US5228501A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Physical vapor deposition clamping mechanism and heater/cooler
Assignee: Applied Materials Inc
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Filing: 1992-09-02
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Granted: 1993-07-20
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Expires: 2012-09-02
Abstract
Abstract A clamping ring and temperature regulated platen for clamping a wafer to the platen and regulating the temperature of the wafer. The force of the clamping ring against the wafer is produced by the weight of the clamping ring. A roof shields all but a few contact regions of the interface between the wafer and clamp from receiving depositing particles so that a coating formed on the wafer makes continuous contact with the clamping ring in only a few narrow regions that act as conductive bridges when the depositing layer is conductive.
Inventors
- 👤 Avi Tepman
- 👤 Howard Grunes
- 👤 Dana Andrews
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 11:49
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7606; C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32458; H01J37/32477; H01J37/32623; H01J37/32733; H01J37/32743; H01J37/32798; H01J37/32853; H01J37/32862; H10P72/04; H10P72/0402; H10P72/0418; H10P72/0421; H10P72/7611
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
175 words
Apparatus for processing a wafer, said apparatus comprising: a platen; a clamping ring having a weight W; a wafer support assembly for supporting the wafer between the platen and the clamping ring; means for producing an axial motion of the platen relative to the clamping ring sufficient to vary a spacing between the wafer and the clamping ring between (i) a first value at which said wafer can be loaded onto the wafer supporting assembly, and (ii) a second value at which the platen presses against a bottom side of the wafer and at which a top side of the wafer presses into the clamping ring with sufficient force to completely support the clamping ring on the wafer; said clamping ring pressing the wafer toward the platen with a force produced only by the weight of the clamping ring, whereby the force between the wafer and the platen is determined only by the weights of the wafer and the clamping ring and is not subjected to forces such as spring forces that can vary considerably.
Claim 2
Dependent Claim
175 words
Apparatus for processing a wafer, said apparatus comprising: a platen; a clamping ring having a weight W; a wafer support assembly for supporting the wafer between the platen and the clamping ring; means for producing an axial motion of the platen relative to the clamping ring sufficient to vary a spacing between the wafer and the clamping ring between (i) a first value at which said wafer can be loaded onto the wafer supporting assembly, and (ii) a second value at which the platen presses against a bottom side of the wafer and at which a top side of the wafer presses into the clamping ring with sufficient force to completely support the clamping ring on the wafer; said clamping ring pressing the wafer toward the platen with a force produced only by the weight of the clamping ring, whereby the force between the wafer and the platen is determined only by the weights of the wafer and the clamping ring and is not subjected to forces such as spring forces that can vary considerably.
Claim 3
Dependent Claim
55 words
Apparatus as in claim 1 wherein said means for producing an axial motion of the platen relative to the clamping ring comprises: means for elevating said platen through a range that lifts the platen into the wafer and carries it into sufficient contact with the clamping ring to support the clamping ring on the wafer.
Claim 4
Dependent Claim
66 words
Apparatus as in claim 1 further comprising: means for producing an axial motion of the wafer support assembly, whereby a wafer transfer device having a single degree of freedom in its motion, can position the wafer at a location at which the wafer support assembly can then lift the wafer off of this wafer transfer device, thereby enabling the use of an inexpensive wafer transfer device.
Claim 5
Dependent Claim
25 words
Apparatus as in claim 1 wherein said wafer support assembly comprises a set of wafer support fingers each having a surface for supporting the wafer.
Claim 6
Dependent Claim
77 words
Apparatus as in claim 5 wherein said wafer support fingers encircle a central space through which said platen can be elevated, said fingers each having a surface for supporting a portion of the wafer adjacent to an edge of the wafer such that said wafer is supported on these fingers, whereby a more stable support is provided for the wafer than if these fingers were located to contact the wafer away from the edge of the wafer.
Claim 7
Dependent Claim
46 words
Apparatus as in claim 1 wherein said clamping ring comprises: a roof that does not contact the wafer and that shields at least a portion of an edge of an interface between the clamping ring and the wafer from deposition during any wafer deposition process steps.
Claim 8
Dependent Claim
40 words
Apparatus as in claim 6 wherein said clamping ring has at least one contact region that is in contact with the wafer when the clamping ring presses against the wafer and that is not protected by said roof from deposition.
Claim 9
Dependent Claim
16 words
Apparatus as in claim 7 wherein said contact regions have a width between 1/8" and 3/4".
Claim 10
Dependent Claim
27 words
Apparatus as in claim 6 wherein said roof is spaced at least 0.015" away from a plane that is coplanar with said at least one contact region.
Claim 11
Dependent Claim
131 words
Apparatus for processing a wafer, said apparatus comprising: a platen; a clamping ring having a weight W; a wafer support assembly for supporting the wafer between the platen and the clamping ring; said clamping ring pressing the wafer toward the platen with a force produced only by the weight of the clamping ring, whereby the force between the wafer and the platen is determined only by the weight of the wafer and the clamping ring and is not subjected to forces such as spring forces that can vary considerably; wherein said wafer support has at least one sloping sidewall and wherein said clamp has at least one sloping sidewall adapted to make contact with a sloping sidewall of said wafer support to align the clamping ring with the wafer support assembly.
Claim 12
Dependent Claim
131 words
Apparatus for processing a wafer, said apparatus comprising: a platen; a clamping ring having a weight W; a wafer support assembly for supporting the wafer between the platen and the clamping ring; said clamping ring pressing the wafer toward the platen with a force produced only by the weight of the clamping ring, whereby the force between the wafer and the platen is determined only by the weight of the wafer and the clamping ring and is not subjected to forces such as spring forces that can vary considerably; wherein said wafer support has at least one sloping sidewall and wherein said clamp has at least one sloping sidewall adapted to make contact with a sloping sidewall of said wafer support to align the clamping ring with the wafer support assembly.
Claim 13
Dependent Claim
63 words
Apparatus as in claim 10 wherein said wafer support assembly comprises a plurality of wafer support fingers each having a surface for supporting the wafer and wherein said clamping ring has a shape that defines at least one groove into which a tip of a wafer support finger can fit to provide stable alignment of the clamping ring with the wafer support assembly.
Claim 14
Dependent Claim
120 words
Apparatus for processing a wafer, said apparatus comprising: a platen; a clamping ring having a weight W; said clamping ring pressing the wafer toward the platen with a force produced only by the weight of the clamping ring, whereby the force between the wafer and the platen is determined only by the weights of the wafer and the clamping ring and is not subjected to forces such as spring forces that can vary considerably; and an alignment ring having an inner surface that slopes outward and has a ring diameter slightly larger than a wafer size for which it is designed, whereby this ring helps align the wafer with the clamping ring and prevents deposition laterally past this alignment ring.
Claim 15
Dependent Claim
120 words
Apparatus for processing a wafer, said apparatus comprising: a platen; a clamping ring having a weight W; said clamping ring pressing the wafer toward the platen with a force produced only by the weight of the clamping ring, whereby the force between the wafer and the platen is determined only by the weights of the wafer and the clamping ring and is not subjected to forces such as spring forces that can vary considerably; and an alignment ring having an inner surface that slopes outward and has a ring diameter slightly larger than a wafer size for which it is designed, whereby this ring helps align the wafer with the clamping ring and prevents deposition laterally past this alignment ring.
Claim 16
Dependent Claim
32 words
Apparatus as in claim 1 further comprising: at least one heater element that is thermally connected to the wafer platen; and a cooling element that is thermally connected to the wafer platen.
Claim 17
Dependent Claim
122 words
Apparatus as in claim 13 wherein said platen further comprises a gas inlet connected to at least one radial groove in a top surface of said platen, said radial groove extending radially to a circular groove in this top surface near an outer perimeter of said top surface; and a lip adjacent to an outer edge of said circular groove, said lip having an edge raised slightly above said circular groove so that, when a wafer is placed onto the top surface of the platen and said clamping ring presses the wafer toward said platen, a gas seal is produced between this edge and the wafer, thereby enabling an increased pressure of gas to form between the wafer and platen top surface.
Claim 18
Dependent Claim
75 words
Apparatus as in claim 14 wherein the top surface of the platen is domed slightly, wherein a wafer is clamped between the clamping ring and the platen and wherein a gas is present in a cavity between the wafer and the platen at a gas pressure sufficient to bow the wafer away from the platen top surface such that a substantially constant gap is produced between the wafer and the domed portion of the platen.
Claim 19
Dependent Claim
15 words
Apparatus as in claim 12 wherein the gas pressure is in the range 0.5-8 Torr.
Claim 20
Dependent Claim
40 words
Apparatus as in claim 15 wherein a central portion of the domed top surface of the platen is flat, whereby the platen has a local flat surface on which a wafer rests as it is raised into the clamping ring.
Claim 21
Dependent Claim
117 words
Apparatus for processing a wafer, said apparatus comprising: a reactor wall enclosing a processing chamber; within this processing chamber a platen, having an annular lip at an outer perimeter of this platen and having a domed surface encircled by this annular lip, wherein said annular lip is recessed relative to a top portion of this domed surface such that said wafer can be supported on the domed surface without making contact with the annular lip and wherein said domed surface has a flat central region, whereby a wafer can be supported on this flat surface without rocking; and means for pressing an outer perimeter of said wafer against said annular lip to produce a substantially gas-tight seal.
Claim 22
Dependent Claim
117 words
Apparatus for processing a wafer, said apparatus comprising: a reactor wall enclosing a processing chamber; within this processing chamber a platen, having an annular lip at an outer perimeter of this platen and having a domed surface encircled by this annular lip, wherein said annular lip is recessed relative to a top portion of this domed surface such that said wafer can be supported on the domed surface without making contact with the annular lip and wherein said domed surface has a flat central region, whereby a wafer can be supported on this flat surface without rocking; and means for pressing an outer perimeter of said wafer against said annular lip to produce a substantially gas-tight seal.
Claim 23
Dependent Claim
70 words
Apparatus as in claim 18, further comprising: a wafer in contact with the top surface of the platen and forming a substantially gas-tight seal with said lip; and a gas in a cavity enclosed by the platen and wafer, said gas having a pressure such that the wafer is bowed away from the domed surface such that a substantially constant gap is formed between the wafer and the domed surface.
Claim 24
Dependent Claim
38 words
A platen for supporting a semiconductor substrate during vacuum processing, said platen having a top surface that is domed and has a flattened central region such that said substrate can be supported on this flattened region without rocking.
Claim 25
Dependent Claim
38 words
A platen for supporting a semiconductor substrate during vacuum processing, said platen having a top surface that is domed and has a flattened central region such that said substrate can be supported on this flattened region without rocking.
Claim 26
Dependent Claim
22 words
A platen according to claim 20 wherein said platen has a peripheral annular lip that is recessed relative to the domed surface.
Claim 27
Dependent Claim
21 words
A platen according to claim 20 wherein said platen has a means of heating and a means of cooling connected thereto.
Claim 28
Dependent Claim
121 words
A platen according to claim 22 wherein said platen has a gas inlet connected to at least one radial groove in a top surface of said platen, said radial groove extending radially to a circular groove in this top surface near an outer perimeter of said top surface, and a lip adjacent to an outer edge of said circular groove, said lip having an edge raised slightly above said circular groove so that, when a wafer is placed onto the top surface of the platen and is pressed against the platen, a gas seal is produced between the edge and the wafer, thereby allowing an increased pressure of gas to form between said wafer and said top surface of the platen.
Claim 29
Dependent Claim
17 words
A platen according to claim 20 wherein said platen is connected to a means of axial movement.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-07-19 | 1997-01-18 | 1997-07-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-07-19 | 2001-01-18 | 2001-07-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-07-19 | 2005-01-18 | 2005-07-20 | $7700.00 | Window Closed / Lapsed |