Patent US6235554B1 successfully refreshed from Google Patents.
US6235554B1
Expired / Lapsed
US
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Method for fabricating stackable chip scale semiconductor package
Assignee: Round Rock Research LLC
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Filing: 1999-05-24
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Granted: 2001-05-22
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Expires: 2019-05-24
Abstract
Abstract A stackable chip scale semiconductor package and a method for fabricating the package are provided. The package includes a substrate having a die mounting site wherein a semiconductor die is mounted. The package also includes first contacts formed on a first surface of the substrate, and second contacts formed on an opposing second surface of the substrate. Conductive vias in the substrate electrically connect the first contacts to the second contacts. In addition, the first contacts and the second contacts have a mating configuration, such that a second package can be stacked on and electrically connected to the package. The method for fabricating the package includes the steps of: laser machining and etching the vias, forming an insulating layer in the vias, and then depositing a conductive material within the vias.
Inventors
- 👤 Salman Akram
- 👤 Alan G. Wood
- 👤 Warren M. Farnworth
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 20:05
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/67; H10W70/69; H10W70/698; H10W70/62; H10W70/66; H10W70/666; H10W70/68; H10W74/00; H10W74/10; H10W74/111; H10W74/129; H10W90/00; H10W90/701; H10W70/682; H10W72/00; H10W72/01; H10W72/0198; H10W72/071; H10W72/072; H10W72/07221; H10W72/07227; H10W72/075; H10W72/20; H10W72/29; H10W72/90; H10W72/931; H10W72/932; H10W72/941; H10W72/944; H10W72/9445; H10W72/951; H10W74/131; H10W74/142; H10W90/721; H10W90/722; H10W90/724; H10W90/751; H10W90/754
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
103 words
A method for fabricating a semiconductor package comprising: providing a substrate having a first surface and an opposing second surface; laser machining a plurality of vias in the substrate from the first surface to the second surface; at least partially filling the vias with a conductive material to form conductive vias; forming a plurality of first contacts on the first surface in electrical communication with the conductive vias; forming a plurality of second contacts on the second surface in electrical communication with the conductive vias; and mounting a die to the substrate in electrical communication with the first contacts or the second contacts.
Claim 2
Independent Claim
103 words
A method for fabricating a semiconductor package comprising: providing a substrate having a first surface and an opposing second surface; laser machining a plurality of vias in the substrate from the first surface to the second surface; at least partially filling the vias with a conductive material to form conductive vias; forming a plurality of first contacts on the first surface in electrical communication with the conductive vias; forming a plurality of second contacts on the second surface in electrical communication with the conductive vias; and mounting a die to the substrate in electrical communication with the first contacts or the second contacts.
Claim 3
Dependent Claim
10 words
The method of claim 1 wherein the substrate comprises silicon.
Claim 4
Dependent Claim
16 words
The method of claim 1 further comprising following laser machining of the vias etching the vias.
Claim 5
Dependent Claim
24 words
The method of claim 1 wherein the second contacts are configured to retain and electrically engage third contacts substantially identical to the first contacts.
Claim 6
Dependent Claim
39 words
The method of claim 1 further comprising providing a second package having third contacts substantially identical to the first contacts, then stacking the second package on the package with the second contacts retaining and electrically engaging the third contacts.
Claim 7
Independent Claim
120 words
A method for fabricating a semiconductor package comprising: providing a silicon substrate comprising a first surface and an opposing second surface; laser machining a via through the substrate from the first surface to the second surface; etching the via; forming an insulating layer in the via; at least partially filling the via with a conductive material to form a conductive via; forming a first contact on the first surface in electrical communication with the conductive via; forming a second contact on the second surface in electrical communication with the conductive via, the second contact and the first contact having a mating configuration; and mounting a die to the substrate in electrical communication with the first contact or the second contact.
Claim 8
Independent Claim
120 words
A method for fabricating a semiconductor package comprising: providing a silicon substrate comprising a first surface and an opposing second surface; laser machining a via through the substrate from the first surface to the second surface; etching the via; forming an insulating layer in the via; at least partially filling the via with a conductive material to form a conductive via; forming a first contact on the first surface in electrical communication with the conductive via; forming a second contact on the second surface in electrical communication with the conductive via, the second contact and the first contact having a mating configuration; and mounting a die to the substrate in electrical communication with the first contact or the second contact.
Claim 9
Dependent Claim
24 words
The method of claim 6 wherein the second contacts are configured to retain and electrically engage third contacts substantially similar to the first contacts.
Claim 10
Dependent Claim
17 words
The method of claim 6 wherein the first contacts comprise bumps and the second contacts comprise recesses.
Claim 11
Independent Claim
139 words
A method for fabricating a semiconductor package comprising: providing a substrate having a first surface and an opposing second surface; forming a conductive via through the substrate from the first surface to the second surface by laser machining a via and at least partially filling the via with a conductive material; forming a first contact on the first surface in electrical communication with the conductive via; forming a second contact on the second surface in electrical communication with the conductive via; mounting a die to the substrate in electrical communication with the first contact or the second contact; and stacking the substrate on a second substrate, the second substrate having a third contact in electrical communication with a second die on the second substrate, the third contact substantially identical to the first contact and bonded to the second contact.
Claim 12
Independent Claim
139 words
A method for fabricating a semiconductor package comprising: providing a substrate having a first surface and an opposing second surface; forming a conductive via through the substrate from the first surface to the second surface by laser machining a via and at least partially filling the via with a conductive material; forming a first contact on the first surface in electrical communication with the conductive via; forming a second contact on the second surface in electrical communication with the conductive via; mounting a die to the substrate in electrical communication with the first contact or the second contact; and stacking the substrate on a second substrate, the second substrate having a third contact in electrical communication with a second die on the second substrate, the third contact substantially identical to the first contact and bonded to the second contact.
Claim 13
Dependent Claim
22 words
The method of claim 9 wherein the substrate comprises silicon and forming the conductive via comprises etching the via following laser machining.
Claim 14
Dependent Claim
37 words
The method of claim 9 wherein the substrate comprises silicon and forming the conductive via comprises etching the via, forming an insulating layer on a sidewall of the via, and depositing a conductive layer in the via.
Claim 15
Independent Claim
114 words
A method for fabricating a semiconductor package comprising: providing a silicon substrate having a first surface and an opposing second surface; laser machining a plurality of vias in the substrate extending from the first surface to the second surface; etching the vias; depositing a conductive material within the vias to form conductive vias; forming first contacts on the first substrate in electrical communication with the conductive vias; forming second contacts on the second substrate in electrical communication with the conductive vias, the second contacts configured to retain and electrically engage the first contacts; mounting a die to the substrate; and forming electrical paths between the die and the first contacts or the second contacts.
Claim 16
Independent Claim
114 words
A method for fabricating a semiconductor package comprising: providing a silicon substrate having a first surface and an opposing second surface; laser machining a plurality of vias in the substrate extending from the first surface to the second surface; etching the vias; depositing a conductive material within the vias to form conductive vias; forming first contacts on the first substrate in electrical communication with the conductive vias; forming second contacts on the second substrate in electrical communication with the conductive vias, the second contacts configured to retain and electrically engage the first contacts; mounting a die to the substrate; and forming electrical paths between the die and the first contacts or the second contacts.
Claim 17
Dependent Claim
17 words
The method of claim 12 wherein the first contacts comprise bumps and the second contacts comprise recesses.
Claim 18
Dependent Claim
17 words
The method of claim 12 wherein the first contacts or the second contacts comprise a conductive polymer.
Claim 19
Dependent Claim
24 words
The method of claim 12 wherein the first contacts comprise cylindrical tip portions and the second contacts comprise openings for receiving the tip portions.
Claim 20
Independent Claim
121 words
A method for fabricating a semiconductor package comprising: providing a first wafer and a second wafer; forming a plurality of packages on the first wafer and the second wafer, each package including a substrate comprising a portion of the first wafer or the second wafer, and a die in electrical communication with a plurality of first contacts on a first side of the substrate, and with a plurality of second contacts on a second side of the substrate; stacking the first wafer to the second wafer with selected first contacts on the first wafer in electrical communication with selected second contacts on the second wafer; and cutting the first wafer and the second wafer to form a plurality of stacked packages.
Claim 21
Independent Claim
121 words
A method for fabricating a semiconductor package comprising: providing a first wafer and a second wafer; forming a plurality of packages on the first wafer and the second wafer, each package including a substrate comprising a portion of the first wafer or the second wafer, and a die in electrical communication with a plurality of first contacts on a first side of the substrate, and with a plurality of second contacts on a second side of the substrate; stacking the first wafer to the second wafer with selected first contacts on the first wafer in electrical communication with selected second contacts on the second wafer; and cutting the first wafer and the second wafer to form a plurality of stacked packages.
Claim 22
Dependent Claim
17 words
The method of claim 16 wherein the first wafer comprises silicon and the second wafer comprises silicon.
Claim 23
Dependent Claim
28 words
The method of claim 17 wherein forming the packages comprises laser machining conductive vias on the substrate in electrical communication with the first contacts and the second contacts.
Claim 24
Dependent Claim
21 words
The method of claim 18 wherein the selected first contacts are configured to retain and electrically engage the selected second contacts.
Claim 25
Dependent Claim
19 words
The method of claim 19 wherein the selected first contacts comprise bumps and the selected second contacts comprise recesses.
Claim 26
Independent Claim
103 words
A method for fabricating a semiconductor package comprising: providing a first package comprising a first contact on a first surface thereof, and a second contact on a second surface thereof, and a conductive via electrically connecting the first contact to the second contact; providing a second package substantially identical to the first package and with the second contact on the second package configured to retain and electrically engage the first contact on the first package; and stacking the first package on the second package with the second contact on the second package retaining and electrically engaging the first contact on the first package.
Claim 27
Independent Claim
103 words
A method for fabricating a semiconductor package comprising: providing a first package comprising a first contact on a first surface thereof, and a second contact on a second surface thereof, and a conductive via electrically connecting the first contact to the second contact; providing a second package substantially identical to the first package and with the second contact on the second package configured to retain and electrically engage the first contact on the first package; and stacking the first package on the second package with the second contact on the second package retaining and electrically engaging the first contact on the first package.
Claim 28
Dependent Claim
33 words
The method of claim 21 further comprising forming a conductive polymer layer between the first contact on the first package and the second contact on the second package prior to the stacking step.
Claim 29
Dependent Claim
24 words
The method of claim 21 wherein the first contact comprises a bump and the second contact comprises a recess sized to retain the bump.
Claim 30
Dependent Claim
26 words
The method of claim 21 wherein the first contact comprises a tip portion and the second contact comprise an opening sized to retain the tip portion.
Claim 31
Dependent Claim
48 words
The method of claim 21 wherein the first package is contained on a first wafer and the second package is contained on a second wafer, and further comprising singluating the first package from the first wafer and the second package from the second wafer following the stacking step.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-05-21 | 2004-11-20 | 2005-05-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-05-21 | 2008-11-20 | 2009-05-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-05-21 | 2012-11-20 | 2013-05-22 | $7700.00 | Window Closed / Lapsed |