US3982049A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for producing single crystal films
Assignee: Boeing North American Inc
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Filing: 1974-07-15
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Granted: 1976-09-21
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Expires: 1994-07-15
Abstract
Abstract The reaction zone for the deposition of a metal oxide film on a crystal substrate inside a reaction chamber is shifted during a chemical vapor deposition process by the systematic control of the process parameters of the system.
Inventors
- 👤 Jack E. Mee
- 👤 Thomas N. Hamilton
- 👤 John L. Archer
- 👤 David M. Heinz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 02:09
CPC Classifications
C; C01; C01G; C01G49/00; C01G49/0018; C01G49/0054
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
304 words
A method of optimizing the deposition of a deposit of a desired complex metal oxide, with respect to at least one selected characteristic of the deposit of said desired complex metal oxide, said at least one selected characteristic being selected from the group consisting of, location of the zone where said desired complex metal oxide deposits, size of the zone where said desired complex metal oxide deposits, rate of deposition of said desired complex metal oxide and purity of said desired complex metal oxide deposit, said method comprising: performing steps A and B a plurality of times and performing step C prior to at least one repetition of step A; A. reacting metal halides with an oxidizing gas in a reaction chamber to form a deposit of a plurality of metal oxides at different locations on a substrate means, said metal oxides including said desired complex metal oxide, said oxidizing gas consisting of at least one gas selected from the group consisting of water vapor and O 2 ; B. determining from said deposit of a plurality of metal oxides the quality of said at least one selected characteristic of said desired complex metal oxide deposit which is obtained under the reaction conditions extant during the formation of said deposit of a plurality of metal oxides; C. altering at least one reaction condition, said at least one reaction condition being selected from the group consisting of substrate means temperature, the quantities of metal halides and the quantity of the oxidizing gas; D. determining from the qualities of said at least one selected characteristic of the deposits of a plurality of metal oxides formed under a plurality of different reaction conditions, the reaction conditions which yield a deposit of said desired complex metal oxide which is optimized with respect to at least one selected characteristic.
Claim 2
Independent Claim
304 words
A method of optimizing the deposition of a deposit of a desired complex metal oxide, with respect to at least one selected characteristic of the deposit of said desired complex metal oxide, said at least one selected characteristic being selected from the group consisting of, location of the zone where said desired complex metal oxide deposits, size of the zone where said desired complex metal oxide deposits, rate of deposition of said desired complex metal oxide and purity of said desired complex metal oxide deposit, said method comprising: performing steps A and B a plurality of times and performing step C prior to at least one repetition of step A; A. reacting metal halides with an oxidizing gas in a reaction chamber to form a deposit of a plurality of metal oxides at different locations on a substrate means, said metal oxides including said desired complex metal oxide, said oxidizing gas consisting of at least one gas selected from the group consisting of water vapor and O 2 ; B. determining from said deposit of a plurality of metal oxides the quality of said at least one selected characteristic of said desired complex metal oxide deposit which is obtained under the reaction conditions extant during the formation of said deposit of a plurality of metal oxides; C. altering at least one reaction condition, said at least one reaction condition being selected from the group consisting of substrate means temperature, the quantities of metal halides and the quantity of the oxidizing gas; D. determining from the qualities of said at least one selected characteristic of the deposits of a plurality of metal oxides formed under a plurality of different reaction conditions, the reaction conditions which yield a deposit of said desired complex metal oxide which is optimized with respect to at least one selected characteristic.
Claim 3
Dependent Claim
21 words
The method recited in claim 1 wherein the altering step includes the step of varying the quantities of the metal halides.
Claim 4
Dependent Claim
29 words
The method recited in claim 2 wherein said step of varying the quantities of the metal halides includes the step of changing the relative quantities of the metal halides.
Claim 5
Dependent Claim
23 words
The method recited in claim 1 wherein the altering step includes the step of varying the quantity of at least one metal halide.
Claim 6
Dependent Claim
20 words
The method recited in claim 1 wherein the altering step includes the step of varying the quantity of oxidizing gas.
Claim 7
Dependent Claim
31 words
The method recited in claim 5 wherein said step of varying the quantity of oxidizing gas includes the step of changing the relative quantities of water vapor and O 2 .
Claim 8
Dependent Claim
29 words
The method recited in claim 1 wherein the altering step includes the steps of: varying the quantities of said metal halides; and varying the quantity of the oxidizing gas.
Claim 9
Dependent Claim
31 words
The method recited in claim 1 wherein said desired complex metal oxide is a garnet and the selected characteristic is the size of the zone in which said garnet is deposited.
Claim 10
Dependent Claim
31 words
The method recited in claim 1 wherein the desired complex metal oxide is an orthoferrite and the selected characteristic is the size of the zone in which said orthoferrite is deposited.
Claim 11
Dependent Claim
51 words
The method of claim 1 wherein said at least one selected characteristic includes the size of the zone where the desired complex metal oxide deposits and wherein said substrate means is sufficiently large in at least one dimension to extend beyond the zone in which said desired complex metal oxide deposits.
Claim 12
Dependent Claim
60 words
The method in claim 1 further comprising steps E and F: E. placing a seed substrate in said zone where said desired complex metal oxide deposits; and F. reacting said metal halides with said oxidizing gas in said reaction chamber under optimized reaction conditions to form a single crystalline deposit of said desired complex metal oxide on said seed substrate.
Claim 13
Dependent Claim
19 words
The process recited in claim 1 including the step of initially determining the relative reactivities of said metal halides.
Claim 14
Dependent Claim
24 words
The process recited in claim 1 wherein said substrate means is a single test plate whereby said deposit is on the single test plate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-09-21 | 1980-03-22 | 1980-09-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-09-21 | 1984-03-22 | 1984-09-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-09-21 | 1988-03-22 | 1988-09-21 | $7700.00 | Window Closed / Lapsed |