US4351696A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Corrosion inhibition of aluminum or aluminum alloy film utilizing bromine-containing plasma
Assignee: National Semiconductor Corp
•
Filing: 1981-10-28
•
Granted: 1982-09-28
•
Expires: 2001-10-28
Abstract
Abstract Bromine-containing plasma is utilized to inhibit corrosion of aluminum or aluminum alloy films which have been etched utilizing a chlorinated plasma.
Inventors
- 👤 Kenneth J. Radigan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 16:29
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/20; H10P70/27; H10P70/273; C; C23; C23C; C23C8/00; C23C8/02; C23C8/06; C23C8/36; Y; Y10; Y10S; Y10S438/00; Y10S438/958
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
26 words
A method for inhibiting corrosion of aluminum or aluminum alloy films which have been etched utilizing chlorinated plasma comprising exposing the etched film to bromine-containing plasma.
Claim 2
Independent Claim
26 words
A method for inhibiting corrosion of aluminum or aluminum alloy films which have been etched utilizing chlorinated plasma comprising exposing the etched film to bromine-containing plasma.
Claim 3
Dependent Claim
19 words
The method as in claim 1 wherein the source gas utilized for generating the bromine-containing plasma includes methyl bromide.
Claim 4
Dependent Claim
19 words
The method as in claim 1 wherein the source gas utilized for generating the bromine-containing plasma includes ethyl bromide.
Claim 5
Independent Claim
55 words
A method for inhibiting corrosion of an aluminum or aluminum alloy film which has been etched in a reactor utilizing chlorinated plasma, comprising the sequential steps of: (a) purging the reactor utilizing a combination of oxygen and nitrogen; (b) introducting a bromine-containing gas into the reactor; and (c) generating a bromine-containing plasma within the reactor.
Claim 6
Independent Claim
55 words
A method for inhibiting corrosion of an aluminum or aluminum alloy film which has been etched in a reactor utilizing chlorinated plasma, comprising the sequential steps of: (a) purging the reactor utilizing a combination of oxygen and nitrogen; (b) introducting a bromine-containing gas into the reactor; and (c) generating a bromine-containing plasma within the reactor.
Claim 7
Dependent Claim
13 words
A method as in claim 4 wherein the bromine-containing gas includes methyl bromode.
Claim 8
Dependent Claim
22 words
A method as in claim 5 wherein the bromine-containing plasma is generated by applying power of about 3.0 amps to the reactor.
Claim 9
Dependent Claim
18 words
A method as in claim 6 wherein the power is applied to the reactor for about 15 minutes.
Claim 10
Independent Claim
119 words
A method for inhibiting corrosion of an aluminum or aluminum alloy film which has been etched in a reactor utilizing chlorinated plasma, comprising the sequential steps of: (a) introducing a combination of oxygen and nitrogen to the reactor for about 5 minutes while maintaining the reactor power at about 3.0 amps and the reactor pressure at about 400 millimicrons; (b) turning off the reactor power and introducing methyl bromide to the reactor for about 2 minutes while maintaining the reactor pressure at about 300 millimicrons; and (c) generating a methyl bromide plasma in the reactor by applying a power of about 3.0 amps to the reactor for about 15 minutes while maintaining the reactor pressure at about 300 millimicrons.
Claim 11
Independent Claim
119 words
A method for inhibiting corrosion of an aluminum or aluminum alloy film which has been etched in a reactor utilizing chlorinated plasma, comprising the sequential steps of: (a) introducing a combination of oxygen and nitrogen to the reactor for about 5 minutes while maintaining the reactor power at about 3.0 amps and the reactor pressure at about 400 millimicrons; (b) turning off the reactor power and introducing methyl bromide to the reactor for about 2 minutes while maintaining the reactor pressure at about 300 millimicrons; and (c) generating a methyl bromide plasma in the reactor by applying a power of about 3.0 amps to the reactor for about 15 minutes while maintaining the reactor pressure at about 300 millimicrons.
References Cited (Backward Citations)
US4073669A
Cited
JPS549387A
Cited
US4267013A
Cited
US4256534A
Cited
JPS5569268A
Cited
US4308089A
Cited
US4325984A
Cited
US4325984B1
Cited
US4325984B2
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-09-27 | 1986-03-29 | 1986-09-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-09-27 | 1990-03-29 | 1990-09-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-09-27 | 1994-03-29 | 1994-09-28 | $7700.00 | Window Closed / Lapsed |