Process for the fabrication of a vertical contact

Claim 2

A process for providing a vertical contact from a conducting or semiconducting foundation layer to a first layer of conducting or semiconducting material vertically separated from said foundation layer by a dielectric layer comprising the steps of: providing an exposed surface portion of said foundation layer adjacent aligned vertical edges of said dielectric layer and first layer, and providing a conformal layer of a contact forming material on said aligned vertical edges of said dielectric and first layers, and said exposed surface portion of said foundation layer, said conformal layer being physically isolated from the top surface of said first layer.

Claim 3

A process as claimed in claim 1, wherein said contact forming material is provided by conformal deposition over said first layer, on said aligned vertical edges and on said exposed surface portion of said foundation layer followed by removal of said contact forming material from said top surface of said first layer.

Claim 4

A process as claimed in claim 2, wherein said contact forming material is a silicide forming metal.

Claim 5

A process as claimed in claim 3, wherein a silicide of said metal is formed on said vertical edge of said first layer prior to said removal of said contact forming material from said top surface of said first layer.

Claim 6

A process as claimed in claim 4, wherein said foundation layer comprises silicon and said first layer comprises silicon.

Claim 7

A process as claimed in claim 5, wherein a silicide of said metal is formed on said exposed surface portion of said foundation layer prior to said removal of said contact forming material from said top surface of said first layer.

Claim 8

A process as claimed in claim 6, wherein said metal is not converted to a silicide over said top surface of said first layer.

Claim 9

A process as claimed in claim 1, wherein an epitaxial layer of silicon is formed on said exposed surface portion of said foundation layer prior to said provision of said conformal layer.

Claim 10

A process as claimed in claim 8, wherein said contact forming material is a silicide forming metal.

Claim 11

A process as claimed in claim 9, wherein said silicide forming metal is selected from the group consisting of the noble and refractory metals.

Claim 12

A process as claimed in claim 1, wherein a lateral spacer is formed on said vertical edge of said dielectric layer prior to said provision of said conformal layer.

Claim 13

A vertical contact fabrication process for providing an electrical contact between a foundation layer of a conductive or semiconductive material and an overlying layer of a conductive or semiconductive material wherein a dielectric layer separates said overlying layer from said foundation layer comprising: forming an aperture through said overlying layer and said dielectric layer to expose a first surface portion of said foundation layer, a vertical edge of said overlying layer and a vertical edge of said dielectric layer, selectively depositing a contact forming material on said first surface portion of said foundation layer and said vertical edge of said overlying layer whereby said contact forming material bridges said dielectric vertical edge and wherein said contact forming material does not substantially extend vertically above the top of said vertical edge of said overlying layer.

Claim 14

A vertical contact fabrication process for providing an electrical contact between a foundation layer of a conductive or semiconductive material and an overlying layer of a conductive or semiconductive material wherein a dielectric layer separates said overlying layer from said foundation layer comprising: forming an aperture through said overlying layer and said dielectric layer to expose a first surface portion of said foundation layer, a vertical edge of said overlying layer and a vertical edge of said dielectric layer, selectively depositing a contact forming material on said first surface portion of said foundation layer and said vertical edge of said overlying layer whereby said contact forming material bridges said dielectric vertical edge and wherein said contact forming material does not substantially extend vertically above the top of said vertical edge of said overlying layer.

Claim 15

A process as claimed in claim 12, wherein said contact forming material is a silicide forming metal.

Claim 16

A process as claimed in claim 12, wherein a lateral spacer is provided adjacent a portion of said vertical edge of said dielectric layer prior to said selective deposition of said contact forming material and wherein said contact forming material bridges said lateral spacer.

Claim 17

A process as claimed in claim 14, wherein said lateral spacer is formed by providing a layer of conformal silicon dioxide over said overlying layer, said vertical edge of said overlying layer, said vertical edge of said dielectric layer and said first surface portion of said foundation layer; and anisotropically removing said silicon dioxide by a reactive ion etch which preferentially etches said silicon dioxide vertically whereby said silicon dioxide is cleared from horizontal surfaces and remains on at least a portion of said vertical edge of said dielectric layer and wherein said etch is continued until at least a portion of said vertical edge of said overlying layer is cleared of said silicon dioxide.

Claim 18

A vertical contact fabrication process comprising: providing a silicon layer having a horizontal surface; providing a dielectric layer over said silicon layer; providing an overlying layer of silicon having a top surface; forming an aperture through said overlying layer and said dielectric layer thereby exposing a first region of said horizontal surface and aligned vertical edges of said overlying layer and said dielectric layer; providing a layer of contact forming material directly on said vertical edge of said overlying layer and directly contacting said first region of said horizontal surface, without providing contact to said top surface of said overlying layer.

Claim 19

A vertical contact fabrication process comprising: providing a silicon layer having a horizontal surface; providing a dielectric layer over said silicon layer; providing an overlying layer of silicon having a top surface; forming an aperture through said overlying layer and said dielectric layer thereby exposing a first region of said horizontal surface and aligned vertical edges of said overlying layer and said dielectric layer; providing a layer of contact forming material directly on said vertical edge of said overlying layer and directly contacting said first region of said horizontal surface, without providing contact to said top surface of said overlying layer.

Claim 20

A process as claimed in claim 16, wherein said layer of contact forming material is conformally deposited over said top surface, directly on said vertical edge of said overlying layer and over said first region of said horizontal surface; and wherein said contact forming material is removed from said top surface by an anisotropic removal step having its highest removal rate in the vertical direction which does not completely remove said contact forming material from said vertical edge of said overlying layer and does not completely remove said contact forming material from said first region of said horizontal surface.

Claim 21

A process as claimed in claim 17, wherein said contact forming material is removed by an anisotropic reactive ion etch.

Claim 22

A process as claimed in claim 17, wherein said contact forming material is removed by ion milling.

Claim 23

A process for the production of semiconductor products including the steps of: selecting a semiconductor substrate having a foundation of a conductive or semiconductive material; providing a first layer of a dielectric material directly on said foundation; providing a second layer of a conductive or semiconductive material over said first layer, said second layer having a top surface; removing a portion of said first layer over a first region of said foundation to expose a first vertical edge of said first layer and said first region of said foundation; removing a portion of said second layer over said first region of said foundation to expose a second vertical edge of said second layer; providing a conformal layer of a dielectric material directly on said second vertical edge and over said top surface; vertically etching said conformal layer for a time sufficient to substantially remove said conformal layer from said top surface and retain said conformal layer over a substantial portion of said second vertical edge; selectively removing a first portion and retaining a second portion of said retained conformal layer to define an exposed vertical contact region on said second vertical edge; providing a layer of contact forming material directly on said exposed vertical contact region of said second vertical edge and on said exposed first region of said foundation to provide an electrical contact connecting said vertical contact region to said exposed first region, said electrical contact bridging said first layer and not bridging said second portion of said retained conformal layer.

Claim 24

A process for the production of semiconductor products including the steps of: selecting a semiconductor substrate having a foundation of a conductive or semiconductive material; providing a first layer of a dielectric material directly on said foundation; providing a second layer of a conductive or semiconductive material over said first layer, said second layer having a top surface; removing a portion of said first layer over a first region of said foundation to expose a first vertical edge of said first layer and said first region of said foundation; removing a portion of said second layer over said first region of said foundation to expose a second vertical edge of said second layer; providing a conformal layer of a dielectric material directly on said second vertical edge and over said top surface; vertically etching said conformal layer for a time sufficient to substantially remove said conformal layer from said top surface and retain said conformal layer over a substantial portion of said second vertical edge; selectively removing a first portion and retaining a second portion of said retained conformal layer to define an exposed vertical contact region on said second vertical edge; providing a layer of contact forming material directly on said exposed vertical contact region of said second vertical edge and on said exposed first region of said foundation to provide an electrical contact connecting said vertical contact region to said exposed first region, said electrical contact bridging said first layer and not bridging said second portion of said retained conformal layer.

Claim 25

A process as claimed in claim 20, wherein: said layer of contact forming material is a silicide forming metal; said foundation and second layer comprise silicon; said contact forming material is provided by conformal deposition over said second layer, said exposed first vertical edge, said exposed vertical contact region, said exposed first region of said foundation and said second portion of said retained conformal layer; said contact forming material is converted to a silicide at said exposed vertical contact region and said exposed first region of said foundation whereby said silicide bridges said first layer and does not bridge said second portion of said retained conformal layer.

Claim 26

A process for forming a vertical contact in an MOS process for connecting a first silicon device region to an overlying polycrystalline silicon layer isolated from said device region by a dielectric comprising the steps of: providing an aperture through said polycrystalline silicon layer and said dielectric to expose said device region, said aperture exposing a first vertical edge of said polycrystalline silicon layer and an aligned second vertical edge of said dielectric layer, providing a layer of silicide forming metal on said first vertical edge and said device region and reacting said silicide forming metal with said first vertical edge and said device region to form a silicide vertical contact bridging said second vertical edge.

Claim 27

A process for forming a vertical contact in an MOS process for connecting a first silicon device region to an overlying polycrystalline silicon layer isolated from said device region by a dielectric comprising the steps of: providing an aperture through said polycrystalline silicon layer and said dielectric to expose said device region, said aperture exposing a first vertical edge of said polycrystalline silicon layer and an aligned second vertical edge of said dielectric layer, providing a layer of silicide forming metal on said first vertical edge and said device region and reacting said silicide forming metal with said first vertical edge and said device region to form a silicide vertical contact bridging said second vertical edge.

Claim 28

A process as claimed in claim 22, further comprising: providing said layer of silicide forming metal by conformal deposition over said polycrystalline silicon layer.

Claim 29

A process as claimed in claim 22, further comprising: removing said silicide forming metal from an area where no silicide is formed.

Claim 30

A process as claimed in claim 22, further comprising: forming a dielectric spacer prior to providing said silicide forming metal.

Claim 31

A process as claimed in claim 25, further comprising forming said dielectric spacer by: conformally depositing a layer of silicon dioxide on said first and second aligned vertical edges and additional exposed surfaces; partially removing said silicon dioxide by an anisotropic vertically preferential reactive ion etch whereby said silicon dioxide is removed from a horizontal portion of said device region and remains on said first and second aligned vertical edges; providing a mask layer covering a dielectric spacer portion of said silicon dioxide; and removing exposed portions of said silicon dioxide, thereby leaving a dielectric spacer.