26 , wherein said illumination system illuminates a first object having a pattern with ultraviolet light generated from said laser apparatus to expose a second object with the ultraviolet light irradiated on the first object.
Claim 29
Dependent Claim
26 words
An apparatus according to claim 27 , further comprising: an adjusting device connected with said laser apparatus to adjust an emission property of said ultraviolet light.
Claim 30
Dependent Claim
46 words
An apparatus according to claim 28 , wherein said adjusting device adjusts at least one of intensity, center wavelength, wavelength width and/or oscillation interval of said ultraviolet light as said emission property by means of at least one of said laser generating portion and/or optical amplifier.
Claim 31
Dependent Claim
32 words
An apparatus according to claim 29 , wherein said laser generating portion includes a single-wavelength oscillating laser and/or a light modulator, at least one of which is connected with said adjusting device.
Claim 32
Dependent Claim
43 words
An apparatus according to claim 30 , wherein said adjusting device adjusts said emission property by controlling at least one of temperature of said single-wavelength oscillating laser, a control parameter of said single-wavelength oscillating laser and/or a control parameter of said light modulator.
Claim 33
Dependent Claim
53 words
An apparatus according to claim 31 , further comprising: a projection optical system that projects an image of the illuminated pattern onto said second object, and said adjusting device adjusts at least one of center wavelength and/or wavelength width of said ultraviolet light to control an image characteristics of the projection optical system.
Claim 34
Dependent Claim
50 words
An apparatus according to claim 29 , wherein said laser generating portion includes a single-wavelength oscillating laser and a light modulator, and said adjusting device adjusts the intensity of said ultraviolet light by means of at least one of the single-wavelength oscillating laser, the light modulator and/or said optical amplifier.
Claim 35
Dependent Claim
38 words
An apparatus according to claim 29 , wherein said adjusting device detects light of which a wavelength is different from that of said ultraviolet light to operate said adjustment of said emission property based on the detected result.
Claim 36
Dependent Claim
33 words
An apparatus according to claim 34 , wherein said adjusting device detects ultraviolet light generated from said wavelength converting portion to operate said adjustment of said emission property based on the detected result.
Claim 37
Dependent Claim
33 words
An apparatus according to claim 29 , wherein said laser apparatus is constructed so that at least said wavelength converting portion is integrally held with at least a portion of said illumination system.
Claim 38
Dependent Claim
50 words
An apparatus according to claim 26 , further comprising: a projection optical system that projects an image of the illuminated pattern onto said second object; and a mark detecting system optically connected with said illumination system to detect through the projection optical system a mark illuminated with said ultraviolet light.
Claim 39
Dependent Claim
48 words
An apparatus according to claim 1 , wherein said wavelength converting portion generates the 8-times high harmonic wave having a wavelength within a range from 189 nm to 199 nm or the 10-times high harmonic wave having a wavelength within a range from 151 nm to 159 nm.
Claim 40
Dependent Claim
29 words
An apparatus according to claim 38 , wherein said plurality of non-linear optical crystals includes at least one non-linear optical crystal which is used for NCPM (Non-Critical Phase Matching).
Claim 41
Dependent Claim
21 words
An apparatus according to claim 38 , wherein at least a portion of said optical amplifier is exchangeable as a unit.
Claim 42
Dependent Claim
23 words
An apparatus according to claim 1 , further comprising: a shutter device provided on an optical path through which the pulse light passes.
Claim 43
Dependent Claim
21 words
An apparatus according to claim 41 , wherein said shutter device includes an electro-optical modulating element or an acousto-optical modulating element.
Claim 44
Dependent Claim
48 words
An apparatus according to claim 42 , wherein said wavelength converting portion generates the 8-times high harmonic wave having a wavelength within a range from 189 nm to 199 nm or the 10-times high harmonic wave having a wavelength within a range from 151 nm to 159 nm.
Claim 45
Dependent Claim
29 words
An apparatus according to claim 42 , wherein said plurality of non-linear optical crystals includes at least on non-linear optical crystal which is used for NCPM (Non-Critical Phase Matching).
Claim 46
Dependent Claim
21 words
An apparatus according to claim 42 , wherein at least a portion of said optical amplifier is exchangeable as a unit.
Claim 47
Dependent Claim
27 words
An apparatus used in a device manufacturing process, comprising: a laser apparatus according to claim 1 ; and a main body optically connected with the laser apparatus.
Claim 48
Dependent Claim
29 words
An apparatus according to claim 46 , wherein said plurality of non-linear optical crystals includes at least one non-linear optional crystal which is used for NCPM (Non-Critical Phase Matching).
Claim 49
Dependent Claim
21 words
An apparatus according to claim 46 , wherein at least a portion of said optical amplifier is exchangeable as a unit.
Claim 50
Dependent Claim
48 words
An apparatus according to claim 46 , wherein said wavelength converting portion generates the 8-times high harmonic wave having a wavelength within a range from 189 nm to the 199 nm or 10-times high harmonic wave having a wavelength within a range from 151 nm to 159 nm.
Claim 51
Dependent Claim
34 words
An apparatus according to claim 46 , further comprising: a shutter device provided on an optical path through which the pulse light passes, that includes an electro-optical modulating element or an acousto-optical modulating element.
Claim 52
Dependent Claim
32 words
An apparatus according to claim 46 , wherein said plurality of non-linear optical crystals include at least one non-linear optical crystal, a phase alignment angle of which is adjusted by temperature control.
Claim 53
Dependent Claim
41 words
An apparatus according to claim 46 , wherein said laser apparatus includes an optical device which suppresses an expansion of the wavelength width of light between a single wavelength oscillating laser of said laser generating portion and said wavelength converting portion.
Claim 54
Dependent Claim
33 words
An apparatus according to claim 52 , wherein said optical device includes a narrow band filter and an isolator which are disposed between said single wavelength oscillating laser and said wavelength converting portion.
Claim 55
Dependent Claim
51 words
An apparatus according to claim 53 , wherein said optical device suppresses an expansion of the wavelength width caused by non-linear effectiveness of a least one fiber optical amplifier, by means of the reduction of the length of a fiber of at least one of said plurality of fiber optical amplifiers.
Claim 56
Dependent Claim
34 words
An apparatus according to claim 46 , wherein said main body, in order to detect patterns on an object, includes an optical system for illuminating said patterns by ultraviolet light from said laser apparatus.
Claim 57
Dependent Claim
26 words
An apparatus according to claim 55 , wherein said object is a wafer on which circuit patterns are formed, separately from said patterns on the object.
Claim 58
Dependent Claim
32 words
An apparatus according to claim 46 , wherein said main body includes an illumination portion for illuminating ultraviolet light from said laser apparatus to said object in order to work said object.
Claim 59
Dependent Claim
27 words
An apparatus according to claim 46 , wherein said main body includes an exposure portion for exposing a photosensitized object by ultraviolet light from said laser apparatus.
Claim 60
Dependent Claim
40 words
An apparatus according to claim 58 , wherein said exposure portion includes an illumination system through which said ultraviolet light passes, and said wavelength converting portion is provided within said main body and is optically connected with said illumination system.
Claim 61
Dependent Claim
39 words
An apparatus according to claim 1 , further comprising: an optical device which suppresses an expansion of the wavelength width of a light between a single wavelength oscillating laser of said laser generating portion and said wavelength converting portion.
Claim 62
Dependent Claim
32 words
An apparatus according to claim 60 , wherein said plurality of non-linear optical crystals include at least one non-linear optical crystal, a phase alignment angle of which is adjusted by temperature control.
Claim 63
Dependent Claim
25 words
An apparatus according to claim 60 , wherein at least a part of said optical device is disposed among said plurality of fiber optical amplifiers.
Claim 64
Dependent Claim
37 words
An apparatus according to claim 60 , wherein said optical device includes at least one of a narrow band filter and an isolator which are disposed between said single wavelength oscillating laser and said wavelength converting portion.
Claim 65
Dependent Claim
51 words
An apparatus according to claim 60 , wherein said optical device suppresses said expansion of the wavelength width caused by non-linear effectiveness of at least one fiber optical amplifier, by means of the reduction of the length of a fiber of at least one of said plurality of fiber optical amplifiers.
Claim 66
Dependent Claim
35 words
An apparatus according to claim 64 , wherein a fiber length of said fiber optical amplifier, which is one of said plurality of fiber optical amplifiers and is disposed optically most downstream position among them.
Claim 67
Dependent Claim
37 words
An apparatus according to claim 64 , wherein said optical device includes at least one of a narrow band filter and an isolator which are disposed between said single wavelength oscillating laser and said wavelength converting portion.
Claim 68
Dependent Claim
39 words
An apparatus according to claim 60 , wherein at least a portion of said optical amplifier is exchangeable as a unit, and further comprising a shutter device disposed between said single wavelength oscillating laser and said wavelength converting portion.
Claim 69
Dependent Claim
32 words
An apparatus according to claim 1 , wherein said plurality of non-linear optical crystals include at least one non-linear optical crystal, a phase alignment angle of which is adjusted by temperature control.
Claim 70
Dependent Claim
31 words
An apparatus according to claim 68 , wherein temperature of a non-linear optical crystal which generates said ultraviolet light and which is disposed optically most downstream position among them is controlled.
Claim 71
Dependent Claim
44 words
An apparatus according to claim 68 , wherein at least a portion of said optical amplifier is exchangeable as a unit, and further comprising a shutter device disposed between a single wavelength oscillating laser of said laser generating portion and said wavelength converting portion.
Claim 72
Dependent Claim
22 words
An apparatus according to claim 1 , wherein at least a portion of said optical amlifier can be exchanged as a unit.
Claim 73
Dependent Claim
31 words
An apparatus according to claim 71 , further comprising: a shutter device which is disposed between a single wavelength oscillating laser of said laser generating portion and said wavelength converting portion.
Claim 74
Dependent Claim
33 words
An apparatus according to claim 71 , further comprising: an optical device which suppresses an expansion of the wavelength width of light between said single wavelength oscillating laser and said wavelength converting portion.
Claim 75
Dependent Claim
32 words
An apparatus according to claim 71 , wherein said plurality of non-linear optical crystals include at least one non-linear optical crystal, a phase alignment angle of which is adjusted by temperature control.
Claim 76
Dependent Claim
36 words
An apparatus according to claim 1 , wherein said laser generating portion includes a single wavelength oscillating laser and further comprising a shutter device disposed between said single wavelength oscillating laser and said wavelength converting portion.
Claim 77
Dependent Claim
51 words
An apparatus according to claim 75 , wherein said single wavelength oscillating laser pulse-emits light having a first pulse width, and said laser generating portion includes a light modulator which generates with the pulse-emitted light said pulse light having a second pulse width which is narrower than said first pulse width.
Claim 78
Dependent Claim
33 words
An apparatus according to claim 75 , further comprising: an optical device which suppresses an expansion of the wavelength width of light between said single wavelength oscillating lasaer and said wavelength converting portion.
Claim 79
Dependent Claim
31 words
An apparatus according to claim 75 , wherein plurality of non-linear optical crystals include at least one non-linear optical crystal, a phase alignment angle of which is adjusted by temperature control.
Claim 80
Dependent Claim
54 words
An apparatus according to claim 1 , wherein said laser generating portion includes a single wavelength oscillating laser which oscillates a continuous light and a light modulator which converts said continuous light to said pulse light, and further comprising a shutter device disposed between said single wavelength oscillating laser and said wavelength converting portion.
Claim 81
Dependent Claim
36 words
An apparatus according to claim 79 , wherein said laser apparatus includes an optical device which suppresses an expansion of the wavelength width of light between said single wavelength oscillating laser and said wavelength converting portion.
Claim 82
Dependent Claim
32 words
An apparatus according to claim 79 , wherein said plurality of non-linear optical crystals include at least one non-linear optical crystal, a phase alignment angle of which is adjusted by temperature control.
Claim 83
Dependent Claim
47 words
An apparatus which irradiates ultraviolet light onto an object, comprising: an ultraviolet laser apparatus according to claim 1 , which generates ultraviolet light having a single wavelength; and an optical system optically connected to the ultraviolet laser apparatus to illuminate the object with the generated ultraviolet light.
Claim 84
Dependent Claim
22 words
An apparatus according to claim 82 , wherein at least a portion of the laser apparatus can be replaced as a unit.
Claim 85
Dependent Claim
41 words
An apparatus according to claim 83 , wherein said laser apparatus includes an optical device which suppresses an expansion of the wavelength width of light between a single wavelength oscillating laser of said laser generating portion and said wavelength converting portion.
Claim 86
Dependent Claim
19 words
An apparatus according to claim 82 , wherein said object includes a substrate on which a pattern is formed.
Claim 87
Dependent Claim
23 words
An apparatus according to claim 82 , wherein said object has a pattern which is detected by an illumination of the ultraviolet light.
Claim 88
Dependent Claim
95 words
A exposure method of exposing an object with an illumination light, comprising: generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion; amplifying the pulse light in plural times by means of an optical amplifier that includes a plurality of fiber optical amplifiers; wavelength-converting the amplified pulse light into ultraviolet light by means of a wavelength converting portion that includes a plurality of non-linear optical crystals; and irradiating the ultraviolet light as the illumination light on a pattern that is transferred onto the object.
Claim 89
Dependent Claim
95 words
A exposure method of exposing an object with an illumination light, comprising: generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion; amplifying the pulse light in plural times by means of an optical amplifier that includes a plurality of fiber optical amplifiers; wavelength-converting the amplified pulse light into ultraviolet light by means of a wavelength converting portion that includes a plurality of non-linear optical crystals; and irradiating the ultraviolet light as the illumination light on a pattern that is transferred onto the object.
Claim 90
Dependent Claim
32 words
A method according to claim 87 , further comprising: adjusting an emission property of said ultraviolet light by means of at least one of said laser generating portion and/or said optical amplifier.
Claim 91
Dependent Claim
30 words
A method according to claim 88 , wherein at least one of intensity, center wavelength, wavelength width and/or oscillation interval of said ultraviolet light is adjusted as said emission property.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2009-04-03 | 2009-10-03 | 2010-04-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2013-04-03 | 2013-10-03 | 2014-04-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2017-04-03 | 2017-10-03 | 2018-04-04 | $7700.00 | Window Closed / Lapsed |