US5292554A
Expired / Lapsed
US
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Deposition apparatus using a perforated pumping plate
Assignee: Applied Materials Inc
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Filing: 1992-11-12
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Granted: 1994-03-08
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Expires: 2012-11-12
Abstract
Abstract In a deposition apparatus, a barrier is used to separate a process gas section from the section of the chamber below the substrate on which a metal layer is deposited. The substrate is supported on a support. During an unloading stage, purge gas is introduced into the chamber below the substrate. To prevent the substrate from being moved on the support by the purge gas, the barrier is perforated so that the process gas can flow through the barrier and into a vacuum manifold system.
Inventors
- 👤 Ashok K. Sinha
- 👤 Steve G. Ghanayem
- 👤 Virendra V. S. Rana
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 15:15
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45519; C23C16/4401; C23C16/45587; C23C16/45591; C23C16/54; H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7606
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
187 words
An apparatus for depositing a material on a substrate, the substrate comprising a deposition surface and a second surface on which substantially less material deposition is to occur, the apparatus comprising: (a) a support for the substrate; (b) a process gas section in contact with the deposition surface of the substrate when the substrate is on the support; (c) a first inlet for introducing a process gas comprising at least a component of the material into the process gas section during a deposition stage; (d) a barrier means separating the process gas section from the second surface of the substrate for inhibiting process gas from contacting the second surface; (e) a second inlet for introducing a purge gas into a flow path comprising a section proximate to the second surface of the substrate when the substrate is positioned on the support during a purge stage; and (f) a plurality of perforations in the barrier, the cross sectional area of the perforations being sufficiently large to allow the purge gas to flow through the barrier into the process gas section without moving the substrate relative to the support.
Claim 2
Independent Claim
187 words
An apparatus for depositing a material on a substrate, the substrate comprising a deposition surface and a second surface on which substantially less material deposition is to occur, the apparatus comprising: (a) a support for the substrate; (b) a process gas section in contact with the deposition surface of the substrate when the substrate is on the support; (c) a first inlet for introducing a process gas comprising at least a component of the material into the process gas section during a deposition stage; (d) a barrier means separating the process gas section from the second surface of the substrate for inhibiting process gas from contacting the second surface; (e) a second inlet for introducing a purge gas into a flow path comprising a section proximate to the second surface of the substrate when the substrate is positioned on the support during a purge stage; and (f) a plurality of perforations in the barrier, the cross sectional area of the perforations being sufficiently large to allow the purge gas to flow through the barrier into the process gas section without moving the substrate relative to the support.
Claim 3
Dependent Claim
35 words
The apparatus of claim 1 wherein the cross sectional area of the perforations is sufficiently small that substantially no deposition of the material on the second surface of the substrate occurs during the deposition stage.
Claim 4
Dependent Claim
30 words
The apparatus of claim 1 comprising a shield for contacting the edge of the substrate and inhibiting reactive gas from contacting the backside of the substrate during the deposition stage.
Claim 5
Dependent Claim
30 words
The apparatus of claim 3 wherein the support is moveable to provide a gap between the shield and the substrate for purge gas to flow therethrough during the purge stage.
Claim 6
Dependent Claim
17 words
The apparatus of claim 1 wherein the substrate is a silicon wafer and the material comprises tungsten.
Claim 7
Dependent Claim
20 words
The apparatus of claim 1 wherein the substrate is a glass plate and the material comprises an oxide of silicon.
Claim 8
Dependent Claim
15 words
The apparatus of claim 1 wherein the perforations are not symmetrically located in the barrier.
Claim 9
Independent Claim
227 words
An apparatus for depositing a layer of a material on a substrate, the substrate comprising a deposition surface, an opposed backside on which substantially no material deposition is to occur, and an edge therebetween, the apparatus comprising: (a) a moveable support for the substrate, (b) a process gas section in contact with the deposition surface of the substrate when the substrate is on the support, (c) a gas purge section in fluid contact with the backside of the substrate when the substrate is on the support, (d) a process gas inlet for process gas into the process gas section during a material deposition stage, (e) an outlet for removing spent process gas and process gas byproducts from the process gas input section, (f) a separation plate separating the process gas section from the gas purge section, and (g) a purge gas inlet for inputting a purge gas into the gas purge section during a purge stage, wherein the separation plate comprises a plurality of perforations providing sufficient cross sectional area to allow the purge gas to flow from the gas purge section and through the separation plate into the process gas section without moving the substrate relative to the support, the cross sectional area of the perforations being sufficiently small that substantially no deposition of material on the backside of the substrate occurs during the deposition stage.
Claim 10
Independent Claim
227 words
An apparatus for depositing a layer of a material on a substrate, the substrate comprising a deposition surface, an opposed backside on which substantially no material deposition is to occur, and an edge therebetween, the apparatus comprising: (a) a moveable support for the substrate, (b) a process gas section in contact with the deposition surface of the substrate when the substrate is on the support, (c) a gas purge section in fluid contact with the backside of the substrate when the substrate is on the support, (d) a process gas inlet for process gas into the process gas section during a material deposition stage, (e) an outlet for removing spent process gas and process gas byproducts from the process gas input section, (f) a separation plate separating the process gas section from the gas purge section, and (g) a purge gas inlet for inputting a purge gas into the gas purge section during a purge stage, wherein the separation plate comprises a plurality of perforations providing sufficient cross sectional area to allow the purge gas to flow from the gas purge section and through the separation plate into the process gas section without moving the substrate relative to the support, the cross sectional area of the perforations being sufficiently small that substantially no deposition of material on the backside of the substrate occurs during the deposition stage.
Claim 11
Dependent Claim
18 words
The apparatus of claim 8 wherein the material is a metal and the substrate is a silicon wafer.
Claim 12
Dependent Claim
10 words
The apparatus of claim 9 wherein the metal comprises tungsten.
Claim 13
Dependent Claim
23 words
The apparatus of claim 8 wherein the substrate is glass for a flat panel display and the material comprises an oxide of silicon.
Claim 14
Independent Claim
188 words
A method for depositing material on a substrate, the substrate comprising a deposition surface and a second surface on which substantially less material deposition is to occur, the method comprising the steps of: (a) loading the substrate onto a support contained in a deposition chamber, the chamber having a process gas section in contact with the deposition surface of the substrate (b) after the loading step, depositing the material on the substrate by introducing a process gas into the process gas section, the deposition chamber having a perforated plate separating the process gas section from the second surface of the substrate for inhibiting process gas from contacting the second surface, the perforations being sufficiently small that substantially no deposition of material on the backside of the substrate occurs; and (c) after the deposition step, introducing a purge gas into a flow path that comprises a section proximate to the second surface of the substrate, the cross sectional area of the perforations being sufficiently large to allow the purge gas to flow through the separation plate into the process gas section without moving the substrate relative to the support.
Claim 15
Independent Claim
188 words
A method for depositing material on a substrate, the substrate comprising a deposition surface and a second surface on which substantially less material deposition is to occur, the method comprising the steps of: (a) loading the substrate onto a support contained in a deposition chamber, the chamber having a process gas section in contact with the deposition surface of the substrate (b) after the loading step, depositing the material on the substrate by introducing a process gas into the process gas section, the deposition chamber having a perforated plate separating the process gas section from the second surface of the substrate for inhibiting process gas from contacting the second surface, the perforations being sufficiently small that substantially no deposition of material on the backside of the substrate occurs; and (c) after the deposition step, introducing a purge gas into a flow path that comprises a section proximate to the second surface of the substrate, the cross sectional area of the perforations being sufficiently large to allow the purge gas to flow through the separation plate into the process gas section without moving the substrate relative to the support.
Claim 16
Dependent Claim
18 words
The method of claim 12 wherein the substrate is a silicon wafer and the material comprises a metal.
Claim 17
Dependent Claim
10 words
The method of claim 13 wherein the metal is tungsten.
Claim 18
Dependent Claim
16 words
The method of claim 12 wherein the substrate is glass and the material comprises silicon oxide.
Claim 19
Dependent Claim
49 words
The method of claim 12 wherein before the step of depositing the material on the substrate, the step of contacting the edge of the substrate with a shield for inhibiting process gas from contacting the backside of the substrate during the step of depositing the material on the substrate.
Claim 20
Dependent Claim
32 words
The method of claim 16 wherein before introducing the purge gas, separating the shield from the substrate to provide a gap for passage of purge gas into the process gas input section.
Claim 21
Dependent Claim
34 words
The method of claim 17 wherein the combined cross-sectional area of the flow path of the gap and the perforations is from about 0.1 to about 3 per 100 sccm of purge gas flow.
Claim 22
Dependent Claim
34 words
The method of claim 18 wherein the combined cross-sectional area of the flow path of the gap and the perforations is from about 0.5 to about 1.5 per 100 sccm of purge gas flow.
Claim 23
Dependent Claim
54 words
The method of claim 15 wherein the process gas is introduced at a rate from about 100 to about 6,000 sccm, the purge gas is introduced at a rate of from about 450 to about 800 sccm, and the total surface area of the perforations is from about 0.1 to about 1 square inch.
Claim 24
Dependent Claim
21 words
The method of claim 19 wherein the purge gas is introduced at a rate from about 450 to about 800 sccm.
Claim 25
Dependent Claim
26 words
The method of claim 20 wherein the process gas is introduced into the process gas section at a rate from about 500 to about 1,000 sccm.
Claim 26
Dependent Claim
22 words
The method of claim 20 wherein the cross sectional area of the perforations is from about 0.2 to about 0.4 square inch.
Claim 27
Dependent Claim
55 words
The method of claim 12 wherein the process gas is introduced at a rate of from about 500 to about 1,000 sccm, the purge gas is introduced at a rate of from about 450 to about 800 sccm, and the total surface area of the perforations is from about 0.2 to about 0.4 square inch.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-03-07 | 1997-09-06 | 1998-03-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-03-07 | 2001-09-06 | 2002-03-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-03-07 | 2005-09-06 | 2006-03-08 | $7700.00 | Window Closed / Lapsed |