US5290733A
Expired / Lapsed
US
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Method of manufacturing semiconductor devices including depositing aluminum on aluminum leads
Assignee: Toshiba Corp
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Filing: 1992-08-06
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Granted: 1994-03-01
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Expires: 2012-08-06
Abstract
Abstract A method of manufacturing semiconductor devices comprises steps of selectively forming metal leads on the surface a semiconductor substrate, and immersing the semiconductor substrate in a solution containing dissolved metal for depositing the dissolved metal on the surfaces of the metal leads. The solution contains dissolved metal having an ionization tendency equal to or smaller than ionization of the metal leads.
Inventors
- 👤 Nobuo Hayasaka
- 👤 Ayako Shimazaki
- 👤 Haruo Okano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:20
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/063; H10P; H10P14/00; H10P14/40; H10P14/46; H10P14/47; H10W20/056; H10W20/057; Y; Y10; Y10S; Y10S438/00; Y10S438/927; Y10S438/963
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
76 words
A method of manufacturing semiconductor devices, comprising the steps of: forming aluminum or aluminum alloy leads on the surface of a semiconductor substrate, including a step of dry etching; and immersing the semiconductor substrate in a solution containing aluminum, for depositing aluminum on the exposed surfaces of the leads and for eliminating at least one of F and Cl adhering to the leads due to said dry etching, thereby suppressing electromigration and corrosion of the leads.
Claim 2
Independent Claim
76 words
A method of manufacturing semiconductor devices, comprising the steps of: forming aluminum or aluminum alloy leads on the surface of a semiconductor substrate, including a step of dry etching; and immersing the semiconductor substrate in a solution containing aluminum, for depositing aluminum on the exposed surfaces of the leads and for eliminating at least one of F and Cl adhering to the leads due to said dry etching, thereby suppressing electromigration and corrosion of the leads.
Claim 3
Dependent Claim
26 words
The method of claim 1, wherein said step of immersing the substrate in the solution includes the step of preparing a solution containing a aluminum-salt group.
Claim 4
Dependent Claim
11 words
The method of claim 2, wherein said aluminum-salt is aluminum nitrate.
Claim 5
Dependent Claim
31 words
The method of claim 1, further comprising the step of applying ultrasonic waves to the surfaces of the aluminum or aluminum alloy leads for enhancing the selectivity of the aluminum deposition.
Claim 6
Dependent Claim
39 words
The method of claim 4, wherein said step of applying the ultrasonic waves to the surface of the aluminum or aluminum alloy leads includes the step of providing the ultrasonic waves having frequencies of 600 kHz at a lowest.
Claim 7
Dependent Claim
31 words
The method of claim 1, further comprising the step of heating the substrate at a temperature between 400° to 500° C. to suppress electromigration of the aluminum or aluminum alloy leads.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-02-28 | 1997-08-30 | 1998-03-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-02-28 | 2001-08-30 | 2002-03-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-02-28 | 2005-08-30 | 2006-03-01 | $7700.00 | Window Closed / Lapsed |