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US4287224A
Expired / Lapsed
US
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Method for regulating the evaporation rate of oxidizable substances in reactive vacuum deposition
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1979-08-09
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Granted: 1981-09-01
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Expires: 1999-08-09
Abstract
Abstract A process for regulating the evaporation rate of oxidizable substances in reactive vacuum deposition by the metered addition of oxygen to a vacuum deposition chamber during deposition, wherein the addition of oxygen to a predetermined value, the pressure "p" in the vacuum chamber is measured, and the evaporation rate "r" for any pressure changes is regulated such that the ratio of pressure to evaporation rate p:r is maintained substantially constant.
Inventors
- 👤 Klaus-Jurgen Heimbach
- 👤 Walter Zultzke
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 18:48
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/0021
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
69 words
In a process for regulating the evaporation rate of oxidisable substances in reactive vacuum deposition by the metered addition of oxygen to a vacuum deposition chamber during deposition, the improvement comprising: adjusting the addition of oxygen to a predetermined value, measuring the pressure in the vacuum chamber, and regulating the evaporation rate for any pressure changes such that the ratio of pressure to evaporation rate is maintained substantially constant.
Claim 2
Dependent Claim
69 words
In a process for regulating the evaporation rate of oxidisable substances in reactive vacuum deposition by the metered addition of oxygen to a vacuum deposition chamber during deposition, the improvement comprising: adjusting the addition of oxygen to a predetermined value, measuring the pressure in the vacuum chamber, and regulating the evaporation rate for any pressure changes such that the ratio of pressure to evaporation rate is maintained substantially constant.
Claim 3
Dependent Claim
27 words
The method according to claim 1, wherein the adjusting of the addition of oxygen comprises regulating the amount of oxygen to a constant value per unit time.
Claim 4
Dependent Claim
24 words
The method according to claim 1, in a resistance-heated evaporator, further comprising regulating the current flowing through the evaporator resistance in a pressure-dependent manner.
Claim 5
Dependent Claim
24 words
The method according to claim 1, in an electron beam evaporator, further comprising regulating the emission current of the cathode in a pressure-dependent manner.
Claim 6
Dependent Claim
13 words
The method according to claim 1, further comprising measuring the oxygen partial pressure.
References Cited (Backward Citations)
US3982049A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-08-31 | 1985-03-02 | 1985-09-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-08-31 | 1989-03-02 | 1989-09-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-08-31 | 1993-03-02 | 1993-09-01 | $7700.00 | Window Closed / Lapsed |