US4267013A
Expired / Lapsed
US
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Method for dry-etching aluminum and aluminum alloys
Assignee: Hitachi Ltd
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Filing: 1979-06-05
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Granted: 1981-05-12
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Expires: 1999-06-05
Abstract
Abstract A method for dry-etching Al and Al alloys is disclosed, which comprises producing plasma discharges with a mixed gas comprising boron trichloride and freon and/or oxygen incorporated therein and patterning Al or an Al alloy by the produced discharges. In this dry etching method, the etch rate of Al or an Al alloy can be remarkably improved over the etch rate attainable according to the conventional techniques, and the difference of the etch rate between Al or an Al alloy and other material can be remarkably increased.
Inventors
- 👤 Shinya Iida
- 👤 Kazuyoshi Ueki
- 👤 Hideo Komatsu
- 👤 Tatsumi Mitzutani
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 22:17
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/20; H10P70/27; H10P70/273; C; C09; C09K; C09K13/00; C09K13/04; C09K13/10; C23; C23F; C23F4/00
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
81 words
A method for dry-etching aluminum and aluminum alloys which comprises producing plasma discharges with a gas comprising boron trichloride and at least one member selected from the group consisting of a halogenated hydrocarbon selected from the group consisting of CF 4 , C 2 F 6 , C 3 F 8 , C 4 F 8 , CHF 3 and CCl 2 F 2 and oxygen and patterning aluminum or an aluminum alloy with ions or radicals generated by said discharges.
Claim 2
Independent Claim
81 words
A method for dry-etching aluminum and aluminum alloys which comprises producing plasma discharges with a gas comprising boron trichloride and at least one member selected from the group consisting of a halogenated hydrocarbon selected from the group consisting of CF 4 , C 2 F 6 , C 3 F 8 , C 4 F 8 , CHF 3 and CCl 2 F 2 and oxygen and patterning aluminum or an aluminum alloy with ions or radicals generated by said discharges.
Claim 3
Dependent Claim
28 words
A dry-etching method according to claim 1, wherein a mixed gas comprising boron trichloride and up to 32% by volume of said halogenated hydrocarbon incorporated therein is used.
Claim 4
Dependent Claim
28 words
A dry-etching method according to claim 1, wherein a mixed gas comprising boron trichloride and 10 to 28% by volume of said halogenated hydrocarbon incorporated therein is used.
Claim 5
Dependent Claim
27 words
A dry-etching method according to claim 1, wherein a mixed gas comprising boron trichloride and about 20% by volume of said halogenated hydrocarbon incorporated therein is used.
Claim 6
Dependent Claim
26 words
A dry-etching method according to claim 1, wherein a mixed gas comprising boron trichloride and up to 6.5% by volume of oxygen incorporated therein is used.
Claim 7
Dependent Claim
26 words
A dry-etching method according to claim 1, wherein a mixed gas comprising boron trichloride and 2 to 5.5% by volume of oxygen incorporated therein is used.
Claim 8
Dependent Claim
25 words
A dry-etching method according to claim 1, wherein a mixed gas comprising boron trichloride and about 4% by volume of oxygen incorporated therein is used.
Claim 9
Dependent Claim
34 words
A dry-etching method according to claim 1, wherein a mixed gas formed by incorporating up to 32% by volume of freon and up to 6.5% by volume of oxygen into boron trichloride is used.
Claim 10
Dependent Claim
20 words
A dry-etching method according to claim 8, wherein the amount of said halogenated hydrocarbon is 10 to 28% by volume.
Claim 11
Dependent Claim
19 words
A dry-etching method according to claim 8, wherein the amount of said halogenated hydrocarbon is about 20% by volume.
Claim 12
Dependent Claim
18 words
A dry-etching method according to claim 9, wherein the amount of oxygen is 2 to 5.5% by volume.
Claim 13
Dependent Claim
17 words
A dry-etching method according to claim 10, wherein the amount of oxygen is about 4% by volume.
Claim 14
Dependent Claim
26 words
A dry-etching method according to any of claims 1, 2, 3, 4, 8, 9, 10, 11 and 12 wherein the halogenated hydrocarbon is CF 4 .
Claim 15
Independent Claim
94 words
A method for dry-etching aluminum and aluminum alloys which comprises producing plasma discharges with a gas comprising boron trichloride and at least one member selected from the group consisting of a halogenated hydrocarbon selected from the group consisting of CF 4 , C 2 F 6 , C 3 F 8 , C 4 F 8 , CHF 3 and CCl 2 F 2 and oxygen, patterning aluminum or an aluminum aloy with ions or radicals generated by said discharges, and then, conducting plasma cleaning in said halogenated hydrocarbon, alkali washing and water washing.
Claim 16
Independent Claim
94 words
A method for dry-etching aluminum and aluminum alloys which comprises producing plasma discharges with a gas comprising boron trichloride and at least one member selected from the group consisting of a halogenated hydrocarbon selected from the group consisting of CF 4 , C 2 F 6 , C 3 F 8 , C 4 F 8 , CHF 3 and CCl 2 F 2 and oxygen, patterning aluminum or an aluminum aloy with ions or radicals generated by said discharges, and then, conducting plasma cleaning in said halogenated hydrocarbon, alkali washing and water washing.
Claim 17
Dependent Claim
14 words
A dry-etching method according to claim 14, wherein said member is the halogenated hydrocarbon.
Claim 18
Dependent Claim
15 words
A dry-etching method according to claim 15, wherein the halogenated hydrocarbon is CF 4 .
Claim 19
Dependent Claim
12 words
A dry-etching method according to claim 14, wherein the member is oxygen.
References Cited (Backward Citations)
US3951709A
Cited
US4030967A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-05-11 | 1984-11-10 | 1985-05-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-05-11 | 1988-11-10 | 1989-05-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-05-11 | 1992-11-10 | 1993-05-12 | $7700.00 | Window Closed / Lapsed |