US4826709A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Devices involving silicon glasses
Assignee: Nokia Bell Labs
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Filing: 1988-02-29
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Granted: 1989-05-02
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Expires: 2008-02-29
Abstract
Abstract A sol-gel process is utilized for producing silicon oxide glasses useful in the manufacture of devices such as semiconductor devices. These glasses are easily deposited by techniques such as spinning. Not only is the glass easily applied, but also has advantageous electrical, etching, and mechanical properties. Thus, these glasses are useful in applications such as passivating layers for integrated circuit devices and as intermediary layers in trilevel lithography for the production of such devices.
Inventors
- 👤 Vivian W. Ryan
- 👤 Gerald Smolinsky
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 02:35
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/66; H10P14/668; H10P14/6681; C; C03; C03C; C03C3/00; C03C3/04; C03C3/06; H10P14/63; H10P14/6326; H10P14/6342; H10P14/69; H10P14/692; H10P14/6921; H10P14/69215; C03C2201/00; C03C2201/02; C03C2201/06; C03C2201/08; C03C2201/10; C03C2201/20; C03C2201/28; C03C2203/00; C03C2203/20; H10P14/65; H10P14/6516; H10P14/6922
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
75 words
A process for producing a device comprising the steps of coating a precursor layer on a non-planar substrate, curing said precursor layer to form a dielectric layer comprising silicon and oxygen and continuing the fabrication of said device characterized in that said precursor layer comprises a material produced by reacting a lower alcohol having at least two carbon atoms with a silicon(IV) anhydride reactant composed of lower organic acid moieties bound to the silicon atom.
Claim 2
Dependent Claim
75 words
A process for producing a device comprising the steps of coating a precursor layer on a non-planar substrate, curing said precursor layer to form a dielectric layer comprising silicon and oxygen and continuing the fabrication of said device characterized in that said precursor layer comprises a material produced by reacting a lower alcohol having at least two carbon atoms with a silicon(IV) anhydride reactant composed of lower organic acid moieties bound to the silicon atom.
Claim 3
Dependent Claim
21 words
The process of claim 1 wherein said alcohol comprises a material chosen from the group consisting of ethanol, 1-propanol, and 1-butanol.
Claim 4
Dependent Claim
23 words
The process of claim 2 wherein said alcohol comprises ethanol or propanol and wherein B 2 O 3 is present during said reaction.
Claim 5
Dependent Claim
10 words
The process of claim 3 wherein said substrate comprises silicon.
Claim 6
Dependent Claim
15 words
The process of claim 2 wherein said coating is done by a step comprising spinning.
Claim 7
Dependent Claim
10 words
The process of claim 1 wherein said substrate comprises silicon.
Claim 8
Dependent Claim
20 words
The process of claim 2 wherein said alcohol comprises 1-propanol or 1-butanol and wherein water is added during said reaction.
Claim 9
Dependent Claim
15 words
The process of claim 1 wherein said coating is done by a step comprising spinning.
Claim 10
Dependent Claim
12 words
The process of claim 8 wherein said curing is induced by heating.
Claim 11
Dependent Claim
12 words
The process of claim 1 wherein said curing is induced by heating.
Claim 12
Dependent Claim
28 words
The process of claim 1 wherein said step of continuing to complete said device comprises depositing a metal layer on said dielectric layer and patterning said metal layer.
Claim 13
Dependent Claim
24 words
The process of claim 1 wherein said lower silicon(IV) anhydride comprises an anhydride chosen from the group consisting of silicon(IV) acetate and silicon(IV) propionate.
Claim 14
Dependent Claim
62 words
A process for producing a device according to claim 1 characterized in that said precursor layer comprises a material produced by forming salicic acid and controlling the polymerization of said salicic acid such that the polymer yields a scattering pattern to incident 365 nm light that fits with at least a 0.95 correlation coefficient to the theoretical curve predicted for spherical scatterers.
References Cited (Backward Citations)
US4652467A
Cited
US4719125A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-05-01 | 1992-10-31 | 1993-05-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-05-01 | 1996-10-31 | 1997-05-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-05-01 | 2000-10-31 | 2001-05-02 | $7700.00 | Window Closed / Lapsed |