US6453457B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Selection of evaluation point locations based on proximity effects model amplitudes for correcting proximity effects in a fabrication layout
Assignee: Synopsys Inc
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Filing: 2000-09-29
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Granted: 2002-09-17
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Expires: 2020-09-29
Abstract
Abstract Techniques for fabricating a device include forming a fabrication layout such as a mask layout, for a physical design layer, such as a design for an integrated circuit, and identifying evaluation points on an edge of a polygon corresponding to the design layer for correcting proximity effects. Included are techniques that correct for proximity effects associated with an edge in a layout corresponding to a design layer. An evaluation point is determined for the edge based on a profile of amplitudes output from a proximity effects model along a transect. The transect includes a target edge in the design layer corresponding to the edge. It is then determined how to correct at least a portion of the edge for proximity effects based on an analysis at the evaluation point. In other techniques, a dissection length parameter is derived based on a profile of amplitudes output by a proximity effects model along a transect. The transect includes a second edge in a second layout. An evaluation point is determined for a first edge based on the dissection length parameter. Then it is determined how to correct at least a portion of the first edge based on an analysis at the evaluation point.
Inventors
- 👤 Christophe Pierrat
- 👤 Youping Zhang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 09:37
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/36; G03F1/68; G03F1/70; Y; Y10; Y10S; Y10S977/00; Y10S977/70; Y10S977/734
Claims Analysis
Total Claims: 105
Claim 1
Independent Claim
79 words
A method of correcting for proximity effects associated with an edge in a layout corresponding to a design layer, the method comprising: determining an evaluation point for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge; and determining how to correct at least a portion of the edge for proximity effects based on an analysis at the evaluation point.
Claim 2
Independent Claim
79 words
A method of correcting for proximity effects associated with an edge in a layout corresponding to a design layer, the method comprising: determining an evaluation point for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge; and determining how to correct at least a portion of the edge for proximity effects based on an analysis at the evaluation point.
Claim 3
Dependent Claim
30 words
The method of claim 1 , further comprising executing a routine implementing the proximity effects model for a plurality of points on the transect before said determining an evaluation point.
Claim 4
Dependent Claim
25 words
The method of claim 1 , further comprising retrieving stored amplitudes for a plurality of points on the transect before said determining an evaluation point.
Claim 5
Dependent Claim
18 words
The method of claim 1 , wherein the layout is the design layer for a printed features layer.
Claim 6
Dependent Claim
19 words
The method of claim 1 , wherein the layout is an originally proposed fabrication layout for the design layer.
Claim 7
Dependent Claim
41 words
The method of claim 1 , wherein: the layout is an adjusted fabrication layout for the design layer; and the adjusted fabrication layout includes at least a segment of the edge displaced from a corresponding target edge in the design layer.
Claim 8
Dependent Claim
53 words
The method of claim 1 , before said determining an evaluation point, further comprising: determining whether the target edge is a critical edge; and if it is determined that the target edge is a critical edge, then executing a routine implementing the proximity effects model for a plurality of points on the transect.
Claim 9
Dependent Claim
22 words
The method of claim 7 , wherein a target edge is a critical edge if it includes an edge of a true-gate.
Claim 10
Dependent Claim
25 words
The method of claim 7 , wherein a target edge is a critical edge if it lies within a predetermined halo distance of another edge.
Claim 11
Dependent Claim
33 words
The method of claim 7 , wherein a target edge is a critical edge if a corresponding edge in the layout has been adjusted for proximity effects in a previous round of corrections.
Claim 12
Dependent Claim
42 words
The method of claim 1 , said determining an evaluation point further comprising determining a corresponding segment on the target edge, wherein said corresponding segment is associated with the portion of the edge corrected based on the analysis at the evaluation point.
Claim 13
Dependent Claim
51 words
The method of claim 11 , said determining an evaluation point further comprising establishing an evaluation point where the profile substantially equals a predetermined percentage of a threshold value, wherein the threshold value defines an amplitude where the proximity effects model predicts an edge is printed in the printed features layer.
Claim 14
Dependent Claim
64 words
The method of claim 11 , said determining the corresponding segment further comprising determining a corner segment extending from a vertex nearest the evaluation point to a corner segment dissection point where the profile exceeds a predetermined percentage of a threshold value, wherein the threshold value defines an amplitude where the proximity effects model predicts an edge is printed in the printed features layer.
Claim 15
Dependent Claim
35 words
The method of claim 11 , said determining the corresponding segment further comprising determining a corner segment extending from a vertex nearest the evaluation point to a corner segment dissection point where the profile flattens.
Claim 16
Dependent Claim
34 words
The method of claim 11 , said determining the evaluation point further comprising establishing a corner evaluation point where the profile substantially equals a predetermined fraction of an amplitude value where the profile flattens.
Claim 17
Dependent Claim
40 words
The method of claim 11 , said determining the evaluation point further comprising establishing the evaluation point where the profile deviates more than a predetermined amount from an ideal profile having no proximity effects from another edge in the layout.
Claim 18
Dependent Claim
39 words
The method of claim 11 , said determining the corresponding segment further comprising establishing the segment where the profile deviates more than a predetermined amount from an ideal profile having no proximity effects from another edge in the layout.
Claim 19
Dependent Claim
33 words
The method of claim 11 , said determining the evaluation point further comprising establishing the evaluation point substantially between two local maxima in an absolute value of a first derivative of the profile.
Claim 20
Dependent Claim
48 words
The method of claim 11 , said determining the corresponding segment further comprising establishing the segment to extend substantially from one local maximum in an absolute value of a first derivative of the profile to a next adjacent local maximum in the absolute value of the first derivative.
Claim 21
Dependent Claim
48 words
The method of claim 11 , said determining the corresponding segment further comprising establishing the segment to extend substantially from a local maximum in an absolute value of a first derivative of the profile to a next adjacent local minimum in the absolute value of the first derivative.
Claim 22
Dependent Claim
33 words
The method of claim 11 , said determining the evaluation point further comprising establishing the evaluation point substantially at a local maximum in an absolute value of a second derivative of the profile.
Claim 23
Dependent Claim
42 words
The method of claim 11 , said determining the corresponding segment further comprising establishing the segment to extend substantially from a point where a second derivative of the profile crosses zero to a next adjacent point where the second derivative crosses zero.
Claim 24
Independent Claim
116 words
A method of using a computer to correct for proximity effects associated with an edge in a layout corresponding to a design layer, the computer having a processor coupled to a computer-readable medium, the computer-readable medium storing at least a portion of the design layer, the design layer corresponding to a portion of an integrated circuit, the method comprising: determining an evaluation point for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge; and determining how to correct at least a portion of the edge for proximity effects based on an analysis at the evaluation point.
Claim 25
Independent Claim
116 words
A method of using a computer to correct for proximity effects associated with an edge in a layout corresponding to a design layer, the computer having a processor coupled to a computer-readable medium, the computer-readable medium storing at least a portion of the design layer, the design layer corresponding to a portion of an integrated circuit, the method comprising: determining an evaluation point for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge; and determining how to correct at least a portion of the edge for proximity effects based on an analysis at the evaluation point.
Claim 26
Independent Claim
97 words
A method of correcting for proximity effects associated with an edge in a layout corresponding to a design layer, the method comprising: determining dissection points for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge; determining an evaluation point based on at least one of the profile and the dissection points; and determining how to correct a segment of the edge corresponding to two dissection points for proximity effects based on an analysis at the evaluation point.
Claim 27
Independent Claim
97 words
A method of correcting for proximity effects associated with an edge in a layout corresponding to a design layer, the method comprising: determining dissection points for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge; determining an evaluation point based on at least one of the profile and the dissection points; and determining how to correct a segment of the edge corresponding to two dissection points for proximity effects based on an analysis at the evaluation point.
Claim 28
Independent Claim
133 words
A method of using a computer to correct for proximity effects associated with an edge in a layout corresponding to a design layer, the computer having a processor coupled to a computer-readable medium, the computer-readable medium storing at least a portion of the design layer, the design layer corresponding to a portion of an integrated circuit, the method comprising: determining dissection points for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge, determining an evaluation point based on at least one of the profile and the dissection points; determining how to correct a segment of the edge corresponding to two dissection points for proximity effects based on an analysis at the evaluation point.
Claim 29
Independent Claim
133 words
A method of using a computer to correct for proximity effects associated with an edge in a layout corresponding to a design layer, the computer having a processor coupled to a computer-readable medium, the computer-readable medium storing at least a portion of the design layer, the design layer corresponding to a portion of an integrated circuit, the method comprising: determining dissection points for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge, determining an evaluation point based on at least one of the profile and the dissection points; determining how to correct a segment of the edge corresponding to two dissection points for proximity effects based on an analysis at the evaluation point.
Claim 30
Independent Claim
105 words
A method of correcting for proximity effects associated with a first edge in a first layout corresponding to a design layer for a printed features layer, the method comprising: deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect including a second edge in a second layout; and determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter; and determining how to correct at least a portion of the first edge for proximity effects based on an analysis at the evaluation point.
Claim 31
Independent Claim
105 words
A method of correcting for proximity effects associated with a first edge in a first layout corresponding to a design layer for a printed features layer, the method comprising: deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect including a second edge in a second layout; and determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter; and determining how to correct at least a portion of the first edge for proximity effects based on an analysis at the evaluation point.
Claim 32
Dependent Claim
15 words
The method of claim 26 , wherein the first layout is also the second layout.
Claim 33
Dependent Claim
28 words
The method of claim 26 , wherein: the first layout is a proposed fabrication layout for the printed features layer; and the second layout is a test layout.
Claim 34
Dependent Claim
26 words
The method of claim 28 , before said deriving a dissection length, the method further comprising retrieving amplitudes stored during building of the proximity effects model.
Claim 35
Dependent Claim
34 words
The method of claim 26 , said deriving a dissection length parameter further comprising: determining a segment based on the profile; and setting the dissection length parameter based on a length of the segment.
Claim 36
Dependent Claim
74 words
The method of claim 30 , wherein: a threshold value is an amplitude where the proximity effects model predicts an edge is printed in the printed features layer; said determining a segment further comprises establishing a corner segment extending from a vertex of the second edge to a corner segment dissection point where the profile exceeds a predetermined percentage of the threshold value; and the dissection length parameter is a corner dissection segment length.
Claim 37
Dependent Claim
46 words
The method of claim 30 , wherein: said determining a segment further comprises establishing a corner segment extending from a vertex of the second edge to a corner segment dissection point where the profile flattens; and the dissection length parameter is a corner dissection segment length.
Claim 38
Dependent Claim
51 words
The method of claim 30 , wherein: said determining a segment further comprises establishing a segment where the profile deviates more than a predetermined amount from an ideal profile with no proximity effects from another edge in the second layout; and the dissection length parameter is a detail dissection segment length.
Claim 39
Dependent Claim
68 words
The method of claim 30 , wherein: said determining a segment further comprises establishing the segment to extend from one local maximum in an absolute value of a first derivative of the profile to a next adjacent local maximum in the absolute value of the first derivative; and the dissection length parameter is at least one of a detail dissection segment length and a maximum dissection segment length.
Claim 40
Dependent Claim
68 words
The method of claim 30 , wherein: said determining a segment further comprises establishing the segment to extend from a local maximum in an absolute value of a first derivative of the profile to a next adjacent local minimum in the absolute value of the first derivative; and the dissection length parameter is at least one of a detail dissection segment length and a maximum dissection segment length.
Claim 41
Dependent Claim
61 words
The method of claim 30 , wherein: said determining a segment further comprises establishing the segment to extend from a point where a second derivative of the profile crosses zero a next adjacent point where the second derivative crosses zero; and the dissection length parameter is at least one of a detail dissection segment length and a maximum dissection segment length.
Claim 42
Dependent Claim
93 words
The method of claim 30 , wherein: the dissection length parameter is a halo distance; and said deriving the dissection length parameter comprises determining whether the profile deviates more than a predetermined amount from an ideal profile with no proximity effects from another edge in the first layout, if the profile deviates more than the predetermined amount, then determining a distance to a third edge in the second layout associated with each deviation, and including the distance in a set of distances; and setting the halo distance based on the set of distances.
Claim 43
Dependent Claim
102 words
The method of claim 30 , wherein: said deriving a dissection length parameter further comprises, after said determining a segment based on the profile, including a length of the segment in a set of segment lengths, determining another segment based on another profile of amplitudes along another transect including another edge in the second layout, including another length of the segment in the set of segment lengths, and repeating said determining another segment for a plurality of edges in the second layout; and setting the dissection length parameter further comprises setting the dissection length parameter based on the set of segment lengths.
Claim 44
Dependent Claim
41 words
The method of claim 38 , wherein: the dissection length parameter is a corner dissection segment length; a corner segment includes one vertex of an edge; and only a corner segment has a length included in the set of segment lengths.
Claim 45
Dependent Claim
51 words
The method of claim 38 , wherein: the dissection length parameter is at least one of a detail dissection segment length and a maximum dissection segment length; a non-corner segment includes no vertex of an edge; and only a non-corner segment has a length included in the set of segment lengths.
Claim 46
Dependent Claim
22 words
The method of claim 38 , wherein the dissection length parameter is based on a mode of the set of segment lengths.
Claim 47
Independent Claim
137 words
A method of using a computer to correct for proximity effects associated with a first edge in a first layout corresponding to a design layer, the computer having a processor coupled to a computer-readable medium, the computer-readable medium storing at least a portion of the design layer, the design layer corresponding to a portion of an integrated circuit, the method comprising: deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect including a second edge in a second layout; and determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter; and determining how to correct at least a portion of the first edge for proximity effects based on an analysis at the evaluation point.
Claim 48
Independent Claim
137 words
A method of using a computer to correct for proximity effects associated with a first edge in a first layout corresponding to a design layer, the computer having a processor coupled to a computer-readable medium, the computer-readable medium storing at least a portion of the design layer, the design layer corresponding to a portion of an integrated circuit, the method comprising: deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect including a second edge in a second layout; and determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter; and determining how to correct at least a portion of the first edge for proximity effects based on an analysis at the evaluation point.
Claim 49
Independent Claim
106 words
A method of correcting for proximity effects associated with a first edge in a first layout corresponding to a design layer for a printed features layer, the method comprising: deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect crossing a plurality of polygons in a second layout; and determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter; and determining how to correct at least a portion of the first edge for proximity effects based on an analysis at the evaluation point.
Claim 50
Independent Claim
106 words
A method of correcting for proximity effects associated with a first edge in a first layout corresponding to a design layer for a printed features layer, the method comprising: deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect crossing a plurality of polygons in a second layout; and determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter; and determining how to correct at least a portion of the first edge for proximity effects based on an analysis at the evaluation point.
Claim 51
Dependent Claim
15 words
The method of claim 43 , wherein the first layout is also the second layout.
Claim 52
Dependent Claim
28 words
The method of claim 43 , wherein: the first layout is a proposed fabrication layout for the printed features layer; and the second layout is a test layout.
Claim 53
Dependent Claim
28 words
The method of claim 43 , said deriving a dissection length parameter further comprising obtaining the profile by retrieving amplitudes stored during building of the proximity effects model.
Claim 54
Dependent Claim
124 words
The method of claim 43 , wherein: the plurality of polygons comprises a plurality of polygon sets associated with corresponding pitch distances; a threshold value is a particular amplitude where the proximity effects model predicts an edge is printed in the printed features layer; and said deriving a dissection length parameter further comprises, determining whether a set of points along the profile associated with a polygon set includes a point having an amplitude that exceeds the threshold value, if it is determined that the set of points includes an amplitude that exceeds the threshold value, then including a pitch distance associated with the polygon set in a set of printable pitches, and deriving the dissection length parameter based on the set of printable pitches.
Claim 55
Dependent Claim
30 words
The method of claim 47 , deriving the dissection length parameter comprises setting the dissection length parameter substantially equal to a smallest pitch distance in the set of printable pitches.
Claim 56
Dependent Claim
125 words
The method of claim 43 , wherein: the plurality of polygons comprises a plurality of polygon sets associated with corresponding pitch distances; a threshold value is a particular amplitude where the proximity effects model predicts an edge is printed in the printed features layer; and the step of deriving a dissection length parameter based on the profile further comprises, finding a plurality of peak amplitudes corresponding to the plurality of pitch distances, each peak amplitude substantially equal to a maximum amplitude among all points on the profile associated with a polygon interpolating the plurality of peak amplitudes and the corresponding plurality of pitch distances to obtain a particular distance associated with the threshold value, and deriving the dissection length parameter based on the particular distance.
Claim 57
Dependent Claim
37 words
The method of claim 43 , wherein the dissection length parameter is a corner dissection segment length used as a target length for a segment on the first edge that includes one vertex of the first edge.
Claim 58
Dependent Claim
37 words
The method of claim 43 , wherein the dissection length parameter is a detail dissection segment length used as a target length for a segment on the first edge that includes neither vertex of the first edge.
Claim 59
Independent Claim
138 words
A method of using a computer to correct for proximity effects associated with a first edge in a first layout corresponding to a design layer, the computer having a processor coupled to a computer-readable medium, the computer-readable medium storing at least a portion of the design layer, the design layer corresponding to a portion of an integrated circuit, the method comprising: deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect crossing a plurality of polygons in a second layout; and determining an evaluation point on the first edge in the first layout corresponding to the design layer based on the dissection length parameter; and determining how to correct at least a portion of the first edge for proximity effects based on an analysis at the evaluation point.
Claim 60
Independent Claim
138 words
A method of using a computer to correct for proximity effects associated with a first edge in a first layout corresponding to a design layer, the computer having a processor coupled to a computer-readable medium, the computer-readable medium storing at least a portion of the design layer, the design layer corresponding to a portion of an integrated circuit, the method comprising: deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect crossing a plurality of polygons in a second layout; and determining an evaluation point on the first edge in the first layout corresponding to the design layer based on the dissection length parameter; and determining how to correct at least a portion of the first edge for proximity effects based on an analysis at the evaluation point.
Claim 61
Dependent Claim
91 words
A computer readable medium for correcting proximity effects associated with an edge in a layout corresponding to a design layer, the computer readable medium carrying instructions to cause one or more processors to perform: determining an evaluation point for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge; and determining how to correct at least a portion of the edge for proximity effects based on an analysis at the evaluation point.
Claim 62
Dependent Claim
91 words
A computer readable medium for correcting proximity effects associated with an edge in a layout corresponding to a design layer, the computer readable medium carrying instructions to cause one or more processors to perform: determining an evaluation point for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge; and determining how to correct at least a portion of the edge for proximity effects based on an analysis at the evaluation point.
Claim 63
Dependent Claim
109 words
A computer readable medium for correcting proximity effects associated with an edge in a layout corresponding to a design layer, the computer readable medium carrying instructions to cause one or more processors to perform: determining dissection points for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge; determining an evaluation point based on at least one of the profile and the dissection points; and determining how to correct a segment of the edge corresponding to two dissection points for proximity effects based on an analysis at the evaluation point.
Claim 64
Dependent Claim
109 words
A computer readable medium for correcting proximity effects associated with an edge in a layout corresponding to a design layer, the computer readable medium carrying instructions to cause one or more processors to perform: determining dissection points for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge; determining an evaluation point based on at least one of the profile and the dissection points; and determining how to correct a segment of the edge corresponding to two dissection points for proximity effects based on an analysis at the evaluation point.
Claim 65
Dependent Claim
117 words
A computer readable medium for correcting proximity effects associated with a first edge in a first layout corresponding to a design layer for a printed features layer, the computer readable medium carrying instructions to cause one or more processors to perform: deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect including a second edge in a second layout; and determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter; and determining how to correct at least a portion of the first edge for proximity effects based on an analysis at the evaluation point.
Claim 66
Dependent Claim
117 words
A computer readable medium for correcting proximity effects associated with a first edge in a first layout corresponding to a design layer for a printed features layer, the computer readable medium carrying instructions to cause one or more processors to perform: deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect including a second edge in a second layout; and determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter; and determining how to correct at least a portion of the first edge for proximity effects based on an analysis at the evaluation point.
Claim 67
Dependent Claim
118 words
A computer readable medium for correcting proximity effects associated with a first edge in a first layout corresponding to a design layer for a printed features layer, the computer readable medium carrying instructions to cause one or more processors to perform: deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect crossing a plurality of polygons in a second layout; and determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter; and determining how to correct at least a portion of the first edge for proximity effects based on an analysis at the evaluation point.
Claim 68
Dependent Claim
118 words
A computer readable medium for correcting proximity effects associated with a first edge in a first layout corresponding to a design layer for a printed features layer, the computer readable medium carrying instructions to cause one or more processors to perform: deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect crossing a plurality of polygons in a second layout; and determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter; and determining how to correct at least a portion of the first edge for proximity effects based on an analysis at the evaluation point.
Claim 69
Dependent Claim
89 words
A carrier wave for correcting proximity effects associated with an edge in a layout corresponding to a design layer, the carrier wave carrying instructions to cause one or more processors to perform: determining an evaluation point for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge; and determining how to correct at least a portion of the edge for proximity effects based on an analysis at the evaluation point.
Claim 70
Dependent Claim
89 words
A carrier wave for correcting proximity effects associated with an edge in a layout corresponding to a design layer, the carrier wave carrying instructions to cause one or more processors to perform: determining an evaluation point for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge; and determining how to correct at least a portion of the edge for proximity effects based on an analysis at the evaluation point.
Claim 71
Dependent Claim
107 words
A carrier wave for correcting proximity effects associated with an edge in a layout corresponding to a design layer, the carrier wave carrying instructions to cause one or more processors to perform: determining dissection points for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge; determining an evaluation point based on at least one of the profile and the dissection points; and determining how to correct a segment of the edge corresponding to two dissection points for proximity effects based on an analysis at the evaluation point.
Claim 72
Dependent Claim
107 words
A carrier wave for correcting proximity effects associated with an edge in a layout corresponding to a design layer, the carrier wave carrying instructions to cause one or more processors to perform: determining dissection points for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge; determining an evaluation point based on at least one of the profile and the dissection points; and determining how to correct a segment of the edge corresponding to two dissection points for proximity effects based on an analysis at the evaluation point.
Claim 73
Dependent Claim
115 words
A carrier wave for correcting proximity effects associated with a first edge in a first layout corresponding to a design layer for a printed features layer, the carrier wave carrying instructions to cause one or more processors to perform: deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect including a second edge in a second layout; and determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter; and determining how to correct at least a portion of the first edge for proximity effects based on an analysis at the evaluation point.
Claim 74
Dependent Claim
115 words
A carrier wave for correcting proximity effects associated with a first edge in a first layout corresponding to a design layer for a printed features layer, the carrier wave carrying instructions to cause one or more processors to perform: deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect including a second edge in a second layout; and determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter; and determining how to correct at least a portion of the first edge for proximity effects based on an analysis at the evaluation point.
Claim 75
Dependent Claim
116 words
A carrier wave for correcting proximity effects associated with a first edge in a first layout corresponding to a design layer for a printed features layer, the carrier wave carrying instructions to cause one or more processors to perform: deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect crossing a plurality of polygons in a second layout; and determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter; and determining how to correct at least a portion of the first edge for proximity effects based on an analysis at the evaluation point.
Claim 76
Dependent Claim
116 words
A carrier wave for correcting proximity effects associated with a first edge in a first layout corresponding to a design layer for a printed features layer, the carrier wave carrying instructions to cause one or more processors to perform: deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect crossing a plurality of polygons in a second layout; and determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter; and determining how to correct at least a portion of the first edge for proximity effects based on an analysis at the evaluation point.
Claim 77
Dependent Claim
133 words
A computer system for correcting proximity effects associated with an edge in a layout corresponding to a design layout, the computer system comprising: a computer readable medium carrying data representing the edge and at least a portion of the design layout, the design layout corresponding to a portion of an integrated circuit; and one or more processors coupled to the computer readable medium, the one or more processors configured for determining an evaluation point for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge, determining a correction based on an analysis of an amplitude from the profile at the evaluation point, and applying the correction to at least a portion of the edge.
Claim 78
Dependent Claim
133 words
A computer system for correcting proximity effects associated with an edge in a layout corresponding to a design layout, the computer system comprising: a computer readable medium carrying data representing the edge and at least a portion of the design layout, the design layout corresponding to a portion of an integrated circuit; and one or more processors coupled to the computer readable medium, the one or more processors configured for determining an evaluation point for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge, determining a correction based on an analysis of an amplitude from the profile at the evaluation point, and applying the correction to at least a portion of the edge.
Claim 79
Dependent Claim
153 words
A computer system for correcting proximity effects associated with an edge in a layout corresponding to a design layout, the computer system comprising: a computer readable medium carrying data representing the edge and at least a portion of the design layout, the design layout corresponding to a portion of an integrated circuit; and one or more processors coupled to the computer readable medium, the one or more processors configured for determining dissection points for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge, determining an evaluation point based on at least one of the profile and the dissection points, determining a correction based on an analysis of an amplitude from the profile at the evaluation point, and applying the correction to at least a portion of the edge corresponding to two dissection points.
Claim 80
Dependent Claim
153 words
A computer system for correcting proximity effects associated with an edge in a layout corresponding to a design layout, the computer system comprising: a computer readable medium carrying data representing the edge and at least a portion of the design layout, the design layout corresponding to a portion of an integrated circuit; and one or more processors coupled to the computer readable medium, the one or more processors configured for determining dissection points for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge, determining an evaluation point based on at least one of the profile and the dissection points, determining a correction based on an analysis of an amplitude from the profile at the evaluation point, and applying the correction to at least a portion of the edge corresponding to two dissection points.
Claim 81
Dependent Claim
171 words
A computer system for correcting proximity effects associated with a first edge in a first layout corresponding to a design layout, the computer system comprising: a computer readable medium carrying data representing the edge and at least a portion of the design layout, the design layout corresponding to a portion of an integrated circuit; and one or more processors coupled to the computer readable medium, the one or more processors configured for deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect including a second edge in a second layout, determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter, executing a routine implementing the proximity effects model for the evaluation point to produce a model amplitude at the evaluation point, determining a correction based on an analysis of the model amplitude at the evaluation point, and applying the correction to at least a portion of the edge.
Claim 82
Dependent Claim
171 words
A computer system for correcting proximity effects associated with a first edge in a first layout corresponding to a design layout, the computer system comprising: a computer readable medium carrying data representing the edge and at least a portion of the design layout, the design layout corresponding to a portion of an integrated circuit; and one or more processors coupled to the computer readable medium, the one or more processors configured for deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect including a second edge in a second layout, determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter, executing a routine implementing the proximity effects model for the evaluation point to produce a model amplitude at the evaluation point, determining a correction based on an analysis of the model amplitude at the evaluation point, and applying the correction to at least a portion of the edge.
Claim 83
Dependent Claim
172 words
A computer system for correcting proximity effects associated with a first edge in a first layout corresponding to a design layout, the computer system comprising: a computer readable medium carrying data representing the edge and at least a portion of the design layout, the design layout corresponding to a portion of an integrated circuit; and one or more processors coupled to the computer readable medium, the one or more processors configured for deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect crossing a plurality of polygons in a second layout, determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter, executing a routine implementing the proximity effects model for the evaluation point to produce a model amplitude at the evaluation point determining a correction based on an analysis of the model amplitude at the evaluation point, and applying the correction to at least a portion of the edge.
Claim 84
Dependent Claim
172 words
A computer system for correcting proximity effects associated with a first edge in a first layout corresponding to a design layout, the computer system comprising: a computer readable medium carrying data representing the edge and at least a portion of the design layout, the design layout corresponding to a portion of an integrated circuit; and one or more processors coupled to the computer readable medium, the one or more processors configured for deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect crossing a plurality of polygons in a second layout, determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter, executing a routine implementing the proximity effects model for the evaluation point to produce a model amplitude at the evaluation point determining a correction based on an analysis of the model amplitude at the evaluation point, and applying the correction to at least a portion of the edge.
Claim 85
Independent Claim
98 words
A system for correcting proximity effects associated with an edge in a layout corresponding to a design layout, the system comprising: a means for determining an evaluation point for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge, the proximity effects model for producing the profile; a means for analyzing an amplitude from the profile at the evaluation point to determine a correction; and a means for applying the correction to at least a portion of the edge.
Claim 86
Independent Claim
98 words
A system for correcting proximity effects associated with an edge in a layout corresponding to a design layout, the system comprising: a means for determining an evaluation point for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge, the proximity effects model for producing the profile; a means for analyzing an amplitude from the profile at the evaluation point to determine a correction; and a means for applying the correction to at least a portion of the edge.
Claim 87
Independent Claim
119 words
A system for correcting proximity effects associated with an edge in a layout corresponding to a design layout, the system comprising: a means for determining dissection points for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge and determining an evaluation point based on at least one of the profile and the dissection points, the proximity effects model for producing the profile; a means for analyzing an amplitude from the profile at the evaluation point to determine a correction; and a means for applying the correction to at least a portion of the edge corresponding to two dissection points.
Claim 88
Independent Claim
119 words
A system for correcting proximity effects associated with an edge in a layout corresponding to a design layout, the system comprising: a means for determining dissection points for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge and determining an evaluation point based on at least one of the profile and the dissection points, the proximity effects model for producing the profile; a means for analyzing an amplitude from the profile at the evaluation point to determine a correction; and a means for applying the correction to at least a portion of the edge corresponding to two dissection points.
Claim 89
Independent Claim
124 words
A system for correcting proximity effects associated with a first edge in a first layout corresponding to a design layout, the system comprising: a means for deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect including a second edge in a second layout, a means for determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter, the proximity effects model for producing a model amplitude at the evaluation point; a means for analyzing the model amplitude at the evaluation point to determine a correction; and a means for applying the correction to at least a portion of the first edge.
Claim 90
Independent Claim
124 words
A system for correcting proximity effects associated with a first edge in a first layout corresponding to a design layout, the system comprising: a means for deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect including a second edge in a second layout, a means for determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter, the proximity effects model for producing a model amplitude at the evaluation point; a means for analyzing the model amplitude at the evaluation point to determine a correction; and a means for applying the correction to at least a portion of the first edge.
Claim 91
Independent Claim
125 words
A system for correcting proximity effects associated with a first edge in a first layout corresponding to a design layout, the system comprising: a means for deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect crossing a plurality of polygons in a second layout, a means for determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter, the proximity effects model for producing a model amplitude at the evaluation point; a means for analyzing the model amplitude at the evaluation point to determine a correction; and a means for applying the correction to at least a portion of the first edge.
Claim 92
Independent Claim
125 words
A system for correcting proximity effects associated with a first edge in a first layout corresponding to a design layout, the system comprising: a means for deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect crossing a plurality of polygons in a second layout, a means for determining an evaluation point for the first edge in the first layout corresponding to the design layer based on the dissection length parameter, the proximity effects model for producing a model amplitude at the evaluation point; a means for analyzing the model amplitude at the evaluation point to determine a correction; and a means for applying the correction to at least a portion of the first edge.
Claim 93
Independent Claim
125 words
A method for fabricating a printed features layer including features corrected for proximity effects, the method comprising: building an initial fabrication layout based on a design layer corresponding to the printed features layer, the fabrication layout including a edge of a polygon; determining an evaluation point for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge, analyzing an amplitude from the profile at the evaluation point to determine a correction; applying the correction to at least a portion of the edge; producing a mask based on the portion of the edge corrected; and producing the printed features layer in a fabrication process using the mask.
Claim 94
Independent Claim
125 words
A method for fabricating a printed features layer including features corrected for proximity effects, the method comprising: building an initial fabrication layout based on a design layer corresponding to the printed features layer, the fabrication layout including a edge of a polygon; determining an evaluation point for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge, analyzing an amplitude from the profile at the evaluation point to determine a correction; applying the correction to at least a portion of the edge; producing a mask based on the portion of the edge corrected; and producing the printed features layer in a fabrication process using the mask.
Claim 95
Independent Claim
140 words
A method for fabricating a printed features layer including features corrected for proximity effects, the method comprising: building an initial fabrication layout based on a design layer corresponding to the printed features layer, the fabrication layout including a edge of a polygon; determining dissection points for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge; determining an evaluation point based on at least one of the profile and the dissection points; analyzing an amplitude from the profile at the evaluation point to determine a correction; applying the correction to at least a portion of the edge; producing a mask based on the portion of the edge corrected; and producing the printed features layer in a fabrication process using the mask.
Claim 96
Independent Claim
140 words
A method for fabricating a printed features layer including features corrected for proximity effects, the method comprising: building an initial fabrication layout based on a design layer corresponding to the printed features layer, the fabrication layout including a edge of a polygon; determining dissection points for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge; determining an evaluation point based on at least one of the profile and the dissection points; analyzing an amplitude from the profile at the evaluation point to determine a correction; applying the correction to at least a portion of the edge; producing a mask based on the portion of the edge corrected; and producing the printed features layer in a fabrication process using the mask.
Claim 97
Independent Claim
151 words
A method for fabricating a printed features layer including features corrected for proximity effects, the method comprising: building an initial fabrication layout based on a design layer corresponding to the printed features layer, the fabrication layout including a first edge of a first polygon; deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect including a second edge in a second layout; determining an evaluation point for the first edge in the initial fabrication layout based on the dissection length parameter; executing a routine implementing a proximity effects model for producing a model amplitude at the evaluation point; analyzing the model amplitude to determine a correction; applying the correction to at least a portion of the edge; producing a mask based on the portion of the edge corrected; and producing the printed features layer in a fabrication process using the mask.
Claim 98
Independent Claim
151 words
A method for fabricating a printed features layer including features corrected for proximity effects, the method comprising: building an initial fabrication layout based on a design layer corresponding to the printed features layer, the fabrication layout including a first edge of a first polygon; deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect including a second edge in a second layout; determining an evaluation point for the first edge in the initial fabrication layout based on the dissection length parameter; executing a routine implementing a proximity effects model for producing a model amplitude at the evaluation point; analyzing the model amplitude to determine a correction; applying the correction to at least a portion of the edge; producing a mask based on the portion of the edge corrected; and producing the printed features layer in a fabrication process using the mask.
Claim 99
Independent Claim
152 words
A method for fabricating a printed features layer including features corrected for proximity effects, the method comprising: building an initial fabrication layout based on a design layer corresponding to the printed features layer, the fabrication layout including a first edge of a first polygon; deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect crossing a plurality of polygons in a second layout; determining an evaluation point for the first edge in the initial fabrication layout based on the dissection length parameter; executing a routine implementing a proximity effects model for producing a model amplitude at the evaluation point; analyzing the model amplitude to determine a correction; applying the correction to at least a portion of the edge; producing a mask based on the portion of the edge corrected; and producing the printed features layer in a fabrication process using the mask.
Claim 100
Independent Claim
152 words
A method for fabricating a printed features layer including features corrected for proximity effects, the method comprising: building an initial fabrication layout based on a design layer corresponding to the printed features layer, the fabrication layout including a first edge of a first polygon; deriving a dissection length parameter based on a profile of amplitudes output by a proximity effects model along a transect crossing a plurality of polygons in a second layout; determining an evaluation point for the first edge in the initial fabrication layout based on the dissection length parameter; executing a routine implementing a proximity effects model for producing a model amplitude at the evaluation point; analyzing the model amplitude to determine a correction; applying the correction to at least a portion of the edge; producing a mask based on the portion of the edge corrected; and producing the printed features layer in a fabrication process using the mask.
Claim 101
Independent Claim
86 words
A method of fabricating an integrated circuit using a mask, the mask including a segment corresponding to at least one portion of an edge in a design layer for the integrated circuit, the method comprising: determining an evaluation point for the edge based on a profile of amplitudes output from a proximity effects model along a target edge in the design layer collinear with the edge; and displacing at least a portion of the edge for proximity effects based on an analysis at the evaluation point.
Claim 102
Independent Claim
86 words
A method of fabricating an integrated circuit using a mask, the mask including a segment corresponding to at least one portion of an edge in a design layer for the integrated circuit, the method comprising: determining an evaluation point for the edge based on a profile of amplitudes output from a proximity effects model along a target edge in the design layer collinear with the edge; and displacing at least a portion of the edge for proximity effects based on an analysis at the evaluation point.
Claim 103
Dependent Claim
53 words
The method of claim 73 , before determining the evaluation point, further comprising: determining whether the target edge is a critical edge; and if it is determined that the target edge is a critical edge, then executing a routine implementing the proximity effects model for a plurality of points on the target edge.
Claim 104
Dependent Claim
25 words
The method of claim 74 , wherein the target edge is a critical edge if it lies within a predetermined halo distance of another edge.
Claim 105
Dependent Claim
46 words
The method of claim 73 , wherein determining an evaluation point includes establishing where the profile substantially equals a predetermined percentage of a threshold value, wherein the threshold value defines an amplitude where the proximity effects model predicts an edge is printed on the integrated circuit.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-09-16 | 2006-03-18 | 2006-09-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-09-16 | 2010-03-18 | 2010-09-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-09-16 | 2014-03-18 | 2014-09-17 | $7700.00 | Window Closed / Lapsed |