US5498579A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of producing semiconductor device layer layout
Assignee: Intel Corp
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Filing: 1994-06-08
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Granted: 1996-03-12
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Expires: 2014-06-08
Abstract
Abstract A method of enhancing the lithographic resolution of randomly laid out isolated structures is disclosed. A first mask comprises an active layer with isolated features such as gates. Portions of the active layer have a reduced dimension typical of periodic structures. The first mask additionally has complementary features provided along side the reduced active features to provide periodicity. In this way, the resolution of the lithographic process is enhanced, and other enhanced resolution technologies additionally can be used to best advantage to form a patterned photosensitive layer having isolated features of reduced width. The photosensitive layer is then exposed to a second mask which exposes the complementary features so that they are removed from the latent image in the photosensitive layer. This second exposure also further improves resolution by enhancing the contrast between exposed and unexposed regions. A method is disclosed for automatically providing random logic device layouts having the complementary features, as well as for providing a layout for the second mask.
Inventors
- 👤 Yan A. Borodovsky
- 👤 Ananda G. Sarangi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 01:40
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/26; G03F1/68; G03F1/70; G03F7/00; G03F7/70; G03F7/70058; G03F7/70125; G03F7/70216; G03F7/70283
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
85 words
A method of modifying a semiconductor device layer layout of a semiconductor device layer comprising the steps of: a) providing data that defines said semiconductor device layer layout in a database; b) identifying a portion of said semiconductor device layer layout, said portion comprising an active feature of said semiconductor device layer; c) downsizing said portion by a first amount to form a downsized portion; and d) placing a complementary feature proximate said downsized portion to form said modified device layer layout in said database.
Claim 2
Independent Claim
85 words
A method of modifying a semiconductor device layer layout of a semiconductor device layer comprising the steps of: a) providing data that defines said semiconductor device layer layout in a database; b) identifying a portion of said semiconductor device layer layout, said portion comprising an active feature of said semiconductor device layer; c) downsizing said portion by a first amount to form a downsized portion; and d) placing a complementary feature proximate said downsized portion to form said modified device layer layout in said database.
Claim 3
Dependent Claim
115 words
The method as described in claim 1 wherein said device layer layout comprises a transistor gate, wherein said portion of said device layer layout comprises said transistor gate, wherein said step b is performed by a method comprising performing a logical AND operation between said device layer layout and a diffusion layer, and wherein said step c is performed by identifying a first region alongside said portion, upsizing said first region by said first amount to form a first upsized region, performing a logical AND operation between said first upsized region and said device layer layout to define border regions, and subtracting said border regions from said device layer layout to form said transistor gate.
Claim 4
Dependent Claim
42 words
The method as described in claim 2 wherein said identification of said first region alongside said portion is performed by upsizing said portion by a second amount to form a second upsized region and subtracting said portion from said second upsized region.
Claim 5
Dependent Claim
65 words
The method as described in claim 1 wherein said step d is performed by a method comprising upsizing said downsized portion by a third amount to form a third upsized region, upsizing said downsized portion by a fourth amount to form a fourth upsized region, and subtracting said third upsized region from said fourth upsized region to form a complementary region comprising said complementary feature.
Claim 6
Dependent Claim
65 words
The method as described in claim 2 wherein said step d is performed by a method comprising upsizing said downsized portion by a third amount to form a third upsized region, upsizing said downsized portion by a fourth amount to form a fourth upsized region, and subtracting said third upsized region from said fourth upsized region to form a complementary region comprising said complementary feature.
Claim 7
Dependent Claim
65 words
The method as described in claim 3 wherein said step d is performed by a method comprising upsizing said downsized portion by a third amount to form a third upsized region, upsizing said downsized portion by a fourth amount to form a fourth upsized region, and subtracting said third upsized region from said fourth upsized region to form a complementary region comprising said complementary feature.
Claim 8
Dependent Claim
18 words
The method as described in claim 4 wherein said fourth amount is approximately two times said third amount.
Claim 9
Dependent Claim
18 words
The method as described in claim 5 wherein said fourth amount is approximately two times said third amount.
Claim 10
Dependent Claim
18 words
The method as described in claim 6 wherein said fourth amount is approximately two times said third amount.
Claim 11
Dependent Claim
25 words
The method as described in claim 4 further comprising the step of performing a logical AND operation between said complementary region and a diffusion layer.
Claim 12
Dependent Claim
25 words
The method as described in claim 5 further comprising the step of performing a logical AND operation between said complementary region and said diffusion layer.
Claim 13
Dependent Claim
25 words
The method as described in claim 6 further comprising the step of performing a logical AND operation between said complementary region and said diffusion layer.
Claim 14
Dependent Claim
21 words
The method as described in claim 1 further comprising steps of upsizing and then downsizing said downsized portion a fifth amount.
Claim 15
Dependent Claim
21 words
The method as described in claim 2 further comprising steps of upsizing and then downsizing said downsized portion a fifth amount.
Claim 16
Dependent Claim
21 words
The method as described in claim 3 further comprising steps of upsizing and then downsizing said downsized portion a fifth amount.
Claim 17
Dependent Claim
28 words
The method as described in claim 1 further comprising providing a complementary layer layout comprising the steps of inverting said complementary feature and upsizing said inverted complementary feature.
Claim 18
Dependent Claim
28 words
The method as described in claim 2 further comprising providing a complementary layer layout comprising the steps of inverting said complementary feature and upsizing said inverted complementary feature.
Claim 19
Dependent Claim
28 words
The method as described in claim 3 further comprising providing a complementary layer layout comprising the steps of inverting said complementary feature and upsizing said inverted complementary feature.
Claim 20
Dependent Claim
15 words
The method as described in claim 1 wherein said active feature comprises an isolated feature.
Claim 21
Dependent Claim
15 words
The method as described in claim 19 wherein said isolated feature comprises a transistor gate.
References Cited (Backward Citations)
US4895780A
Cited
US5308741A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-03-12 | 1999-09-11 | 2000-03-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-03-12 | 2003-09-11 | 2004-03-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-03-12 | 2007-09-11 | 2008-03-12 | $7700.00 | Window Closed / Lapsed |