US3336898A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vapor deposition apparatus
Assignee: Unisys Corp
•
Filing: 1962-11-16
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Granted: 1967-08-22
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Expires: 1982-11-16
Abstract
No abstract record available.
Inventors
- 👤 John G Simmons
- 👤 Jr Douglas E Moister
- 👤 Jr David A Starr
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 02:13
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; C23C14/22
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
174 words
VACUUM VAPOR DEPOSITION APPARATUS COMPRISING, (A) A VACUUM CHAMBER, (B) DEMOUNTABLE MEANS SUPPORTING A PLURALITY OF WORK PIECES WITHIN SAID VACUUM CHAMBER, (C) DEMOUNTABLE, MOVABLE MEANS SUPPORTING A PLURALITY OF PATTERN FORMING MASKS ADJACENT AND NORMAL TO SAID WORK PIECE SUPPORTING MEANS, (D) DEMOUNTABLE, MOVABLE MEANS WITHIN SAID CHAMBER SUPPORTING A PLURALITY OF MATERIALS FOR VAPOR DEPOSITION ON SAID WORK PIECES, (E) MEANS FOR CAUSING SAID MATERIAL TO VAPORIZE, (F) MEANS FOR DIRECTING VAPORS FROM SAID VAPORIZED MATERIAL THROUGH SAID PATTERN FORMING MEANS ONTO SAID WORK PIECES, (G) MEANS OPERABLY INTERCONNECTING SAID PATTERN FORMING MEANS AND SAID MATERIAL SUPPORTING MEANS AND RESPONSIVE TO APPLIED TORQUE TO CAUSE SAID LAST MEANS TO MOVE RELATIVE TO SAID WORK PIECES, AND, (H) MEANS EXTERNAL TO SAID VACUUM CHAMBER FOR APPLYING ROTATIVE TORQUE TO SAID INTERCONNECTING MEANS EFFECTIVE IN ONE DIRECTION OF ROTATIVE TORQUE TO EFFECT SAID APPLIED TORQUE AND IN THE OTHER DIRECTION OF ROTATIVE TORQUE TO EFFECT MOVEMENT OF SAID MASK SUPPORTING MEANS WITH RESPECT TO BOTH THE WORK SUPPORT MEANS AND THE MATERIAL SUPPORT MEANS.
Claim 2
Dependent Claim
174 words
VACUUM VAPOR DEPOSITION APPARATUS COMPRISING, (A) A VACUUM CHAMBER, (B) DEMOUNTABLE MEANS SUPPORTING A PLURALITY OF WORK PIECES WITHIN SAID VACUUM CHAMBER, (C) DEMOUNTABLE, MOVABLE MEANS SUPPORTING A PLURALITY OF PATTERN FORMING MASKS ADJACENT AND NORMAL TO SAID WORK PIECE SUPPORTING MEANS, (D) DEMOUNTABLE, MOVABLE MEANS WITHIN SAID CHAMBER SUPPORTING A PLURALITY OF MATERIALS FOR VAPOR DEPOSITION ON SAID WORK PIECES, (E) MEANS FOR CAUSING SAID MATERIAL TO VAPORIZE, (F) MEANS FOR DIRECTING VAPORS FROM SAID VAPORIZED MATERIAL THROUGH SAID PATTERN FORMING MEANS ONTO SAID WORK PIECES, (G) MEANS OPERABLY INTERCONNECTING SAID PATTERN FORMING MEANS AND SAID MATERIAL SUPPORTING MEANS AND RESPONSIVE TO APPLIED TORQUE TO CAUSE SAID LAST MEANS TO MOVE RELATIVE TO SAID WORK PIECES, AND, (H) MEANS EXTERNAL TO SAID VACUUM CHAMBER FOR APPLYING ROTATIVE TORQUE TO SAID INTERCONNECTING MEANS EFFECTIVE IN ONE DIRECTION OF ROTATIVE TORQUE TO EFFECT SAID APPLIED TORQUE AND IN THE OTHER DIRECTION OF ROTATIVE TORQUE TO EFFECT MOVEMENT OF SAID MASK SUPPORTING MEANS WITH RESPECT TO BOTH THE WORK SUPPORT MEANS AND THE MATERIAL SUPPORT MEANS.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1970-08-21 | 1971-02-20 | 1971-08-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1974-08-21 | 1975-02-20 | 1975-08-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1978-08-21 | 1979-02-20 | 1979-08-22 | $7700.00 | Window Closed / Lapsed |