US3667424A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multi-station vacuum apparatus
Assignee: SRI International Inc
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Filing: 1969-04-14
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Granted: 1972-06-06
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Expires: 1989-04-14
Abstract
Abstract A high-current vacuum system suitable for on-vacuum deposition of multiple layers onto a substrate. A vacuum chamber encloses a stationary substrate holder disposed above a plurality of vapor sources utilizing diverse heating elements. The vapor sources are arranged on a rotatable support for sequential movement to a deposition station for the vaporization and deposit of low and high temperature metals and dielectrics. Manipulators for making and breaking electrical contact to the station and for rotation of the support are positioned without the chamber and are externally operated to change sources without breaking vacuum. A liquid nitrogen cooled cold cam is situated between the station and the substrate support to funnel the vapor stream toward the stationary substrate target.
Inventors
- 👤 William L Cornelius
- 👤 John G Martner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 09:32
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C23C14/24
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
163 words
A multi-source vacuum deposition system comprising in combination: a vacuum chamber containing: a rotatable support; a plurality of vapor sources mounted on said support, at least one of said sources comprises a reservoir receptacle for containing a source of vaporizable material; a first electrical heating element for heating the receptacle and an electrical wick heating element extending into the receptacle for vaporizing the body of vaporizable material; electrical connecting studs connected to said heating elements and extending through said rotatable support and terminating in a first electrical contact; a second electrical contact, a shaft connected to said second contact, a portion of said shaft extending without said chamber and a portion extending within said chamber adjacent said connecting studs and means connected to said shaft without said chamber for making and breaking connection between said contacts; substrate holder means disposed above said sources; and means extending without said chamber for rotating said support to dispose each of said sources below said holder means.
Claim 2
Dependent Claim
163 words
A multi-source vacuum deposition system comprising in combination: a vacuum chamber containing: a rotatable support; a plurality of vapor sources mounted on said support, at least one of said sources comprises a reservoir receptacle for containing a source of vaporizable material; a first electrical heating element for heating the receptacle and an electrical wick heating element extending into the receptacle for vaporizing the body of vaporizable material; electrical connecting studs connected to said heating elements and extending through said rotatable support and terminating in a first electrical contact; a second electrical contact, a shaft connected to said second contact, a portion of said shaft extending without said chamber and a portion extending within said chamber adjacent said connecting studs and means connected to said shaft without said chamber for making and breaking connection between said contacts; substrate holder means disposed above said sources; and means extending without said chamber for rotating said support to dispose each of said sources below said holder means.
Claim 3
Dependent Claim
52 words
A system according to claim 1 further including vapor funneling means disposed between said holder and said support comprising a tubular member disposed axially below said holder and means to cool the walls of said tubular member comprising a coolant coil surrounding said tubular member for receiving a flow of liquid coolant.
Claim 4
Dependent Claim
22 words
A system according to claim 1 further including heat exchange means associated with said holder for controlling the temperature of the substrate.
Claim 5
Dependent Claim
24 words
A system according to claim 3 wherein said heat exchange means comprises an electrical heating element surrounding at least a portion of said holder.
Claim 6
Dependent Claim
40 words
A system according to claim 4 further including shutter means disposed between said holder and said funnel means, means without said chamber for positioning said shutter and linkage means within said chamber associating said shutter means with said positioning means.
Claim 7
Dependent Claim
113 words
A vacuum deposition system comprising: a base housing; a removable cover for said housing defining a vacuum chamber, said chamber containing: stationary substrate holder means; a rotatable support below said holder; a plurality of reservoirs for receiving vaporizable material mounted on said support; a first electrical heating element in contact with the exterior of at least one reservoir; a second wick electrical heating element extending into the interior of at least one reservoir; a first fixed electrical contact connected to each said heating element; a second translatable contact disposed adjacent said first contact; and means extending through said housing into said chamber for moving said second contact into engagement with said first contact.
Claim 8
Dependent Claim
113 words
A vacuum deposition system comprising: a base housing; a removable cover for said housing defining a vacuum chamber, said chamber containing: stationary substrate holder means; a rotatable support below said holder; a plurality of reservoirs for receiving vaporizable material mounted on said support; a first electrical heating element in contact with the exterior of at least one reservoir; a second wick electrical heating element extending into the interior of at least one reservoir; a first fixed electrical contact connected to each said heating element; a second translatable contact disposed adjacent said first contact; and means extending through said housing into said chamber for moving said second contact into engagement with said first contact.
Claim 9
Dependent Claim
24 words
A system according to claim 6 wherein said moving means comprises an axial rod supporting said second contact and bearing means engaging said rod.
References Cited (Backward Citations)
FR929892A
Cited
US2665226A
Cited
US3336898A
Cited
US3312190A
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US3362915A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-06-06 | 1975-12-06 | 1976-06-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-06-06 | 1979-12-06 | 1980-06-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-06-06 | 1983-12-06 | 1984-06-06 | $7700.00 | Window Closed / Lapsed |