US5804340A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photomask inspection method and inspection tape therefor
Assignee: Bell Semiconductor LLC
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Filing: 1996-12-23
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Granted: 1998-09-08
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Expires: 2016-12-23
Abstract
Abstract A method of inspecting a photomask for use in photolithography which accounts for the rounding of corners of features that occurs during manufacture of the photomask. A data tape used in the preparation of the photomask is first provided. An inspection tape is then prepared by modifying the data on the data tape to account for rounding of the features during preparation of the photomask. Finally, an inspection device is used to compare features on the photomask to data on the inspection tape corresponding to such features.
Inventors
- 👤 Mario Garza
- 👤 Keith K. Chao
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 12:25
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/36; G03F1/68; G03F1/82; G03F1/84; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/95; G01N21/956; G01N2021/95676
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
83 words
A method of inspecting a photomask for use in photolithography, said method comprising the steps of: providing a data tape used in the preparation of a photomask, said data tape having data corresponding to features on said photomask thereon; preparing an inspection tape by modifying said data to account for rounding of said features during preparation of said photomask on a reticle; and using an inspection device to compare features on said photomask to data on said inspection tape corresponding to such features.
Claim 2
Independent Claim
83 words
A method of inspecting a photomask for use in photolithography, said method comprising the steps of: providing a data tape used in the preparation of a photomask, said data tape having data corresponding to features on said photomask thereon; preparing an inspection tape by modifying said data to account for rounding of said features during preparation of said photomask on a reticle; and using an inspection device to compare features on said photomask to data on said inspection tape corresponding to such features.
Claim 3
Dependent Claim
15 words
The method of claim 1, wherein the modified data includes data corresponding to inside corners.
Claim 4
Dependent Claim
18 words
The method of claim 2, wherein the data corresponding to inside corners is modified by adding pixels thereto.
Claim 5
Dependent Claim
15 words
The method of claim 1, wherein the modified data includes data corresponding to outside corners.
Claim 6
Dependent Claim
18 words
The method of claim 4, wherein the data corresponding to outside corners is modified by removing pixels therefrom.
Claim 7
Independent Claim
62 words
A method of preparing an inspection tape for use in inspecting a photomask manufactured on a glass plate used in photolithography, said method comprising the steps of: providing a data tape having data corresponding to features on a photomask thereon; and modifying said date to account for rounding of said features during preparation of said photomask to obtain a modified inspection tape.
Claim 8
Independent Claim
62 words
A method of preparing an inspection tape for use in inspecting a photomask manufactured on a glass plate used in photolithography, said method comprising the steps of: providing a data tape having data corresponding to features on a photomask thereon; and modifying said date to account for rounding of said features during preparation of said photomask to obtain a modified inspection tape.
Claim 9
Dependent Claim
15 words
The method of claim 6, wherein the modified data includes data corresponding to inside corners.
Claim 10
Dependent Claim
18 words
The method of claim 7, wherein the data corresponding to inside corners is modified by adding pixels thereto.
Claim 11
Dependent Claim
15 words
The method of claim 6, wherein the modified data includes data corresponding to outside corners.
Claim 12
Dependent Claim
18 words
The method of claim 9, wherein the data corresponding to outside corners is modified by removing pixels therefrom.
Claim 13
Dependent Claim
84 words
An inspection tape for use in inspecting a photomask used in photolithography, the data on the inspection tape corresponding to features on a photomask being modified relative to corresponding data on a data tape used in the preparation of said photomask to account for anticipated rounding of said features during preparation of said photomask before being transferred to a substrate surface, said anticipated rounding is produced when said data is transferred from a digital form to the photomask that is manufactured on a reticle.
Claim 14
Dependent Claim
84 words
An inspection tape for use in inspecting a photomask used in photolithography, the data on the inspection tape corresponding to features on a photomask being modified relative to corresponding data on a data tape used in the preparation of said photomask to account for anticipated rounding of said features during preparation of said photomask before being transferred to a substrate surface, said anticipated rounding is produced when said data is transferred from a digital form to the photomask that is manufactured on a reticle.
Claim 15
Dependent Claim
16 words
The inspection tape of claim 11, wherein the modified data includes data corresponding to inside corners.
Claim 16
Dependent Claim
19 words
The inspection tape of claim 12, wherein the data corresponding to inside corners is modified by adding pixels thereto.
Claim 17
Dependent Claim
16 words
The inspection tape of claim 11, wherein the modified data includes data corresponding to outside corners.
Claim 18
Dependent Claim
19 words
The inspection tape of claim 14, wherein the data corresponding to outside corners is modified by removing pixels therefrom.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-09-07 | 2002-03-09 | 2002-09-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-09-07 | 2006-03-09 | 2006-09-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-09-07 | 2010-03-09 | 2010-09-08 | $7700.00 | Window Closed / Lapsed |