Patent US6051276A successfully refreshed from Google Patents.
US6051276A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Internally heated pyrolysis zone
Assignee: Specialty Coating Systems Inc
•
Filing: 1997-03-14
•
Granted: 2000-04-18
•
Expires: 2017-03-14
Abstract
Abstract A method and apparatus for more efficiently depositing a gas onto a surface. In one embodiment, a deposition apparatus is provided. The deposition apparatus comprises a deposition chamber, a tube and a heating element. The tube is in fluid communication with the deposition chamber, and the heating element is constructed and arranged so that the heating element preferentially heats the centerline of the tube relative to the inner surface of the tube. In another embodiment, a method of depositing a product gas onto a surface is provided. The method comprises placing a first gas into a tube; heating first and second portions of the first gas to first and second temperatures, respectively, to form the product gas, the first portion of the first gas being adjacent the centerline of the tube, the second portion of the first gas being adjacent the inner surface of the tube, the first temperature being greater than the second temperature; and depositing the product gas onto the surface.
Inventors
- 👤 John Wary
- 👤 William F. Beach
- 👤 Roger A. Olson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:03
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45563; C23C16/4557; C23C16/448; C23C16/4488; C23C16/452
Claims Analysis
Total Claims: 55
Claim 1
Independent Claim
52 words
A deposition apparatus, comprising: a deposition chamber; a tube in fluid communication with the deposition chamber, the tube having a centerline and an inner surface; and a heating element constructed and arranged so that the heating element preferentially heats the centerline of the tube relative to the inner surface of the tube.
Claim 2
Dependent Claim
52 words
A deposition apparatus, comprising: a deposition chamber; a tube in fluid communication with the deposition chamber, the tube having a centerline and an inner surface; and a heating element constructed and arranged so that the heating element preferentially heats the centerline of the tube relative to the inner surface of the tube.
Claim 3
Dependent Claim
19 words
The deposition apparatus according to claim 1, wherein the heating element is disposed within the interior of the tube.
Claim 4
Dependent Claim
19 words
The deposition apparatus according to claim 1, wherein the heating element is disposed adjacent the centerline of the tube.
Claim 5
Dependent Claim
19 words
The deposition apparatus according to claim 1, wherein the heating element is disposed along the centerline of the tube.
Claim 6
Dependent Claim
21 words
The deposition apparatus according to claim 1, wherein the tube and the heating element form a portion of a pyrolysis zone.
Claim 7
Dependent Claim
46 words
The deposition apparatus according to claim 1, further comprising a zone for providing a first gas, the tube being disposed between the zone for providing the first gas and the deposition chamber, the zone for providing the first gas being in fluid communication with the tube.
Claim 8
Dependent Claim
19 words
The deposition apparatus according to claim 6, wherein the zone for providing the first gas is a vaporization zone.
Claim 9
Dependent Claim
31 words
The deposition apparatus according to claim 7, wherein the tube and the heating element form a portion of a pyrolysis zone, the pyrolysis zone being in fluid communication with the tube.
Claim 10
Dependent Claim
20 words
The deposition apparatus according to claim 8, wherein the pyrolysis zone heats the first gas to form a second gas.
Claim 11
Dependent Claim
36 words
The deposition apparatus according to claim 9, further comprising a substrate support disposed within the deposition chamber so that the second gas can be deposited on a surface of a substrate disposed along the substrate support.
Claim 12
Dependent Claim
31 words
The deposition apparatus according to claim 8, further comprising a post-pyrolysis zone disposed between the deposition chamber and the pyrolysis zone, the post-pyrolysis zone being in fluid communication with the tube.
Claim 13
Dependent Claim
15 words
The deposition apparatus according to claim 1, wherein the heating element is a coiled wire.
Claim 14
Dependent Claim
43 words
The deposition apparatus according to claim 1, wherein the heating element is a coiled wire having first and second diameters, the first diameter being less than an inner diameter of the tube, the second diameter being about the inner diameter of the tube.
Claim 15
Dependent Claim
37 words
The apparatus according to claim 6, wherein less than about 1 weight percent of the first gas vaporized in the zone for providing the first gas results in carbonaceous residue on the inner surface of the tube.
Claim 16
Independent Claim
46 words
An apparatus for depositing a gas, comprising: a deposition chamber; a tube in fluid communication with the deposition chamber, the tube having a centerline and an inner surface; and means for preferentially heating the centerline of the tube relative to the inner surface of the tube.
Claim 17
Independent Claim
46 words
An apparatus for depositing a gas, comprising: a deposition chamber; a tube in fluid communication with the deposition chamber, the tube having a centerline and an inner surface; and means for preferentially heating the centerline of the tube relative to the inner surface of the tube.
Claim 18
Dependent Claim
59 words
The deposition apparatus according to claim 15, further comprising a zone for providing a gas, the means for preferentially heating the centerline of the tube being disposed between the zone for providing the gas and the deposition chamber, the zone for providing the gas being in fluid communication with the means for preferentially heating the centerline of the tube.
Claim 19
Dependent Claim
18 words
The deposition apparatus according to claim 16, wherein the zone for providing the gas is a vaporization zone.
Claim 20
Dependent Claim
17 words
The deposition apparatus according to claim 17, further comprising a substrate support disposed within the deposition chamber.
Claim 21
Dependent Claim
39 words
The deposition apparatus according to claim 17, further comprising a post-pyrolysis zone disposed between the deposition chamber and the means for preferentially heating the centerline of the tube, the post-pyrolysis zone being in fluid communication with the deposition chamber.
Claim 22
Dependent Claim
15 words
The deposition apparatus according to claim 15, wherein the heating element is a coiled wire.
Claim 23
Dependent Claim
43 words
The deposition apparatus according to claim 15, wherein the heating element is a coiled wire having first and second diameters, the first diameter being less than an inner diameter of the tube, the second diameter being about the inner diameter of the tube.
Claim 24
Independent Claim
86 words
An apparatus for depositing parylene monomer, comprising: a first zone for providing parylene dimer; a pyrolysis zone for pyrolyzing the parylene dimer to form the parylene monomer, the pyrolysis zone comprising: a tube in fluid communication with the first zone, the tube having an inner surface and a centerline; and a heating element constructed and arranged so that the heating element preferentially heats the centerline of the tube relative to the inner surface of the tube; and a deposition chamber in fluid communication with the tube.
Claim 25
Independent Claim
86 words
An apparatus for depositing parylene monomer, comprising: a first zone for providing parylene dimer; a pyrolysis zone for pyrolyzing the parylene dimer to form the parylene monomer, the pyrolysis zone comprising: a tube in fluid communication with the first zone, the tube having an inner surface and a centerline; and a heating element constructed and arranged so that the heating element preferentially heats the centerline of the tube relative to the inner surface of the tube; and a deposition chamber in fluid communication with the tube.
Claim 26
Dependent Claim
18 words
The apparatus according to claim 22, wherein the heating element is disposed within the interior of the tube.
Claim 27
Dependent Claim
18 words
The apparatus according to claim 22, wherein the heating element is disposed adjacent the centerline of the tube.
Claim 28
Dependent Claim
18 words
The apparatus according to claim 22, wherein the heating element is disposed along the centerline of the tube.
Claim 29
Dependent Claim
14 words
The apparatus according to claim 22, wherein the first zone is a vaporization zone.
Claim 30
Dependent Claim
35 words
The apparatus according to claim 22, further comprising a substrate support disposed within the deposition chamber so that the parylene monomer can be deposited on a surface of a substrate disposed along the substrate support.
Claim 31
Dependent Claim
30 words
The apparatus according to claim 22, further comprising a post-pyrolysis zone disposed between the deposition chamber and the pyrolysis zone, the post-pyrolysis zone being in fluid communication with the tube.
Claim 32
Dependent Claim
34 words
The apparatus according to claim 28, further comprising a substrate support disposed within the deposition chamber so that the parylene monomer can be deposited on a surface of a substrate disposed along the substrate.
Claim 33
Dependent Claim
18 words
The apparatus according to claim 28, wherein the heating element is disposed within the interior of the tube.
Claim 34
Dependent Claim
18 words
The apparatus according to claim 28, wherein the heating element is disposed adjacent the centerline of the tube.
Claim 35
Dependent Claim
18 words
The apparatus according to claim 28, wherein the heating element is disposed along the centerline of the tube.
Claim 36
Dependent Claim
14 words
The apparatus according to claim 32, wherein the first zone is a vaporization zone.
Claim 37
Dependent Claim
15 words
The deposition apparatus according to claim 22, wherein the heating element is a coiled wire.
Claim 38
Dependent Claim
43 words
The deposition apparatus according to claim 22, wherein the heating element is a coiled wire having first and second diameters, the first diameter being less than an inner diameter of the tube, the second diameter being about the inner diameter of the tube.
Claim 39
Dependent Claim
33 words
The apparatus according to claim 22, wherein less than about 1 weight percent of the parylene dimer vaporized in the first zone results in carbonaceous residue on the inner surface of the tube.
Claim 40
Independent Claim
77 words
An apparatus for depositing parylene monomer, comprising: a first zone for providing parylene dimer; a pyrolysis zone for pyrolyzing the parylene dimer to form the parylene monomer, the pyrolysis zone comprising: a tube in fluid communication with the deposition chamber, the tube having a centerline and an inner surface; and means for preferentially heating the centerline of the tube relative to the inner surface of the tube; and a deposition chamber in fluid communication with the tube.
Claim 41
Independent Claim
77 words
An apparatus for depositing parylene monomer, comprising: a first zone for providing parylene dimer; a pyrolysis zone for pyrolyzing the parylene dimer to form the parylene monomer, the pyrolysis zone comprising: a tube in fluid communication with the deposition chamber, the tube having a centerline and an inner surface; and means for preferentially heating the centerline of the tube relative to the inner surface of the tube; and a deposition chamber in fluid communication with the tube.
Claim 42
Dependent Claim
14 words
The apparatus according to claim 37, wherein the first zone is a vaporization zone.
Claim 43
Dependent Claim
35 words
The apparatus according to claim 37, further comprising a substrate support disposed within the deposition chamber so that the parylene monomer can be deposited on a surface of a substrate disposed along the substrate support.
Claim 44
Dependent Claim
30 words
The apparatus according to claim 37, further comprising a post-pyrolysis zone disposed between the deposition chamber and the pyrolysis zone, the post-pyrolysis zone being in fluid communication with the tube.
Claim 45
Dependent Claim
34 words
The apparatus according to claim 40, further comprising a substrate support disposed within the deposition chamber so that the parylene monomer can be deposited on a surface of a substrate disposed along the substrate.
Claim 46
Dependent Claim
14 words
The apparatus according to claim 41, wherein the first zone is a vaporization zone.
Claim 47
Dependent Claim
15 words
The deposition apparatus according to claim 37, wherein the heating element is a coiled wire.
Claim 48
Dependent Claim
43 words
The deposition apparatus according to claim 37, wherein the heating element is a coiled wire having first and second diameters, the first diameter being less than an inner diameter of the tube, the second diameter being about the inner diameter of the tube.
Claim 49
Dependent Claim
33 words
The apparatus according to claim 37, wherein less than about 1 weight percent of the parylene dimer vaporized in the first zone results in carbonaceous residue on the inner surface of the tube.
Claim 50
Independent Claim
92 words
A method of depositing a product gas onto a surface, the method comprising the steps of: (a) placing a first gas into a tube; (b) heating first and second portions of the first gas to first and second temperatures, respectively, to form the product gas, the first portion of the first gas being adjacent a centerline of the tube, the second portion of the first gas being adjacent an inner surface of the tube, the first temperature being greater than the second temperature; and (c) depositing the product gas onto the surface.
Claim 51
Independent Claim
92 words
A method of depositing a product gas onto a surface, the method comprising the steps of: (a) placing a first gas into a tube; (b) heating first and second portions of the first gas to first and second temperatures, respectively, to form the product gas, the first portion of the first gas being adjacent a centerline of the tube, the second portion of the first gas being adjacent an inner surface of the tube, the first temperature being greater than the second temperature; and (c) depositing the product gas onto the surface.
Claim 52
Dependent Claim
25 words
The method according to claim 46, further comprising, between step (b) and step (c), the step of passing the product gas into a deposition chamber.
Claim 53
Dependent Claim
31 words
The method according to claim 46, wherein step (b) includes heating the first and second portions of the first gas with a heating element disposed within an interior of the tube.
Claim 54
Dependent Claim
31 words
The method according to claim 46, wherein step (b) includes heating the first and second portions of the first gas with a heating element disposed along a centerline of the tube.
Claim 55
Dependent Claim
18 words
The method according to claim 46, wherein step (a) includes placing the first gas into a pyrolysis zone.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-04-18 | 2003-10-18 | 2004-04-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-04-18 | 2007-10-18 | 2008-04-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-04-18 | 2011-10-18 | 2012-04-18 | $7700.00 | Window Closed / Lapsed |