US5514822A
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Precursors and processes for making metal oxides
Assignee: Symetrix Corp
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Filing: 1993-10-06
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Granted: 1996-05-07
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Expires: 2013-10-06
Abstract
Abstract A first metal, an alcohol, and a carboxylic acid are reacted to form a metal alkoxycarboxylate which is then reacted with an alkoxide and/or a carboxylate of a second metal to form a precursor. Alternatively, a metal carboxylate and a metal alkoxide are combined and heated to form a precursor. In either alternative, the precursor includes all or most of the metal-oxygen-metal bonds of a desired metal oxide and a carboxylate ligand. The precursor is applied to a substrate, dried and annealed to form the metal oxide, such as BST. The metal-oxygen-metal bonds in the precursor permit the desired metal oxide to be formed from the precursor in one step, providing excellent thin films suitable for integrated circuits. The carboxylate ligand provides stability to the precursor allowing it to be stored for periods common in large scale manufacturing.
Inventors
- 👤 Michael C. Scott
- 👤 Carlos A. Paz de Araujo
- 👤 Larry D. McMillan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:34
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/66; H10P14/668; C; C04; C04B; C04B35/00; C04B35/01; C04B35/46; C04B35/462; C04B35/465; C04B35/468; C04B35/4682; C04B35/622; C04B35/626; C04B35/62605; C04B35/62625; C04B35/6264; C23; C23C; C23C16/00; C23C16/44; C23C16/4412; C23C16/448; C23C16/4486; C23C16/455; C23C16/45561; C23C16/45563; C23C16/4558; C23C16/46; C23C16/48; C23C16/482; C23C16/52; C23C18/00; C23C18/02; C23C18/12; C23C18/1204; C23C18/1208; C23C18/1216; C23C18/125; C23C18/1275; C30; C30B; C30B29/00; C30B29/60; C30B29/68; C30B7/00; H01; H01C; H01C7/00; H01C7/10; H01C7/1013; H10B; H10B12/00; H10B12/30; H10B53/00; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/682; H10D1/684; H10D1/692; H10P14/63; H10P14/6326; H10P14/6342; C04B2235/00; C04B2235/02; C04B2235/30; C04B2235/32; C04B2235/3205; C04B2235/3213; C04B2235/3224; C04B2235/3227; C04B2235/3229; C04B2235/3231; C04B2235/3241; C04B2235/3243; C04B2235/3262; C04B2235/3268; C04B2235/44; C04B2235/441; C04B2235/449; C04B2235/70; C04B2235/72; H10P14/69; H10P14/692; H10P14/6938; H10P14/69398
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
95 words
A liquid precursor for use in making a solid metal oxide, said precursor comprising: a polyoxyalkylated metal portion having a molecular formula including a metal-oxygen-metal structure; and a solvent portion forming an essentially liquid solution with said polyoxyalkylated metal portion, said polyoxyalkylated metal portion being present in an effective amount for yielding a corresponding portion of an electronically competent thin-film metal oxide upon liquid deposition of said precursor followed by thermal treatment at effective metal-oxide forming temperatures, said precursor being essentially free of distillable portions having a boiling point of less than about 115° C.
Claim 2
Dependent Claim
95 words
A liquid precursor for use in making a solid metal oxide, said precursor comprising: a polyoxyalkylated metal portion having a molecular formula including a metal-oxygen-metal structure; and a solvent portion forming an essentially liquid solution with said polyoxyalkylated metal portion, said polyoxyalkylated metal portion being present in an effective amount for yielding a corresponding portion of an electronically competent thin-film metal oxide upon liquid deposition of said precursor followed by thermal treatment at effective metal-oxide forming temperatures, said precursor being essentially free of distillable portions having a boiling point of less than about 115° C.
Claim 3
Dependent Claim
23 words
The precursor as set forth in claim 1, said solvent portion being selected from a solvent group consisting of n-butyl acetate, and 2-methoxyethanol.
Claim 4
Dependent Claim
48 words
The precursor as set forth in claim 1, including metals of said metal-oxygen-metal structure being selected from a metal group consisting of barium, strontium, tantalum, calcium, bismuth, lead, yttrium, scandium, lanthanum, antimony, chromium, thallium, titanium, hafnium, tungsten, niobium, zirconium, manganese, iron, cobalt, nickel, magnesium, zinc, and mixtures thereof.
Claim 5
Dependent Claim
108 words
The precursor as set forth in claim 3, including said molecular formula selected from a formula group consisting of: X x M 1 --O--M 2 A b-a , A a M 1 --O--M 2 X y-x , A a M 1 --O--M 2 A b-x and mixtures thereof, wherein M 1 and M 2 are metals of said metal group, X is a carboxylate ligand; A is an alkoxide ligand, O is oxygen; and the subscripts x, a, (b-a), (b-x), and (y-x) indicate a respective number of units of X and A ligand required to satisfy valence requirements of the corresponding metal M 1 and M 2 .
Claim 6
Dependent Claim
23 words
The precursor as set forth in claim 1, wherein said carboxylate ligands are selected from a carboxylate group consisting of octanoates and neodecanoates.
Claim 7
Dependent Claim
14 words
The precursor as set forth in claim 1, wherein said carboxylate ligands are 2-ethylhexanoates.
Claim 8
Dependent Claim
27 words
The precursor as set forth in claim 1, wherein said electronically competent metal oxide includes a ferroelectric material having a polarization-state switching endurance exceeding 10 9 cycles.
Claim 9
Dependent Claim
43 words
The precursor as set forth in claim 1, wherein said electronically competent metal oxide includes a dielectric material having a dielectric constant of at least about 166 in combination with a leakage current of at most about 10 -8 amps/cm2 at 1-10 V.
Claim 10
Dependent Claim
37 words
A precursor for use in making a solid metal oxide, comprising; a polyoxyalkylated metal portion having a molecular formula including a metal-oxygen-metal structure wherein at least one metal of said structure is bonded to a 2-ethylhexanoate ligand.
Claim 11
Dependent Claim
37 words
A precursor for use in making a solid metal oxide, comprising; a polyoxyalkylated metal portion having a molecular formula including a metal-oxygen-metal structure wherein at least one metal of said structure is bonded to a 2-ethylhexanoate ligand.
Claim 12
Independent Claim
72 words
A method of making a precursor for fabricating a metal oxide, said method comprising the steps of: mixing a metal alkoxycarboxylate-containing liquid with a carboxylic acid in an effective amount for shelf-stabilizing said liquid by substituting carboxylate ligands from said carboxylic acid in place of alkoxide ligands of said metal alkoxycarboxylate-containing liquid, thereby forming a mixture; and heating said mixture to so substitute said carboxylate ligands in place of said alkoxide ligands.
Claim 13
Independent Claim
72 words
A method of making a precursor for fabricating a metal oxide, said method comprising the steps of: mixing a metal alkoxycarboxylate-containing liquid with a carboxylic acid in an effective amount for shelf-stabilizing said liquid by substituting carboxylate ligands from said carboxylic acid in place of alkoxide ligands of said metal alkoxycarboxylate-containing liquid, thereby forming a mixture; and heating said mixture to so substitute said carboxylate ligands in place of said alkoxide ligands.
Claim 14
Dependent Claim
76 words
A precursor produced according to a method comprising the steps of: mixing a metal alkoxycarboxylate-containing liquid with a carboxylic acid in an effective amount for shelf-stabilizing said liquid by substituting carboxylate ligands from said carboxylic acid in place of alkoxide ligands of said metal alkoxycarboxylate-containing liquid, thereby forming a mixture; and heating said mixture to substitute said carboxylate ligands in place of said alkoxide ligands, said precursor having a shelf life exceeding at least two months.
Claim 15
Dependent Claim
76 words
A precursor produced according to a method comprising the steps of: mixing a metal alkoxycarboxylate-containing liquid with a carboxylic acid in an effective amount for shelf-stabilizing said liquid by substituting carboxylate ligands from said carboxylic acid in place of alkoxide ligands of said metal alkoxycarboxylate-containing liquid, thereby forming a mixture; and heating said mixture to substitute said carboxylate ligands in place of said alkoxide ligands, said precursor having a shelf life exceeding at least two months.
Claim 16
Dependent Claim
54 words
The method as set forth in claim 10, including a step of providing said metal alkoxycarboxylate to at least two metals selected from a metal group consisting of barium, strontium, tantalum, calcium, bismuth, lead, yttrium, scandium, lanthanum, antimony, chromium, thallium, titanium, hafnium, tungsten, niobium, zirconium, manganese, iron, cobalt, nickel, magnesium, zinc, and mixtures thereof.
Claim 17
Dependent Claim
27 words
The method as set forth in claim 12, said metals being provided in effective amounts for forming strontium bismuth tantalate upon drying and calcining of said precursor.
Claim 18
Dependent Claim
27 words
The method as set forth in claim 12, said metals being provided in effective amounts for forming barium strontium tantalate upon drying and calcining of said precursor.
Claim 19
Independent Claim
82 words
A method of making a barium strontium titanate precursor, said method comprising the steps of: combining a polyoxyalkylated barium moiety, a polyoxyalkylated strontium moiety, and a polyoxyalkylated titanium moiety to form a liquid solution, each of said respective moieties having a formula in which corresponding barium, strontium, and titanium atoms bond with an oxygen atom in a ligand selected from a ligand group consisting of alkoxides and carboxylates; and heating said liquid solution to a temperature of at least about 115° C.
Claim 20
Independent Claim
82 words
A method of making a barium strontium titanate precursor, said method comprising the steps of: combining a polyoxyalkylated barium moiety, a polyoxyalkylated strontium moiety, and a polyoxyalkylated titanium moiety to form a liquid solution, each of said respective moieties having a formula in which corresponding barium, strontium, and titanium atoms bond with an oxygen atom in a ligand selected from a ligand group consisting of alkoxides and carboxylates; and heating said liquid solution to a temperature of at least about 115° C.
Claim 21
Dependent Claim
40 words
The method as set forth in claim 15, wherein said formula defines a member selected from a moiety group consisting of barium carboxylates, barium alkoxides, barium alkoxycarboxylates, strontium carboxylates, strontium alkoxides, strontium alkoxycarboxylates, titanium carboxylates, titanium alkoxides, and titanium alkoxycarboxylates.
Claim 22
Dependent Claim
49 words
The method as set forth in claim 16, wherein said heating step includes reacting two members of said moiety group to form a reaction product having a molecular formula including a central oxygen atom connecting two metal atoms, said two members including a single-metal alkoxycarboxylate and a metal alkoxide.
Claim 23
Dependent Claim
19 words
The method as set forth in claim 17, said two members including said barium alkoxycarboxylate and said titanium alkoxide.
Claim 24
Dependent Claim
14 words
The method as set forth in claim 18, said titanium alkoxide being titanium isopropoxide.
Claim 25
Independent Claim
82 words
A method of making a strontium bismuth tantalate precursor, said method comprising the steps of: combining a polyoxyalkylated strontium moiety, a polyoxyalkylated bismuth moiety, and a polyoxyalkylated tantalum moiety to form a liquid solution, each of said respective moieties having a formula in which corresponding strontium, bismuth, and tantalum atoms bond with an oxygen atom in a ligand selected from a ligand group consisting of alkoxides and carboxylates; and heating said liquid solution to a temperature of at least about 115° C.
Claim 26
Independent Claim
82 words
A method of making a strontium bismuth tantalate precursor, said method comprising the steps of: combining a polyoxyalkylated strontium moiety, a polyoxyalkylated bismuth moiety, and a polyoxyalkylated tantalum moiety to form a liquid solution, each of said respective moieties having a formula in which corresponding strontium, bismuth, and tantalum atoms bond with an oxygen atom in a ligand selected from a ligand group consisting of alkoxides and carboxylates; and heating said liquid solution to a temperature of at least about 115° C.
Claim 27
Dependent Claim
40 words
The method as set forth in claim 20, wherein said formula defines a member selected from a moiety group consisting of bismuth carboxylates, bismuth alkoxides, bismuth alkoxycarboxylates, strontium carboxylates, strontium alkoxides, strontium alkoxycarboxylates, tantalum carboxylates, tantalum alkoxides, and tantalum alkoxycarboxylates.
Claim 28
Dependent Claim
49 words
The method as set forth in claim 21, wherein said heating step includes reacting two members of said moiety group to form a reaction product having a molecular formula including a central oxygen atom connecting two metal atoms, said two members including a single-metal alkoxycarboxylate and a metal alkoxide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-05-07 | 1999-11-06 | 2000-05-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-05-07 | 2003-11-06 | 2004-05-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-05-07 | 2007-11-06 | 2008-05-07 | $7700.00 | Window Closed / Lapsed |