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US5447799A Expired / Lapsed US ⏱️ 0.0 years remaining

Polymerization process

Assignee: Advanced Surface Technology Inc
•
Filing: 1994-10-18
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Granted: 1995-09-05
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Expires: 2014-10-18
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Abstract

Abstract A process of depositing polymeric materials on the surface of a substrate.

Inventors

  • 👤 Ih-Houng Loh
  • 👤 David M. Hudson

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 01:03
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/62; B01; B01J; B01J19/00; B01J19/08; B01J19/087; B01J19/088; B01J19/18; B01J3/00; B01J3/006; C; C09; C09D; C09D4/00; C23; C23C; C23C16/00; C23C16/02; C23C16/0227; C23C16/0245; C23C16/22; C23C16/30; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32018; B01J2219/00; B01J2219/00049; B01J2219/00051; B01J2219/00074; B01J2219/00105; B01J2219/00108; B01J2219/0015; B01J2219/00155; B01J2219/00164; B01J2219/18; B01J2219/185

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 90 words
A process for depositing polymeric materials on the surface of a substrate, which process comprises the steps of: providing a first polymeric material on the surface of said substrate by glow discharge polymerization of a mixture of silane and a vaporizable hydrocarbon monomer or a vaporizable organosilane monomer which contains at least one carbon atom and no oxygen atom; and providing a second polymeric material on said first polymeric material by vapor deposition polymerization of an aromatic hydrocarbon, a substituted aromatic hydrocarbon, an unsaturated hydrocarbon, or a substituted unsaturated hydrocarbon.
Claim 2
Dependent Claim 90 words
A process for depositing polymeric materials on the surface of a substrate, which process comprises the steps of: providing a first polymeric material on the surface of said substrate by glow discharge polymerization of a mixture of silane and a vaporizable hydrocarbon monomer or a vaporizable organosilane monomer which contains at least one carbon atom and no oxygen atom; and providing a second polymeric material on said first polymeric material by vapor deposition polymerization of an aromatic hydrocarbon, a substituted aromatic hydrocarbon, an unsaturated hydrocarbon, or a substituted unsaturated hydrocarbon.
Claim 3
Dependent Claim 57 words
The process of claim 1, further comprising the step of glow discharge activating the surface of said substrate, before providing said first polymeric material thereon, with oxygen or an oxygen-rich molecule selected from the group consisting of CO 2 , NO 2 , CO, NO 2 , N 2 O, NO, SO 3 and SO 2 .
Claim 4
Dependent Claim 31 words
The process of claim 1, in the first step the crosslinking density of said first polymeric material is controlled by varying input power or monomer pressure of said glow discharge polymerization.
Claim 5
Dependent Claim 32 words
The process of claim 1, wherein said first polymeric material is provided by glow discharge polymerization of a vaporizable organosilane monomer which contains at least one carbon atom and no oxygen atom.
Claim 6
Dependent Claim 19 words
The process of claim 4, wherein said aromatic hydrocarbon or substituted aromatic hydrocarbon is p-xylylene or a substituted p-xylylene.
Claim 7
Dependent Claim 17 words
The process of claim 4, wherein said unsaturated hydrocarbon or substituted unsaturated hydrocarbon is an acetylenic hydrocarbon.
Claim 8
Dependent Claim 38 words
The process of claim 1, wherein said first polymeric material is provided by glow discharge polymerization of a mixture of silane and a vaporizable hydrocarbon monomer selected from the group consisting of methane, ethane, propane, ethylene and propylene.
Claim 9
Dependent Claim 19 words
The process of claim 1, wherein said aromatic hydrocarbon or substituted aromatic hydrocarbon is p-xylylene or a substituted p-xylylene.
Claim 10
Dependent Claim 17 words
The process of claim 1, wherein said unsaturated hydrocarbon or substituted unsaturated hydrocarbon is an acetylenic hydrocarbon.
Claim 11
Dependent Claim 89 words
A substrate coated with a composition, said composition comprising a first polymeric material on said substrate and a second polymeric material on said first polymeric material, said first polymeric material being produced by glow discharge polymerization of a mixture of silane and a vaporizable hydrocarbon monomer or a vaporizable organosilane monomer which contains at least one carbon atom and no oxygen atom, and said second polymeric material being produced by vapor deposition polymerization of an aromatic hydrocarbon, a substituted aromatic hydrocarbon, an unsaturated hydrocarbon, or a substituted unsaturated hydrocarbon.
Claim 12
Dependent Claim 89 words
A substrate coated with a composition, said composition comprising a first polymeric material on said substrate and a second polymeric material on said first polymeric material, said first polymeric material being produced by glow discharge polymerization of a mixture of silane and a vaporizable hydrocarbon monomer or a vaporizable organosilane monomer which contains at least one carbon atom and no oxygen atom, and said second polymeric material being produced by vapor deposition polymerization of an aromatic hydrocarbon, a substituted aromatic hydrocarbon, an unsaturated hydrocarbon, or a substituted unsaturated hydrocarbon.
Claim 13
Dependent Claim 32 words
The substrate of claim 10, wherein said first polymeric material is provided by glow discharge polymerization of a vaporizable organosilane monomer which contains at least one carbon atom and no oxygen atom.
Claim 14
Dependent Claim 19 words
The substrate of claim 11, wherein said aromatic hydrocarbon or substituted aromatic hydrocarbon is p-xylylene or a substituted p-xylylene.
Claim 15
Dependent Claim 17 words
The substrate of claim 11, wherein said unsaturated hydrocarbon or substituted unsaturated hydrocarbon is an acetylenic hydrocarbon.
Claim 16
Dependent Claim 38 words
The substrate of claim 10, wherein said first polymeric material is provided by glow discharge polymerization of a mixture of silane and a vaporizable hydrocarbon monomer selected from the group consisting of methane, ethane, propane, ethylene and propylene.

References Cited (Backward Citations)

US4072769A Cited
US4366184A Cited
US4810524A Cited
US4692347A Cited
US4618507A Cited
US4673589A Cited
US4683143A Cited
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