Reduced bird's beak field oxidation process using nitrogen implanted into active region

Abstract

Abstract A method of forming a self-aligned field oxide isolation structure without using silicon nitride. The method comprises forming a dielectric on an upper surface of a semiconductor substrate. The upper surface of the semiconductor substrate comprises an active region and an isolation region laterally adjacent to each other. A photoresist layer is patterned on top of the implant dielectric to expose regions of the implant dielectric over the active region. Nitrogen is then implanted into the active region through the implant dielectric. Nitrogen is preferably introduced into semiconductor substrate in an approximate atomic concentration of 0.5 to 2.0 percent. After the nitrogen has been implanted into a semiconductor substrate, the photoresist layer is stripped and the implant dielectric is removed. The wafer is then thermally oxidized such that a field oxide having a first thickness is grown over the isolation region and a thin oxide having a second thickness is grown over the active region. The presence of the nitrogen within the semiconductor substrate retards the oxidation rate of the silicon in the active region such that the thickness of the thin oxide is substantially less than the thickness of the thermal oxide. In a presently preferred embodiment, the field oxide has a thickness of 2,000 to 8,000 angstroms while the thin oxide has a thickness of less than 300 angstroms.

Inventors

• 👤 Mark I. Gardner
• 👤 Fred N. Hause
• 👤 Kuang-Yeh Chang

Bibliographic Details