US6013948A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Stackable chip scale semiconductor package with mating contacts on opposed surfaces
Assignee: Round Rock Research LLC
•
Filing: 1998-04-01
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Granted: 2000-01-11
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Expires: 2018-04-01
Abstract
Abstract A stackable chip scale semiconductor package and a method for fabricating the package are provided. The package includes a substrate having a die mounting site wherein a semiconductor die is mounted. The package also includes first contacts formed on a first surface of the substrate, and second contacts formed on an opposing second surface of the substrate. Conductive vias in the substrate electrically connect the first contacts to the second contacts. In addition, the first contacts and the second contacts have a mating configuration, such that a second package can be stacked on and electrically connected to the package. The method for fabricating the package includes the steps of: laser machining and etching the vias, forming an insulating layer in the vias, and then depositing a conductive material within the vias.
Inventors
- 👤 Salman Akram
- 👤 Alan G. Wood
- 👤 Warren M. Farnworth
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 11:25
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/67; H10W70/69; H10W70/698; H10W70/62; H10W70/66; H10W70/666; H10W70/68; H10W74/00; H10W74/10; H10W74/111; H10W74/129; H10W90/00; H10W90/701; H10W70/682; H10W72/00; H10W72/01; H10W72/0198; H10W72/071; H10W72/072; H10W72/07221; H10W72/07227; H10W72/075; H10W72/20; H10W72/29; H10W72/90; H10W72/931; H10W72/932; H10W72/941; H10W72/944; H10W72/9445; H10W72/951; H10W74/131; H10W74/142; H10W90/721; H10W90/722; H10W90/724; H10W90/751; H10W90/754
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
126 words
A stackable semiconductor package comprising: a substrate comprising silicon and having a first surface and an opposing second surface; a plurality of first contacts on the first surface and a plurality of second contacts on the second surface, the first contacts and the second contacts having a matching pattern and mating configurations, the first contacts or the second contacts comprising a conductive polymer; a semiconductor die mounted to the substrate comprising a plurality of die contacts in electrical communication with the first contacts or the second contacts; and a plurality of conductive vias in the substrate electrically connecting the first contacts to the second contacts; the semiconductor package configured for stacking on a substantially identical second semiconductor package comprising third contacts bonded to the first contacts.
Claim 2
Dependent Claim
126 words
A stackable semiconductor package comprising: a substrate comprising silicon and having a first surface and an opposing second surface; a plurality of first contacts on the first surface and a plurality of second contacts on the second surface, the first contacts and the second contacts having a matching pattern and mating configurations, the first contacts or the second contacts comprising a conductive polymer; a semiconductor die mounted to the substrate comprising a plurality of die contacts in electrical communication with the first contacts or the second contacts; and a plurality of conductive vias in the substrate electrically connecting the first contacts to the second contacts; the semiconductor package configured for stacking on a substantially identical second semiconductor package comprising third contacts bonded to the first contacts.
Claim 3
Dependent Claim
23 words
The package of claim 1 wherein the third contacts comprise bumps and the second contacts comprise recesses configured to retain the third contacts.
Claim 4
Dependent Claim
25 words
The package of claim 1 wherein the third contacts comprise cylindrical tip portions and the second contacts comprise openings configured to retain the third contacts.
Claim 5
Dependent Claim
23 words
The package of claim 1 wherein the conductive polymer comprises a material selected from the group consisting of isotropic adhesives and anisotropic adhesives.
Claim 6
Dependent Claim
132 words
A stackable semiconductor package comprising: a semiconductor die comprising a plurality of die contacts; a silicon substrate comprising a first surface, an opposing second surface, a cavity for mounting the die and a curable polymer within the cavity at least partially encapsulating the die; a plurality of first contacts on the first surface and a plurality of second contacts on the second surface, the first contacts and the second contacts having a matching pattern and mating configurations, and either the first contacts or the second contacts in electrical communication with the die contacts; and a plurality of conductive vias in the substrate electrically connecting the first contacts to the second contacts; the semiconductor package configured for stacking on a substantially identical second semiconductor package comprising third contacts bonded to the first contacts.
Claim 7
Dependent Claim
132 words
A stackable semiconductor package comprising: a semiconductor die comprising a plurality of die contacts; a silicon substrate comprising a first surface, an opposing second surface, a cavity for mounting the die and a curable polymer within the cavity at least partially encapsulating the die; a plurality of first contacts on the first surface and a plurality of second contacts on the second surface, the first contacts and the second contacts having a matching pattern and mating configurations, and either the first contacts or the second contacts in electrical communication with the die contacts; and a plurality of conductive vias in the substrate electrically connecting the first contacts to the second contacts; the semiconductor package configured for stacking on a substantially identical second semiconductor package comprising third contacts bonded to the first contacts.
Claim 8
Dependent Claim
120 words
A stackable semiconductor package comprising: a substrate comprising a first surface, an opposing second surface, and a cavity; a plurality of first contacts on the first surface; a plurality of second contacts on the second surface, the second contacts configured for electrically engaging third contacts substantially identical to the first contacts on a second semiconductor package substantially identical to the semiconductor package; a plurality of conductive vias in the substrate electrically connecting the first contacts to the second contacts; and a semiconductor die comprising a plurality of die contacts, the die mounted to the cavity at least partially encapsulated in a polymer within the cavity with the die contacts in electrical communication with the first contacts or the second contacts.
Claim 9
Dependent Claim
120 words
A stackable semiconductor package comprising: a substrate comprising a first surface, an opposing second surface, and a cavity; a plurality of first contacts on the first surface; a plurality of second contacts on the second surface, the second contacts configured for electrically engaging third contacts substantially identical to the first contacts on a second semiconductor package substantially identical to the semiconductor package; a plurality of conductive vias in the substrate electrically connecting the first contacts to the second contacts; and a semiconductor die comprising a plurality of die contacts, the die mounted to the cavity at least partially encapsulated in a polymer within the cavity with the die contacts in electrical communication with the first contacts or the second contacts.
Claim 10
Dependent Claim
26 words
The package of claim 6 wherein the substrate comprises silicon and the conductive vias comprise electrically insulated openings at least partially filled with a conductive material.
Claim 11
Dependent Claim
125 words
A stackable semiconductor package comprising: a substrate comprising a first surface and an opposing second surface; a plurality of first contacts comprising bumps on the first surface; a plurality of second contacts comprising recesses on the second surface, the second contacts configured for retaining and electrically engaging third contacts substantially identical to the first contacts on a second semiconductor package substantially identical to the semiconductor package; the first contacts or the second contacts comprising a conductive polymer; a plurality of conductive vias in the substrate electrically connecting the first contacts to the second contacts; and a semiconductor die comprising a plurality of die contacts, the die mounted to the substrate with the die contacts in electrical communication with the first contacts or the second contacts.
Claim 12
Dependent Claim
125 words
A stackable semiconductor package comprising: a substrate comprising a first surface and an opposing second surface; a plurality of first contacts comprising bumps on the first surface; a plurality of second contacts comprising recesses on the second surface, the second contacts configured for retaining and electrically engaging third contacts substantially identical to the first contacts on a second semiconductor package substantially identical to the semiconductor package; the first contacts or the second contacts comprising a conductive polymer; a plurality of conductive vias in the substrate electrically connecting the first contacts to the second contacts; and a semiconductor die comprising a plurality of die contacts, the die mounted to the substrate with the die contacts in electrical communication with the first contacts or the second contacts.
Claim 13
Dependent Claim
35 words
The package of claim 8 wherein the substrate comprises silicon and the conductive vias comprise openings having an insulating layer formed on an inside diameter thereof, and at least partially filled with a conductive material.
Claim 14
Dependent Claim
135 words
A stackable semiconductor package comprising: a silicon substrate comprising a plurality of first contacts on a first surface thereof, and a plurality of second contacts on a second surface thereof, the second contacts sized and shaped to retain and electrically engage third contacts substantially identical to the first contacts on a second semiconductor package substantially identical to the first semiconductor package; an opening in the substrate; a semiconductor die on the substrate and comprising a plurality of die contacts; a pattern of conductors on the second surface in electrical communication with the second contacts; a plurality of wires extending through the opening and bonded to the die contacts and to the conductors; and a plurality of electrical insulated conductive vias in the substrate in electrical communication with the first contacts and with the second contacts.
Claim 15
Dependent Claim
135 words
A stackable semiconductor package comprising: a silicon substrate comprising a plurality of first contacts on a first surface thereof, and a plurality of second contacts on a second surface thereof, the second contacts sized and shaped to retain and electrically engage third contacts substantially identical to the first contacts on a second semiconductor package substantially identical to the first semiconductor package; an opening in the substrate; a semiconductor die on the substrate and comprising a plurality of die contacts; a pattern of conductors on the second surface in electrical communication with the second contacts; a plurality of wires extending through the opening and bonded to the die contacts and to the conductors; and a plurality of electrical insulated conductive vias in the substrate in electrical communication with the first contacts and with the second contacts.
Claim 16
Dependent Claim
25 words
The package of claim 10 wherein the first contacts comprise cylindrical portions and the second contacts comprise circular openings sized to receive the third contacts.
Claim 17
Dependent Claim
17 words
The package of claim 10 wherein the first contacts comprise bumps and the second contacts comprise recesses.
Claim 18
Dependent Claim
101 words
A stackable semiconductor package comprising: a substrate comprising a first surface, an opposing second surface, and a die mounting site; a plurality of first contacts on the first surface comprising a conductive polymer; a semiconductor die mounted proximate to the die mounting site and comprising a plurality of die contacts in electrical communication with the first contacts or the second contacts; and a plurality of conductive vias in the substrate comprising openings with a conductive layer thereon configured to retain and electrically engage second contacts substantially identical to the first contacts on a second package substantially identical to the semiconductor package.
Claim 19
Dependent Claim
101 words
A stackable semiconductor package comprising: a substrate comprising a first surface, an opposing second surface, and a die mounting site; a plurality of first contacts on the first surface comprising a conductive polymer; a semiconductor die mounted proximate to the die mounting site and comprising a plurality of die contacts in electrical communication with the first contacts or the second contacts; and a plurality of conductive vias in the substrate comprising openings with a conductive layer thereon configured to retain and electrically engage second contacts substantially identical to the first contacts on a second package substantially identical to the semiconductor package.
Claim 20
Dependent Claim
18 words
The package of claim 13 wherein the substrate comprises silicon and the openings comprise an electrically insulating layer.
Claim 21
Dependent Claim
16 words
The package of claim 13 wherein the first contacts comprise balls with a cylindrical tip portion.
Claim 22
Dependent Claim
156 words
A stackable semiconductor package comprising: a silicon substrate comprising a first surface and an opposing second surface; a plurality of first contacts on the first surface having a first pattern; a plurality of second contacts on the second surface having a second pattern matching the first pattern, the second contacts comprising a conductive polymer layer configured for mating electrical engagement and bonding with third contacts substantially identical to the first contacts on a second semiconductor package substantially identical to the semiconductor package; a plurality of conductors on the first surface or the second surface in electrical communication with the first contacts or the second contacts; a semiconductor die mounted to the substrate comprising a plurality of die contacts in electrical communication with the conductors; and a plurality of conductive vias in the substrate electrically connecting the first contacts to the second contacts, the conductive vias comprising electrically insulated vias at least partially filled with conductive material.
Claim 23
Dependent Claim
156 words
A stackable semiconductor package comprising: a silicon substrate comprising a first surface and an opposing second surface; a plurality of first contacts on the first surface having a first pattern; a plurality of second contacts on the second surface having a second pattern matching the first pattern, the second contacts comprising a conductive polymer layer configured for mating electrical engagement and bonding with third contacts substantially identical to the first contacts on a second semiconductor package substantially identical to the semiconductor package; a plurality of conductors on the first surface or the second surface in electrical communication with the first contacts or the second contacts; a semiconductor die mounted to the substrate comprising a plurality of die contacts in electrical communication with the conductors; and a plurality of conductive vias in the substrate electrically connecting the first contacts to the second contacts, the conductive vias comprising electrically insulated vias at least partially filled with conductive material.
Claim 24
Dependent Claim
13 words
The package of claim 16 wherein the first contacts comprise a conductive polymer.
Claim 25
Dependent Claim
11 words
The package of claim 16 wherein the first contacts comprise bumps.
Claim 26
Dependent Claim
15 words
The package of claim 16 wherein the conductive vias comprise an SiO 2 insulating layer.
Claim 27
Dependent Claim
13 words
The package of claim 16 wherein the conductive vias comprise a conductive polymer.
Claim 28
Dependent Claim
117 words
An electronic assembly comprising: a supporting substrate; a first semiconductor package mounted to the supporting substrate comprising a first silicon substrate, a first contact formed on a first surface of the first substrate comprising a conductive polymer, a second contact formed on an opposing second surface of the first substrate, and an electrically insulated conductive via in the first substrate electrically connecting the first contact to the second contact; and a second semiconductor package stacked on the first semiconductor package, the second semiconductor package substantially identical to the first semiconductor package and comprising a third contact substantially identical to the first contact sized and shaped to retain and electrically engage the second contact on the first package.
Claim 29
Dependent Claim
117 words
An electronic assembly comprising: a supporting substrate; a first semiconductor package mounted to the supporting substrate comprising a first silicon substrate, a first contact formed on a first surface of the first substrate comprising a conductive polymer, a second contact formed on an opposing second surface of the first substrate, and an electrically insulated conductive via in the first substrate electrically connecting the first contact to the second contact; and a second semiconductor package stacked on the first semiconductor package, the second semiconductor package substantially identical to the first semiconductor package and comprising a third contact substantially identical to the first contact sized and shaped to retain and electrically engage the second contact on the first package.
Claim 30
Dependent Claim
19 words
The assembly of claim 21 wherein the first contact comprises a bump and the second contact comprises a recess.
Claim 31
Dependent Claim
28 words
The assembly of claim 21 wherein the first contact comprises a substantially cylindrical tip portion and the second contacts comprises an opening sized to receive the tip portion.
Claim 32
Dependent Claim
140 words
An electronic assembly comprising: a supporting substrate; a first semiconductor package on the supporting substrate comprising: a silicon substrate comprising a first surface and an opposing second surface; a plurality of first contacts on the first surface and a plurality of second contacts on the second surface, the first contacts and the second contacts comprising a conductive polymer; a semiconductor die on the substrate comprising a plurality of die contacts in electrical communication with the first contacts or the second contacts; a plurality of electrically insulated conductive vias in the substrate electrically connecting the first contacts to the second contacts; a second semiconductor package substantially identical to the first semiconductor package stacked on the first semiconductor package, and comprising a plurality of third contacts substantially identical to the second contacts and configured to retain and electrically engage the second contacts.
Claim 33
Dependent Claim
140 words
An electronic assembly comprising: a supporting substrate; a first semiconductor package on the supporting substrate comprising: a silicon substrate comprising a first surface and an opposing second surface; a plurality of first contacts on the first surface and a plurality of second contacts on the second surface, the first contacts and the second contacts comprising a conductive polymer; a semiconductor die on the substrate comprising a plurality of die contacts in electrical communication with the first contacts or the second contacts; a plurality of electrically insulated conductive vias in the substrate electrically connecting the first contacts to the second contacts; a second semiconductor package substantially identical to the first semiconductor package stacked on the first semiconductor package, and comprising a plurality of third contacts substantially identical to the second contacts and configured to retain and electrically engage the second contacts.
Claim 34
Dependent Claim
19 words
The assembly of claim 24 wherein the conductive vias comprise an insulating layer and a conductive material formed therein.
Claim 35
Dependent Claim
17 words
The assembly of claim 24 wherein the first contacts and the second contacts comprise an isotropic adhesive.
Claim 36
Dependent Claim
17 words
The assembly of claim 24 wherein the first contacts and the second contacts comprise an anisotropic adhesive.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-01-10 | 2003-07-12 | 2004-01-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-01-10 | 2007-07-12 | 2008-01-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-01-10 | 2011-07-12 | 2012-01-11 | $7700.00 | Window Closed / Lapsed |