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US4613306A Expired / Lapsed US ⏱️ 0.0 years remaining

Evaporator crucible for vacuum depositing systems

Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1985-05-02
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Granted: 1986-09-23
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Expires: 2005-05-02
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Abstract

Abstract Evaporator crucible for vacuum depositing systems, having a crucible bottom with at least one bottom opening for the introduction of material in rod form for evaporation. At a distance from the bottom opening there is provided at least one metal crucible rim which preferably is provided with a coolant passage. To solve the problem of reducing the heat losses, the crucible rim is provided internally on at least a part of its depth with a lagging comprising ceramic material. This lagging preferably comprises individual ceramic building blocks which are preferably compressed from magnesium oxide.

Inventors

  • 👤 Volker Bauer
  • 👤 Albert Feuerstein
  • 👤 Horst Ranke

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 17:25
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/243; C23C14/246; C23C14/28; C23C14/30

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 76 words
An electron-beam evaporator crucible for vacuum depositing systems, comprising: a crucible bottom with a wall surface forming a plurality of bottom openings for the introduction of evaporation material in rod form, and a metal crucible rim having a wall surface disposed at a distance from the bottom openings, and a coolant passage in said crucible rim; and a lagging comprising ceramic material provided internally on at least a portion of the depth of said crucible rim.
Claim 2
Dependent Claim 76 words
An electron-beam evaporator crucible for vacuum depositing systems, comprising: a crucible bottom with a wall surface forming a plurality of bottom openings for the introduction of evaporation material in rod form, and a metal crucible rim having a wall surface disposed at a distance from the bottom openings, and a coolant passage in said crucible rim; and a lagging comprising ceramic material provided internally on at least a portion of the depth of said crucible rim.
Claim 3
Dependent Claim 18 words
An evaporator crucible in accordance with claim 1, in which said ceramic lagging comprises individual ceramic building blocks.
Claim 4
Dependent Claim 30 words
An evaporator crucible in accordance with claim 2, in which said ceramic lagging comprises at least two rows of ceramic bulding blocks having joints which are offset from one another.
Claim 5
Dependent Claim 26 words
An evaporator crucible in accordance with claim 3, in which said metal crucible rim has a peripheral projection overlapping said ceramic building blocks at least partially.
Claim 6
Dependent Claim 17 words
An evaporator crucible in accordance with claim 1, in which said ceramic material comprises compressed magnesium oxide.
Claim 7
Dependent Claim 24 words
An evaporator crucible in accordance with claim 2, which includes strips of metal disposed between said ceramic building blocks and said metal crucible rim.

References Cited (Backward Citations)

GB426868A Cited
US4159891A Cited
US4153005A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-09-22 1990-03-24 1990-09-23 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-09-22 1994-03-24 1994-09-23 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-09-22 1998-03-24 1998-09-23 $7700.00 Window Closed / Lapsed

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