US5350453A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for producing thin films of mixed metal oxides from organic metal compounds on a substrate
Assignee: Hoechst AG
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Filing: 1991-02-21
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Granted: 1994-09-27
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Expires: 2011-02-21
Abstract
Abstract In the device for producing thin films of metal oxides from organic metal compounds on a substrate, there is a truncated pyramidal hollow body (3) in an evacuable housing (1). Disposed concentrically with respect to the axis of symmetry (16) of the hollow body (3) in its base (7) are at least three furnaces (8) which have reception devices (9) for the metal compounds (10) to be evaporated. The reception devices (9) are provided with guide pipes (11) which project into the hollow interior of the hollow body (3) and are inclined towards its axis of symmetry (16). The casing (12) of the truncated pyramid merges into a pipe (13) above whose end there is disposed a heatable reception device (5) for the substrate (4). A gas feed pipe (6) terminates in the hollow interior [sic] of the hollow body (3) between the guide pipes (11) and the end of the pipe (13).
Inventors
- 👤 Ernst-Gunther Schlosser
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 22:18
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45514; C23C16/22; C23C16/30; C23C16/40; C23C16/448; C23C16/4485; C23C16/45585; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/73; Y10S505/732; Y10S505/734; Y10S505/786
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
190 words
Device for producing thin films of mixed metal oxides from organic metal compounds on a substrate, characterized in that there is, in an evacuable housing (1), a truncated frustum shaped hollow body (3) formed from a casting (12), having a base (7) and an axis of symmetry (16), in which there are disposed, on a circumference of a circle that is concentric with the axis of symmetry (16), a) at least three furnaces (8) in the base (7) of the hollow body which have reception devices (9) for the metal compounds (10) to be evaporated, which reception devices (9) are provided with guide pipes (11) which project into the hollow interior of the hollow body (3) and are inclined towards the axis of symmetry (16), b) a confluence pipe (13), into which the truncated frustum hollow body merges, having a first and second end, and above whose second end there is disposed a heatable reception device (5) for the substrate (4), and in the interior of the frustum shaped hollow body, a gas feed pipe terminates between the guide pipe (11) and the first end of the confluence pipe (13).
Claim 2
Dependent Claim
190 words
Device for producing thin films of mixed metal oxides from organic metal compounds on a substrate, characterized in that there is, in an evacuable housing (1), a truncated frustum shaped hollow body (3) formed from a casting (12), having a base (7) and an axis of symmetry (16), in which there are disposed, on a circumference of a circle that is concentric with the axis of symmetry (16), a) at least three furnaces (8) in the base (7) of the hollow body which have reception devices (9) for the metal compounds (10) to be evaporated, which reception devices (9) are provided with guide pipes (11) which project into the hollow interior of the hollow body (3) and are inclined towards the axis of symmetry (16), b) a confluence pipe (13), into which the truncated frustum hollow body merges, having a first and second end, and above whose second end there is disposed a heatable reception device (5) for the substrate (4), and in the interior of the frustum shaped hollow body, a gas feed pipe terminates between the guide pipe (11) and the first end of the confluence pipe (13).
Claim 3
Dependent Claim
36 words
Device according to claim 1, characterized in that the furnaces (8) are disposed symmetrically on a circumference of a circle that is concentric with respect to the axis of symmetry (16) of the hollow body (3).
Claim 4
Dependent Claim
31 words
Device according to one of claims 1 or 2, characterized in that a shutter is disposed between the hollow body (3) and the heated reception device (5) for the substrate (4).
Claim 5
Dependent Claim
17 words
Device according to claim 1, characterized in that the gas feed pipe (6) comprises a nozzle ring.
Claim 6
Dependent Claim
23 words
Device according to claim 1, characterized in that the hollow body (3) and the pipe (13) are provided with a temperature-control device (14).
Claim 7
Dependent Claim
21 words
Device according to one of claim 1 to 5, characterized in that baffle plates are disposed between the guide pipes (11).
Claim 8
Dependent Claim
17 words
Device according to claim 2, characterized in that the gas feed pipe (6) comprises a nozzle ring.
Claim 9
Dependent Claim
24 words
Device according to claim 2, characterized in that the hollow body (3) and the confluence pipe (13) are provided with a temperature-control device (14).
Claim 10
Dependent Claim
17 words
Device according to claim 2, characterized in that baffle plates are disposed between the guide pipes (11).
Claim 11
Dependent Claim
17 words
Device according to claim 3, characterized in that the gas feed pipe (6) comprises a nozzle ring.
Claim 12
Dependent Claim
24 words
Device according to claim 3, characterized in that the hollow body (3) and the confluence pipe (13) are provided with a temperature-control device (14).
Claim 13
Dependent Claim
17 words
Device according to claim 3, characterized in that baffle plates are disposed between the guide pipes (11).
Claim 14
Dependent Claim
24 words
Device according to claim 4, characterized in that the hollow body (3) and the confluence pipe (13) are provided with a temperature-control device (14).
Claim 15
Dependent Claim
17 words
Device according to claim 4, characterized in that baffle plates are disposed between the guide pipes (11).
Claim 16
Dependent Claim
17 words
Device according to claim 5, characterized in that baffle plates are disposed between the guide pipes (11).
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-09-26 | 1998-03-28 | 1998-09-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-09-26 | 2002-03-28 | 2002-09-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-09-26 | 2006-03-28 | 2006-09-27 | $7700.00 | Window Closed / Lapsed |