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US3336898A Expired / Lapsed US ⏱️ 0.0 years remaining

Vapor deposition apparatus

Assignee: Unisys Corp
•
Filing: 1962-11-16
•
Granted: 1967-08-22
•
Expires: 1982-11-16
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Abstract

No abstract record available.

Inventors

  • 👤 John G Simmons
  • 👤 Jr Douglas E Moister
  • 👤 Jr David A Starr

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-24 02:13
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; C23C14/22

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 174 words
VACUUM VAPOR DEPOSITION APPARATUS COMPRISING, (A) A VACUUM CHAMBER, (B) DEMOUNTABLE MEANS SUPPORTING A PLURALITY OF WORK PIECES WITHIN SAID VACUUM CHAMBER, (C) DEMOUNTABLE, MOVABLE MEANS SUPPORTING A PLURALITY OF PATTERN FORMING MASKS ADJACENT AND NORMAL TO SAID WORK PIECE SUPPORTING MEANS, (D) DEMOUNTABLE, MOVABLE MEANS WITHIN SAID CHAMBER SUPPORTING A PLURALITY OF MATERIALS FOR VAPOR DEPOSITION ON SAID WORK PIECES, (E) MEANS FOR CAUSING SAID MATERIAL TO VAPORIZE, (F) MEANS FOR DIRECTING VAPORS FROM SAID VAPORIZED MATERIAL THROUGH SAID PATTERN FORMING MEANS ONTO SAID WORK PIECES, (G) MEANS OPERABLY INTERCONNECTING SAID PATTERN FORMING MEANS AND SAID MATERIAL SUPPORTING MEANS AND RESPONSIVE TO APPLIED TORQUE TO CAUSE SAID LAST MEANS TO MOVE RELATIVE TO SAID WORK PIECES, AND, (H) MEANS EXTERNAL TO SAID VACUUM CHAMBER FOR APPLYING ROTATIVE TORQUE TO SAID INTERCONNECTING MEANS EFFECTIVE IN ONE DIRECTION OF ROTATIVE TORQUE TO EFFECT SAID APPLIED TORQUE AND IN THE OTHER DIRECTION OF ROTATIVE TORQUE TO EFFECT MOVEMENT OF SAID MASK SUPPORTING MEANS WITH RESPECT TO BOTH THE WORK SUPPORT MEANS AND THE MATERIAL SUPPORT MEANS.
Claim 2
Dependent Claim 174 words
VACUUM VAPOR DEPOSITION APPARATUS COMPRISING, (A) A VACUUM CHAMBER, (B) DEMOUNTABLE MEANS SUPPORTING A PLURALITY OF WORK PIECES WITHIN SAID VACUUM CHAMBER, (C) DEMOUNTABLE, MOVABLE MEANS SUPPORTING A PLURALITY OF PATTERN FORMING MASKS ADJACENT AND NORMAL TO SAID WORK PIECE SUPPORTING MEANS, (D) DEMOUNTABLE, MOVABLE MEANS WITHIN SAID CHAMBER SUPPORTING A PLURALITY OF MATERIALS FOR VAPOR DEPOSITION ON SAID WORK PIECES, (E) MEANS FOR CAUSING SAID MATERIAL TO VAPORIZE, (F) MEANS FOR DIRECTING VAPORS FROM SAID VAPORIZED MATERIAL THROUGH SAID PATTERN FORMING MEANS ONTO SAID WORK PIECES, (G) MEANS OPERABLY INTERCONNECTING SAID PATTERN FORMING MEANS AND SAID MATERIAL SUPPORTING MEANS AND RESPONSIVE TO APPLIED TORQUE TO CAUSE SAID LAST MEANS TO MOVE RELATIVE TO SAID WORK PIECES, AND, (H) MEANS EXTERNAL TO SAID VACUUM CHAMBER FOR APPLYING ROTATIVE TORQUE TO SAID INTERCONNECTING MEANS EFFECTIVE IN ONE DIRECTION OF ROTATIVE TORQUE TO EFFECT SAID APPLIED TORQUE AND IN THE OTHER DIRECTION OF ROTATIVE TORQUE TO EFFECT MOVEMENT OF SAID MASK SUPPORTING MEANS WITH RESPECT TO BOTH THE WORK SUPPORT MEANS AND THE MATERIAL SUPPORT MEANS.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1970-08-21 1971-02-20 1971-08-22 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1974-08-21 1975-02-20 1975-08-22 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1978-08-21 1979-02-20 1979-08-22 $7700.00 Window Closed / Lapsed

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