Patent US5728626A successfully refreshed from Google Patents.
US5728626A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Spin-on conductor process for integrated circuits
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1995-10-23
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Granted: 1998-03-17
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Expires: 2015-10-23
Abstract
Abstract A method of planarizing a non-planar substrate, such as filling vias and contact holes, spreads a suspension of a conducting material suspended in a liquid on a substrate. The suspension includes an organometallic material, preferably with particles of a polymerized tin or indium alkoxide. The material is spread by spinning the substrate after applying the suspension. The carrier liquid and organic groups are removed by baking and curing at elevated temperatures, thereby depositing the conductive material on the substrate in a layer which is more planar than the substrate and which has regions of greater and lesser thickness. A relatively brief etch step removes conductive material from regions of lesser thickness, leaving material filling vias or contact holes.
Inventors
- 👤 Derryl D. J. Allman
- 👤 Steven S. Lee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:53
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/40; H10P14/46; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/056; H10W20/062
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
193 words
A method of planarizing a non-planar substrate comprising the steps of: hydrolyzing an organic precursor comprising a conductive material in a liquid to form a polymer containing the conductive material and organic material, the polymer being contained in the liquid; repeatedly spreading the polymer suspended in the liquid on at least one surface of the substrate to form a plurality of polymer layers; thereafter simultaneously heating all of the plurality of polymer layers to remove at least a portion of any liquid in the plurality of polymer layers and decreasing the organic material of the polymer contained in the polymer layers, thereby depositing the conductive material on the substrate to form a conductive layer which is more planar than the substrate, wherein said conductive layer has regions of greater and lesser thickness; and removing substantially all of the conductive material from said regions of lesser thickness while leaving significant amounts of conductive material in said regions of greater thickness to planarize the substrate, wherein the conductive material includes a metal selected from the group consisting of indium, tin, aluminum, palladium, osmium, nickel, niobium, copper, platinum, rubidium, tantalum, neodymium, molybdenum, lanthanum, iridium and gold.
Claim 2
Independent Claim
193 words
A method of planarizing a non-planar substrate comprising the steps of: hydrolyzing an organic precursor comprising a conductive material in a liquid to form a polymer containing the conductive material and organic material, the polymer being contained in the liquid; repeatedly spreading the polymer suspended in the liquid on at least one surface of the substrate to form a plurality of polymer layers; thereafter simultaneously heating all of the plurality of polymer layers to remove at least a portion of any liquid in the plurality of polymer layers and decreasing the organic material of the polymer contained in the polymer layers, thereby depositing the conductive material on the substrate to form a conductive layer which is more planar than the substrate, wherein said conductive layer has regions of greater and lesser thickness; and removing substantially all of the conductive material from said regions of lesser thickness while leaving significant amounts of conductive material in said regions of greater thickness to planarize the substrate, wherein the conductive material includes a metal selected from the group consisting of indium, tin, aluminum, palladium, osmium, nickel, niobium, copper, platinum, rubidium, tantalum, neodymium, molybdenum, lanthanum, iridium and gold.
Claim 3
Dependent Claim
37 words
The method of claim 1 wherein the surface is a barrier layer comprising a metal selected from the group consisting of Ti, TiN, TiW, and W to inhibit diffusion of the conductive material through the barrier layer.
Claim 4
Dependent Claim
38 words
The method of claim 1 further comprising, after each of the repeatedly spreading steps, heating the polymer layers to a temperature greater than ambient temperature to remove at least a portion of the liquid and the organic material.
Claim 5
Dependent Claim
90 words
The method of claim 1 wherein said repeatedly spreading step comprises: applying the polymer suspended in the liquid on at least one surface of the substrate to form a first layer; heating the first layer to a temperature of at least about 100° C. to form a first thermally cured layer; applying the polymer suspended in the liquid on the first thermally cured layer to form a second layer; and heating the second layer to a temperature of at least about 100° C. to form a second thermally cured layer.
Claim 6
Dependent Claim
14 words
The method of claim 4 wherein the temperature ranges from 100° to 350° C.
Claim 7
Dependent Claim
21 words
The method of claim 4 wherein the temperature in the simultaneously heating step ranges from about 350° to about 850° C.
Claim 8
Dependent Claim
19 words
The method of claim 1 wherein the liquid is a non-aqueous organic solvent that is free of oxygen atoms.
Claim 9
Dependent Claim
13 words
The method of claim 4 wherein the organic precursor is a metal alkoxide.
Claim 10
Independent Claim
221 words
A method of planarizing a nonplanar substrate comprising the steps of: (a) depositing a first layer of a barrier metal on at least one surface of the substrate, the substrate having a different chemical composition than said first layer; (b) hydrolyzing an organic precursor comprising a conducting material in a liquid to form a polymer containing the conducting material and organic material, the polymer being contained in the liquid; (c) spreading the polymer suspended in the liquid on at least a portion of the first barrier metal layer, the first barrier metal layer inhibiting interaction of the polymer and liquid with the underlying substrate; (d) removing at least a portion of the liquid, thereby depositing the conductive material in a first conductive layer on at least a portion of the first barrier metal layer, wherein the first conductive layer is more planar than said first layer to provide a substantially planar upper surface for the deposition of a second layer and the first conductive layer has a different composition than the barrier metal layer wherein the conducting material includes a metal selected from the group consisting of indium, tin, aluminum, palladium, osmium, nickel, niobium, copper, platinum, rubidium, tantalum, neodymium, molybdenum, lanthanum, iridium and gold; and (e) depositing the second layer on the substantially planar upper surface of the first conductive layer.
Claim 11
Independent Claim
221 words
A method of planarizing a nonplanar substrate comprising the steps of: (a) depositing a first layer of a barrier metal on at least one surface of the substrate, the substrate having a different chemical composition than said first layer; (b) hydrolyzing an organic precursor comprising a conducting material in a liquid to form a polymer containing the conducting material and organic material, the polymer being contained in the liquid; (c) spreading the polymer suspended in the liquid on at least a portion of the first barrier metal layer, the first barrier metal layer inhibiting interaction of the polymer and liquid with the underlying substrate; (d) removing at least a portion of the liquid, thereby depositing the conductive material in a first conductive layer on at least a portion of the first barrier metal layer, wherein the first conductive layer is more planar than said first layer to provide a substantially planar upper surface for the deposition of a second layer and the first conductive layer has a different composition than the barrier metal layer wherein the conducting material includes a metal selected from the group consisting of indium, tin, aluminum, palladium, osmium, nickel, niobium, copper, platinum, rubidium, tantalum, neodymium, molybdenum, lanthanum, iridium and gold; and (e) depositing the second layer on the substantially planar upper surface of the first conductive layer.
Claim 12
Dependent Claim
53 words
The method of claim 9 wherein step (e) comprises depositing a second conductive layer on at least a portion of the first conductive layer and further comprising: (e) depositing an insulating layer on at least a portion of the second conductive layer; and (f) repeating steps (a)-(e) to create a second conductive level.
Claim 13
Dependent Claim
14 words
The method of claim 10 further comprising the step of planarizing the insulating layer.
Claim 14
Dependent Claim
44 words
The method of claim 9 wherein the barrier metal comprises a metal selected from the group consisting of Ti, TiN, TiW, and W to inhibit interaction of the polymer comprising the conducting material and the liquid with a layer located beneath said first layer.
Claim 15
Independent Claim
168 words
A method of planarizing a non-planar substrate comprising the steps of: hydrolyzing an organic precursor comprising a conductive material in a liquid to form a polymer containing the conducting material and organic material, the polymer being contained in the liquid; depositing the polymer-containing liquid over at least one surface of the substrate to form a film wherein the polymer-containing liquid comprises a carrier solvent that is free of oxygen atoms, wherein the surface is a barrier layer comprising a metal selected from the group consisting of Ti, TiN, TiW, and W to inhibit the interaction of the conductive material with the portion of the substrate underlying the barrier layer; and heating the film to remove the liquid and organic material in the organometallic material, thereby depositing the metal in the organometallic material over the substrate in a conductive layer; wherein the heating step is conducted in the presence of a reducing gas to transfer electrons to the carbon in said organic material and thereby volatilize the organic material.
Claim 16
Independent Claim
168 words
A method of planarizing a non-planar substrate comprising the steps of: hydrolyzing an organic precursor comprising a conductive material in a liquid to form a polymer containing the conducting material and organic material, the polymer being contained in the liquid; depositing the polymer-containing liquid over at least one surface of the substrate to form a film wherein the polymer-containing liquid comprises a carrier solvent that is free of oxygen atoms, wherein the surface is a barrier layer comprising a metal selected from the group consisting of Ti, TiN, TiW, and W to inhibit the interaction of the conductive material with the portion of the substrate underlying the barrier layer; and heating the film to remove the liquid and organic material in the organometallic material, thereby depositing the metal in the organometallic material over the substrate in a conductive layer; wherein the heating step is conducted in the presence of a reducing gas to transfer electrons to the carbon in said organic material and thereby volatilize the organic material.
Claim 17
Dependent Claim
25 words
The method of claim 13, wherein the temperature in the heating step is less than the melting point of the metal in the organometallic material.
Claim 18
Dependent Claim
19 words
The method of claim 13, wherein the temperature in the heating step is no more than about 500° C.
Claim 19
Dependent Claim
11 words
The method of claim 13, wherein the reducing gas comprises ammonia.
Claim 20
Independent Claim
204 words
A method of planarizing a non-planar substrate comprising the steps of: forming a barrier layer; hydrolyzing an organic precursor comprising a conductive material in a liquid to form a polymer containing the conducting material and organic material, the polymer being contained in the liquid, wherein the conducting material includes a metal selected from the group consisting of indium, tin, aluminum, palladium, osmium, nickel, niobium, copper, platinum, rubidium, tantalum, neodymium, molybdenum, lanthanum, iridium, and gold; spreading the polymer-containing liquid over the barrier layer to form a film, wherein the barrier layer comprising a metal selected from the group consisting of Ti, TIN., TiW, and W to inhibit the interaction of the conductive material with the substrate; first heating the film to a first temperature to remove a substantial mount of the liquid and form a dried film; and second heating the dried film to a second temperature greater than the first temperature to remove the organic material in the organometallic material, thereby decreasing the bulk resistance of the dried film and forming a conductive metallic film, wherein both of the heating steps are conducted at different times and in the substantial absence of oxygen gas to inhibit oxidation of the metal in the organometallic material.
Claim 21
Independent Claim
204 words
A method of planarizing a non-planar substrate comprising the steps of: forming a barrier layer; hydrolyzing an organic precursor comprising a conductive material in a liquid to form a polymer containing the conducting material and organic material, the polymer being contained in the liquid, wherein the conducting material includes a metal selected from the group consisting of indium, tin, aluminum, palladium, osmium, nickel, niobium, copper, platinum, rubidium, tantalum, neodymium, molybdenum, lanthanum, iridium, and gold; spreading the polymer-containing liquid over the barrier layer to form a film, wherein the barrier layer comprising a metal selected from the group consisting of Ti, TIN., TiW, and W to inhibit the interaction of the conductive material with the substrate; first heating the film to a first temperature to remove a substantial mount of the liquid and form a dried film; and second heating the dried film to a second temperature greater than the first temperature to remove the organic material in the organometallic material, thereby decreasing the bulk resistance of the dried film and forming a conductive metallic film, wherein both of the heating steps are conducted at different times and in the substantial absence of oxygen gas to inhibit oxidation of the metal in the organometallic material.
Claim 22
Dependent Claim
41 words
The method of claim 17, wherein the temperatures in both of the heating steps are less than the melting point of the metal in the organometallic material and the depositing step comprises: hydrolyzing an organic precursor to form the organometallic material.
Claim 23
Dependent Claim
42 words
The method of claim 18 wherein the depositing step comprises: spreading the organometallic material suspended in the liquid on at least one surface of the substrate and wherein after the second heating step the dried film is more planar than the substrate.
Claim 24
Dependent Claim
33 words
The method of claim 17, wherein both of the heating steps are conducted in the presence of a reducing gas to reduce carbon in the organometallic material and thereby volatilize the organic material.
Claim 25
Dependent Claim
23 words
The method of claim 17 wherein the liquid comprises a non-aqueous organic solvent for the organometallic material that is free of oxygen atoms.
Claim 26
Independent Claim
144 words
A method of planarizing a non-planar substrate comprising the steps of: hydrolyzing an organic precursor comprising a conductive material in a liquid to form a polymer containing the conductive material and organic material, the polymer being contained in a liquid; spreading the polymer suspended in the liquid on at least one surface of the substrate, wherein the surface is a barrier layer comprising a metal selected from the group consisting. of Ti, TiN, TiW, and W to inhibit the interaction of the conductive material with the portion of the substrate underlying the barrier layer; and removing at least a portion of the liquid and decreasing the organic material of the polymer, thereby depositing the conductive material on the substrate to form a conductive layer which is more planar than the substrate, wherein the liquid comprises an organic solvent that is free of oxygen atoms.
Claim 27
Independent Claim
144 words
A method of planarizing a non-planar substrate comprising the steps of: hydrolyzing an organic precursor comprising a conductive material in a liquid to form a polymer containing the conductive material and organic material, the polymer being contained in a liquid; spreading the polymer suspended in the liquid on at least one surface of the substrate, wherein the surface is a barrier layer comprising a metal selected from the group consisting. of Ti, TiN, TiW, and W to inhibit the interaction of the conductive material with the portion of the substrate underlying the barrier layer; and removing at least a portion of the liquid and decreasing the organic material of the polymer, thereby depositing the conductive material on the substrate to form a conductive layer which is more planar than the substrate, wherein the liquid comprises an organic solvent that is free of oxygen atoms.
Claim 28
Dependent Claim
45 words
The method of claim 22 wherein said layer has regions of greater and lesser thickness and further comprising the step of removing substantially all of the conductive material from regions of lesser thickness while leaving significant amounts of conductive material in regions of greater thickness.
Claim 29
Independent Claim
139 words
A method of planarizing a non-planar substrate comprising the steps of: hydrolyzing an organic precursor comprising a conductive material in a liquid to form a polymer containing the conductive material and organic material, the polymer being contained in a liquid; spreading the polymer suspended in the liquid on at least one surface of the substrate; and removing at least a portion of the liquid and decreasing the organic material of the polymer, thereby depositing the conductive material on the substrate to form a conductive layer which is more planar than the substrate, wherein the surface is a barrier layer comprising a metal selected from the group consisting of TiN and TiW to inhibit interaction of the conductive material with the portion of the substrate underlying the barrier layer, the barrier layer having a different composition than the conductive layer.
Claim 30
Independent Claim
139 words
A method of planarizing a non-planar substrate comprising the steps of: hydrolyzing an organic precursor comprising a conductive material in a liquid to form a polymer containing the conductive material and organic material, the polymer being contained in a liquid; spreading the polymer suspended in the liquid on at least one surface of the substrate; and removing at least a portion of the liquid and decreasing the organic material of the polymer, thereby depositing the conductive material on the substrate to form a conductive layer which is more planar than the substrate, wherein the surface is a barrier layer comprising a metal selected from the group consisting of TiN and TiW to inhibit interaction of the conductive material with the portion of the substrate underlying the barrier layer, the barrier layer having a different composition than the conductive layer.
Claim 31
Independent Claim
181 words
A method of planarizing a non-planar substrate comprising the steps (a) depositing a first layer of a barrier metal on at least one surface of the substrate, the substrate having different chemical composition than said first layer and the barrier metal being selected from the group consisting of TiN and TiW; (b) hydrolyzing an organic precursor comprising a conducting material in a liquid to form a polymer containing the conducting material and organic material, the polymer being contained in the liquid; (c) spreading the polymer suspended in the liquid on at least a portion of the first barrier metal layer, the first barrier metal layer inhibiting interaction of the polymer and liquid with the underlying substrate; (d) removing the liquid, thereby depositing the conductive material in a first conductive layer on at least a portion of the first barrier metal layer, wherein the first conductive layer is more planar than said first layer to provide a substantially planar upper surface for the deposition of a second layer and the first conductive layer has a different composition than the barrier metal layer.
Claim 32
Independent Claim
181 words
A method of planarizing a non-planar substrate comprising the steps (a) depositing a first layer of a barrier metal on at least one surface of the substrate, the substrate having different chemical composition than said first layer and the barrier metal being selected from the group consisting of TiN and TiW; (b) hydrolyzing an organic precursor comprising a conducting material in a liquid to form a polymer containing the conducting material and organic material, the polymer being contained in the liquid; (c) spreading the polymer suspended in the liquid on at least a portion of the first barrier metal layer, the first barrier metal layer inhibiting interaction of the polymer and liquid with the underlying substrate; (d) removing the liquid, thereby depositing the conductive material in a first conductive layer on at least a portion of the first barrier metal layer, wherein the first conductive layer is more planar than said first layer to provide a substantially planar upper surface for the deposition of a second layer and the first conductive layer has a different composition than the barrier metal layer.
Claim 33
Independent Claim
162 words
A method of planarizing a non-planar substrate comprising the steps of: hydrolyzing an organic precursor comprising a conductive material in a liquid to form a polymer containing the conducting material and organic material, the polymer being contained in a liquid, wherein the conductive material includes a metal selected from the group consisting of indium, tin, aluminum, palladium, osmium, nickel, niobium, copper, platinum, rubidium, tantalum, neodymium, molybdenum, lanthanum, iridium, and gold; spreading the polymer suspended in the liquid on at least one surface of the substrate; and removing at least a portion of the liquid and decreasing the organic material of the polymer, thereby depositing the conductive material on the substrate to form a conductive layer which is more planar than the substrate, wherein the surface is a barrier layer to inhibit interaction of the conductive material with the portion of the substrate underlying the barrier layer, .wherein the barrier layer is selected from the group consisting of Ti, TiN, TiW, and W.
Claim 34
Independent Claim
162 words
A method of planarizing a non-planar substrate comprising the steps of: hydrolyzing an organic precursor comprising a conductive material in a liquid to form a polymer containing the conducting material and organic material, the polymer being contained in a liquid, wherein the conductive material includes a metal selected from the group consisting of indium, tin, aluminum, palladium, osmium, nickel, niobium, copper, platinum, rubidium, tantalum, neodymium, molybdenum, lanthanum, iridium, and gold; spreading the polymer suspended in the liquid on at least one surface of the substrate; and removing at least a portion of the liquid and decreasing the organic material of the polymer, thereby depositing the conductive material on the substrate to form a conductive layer which is more planar than the substrate, wherein the surface is a barrier layer to inhibit interaction of the conductive material with the portion of the substrate underlying the barrier layer, .wherein the barrier layer is selected from the group consisting of Ti, TiN, TiW, and W.
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