US5879808A
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Parylene polymer layers
Assignee: Specialty Coating Systems Inc
•
Filing: 1997-01-31
•
Granted: 1999-03-09
•
Expires: 2017-01-31
Abstract
Abstract Multi-level structures including a first layer with a parylene polymer layer deposited thereon. The parylene polymer layer has the structure: <IMAGE> m is an integer having a value of 0, 1, 2, 3 or 4, and z is greater than 1. G is a halogen, an alkyl group, a cyclo hydrocarbon, an alkylene group or an alkylyne group having the general formula CnHyXw. X is a halogen, and n is an integer greater than zero. The sum of y and w is at most equal to a 2n+1. The parylene polymer layer can have a zinc impurity level of about 66 parts per billion or less. The parylene polymer layers are formed by a process in which monomers are formed outside of a deposition zone of a vacuum chamber. The monomers may be prepared by a process in which a parylene dimer is vaporized and subsequently pyrolized. The process may further include the step of passing the vapor through a post-pyrolysis zone prior to depositing the monomer on the substrate.
Inventors
- 👤 John Wary
- 👤 William F. Beach
- 👤 Roger A. Olson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 21:14
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/60; B05D1/62; B05D3/00; B05D3/14; B05D3/141; B05D3/145; C; C08; C08G; C08G61/00; C08G61/02; C08G61/025; H; H10; H10W; H10W20/00; H10W20/40; H10W20/45; H10W20/48; H10W20/495; C08G2261/00; C08G2261/30; C08G2261/34; C08G2261/342; C08G2261/3424; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31652; Y10T428/31663; Y10T428/31678
Claims Analysis
Total Claims: 58
Claim 1
Independent Claim
132 words
A multi-level structure, comprising: a first layer having a surface; and a parylene polymer layer disposed along the surface of the first layer, the parylene polymer layer being formed from a material having a structure: ##STR11## wherein m is an integer having a value of 0, 1, 2, 3 or 4, z is greater than 1, G is a halogen, an alkyl group, a cyclo hydrocarbon, an alkylene group or an alkylyne group having the general formula C n H y X w , wherein X is a halogen, n is an integer greater than zero and a sum of y and w is at most equal to a sum of 2n and 1, and wherein the parylene polymer layer has a zinc impurity level of at most 66 parts per billion.
Claim 2
Dependent Claim
132 words
A multi-level structure, comprising: a first layer having a surface; and a parylene polymer layer disposed along the surface of the first layer, the parylene polymer layer being formed from a material having a structure: ##STR11## wherein m is an integer having a value of 0, 1, 2, 3 or 4, z is greater than 1, G is a halogen, an alkyl group, a cyclo hydrocarbon, an alkylene group or an alkylyne group having the general formula C n H y X w , wherein X is a halogen, n is an integer greater than zero and a sum of y and w is at most equal to a sum of 2n and 1, and wherein the parylene polymer layer has a zinc impurity level of at most 66 parts per billion.
Claim 3
Dependent Claim
43 words
The multi-level structure according to claim 1, further comprising a second layer having a surface, wherein the parylene polymer layer is disposed along the surface of the second layer such that the parylene polymer layer is disposed between the first and second layers.
Claim 4
Dependent Claim
16 words
The multi-level structure according to claim 2, wherein the first layer is an electrically conductive material.
Claim 5
Dependent Claim
18 words
The multi-level structure according to claim 3, wherein the second layer is formed from an electrically conductive material.
Claim 6
Dependent Claim
20 words
The multi-level structure according to claim 1, wherein the parylene polymer layer has a dielectric constant of at most 2.6.
Claim 7
Dependent Claim
22 words
The multi-level structure according to claim 1, wherein the parylene polymer layer has a zinc impurity level of 66 parts per billion.
Claim 8
Independent Claim
140 words
A method making a multi-level structure, comprising the steps of: depositing a monomer on a surface of a first layer; and polymerizing the monomer to form a parylene polymer film on the surface of the first layer, the parylene polymer having a structure: ##STR12## wherein m is an integer having a value of 0, 1, 2, 3 or 4, z is greater than 1, G is a halogen, an alkyl group, a cyclo hydrocarbon, an alkylene group or an alkylyne group having the general formula C n H y X w , wherein X is a halogen, n is an integer greater than zero and a sum of y and w is at most equal to a sum of 2n and 1, and wherein the parylene polymer layer has a zinc impurity level of at most 66 parts per billion.
Claim 9
Independent Claim
140 words
A method making a multi-level structure, comprising the steps of: depositing a monomer on a surface of a first layer; and polymerizing the monomer to form a parylene polymer film on the surface of the first layer, the parylene polymer having a structure: ##STR12## wherein m is an integer having a value of 0, 1, 2, 3 or 4, z is greater than 1, G is a halogen, an alkyl group, a cyclo hydrocarbon, an alkylene group or an alkylyne group having the general formula C n H y X w , wherein X is a halogen, n is an integer greater than zero and a sum of y and w is at most equal to a sum of 2n and 1, and wherein the parylene polymer layer has a zinc impurity level of at most 66 parts per billion.
Claim 10
Dependent Claim
24 words
The method according to claim 7, further comprising the steps of: vaporizing a parylene dimer; and pyrolizing the parylene dimer to form the monomer.
Claim 11
Dependent Claim
19 words
The method according to claim 8, wherein the depositing step occurs in a deposition zone of a vacuum chamber.
Claim 12
Dependent Claim
19 words
The method according to claim 9, wherein the pyrolizing step occurs outside the deposition zone of the vacuum chamber.
Claim 13
Dependent Claim
22 words
The method according to claim 10, further comprising the step of feeding the monomer into the deposition zone of the vacuum chamber.
Claim 14
Dependent Claim
30 words
The method according to claim 10, wherein the polymerizing step includes polymerizing the monomer to form a parylene polymer film having a zinc impurity level of 66 parts per billion.
Claim 15
Dependent Claim
160 words
A multi-level structure, comprising: a first layer having a surface; and a parylene polymer layer disposed along the surface of the first layer, the parylene polymer layer being formed from a material having a structure: ##STR13## wherein m is an integer having a value of 0, 1, 2, 3 or 4, z is greater than 1, G is a halogen, an alkyl croup, a cyclo hydrocarbon, an alkylene group or an alkylyne group having the general formula C n H y X w , wherein X is a halogen, n is an integer greater than zero, and a sum of y and w is at most equal to a sum of 2n and 1, and wherein the parylene polymer layer has a zinc impurity level of at most 66 parts per billion and wherein the parylene polymer layer is formed by a process including the steps of: vaporizing a parylene dimer; and pyrolizing the parylene dimer to form a monomer.
Claim 16
Dependent Claim
160 words
A multi-level structure, comprising: a first layer having a surface; and a parylene polymer layer disposed along the surface of the first layer, the parylene polymer layer being formed from a material having a structure: ##STR13## wherein m is an integer having a value of 0, 1, 2, 3 or 4, z is greater than 1, G is a halogen, an alkyl croup, a cyclo hydrocarbon, an alkylene group or an alkylyne group having the general formula C n H y X w , wherein X is a halogen, n is an integer greater than zero, and a sum of y and w is at most equal to a sum of 2n and 1, and wherein the parylene polymer layer has a zinc impurity level of at most 66 parts per billion and wherein the parylene polymer layer is formed by a process including the steps of: vaporizing a parylene dimer; and pyrolizing the parylene dimer to form a monomer.
Claim 17
Dependent Claim
25 words
The multi-level structure according to claim 13, wherein the process further comprises the step of depositing the monomer on a surface of a first layer.
Claim 18
Dependent Claim
20 words
The multi-level structure according to claim 14, wherein the depositing step occurs within a deposition zone of a vacuum chamber.
Claim 19
Dependent Claim
20 words
The multi-level structure according to claim 15, wherein the pyrolizing step occurs outside the deposition zone of the vacuum chamber.
Claim 20
Dependent Claim
31 words
The multi-level structure according to claim 16, wherein the process further includes the step of polymerizing the monomer on the surface of the first layer to form the parylene polymer layer.
Claim 21
Dependent Claim
25 words
The multi-level structure according to claim 17, wherein the process includes the step of feeding the monomer into a deposition zone of a vacuum chamber.
Claim 22
Dependent Claim
21 words
The multi-level structure according to claim 18, wherein the multi-level structure has a zinc impurity level of 66 parts per billion.
Claim 23
Dependent Claim
22 words
The multi-level structure according to claim 13, wherein the parylene polymer layer has a zinc impurity level of 66 parts per billion.
Claim 24
Dependent Claim
20 words
The multi-level structure according to claim 20, wherein the parylene polymer layer has a dielectric constant of at most 2.6.
Claim 25
Dependent Claim
20 words
The multi-level structure according to claim 13, wherein the parylene polymer layer has a dielectric constant of at most 2.6.
Claim 26
Dependent Claim
24 words
The method according to claim 7, further comprising the steps of: vaporizing parylene dimer; and cleaving the parylene dimer by use of a plasma.
Claim 27
Dependent Claim
19 words
The method according to claim 23, wherein the depositing step occurs in a deposition zone of a vacuum chamber.
Claim 28
Dependent Claim
19 words
The method according to claim 24, wherein the pyrolizing step occurs outside the deposition zone of the vacuum chamber.
Claim 29
Dependent Claim
22 words
The method according to claim 25, further comprising the step of feeding the monomer into the deposition zone of the vacuum chamber.
Claim 30
Dependent Claim
30 words
The method according to claim 26, wherein the polymerizing step includes polymerizing the monomer to form a parylene polymer film having a zinc impurity level of 66 parts per billion.
Claim 31
Dependent Claim
158 words
A multi-level structure, comprising: a first layer having a surface; and a parylene polymer layer disposed along the surface of the first layer, the parylene polymer layer being formed from a material having a structure: ##STR14## wherein m is an integer having a value 0, 1, 2, 3 or 4, z is greater than 1, G is a halogen, an alkyl group, a cyclo hydrocarbon, an alkylene group or an alkylyne group having the general formula C n H y X w , wherein X is a halogen, n is an integer greater than zero, and a sum of y and w is at most equal to a sum of 2n and 1, and wherein the parylene polymer layer has a zinc impurity level of at most 66 parts per billion and wherein the parylene polymer layer is formed by a process including the steps of: vaporizing a parylene dimer; and exposing the parylene dimer to a plasma.
Claim 32
Dependent Claim
158 words
A multi-level structure, comprising: a first layer having a surface; and a parylene polymer layer disposed along the surface of the first layer, the parylene polymer layer being formed from a material having a structure: ##STR14## wherein m is an integer having a value 0, 1, 2, 3 or 4, z is greater than 1, G is a halogen, an alkyl group, a cyclo hydrocarbon, an alkylene group or an alkylyne group having the general formula C n H y X w , wherein X is a halogen, n is an integer greater than zero, and a sum of y and w is at most equal to a sum of 2n and 1, and wherein the parylene polymer layer has a zinc impurity level of at most 66 parts per billion and wherein the parylene polymer layer is formed by a process including the steps of: vaporizing a parylene dimer; and exposing the parylene dimer to a plasma.
Claim 33
Dependent Claim
20 words
The method according to claim 28 wherein the step of exposing the parylene dimer to a plasma forms a monomer.
Claim 34
Dependent Claim
25 words
The multi-level structure according to claim 28, wherein the process further comprises the step of depositing the monomer on a surface of a first layer.
Claim 35
Dependent Claim
20 words
The multi-level structure according to claim 30, wherein the depositing step occurs within a deposition zone of a vacuum chamber.
Claim 36
Dependent Claim
31 words
The multi-level structure according to claim 31, wherein the process further includes the step of polymerizing the monomer on the surface of the first layer to form the parylene polymer layer.
Claim 37
Dependent Claim
25 words
The multi-level structure according to claim 32, wherein the process includes the step of feeding the monomer into a deposition zone of a vacuum chamber.
Claim 38
Dependent Claim
21 words
The multi-level structure according to claim 33, wherein the multi-level structure has a zinc impurity level of 66 parts per billion.
Claim 39
Dependent Claim
22 words
The multi-level structure according to claim 28, wherein the parylene polymer layer has a zinc impurity level of 66 parts per billion.
Claim 40
Dependent Claim
20 words
The multi-level structure according to claim 35, wherein the parylene polymer layer has a dielectric constant of at most 2.6.
Claim 41
Dependent Claim
20 words
The multi-level structure according to claim 34, wherein the parylene polymer layer has a dielectric constant of at most 2.6.
Claim 42
Dependent Claim
20 words
The multi-level structure according to claim 28, wherein the parylene polymer layer has a dielectric constant of at most 2.6.
Claim 43
Dependent Claim
25 words
The multi-level structure according to claim 29, wherein the process further comprises the step of depositing the monomer on a surface of a first layer.
Claim 44
Dependent Claim
20 words
The multi-level structure according to claim 39, wherein the depositing step occurs within a deposition zone of a vacuum chamber.
Claim 45
Dependent Claim
20 words
The multi-level structure according to claim 40, wherein the pyrolizing step occurs outside the deposition zone of the vacuum chamber.
Claim 46
Dependent Claim
31 words
The multi-level structure according to claim 41, wherein the process further includes the step of polymerizing the monomer on the surface of the first layer to form the parylene polymer layer.
Claim 47
Dependent Claim
25 words
The multi-level structure according to claim 42, wherein the process included the step of feeding the monomer into a deposition zone of a vacuum chamber.
Claim 48
Dependent Claim
21 words
The multi-level structure according to claim 43, wherein the multi-level structure has a zinc impurity level of 66 parts per billion.
Claim 49
Dependent Claim
20 words
The multi-level structure according to claim 44, wherein the parylene polymer layer has a dielectric constant of at most 2.6.
Claim 50
Dependent Claim
24 words
The method according to claim 7, further comprising the step of: treating the parylene polymer film to increase adhesion of the parylene polymer film.
Claim 51
Dependent Claim
13 words
The method according to claim 46, wherein the treating step includes plasma treating.
Claim 52
Dependent Claim
12 words
The method according to claim 46, wherein the treating includes corona treating.
Claim 53
Dependent Claim
24 words
The method according to claim 13, further comprising the step of: treating the parylene polymer film to increase adhesion of the parylene polymer film.
Claim 54
Dependent Claim
13 words
The method according to claim 49, wherein the treating step includes plasma treating.
Claim 55
Dependent Claim
12 words
The method according to claim 49, wherein the treating includes corona treating.
Claim 56
Dependent Claim
24 words
The method according to claim 25, further comprising the step of: treating the parylene polymer film to increase adhesion of the parylene polymer film.
Claim 57
Dependent Claim
13 words
The method according to claim 52, wherein the treating step includes plasma treating.
Claim 58
Dependent Claim
12 words
The method according to claim 53, wherein the treating includes corona treating.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-08 | 2002-09-07 | 2003-03-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-08 | 2006-09-07 | 2007-03-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-08 | 2010-09-07 | 2011-03-09 | $7700.00 | Window Closed / Lapsed |