US4957602A
Expired / Lapsed
US
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Method of modifying the dielectric properties of an organic polymer film
Assignee: United States Department of the Army
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Filing: 1989-06-12
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Granted: 1990-09-18
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Expires: 2009-06-12
Abstract
Abstract The dielectric properties of an organic polymer film are modified by ion lantation.
Inventors
- 👤 Michael Binder
- 👤 Robert J. Mammone
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 03:38
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/48; B; B29; B29C; B29C59/00; B29C59/16; B29C35/00; B29C35/02; B29C35/08; B29C35/0866; B29C2035/0872; B29K; B29K2086/00; B29K2995/00; B29K2995/0003; B29K2995/0006
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
29 words
Method of modifying the dielectric properties of a vapor deposited thin film of a poly-p-xylylene comprising irradiating the vapor deposited thin film of a poly-p-xylylene with doses of ions.
Claim 2
Dependent Claim
29 words
Method of modifying the dielectric properties of a vapor deposited thin film of a poly-p-xylylene comprising irradiating the vapor deposited thin film of a poly-p-xylylene with doses of ions.
Claim 3
Dependent Claim
10 words
Method according to claim 1 wherein the Poly-p-Xylylene is polymonochloroparaxylylene.
Claim 4
Dependent Claim
21 words
Method according to claim 2 wherein the film of polymonochloroparaxylylene is irradiated with an ion flux of 10 16 Cl ions/cm.
References Cited (Backward Citations)
US4291244A
Cited
US4452827A
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US4394426A
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US4554208A
Cited
US4618505A
Cited
US4743493A
Cited
US4820580A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-09-17 | 1994-03-19 | 1994-09-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-17 | 1998-03-19 | 1998-09-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-09-17 | 2002-03-19 | 2002-09-18 | $7700.00 | Window Closed / Lapsed |