US4495889A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polymeric film coating apparatus
Assignee: TRUST OF THOMAS J RILEY SNEIDERMAN DONALD G KERN KEITH W TRUSTEES
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Filing: 1982-11-24
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Granted: 1985-01-29
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Expires: 2002-11-24
Abstract
Abstract Method and apparatus are disclosed for coating substrates with a film polymer based on p-xylylene by vapor-shaped polymerization. The apparatus monitors the monomer vapor pressure after pyrolization of the cyclic di-p-xylylene dimer, compares the measured pressure to a predetermined pressure needed to effect a completed vapor-phase polymerization reaction, and adjusts the temperature of vaporization in response to variations between measured pressure and the predetermined pressure.
Inventors
- 👤 Thomas J. Riley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 23:27
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/60; B07; B07B; B07B7/00; B07B7/04; C; C08; C08G; C08G61/00; C08G61/02; C08G61/025; C08G2261/00; C08G2261/30; C08G2261/34; C08G2261/342; C08G2261/3424
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
99 words
In an apparatus for coating workpieces with polymer film based on p-xylylene by vapor-phase polymerization including a vaporizer, a pyrolizer and a deposition chamber connected in series, the improvement comprising means for continuously measuring a monomer vapor pressure after pyrolization, means for comparing said measured monomer vapor pressure with a predetermined pressure, and means to continuously control the vaporization of the p-xylylene into a dimer to reduce variations between the measured and predetermined monomer pressure after pyrolization and thereby adjust the polymerization rate inside said deposition chamber to achieve a completed polymeric reaction in a minimum amount of time.
Claim 2
Dependent Claim
99 words
In an apparatus for coating workpieces with polymer film based on p-xylylene by vapor-phase polymerization including a vaporizer, a pyrolizer and a deposition chamber connected in series, the improvement comprising means for continuously measuring a monomer vapor pressure after pyrolization, means for comparing said measured monomer vapor pressure with a predetermined pressure, and means to continuously control the vaporization of the p-xylylene into a dimer to reduce variations between the measured and predetermined monomer pressure after pyrolization and thereby adjust the polymerization rate inside said deposition chamber to achieve a completed polymeric reaction in a minimum amount of time.
Claim 3
Dependent Claim
88 words
In an apparatus for coating workpieces with polymer film based on p-xylylene by vapor-phase polymerization including a vaporizer, a pyrolizer and a deposition chamber connected in series, the improvement comprising means for sensing pressure of monomer vapor downstream from the pyrolizer, means for continuously comparing the monomer pressure to a predetermined pressure needed to minimize the time to effect a completed polymeric reaction in the deposition chamber, and means for continuously controlling the temperature of vaporization in response to differences between the actual pressure and the predetermined pressure.
Claim 4
Dependent Claim
88 words
In an apparatus for coating workpieces with polymer film based on p-xylylene by vapor-phase polymerization including a vaporizer, a pyrolizer and a deposition chamber connected in series, the improvement comprising means for sensing pressure of monomer vapor downstream from the pyrolizer, means for continuously comparing the monomer pressure to a predetermined pressure needed to minimize the time to effect a completed polymeric reaction in the deposition chamber, and means for continuously controlling the temperature of vaporization in response to differences between the actual pressure and the predetermined pressure.
Claim 5
Dependent Claim
99 words
In an apparatus for coating workpieces with polymer film based on p-xylylene by vapor-phase polymerization including a vaporizer, a pyrolizer and a deposition chamber connected in series, the improvement comprising means for sensing pressure of monomer vapor downstream from the pyrolizer, means for continuously comparing the sensed monomer pressure with a predetermined optimum pressure needed to effect a completed polymeric reaction in the deposition chamber, said optimum pressure dependent on the molecular weight of said monomer vapor, and means for continuously adjusting the temperature of vaporization in response to differences between the sensed pressure and the predetermined optimum pressure.
Claim 6
Dependent Claim
99 words
In an apparatus for coating workpieces with polymer film based on p-xylylene by vapor-phase polymerization including a vaporizer, a pyrolizer and a deposition chamber connected in series, the improvement comprising means for sensing pressure of monomer vapor downstream from the pyrolizer, means for continuously comparing the sensed monomer pressure with a predetermined optimum pressure needed to effect a completed polymeric reaction in the deposition chamber, said optimum pressure dependent on the molecular weight of said monomer vapor, and means for continuously adjusting the temperature of vaporization in response to differences between the sensed pressure and the predetermined optimum pressure.
Claim 7
Dependent Claim
24 words
The apparatus of claim 3 wherein said means for controlling comprises means operatively coupled to said vaporizer to adjust the temperature of said vaporizer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-01-29 | 1988-07-30 | 1989-01-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-01-29 | 1992-07-30 | 1993-01-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-01-29 | 1996-07-30 | 1997-01-29 | $7700.00 | Window Closed / Lapsed |