US6329017B1 — Mesoporous silica film from a solution containing…

Claim 1

Independent Claim 100 words

A method of making a mesoporous film comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent, said catalyst and said surfactant from said templated film to form a hydroxylated film; and (d) dehydroxylating said hydroxylated film to obtain said mesoporous film, said mesoporous film having a porosity that is disordered, said disorder being characterized by an absence of a major x-ray diffraction peak in the range of 2 to 6 degrees 2-theta.

Claim 2

Independent Claim 100 words

A method of making a mesoporous film comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent, said catalyst and said surfactant from said templated film to form a hydroxylated film; and (d) dehydroxylating said hydroxylated film to obtain said mesoporous film, said mesoporous film having a porosity that is disordered, said disorder being characterized by an absence of a major x-ray diffraction peak in the range of 2 to 6 degrees 2-theta.

Claim 3

Dependent Claim 16 words

The method as recited in claim 1 , wherein said surfactant is a polyoxyethylene ether surfactant.

Claim 4

Dependent Claim 127 words

The method as recited in claim 2 , wherein said polyoxyethylene ether surfactant is C 12 H 25 (CH 2 CH 2 O) 10 OH also known as C 12 EO 10 or 10 lauryl ether; C 16 H 33 (CH 2 CH 2 O) 10 OH also known as C 16 EO 10 or 10 cetyl ether; C 18 H 37 (CH 2 CH 2 O) 10 OH also known as C 18 EO 10 or 10 stearyl ether, C 12 H 25 (CH 2 CH 2 O) 4 OH also known as C 12 EO 4 or 4 lauryl ether; C 16 H 33 (CH 2 CH 2 O) 2 OH also known as C 16 EO 2 or 2 cetyl ether or combinations thereof.

Claim 5

Dependent Claim 47 words

The method as recited in claim 1 , wherein said surfactant is in combination with organic co-solvents and with a chemical agent selected from the group consisting of a second surfactant, smaller hydrophilic molecular compounds characterized by molecular weights of less than or equal to approximately 1150.

Claim 6

Dependent Claim 30 words

The method as recited in claim 4 , wherein said second surfactant is selected from the group consisting of non-ionic surfactant, catonic surfactant, anionic surfactant, amphoteric surfactant and combinations thereof.

Claim 7

Dependent Claim 16 words

The method as recited in claim 5 , wherein said cationic surfactant is an ammonium-based surfactant.

Claim 8

Dependent Claim 27 words

The method as recited in claim 4 , wherein said smaller hydrophilic molecular compounds are selected from the group consisting of glycerol, propylene glycol, and ethylene glycol.

Claim 9

Dependent Claim 24 words

The method as recited in claim 4 , wherein said organic co-solvents are selected from the group consisting of mesitylene, octane and combinations thereof.

Claim 10

Dependent Claim 38 words

The method as recited in claim 1 , wherein said silica precursor is selected from the group consisting of tetraethyl orthosilicate (TEOS), tetramethyl orthosilicate (TMOS), methyl triethoxysilane, phenyl triethoxy silane, dimethyl dimethoxy silane, ethyl triethyoxysilane, and combinations thereof.

Claim 11

Dependent Claim 16 words

The method as recited in claim 1 , wherein said aqueous solvent comprises ethanol and water.

Claim 12

Dependent Claim 25 words

The method as recited in claim 1 , wherein said catalyst is selected from the group consisting of inorganic acid, organic acid and combinations thereof.

Claim 13

Dependent Claim 18 words

The method as recited in claim 1 , wherein said precursor solution includes at least one other surfactant.

Claim 14

Dependent Claim 33 words

The method as recited in claim 12 , wherein said at least one other surfactant is selected from the group consisting of non-ionic surfactant, cationic surfactant, anionic surfactant, amphoteric surfactant and combinations thereof.

Claim 15

Dependent Claim 23 words

The method as recited in claim 1 , wherein dehydroxylating occurs in the presence of a silicon-based organic compound in the vapor phase.

Claim 16

Dependent Claim 16 words

The method as recited in claim 14 , wherein the silicon-based organic compound is a silane.

Claim 17

Dependent Claim 36 words

The method as recited in claim 15 , wherein the silane is selected from the group consisting of trimethyl iodosilane, trimethyl chlorosilane, dimethyl dimethoxy silane, demethyl dichloro silane, hexaphenyl disilazane, diphenyl tetramethyl silazane and hexamethyl disilazane.

Claim 18

Independent Claim 97 words

A method of making a mesoporous film comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution, wherein said precursor solution includes at least one smaller hydrophilic molecular compound characterized by a molecular weight that is less than that of said surfactant; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent, said catalyst and said surfactant from said templated film and forming a hydroxylated film with disordered porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film.

Claim 19

Independent Claim 97 words

A method of making a mesoporous film comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution, wherein said precursor solution includes at least one smaller hydrophilic molecular compound characterized by a molecular weight that is less than that of said surfactant; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent, said catalyst and said surfactant from said templated film and forming a hydroxylated film with disordered porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film.

Claim 20

Dependent Claim 32 words

The method as recited in claim 17 , wherein said at least one smaller hydrophilic molecular compound is selected from the group consisting of glycerol, propylene glycol, ethylene glycol and combinations thereof.

Claim 21

Independent Claim 82 words

A method of making a mesoporous film comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution, wherein said precursor solution includes at least one organic co-solvent; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent said catalyst and said surfactant from said templated film and forming a hydroxylated film with disordered porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film.

Claim 22

Independent Claim 82 words

A method of making a mesoporous film comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution, wherein said precursor solution includes at least one organic co-solvent; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent said catalyst and said surfactant from said templated film and forming a hydroxylated film with disordered porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film.

Claim 23

Dependent Claim 27 words

The method as recited in claim 19 , wherein said at least one organic co-solvent is selected from the group consisting of mesitylene, octane and combinations thereof.

Claim 24

Independent Claim 106 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant that is a polyoxethylene ether surfactant into a precursor solution; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent said catalyst and said surfactant to form a hydroxylated mesoporous film characterized by a porosity that is disordered as indicated by an absence of a major x-ray diffraction peak in the range of 2 to 6 degrees 2-theta; and (d) dehydroxylating said hydroxylated film to obtain said mesoporous film.

Claim 25

Independent Claim 106 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant that is a polyoxethylene ether surfactant into a precursor solution; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent said catalyst and said surfactant to form a hydroxylated mesoporous film characterized by a porosity that is disordered as indicated by an absence of a major x-ray diffraction peak in the range of 2 to 6 degrees 2-theta; and (d) dehydroxylating said hydroxylated film to obtain said mesoporous film.

Claim 26

Dependent Claim 127 words

The method as recited in claim 21 , wherein said polyoxyethylene ether surfactant is C 12 H 25 (CH 2 CH 2 O) 10 OH also known as C 12 EO 10 or 10 lauryl ether; C 16 H 33 (CH 2 CH 2 O) 10 OH also known as C 16 EO 10 or 10 cetyl ether; C 18 H 37 (CH 2 CH 2 O) 10 OH also known as C 18 EO 10 or 10 stearyl etler; C 12 H 25 (CH 2 CH 2 O) 4 OH also known as C 12 EO 4 or 4 lauryl ether; C 16 H 33 (CH 2 CH 2 O) 2 OH also known as C 16 EO 2 or 2 cetyl ether or combinations thereof.

Claim 27

Dependent Claim 18 words

The method as recited in claim 21 , wherein said precursor solution includes at least one other surfactant.

Claim 28

Dependent Claim 48 words

The method as recited in claim 21 , wherein said precursor solution includes an agent selected from the group consisting of a second surfactant, a smaller hydrophilic molecular compound characterized by a molecular weight of less than or equal to approximately 1150, an organic co-solvent and combinations thereof.

Claim 29

Dependent Claim 33 words

The method as recited in claim 23 , wherein said at least one other surfactant is selected from the group consisting of non-ionic surfactant, cationic surfactant, anionic surfactant, amphoteric surfactant and combinations thereof.

Claim 30

Dependent Claim 30 words

The method as recited in claim 24 , wherein said second surfactant is selected from the group consisting of non-ionic surfactant, cationic surfactant, anionic surfactant, amphoteric surfactant and combinations thereof.

Claim 31

Dependent Claim 29 words

The method as recited in claim 24 , wherein said smaller hydrophilic molecular compound is selected from the group consisting of glycerol, propylene glycol, ethylene glycol and combinations thereof.

Claim 32

Dependent Claim 24 words

The method as recited in claim 24 , wherein said organic co-solvent is selected from the group consisting of mesitylene, octane and combinations thereof.

Claim 33

Dependent Claim 34 words

The method as recited in claim 21 wherein said silica precursor is selected from the group consisting of tetraethyl orthosilicate (TEOS), tetramethyl orthosilicate, methyl triethoxysilane, phenyl triethoxy silane, dimethyl dimethoxy silane and combinations thereof.

Claim 34

Dependent Claim 13 words

The method as recited in claim 21 wherein said aqueous solvent includes ethanol.

Claim 35

Dependent Claim 25 words

The method as recited in claim 21 , wherein said catalyst is selected from the group consisting of inorganic acid, organic acid and combinations thereof.

Claim 36

Dependent Claim 23 words

The method as recited in claim 21 , wherein dehydroxylating occurs in the presence of a silicon-based organic compound in the vapor phase.

Claim 37

Dependent Claim 16 words

The method as recited in claim 32 , wherein the silicon-based organic compound is a silane.

Claim 38

Dependent Claim 33 words

The method as recited in claim 33 , wherein the silane is selected from the group consisting of trimethyl iodosilane, trimethyl chlorosilane, dimethyl dichloro silane, hexaphenyl disilazane, diphenyl tetramethyl silazane and hexamethyl disilazane.

Claim 39

Independent Claim 104 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant that is a polyoxethylene ether surfactant into a precursor solution; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent, said catalyst and said surfactant forming a hydroxylated film having porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, wherein said porosity is disordered as indicated by an absence of a major x-ray diffraction peak in the range of 2 to 6 degrees 2-theta.

Claim 40

Independent Claim 104 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant that is a polyoxethylene ether surfactant into a precursor solution; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent, said catalyst and said surfactant forming a hydroxylated film having porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, wherein said porosity is disordered as indicated by an absence of a major x-ray diffraction peak in the range of 2 to 6 degrees 2-theta.

Claim 41

Independent Claim 111 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor wit) an aqueous solvent, a catalyst and a surfactant that is a polyoxethylene ether surfactant into a precursor solution; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent, said catalyst and said surfactant forming a hydroxylated film having porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, wherein said porosity is disordered, lacking a regular geometric arrangement of pores, and the pore structure is characterized by a major x-ray diffraction peak between about 0.75 and about 2 degrees 2-theta.

Claim 42

Independent Claim 111 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor wit) an aqueous solvent, a catalyst and a surfactant that is a polyoxethylene ether surfactant into a precursor solution; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent, said catalyst and said surfactant forming a hydroxylated film having porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, wherein said porosity is disordered, lacking a regular geometric arrangement of pores, and the pore structure is characterized by a major x-ray diffraction peak between about 0.75 and about 2 degrees 2-theta.

Claim 43

Independent Claim 104 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant that is a polyoxethylene ether surfactant into a precursor solution; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent said catalyst and said surfactant forming a hydroxylated film having porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, wherein said precursor solution includes at least one smaller hydrophilic molecular compound characterized by a molecular weight that is less than that of said surfactant.

Claim 44

Independent Claim 104 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant that is a polyoxethylene ether surfactant into a precursor solution; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent said catalyst and said surfactant forming a hydroxylated film having porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, wherein said precursor solution includes at least one smaller hydrophilic molecular compound characterized by a molecular weight that is less than that of said surfactant.

Claim 45

Dependent Claim 32 words

The method as recited in claim 37 , wherein said at least one smaller hydrophilic molecular compound is selected from the group consisting of glycerol, propylene glycol, ethylene glycol and combinations thereof.

Claim 46

Independent Claim 89 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant that is a polyoxethylene ether surfactant into a precursor solution; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent said catalyst and said surfactant forming a hydroxylated film having porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, wherein said precursor solution includes at least one organic co-solvent.

Claim 47

Independent Claim 89 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant that is a polyoxethylene ether surfactant into a precursor solution; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent said catalyst and said surfactant forming a hydroxylated film having porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, wherein said precursor solution includes at least one organic co-solvent.

Claim 48

Dependent Claim 27 words

The method as recited in claim 39 , wherein said at least one organic co-solvent is selected from the group consisting of mesitylene, octane and combinations thereof.

Claim 49

Independent Claim 111 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant that is a polyoxethylene ether surfactant into a precursor solution; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent, said catalyst and said surfactant forming a hydroxylated film having porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, wherein said catalyst is a carboxylic acid selected from the group consisting of methanoic acid (formic acid), ethanoic acid (acetic acid), ethandioic acid (oxalic acid), butanoic acid (butyric acid), and combinations thereof.

Claim 50

Independent Claim 111 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant that is a polyoxethylene ether surfactant into a precursor solution; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent, said catalyst and said surfactant forming a hydroxylated film having porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, wherein said catalyst is a carboxylic acid selected from the group consisting of methanoic acid (formic acid), ethanoic acid (acetic acid), ethandioic acid (oxalic acid), butanoic acid (butyric acid), and combinations thereof.

Claim 51

Independent Claim 93 words

A method of making a mesoporous film comprising the steps of: (a) combining a silica precursor with an aqueous solvent, an acid and a polyoxethylene other surfactant into a precursor solution; (b) spincoating said precursor solution into a templated film; (c) removing said aqueous solvent, said acid and said surfactant to form a hydroxylated film characterized by a porosity that is disordered as indicated by an absence of a major x-ray diffraction peak in the range of 2 to 6 degrees 2-theta; and (d) dehydroxylating said hydroxylated film to obtain said mesoporous film.

Claim 52

Independent Claim 93 words

A method of making a mesoporous film comprising the steps of: (a) combining a silica precursor with an aqueous solvent, an acid and a polyoxethylene other surfactant into a precursor solution; (b) spincoating said precursor solution into a templated film; (c) removing said aqueous solvent, said acid and said surfactant to form a hydroxylated film characterized by a porosity that is disordered as indicated by an absence of a major x-ray diffraction peak in the range of 2 to 6 degrees 2-theta; and (d) dehydroxylating said hydroxylated film to obtain said mesoporous film.

Claim 53

Dependent Claim 127 words

The method as recited in claim 42 , wherein said polyoxyethylene ether surfactant is C 12 H 25 (CH 2 CH 2 O) 10 OH also known as C 12 EO 10 or 10 lauryl ether; C 16 H 33 (CH 2 CH 2 O) 10 OH also known as C 16 EO 10 or 10 cetyl ether; C 18 H 37 (CH 2 CH 2 O) 10 OH also known as C 18 EO 10 or 10 stearyl ether, C 12 H 25 (CH 2 CH 2 O) 4 OH also known as C 12 EO 4 or 4 lauryl ether; C 16 H 33 (CH 2 CH 2 O) 2 OH also known as C 16 EO 2 or 2 cetyl ether or combinations thereof.

Claim 54

Dependent Claim 16 words

The method as recited in claim 42 , wherein said silica precursor is tetraethyl orthosilicate (TEOS).

Claim 55

Dependent Claim 16 words

The method as recited in claim 42 , wherein said aqueous solvent comprises ethanol and water.

Claim 56

Dependent Claim 14 words

The method as recited in claim 42 , wherein said acid is hydrochloric acid.

Claim 57

Independent Claim 227 words

A method of making a mesoporous film comprising the steps of: (a) combining a silica precursor with an aqueous solvent, an acid and a polyoxethylene ether surfactant into a precursor solution; (b) spin-coating said precursor solution into a templated film; (c) removing said aqueous solvent, said acid and said surfactant forming a hydroxylated film; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, wherein said polyoxyethylene ether surfactant is C 12 H 25 (CH 2 CH 2 O) 10 OH also known as C 12 EO 10 or 10 lauryl ether; C 16 H 33 (CH 2 CH 2 O) 10 OH also known as C 16 EO 10 or 10 cetyl ether; C 18 H 37 (CH 2 CH 2 O) 10 OH also known as C 18 EO 10 or 10 stearyl ether; C 12 H 25 (CH 2 CH 2 O) 4 OH also known as C 12 EO 4 or 4 lauryl ether; C 16 CH 33 (CH 2 CH 2 O) 2 OH also known as C 16 EO 2 or 2 cetyl ether or combinations thereof and wherein said polyoxyethylene ether surfactant is in combination with at least one other surfactant at least one hydrophilic molecular compound characterized by a molecular weight that is less than that of said polyoxyethylene ether surfactant, and with at least one organic solvent.

Claim 58

Independent Claim 227 words

A method of making a mesoporous film comprising the steps of: (a) combining a silica precursor with an aqueous solvent, an acid and a polyoxethylene ether surfactant into a precursor solution; (b) spin-coating said precursor solution into a templated film; (c) removing said aqueous solvent, said acid and said surfactant forming a hydroxylated film; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, wherein said polyoxyethylene ether surfactant is C 12 H 25 (CH 2 CH 2 O) 10 OH also known as C 12 EO 10 or 10 lauryl ether; C 16 H 33 (CH 2 CH 2 O) 10 OH also known as C 16 EO 10 or 10 cetyl ether; C 18 H 37 (CH 2 CH 2 O) 10 OH also known as C 18 EO 10 or 10 stearyl ether; C 12 H 25 (CH 2 CH 2 O) 4 OH also known as C 12 EO 4 or 4 lauryl ether; C 16 CH 33 (CH 2 CH 2 O) 2 OH also known as C 16 EO 2 or 2 cetyl ether or combinations thereof and wherein said polyoxyethylene ether surfactant is in combination with at least one other surfactant at least one hydrophilic molecular compound characterized by a molecular weight that is less than that of said polyoxyethylene ether surfactant, and with at least one organic solvent.

Claim 59

Dependent Claim 15 words

The method as recited in claim 47 , wherein said small surfactants are ammonium-based surfactants.

Claim 60

Dependent Claim 17 words

The method as recited in claim 48 , wherein said ammonium-based surfactants are cetyl trimethyl ammonium chloride.

Claim 61

Dependent Claim 26 words

The method as recited in claim 47 , wherein said smaller hydrophilic molecules are selected from the group consisting of glycerol, propylene glycol, and ethylene glycol.

Claim 62

Dependent Claim 22 words

The method as recited in claim 47 , wherein said organic co-solvents are selected from the group consisting of mesitylene and octane.

Claim 63

Independent Claim 101 words

A method of making a mesoporous film comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent, said catalyst and said surfactant from said templated film to form a hydroxylated film characterized by porosity that is disordered as indicated by an absence of a major x-ray diffraction peak in the range of 2 to 6 degrees 2-theta; and (d) dehydroxylating said hydroxylated film with a gaseous silicon-based organic compound to obtain said mesoporous film.

Claim 64

Independent Claim 101 words

A method of making a mesoporous film comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution; (b) spin coating said precursor solution into a templated film; (c) removing said aqueous solvent, said catalyst and said surfactant from said templated film to form a hydroxylated film characterized by porosity that is disordered as indicated by an absence of a major x-ray diffraction peak in the range of 2 to 6 degrees 2-theta; and (d) dehydroxylating said hydroxylated film with a gaseous silicon-based organic compound to obtain said mesoporous film.

Claim 65

Dependent Claim 14 words

The method of claim 52 , wherein the silicon-based organic compound is a silane.

Claim 66

Dependent Claim 34 words

The method of claim 52 , wherein said silane is selected from the group consisting of trimethyl iodosilane, trimethyl chlorosilane, dimethyl dimethoxy silane, dimethyl dichloro silane, hexaphenyl disilazane, diphenyl tetramethyl silazane and hexamethyl disilazane.

Claim 67

Independent Claim 96 words

A method of making a mesoporous film comprising the steps of: (e) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution; (f) spin coating said precursor solution into a templated film; (g) removing said aqueous solvent, said catalyst and said surfactant from said templated film and forming a hydroxylated film; and (h) dehydroxylating said hydroxylated film with a gaseous silicon-based organic compound and obtaining said mesoporous film, wherein said dehydroxylation of said film occurs in alternating exposures of said film to a vacuum and to the gaseous silane.

Claim 68

Independent Claim 96 words

A method of making a mesoporous film comprising the steps of: (e) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution; (f) spin coating said precursor solution into a templated film; (g) removing said aqueous solvent, said catalyst and said surfactant from said templated film and forming a hydroxylated film; and (h) dehydroxylating said hydroxylated film with a gaseous silicon-based organic compound and obtaining said mesoporous film, wherein said dehydroxylation of said film occurs in alternating exposures of said film to a vacuum and to the gaseous silane.

Claim 69

Independent Claim 107 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution; (b) dispensing said precursor solution onto said substrate to form a templated film; (c) substantially removing said aqueous solvent, said catalyst and said surfactant from said templated film to form a hydroxylated film having porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, wherein said porosity is disordered as indicated by an absence of a major x-ray diffraction peak in the range of 2 to 6 degrees 2-theta.

Claim 70

Independent Claim 107 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution; (b) dispensing said precursor solution onto said substrate to form a templated film; (c) substantially removing said aqueous solvent, said catalyst and said surfactant from said templated film to form a hydroxylated film having porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, wherein said porosity is disordered as indicated by an absence of a major x-ray diffraction peak in the range of 2 to 6 degrees 2-theta.

Claim 71

Dependent Claim 12 words

The method of claim 56 , wherein said dispensing involves spin coating.

Claim 72

Independent Claim 111 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution; (b) dispensing said precursor solution onto a substrate for form a templated film; (c) substantially removing said aqueous solvent, said catalyst and said surfactant to form a hydroxylated film having porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, said film being characterized by disordered porosity and said film having a thickness of between approximately 0.1 micron and approximately 1.5 microns, said thickness having a standard deviation of less than approximately +/−5%.

Claim 73

Independent Claim 111 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution; (b) dispensing said precursor solution onto a substrate for form a templated film; (c) substantially removing said aqueous solvent, said catalyst and said surfactant to form a hydroxylated film having porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, said film being characterized by disordered porosity and said film having a thickness of between approximately 0.1 micron and approximately 1.5 microns, said thickness having a standard deviation of less than approximately +/−5%.

Claim 74

Dependent Claim 12 words

The method of claim 58 , wherein said dispensing involves spin coating.

Claim 75

Independent Claim 116 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution; (b) dispensing said precursor solution onto a substrate to form a templated film; (c) heating said templated film, said dispensing and said heating collectively substantially removing said aqueous solvent, said catalyst and said surfactant from said templated firm to form a hydroxylated film having porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, said film being characterized by disordered porosity and said film being of substantially uniform thickness having a standard deviation of less than approximately +/−5%.

Claim 76

Independent Claim 116 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution; (b) dispensing said precursor solution onto a substrate to form a templated film; (c) heating said templated film, said dispensing and said heating collectively substantially removing said aqueous solvent, said catalyst and said surfactant from said templated firm to form a hydroxylated film having porosity; and (d) dehydroxylating said hydroxylated film and obtaining said mesoporous film, said film being characterized by disordered porosity and said film being of substantially uniform thickness having a standard deviation of less than approximately +/−5%.

Claim 77

Dependent Claim 12 words

The method of claim 60 , wherein said dispensing involves spin coating.

Claim 78

Independent Claim 97 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution; (b) dispensing said precursor solution onto said substrate to form a templated film; and (c) substantially removing said aqueous solvent, said catalyst and said surfactant from said templated film to form a mesoporous film having porosity; wherein said porosity is disordered as indicated by an absence of a major x-ray diffraction peak in the range of 2 to 6 degrees 2-theta.

Claim 79

Independent Claim 97 words

A method of making a mesoporous film with a surfactant containing solution, the method comprising the steps of: (a) combining a silica precursor with an aqueous solvent, a catalyst and a surfactant into a precursor solution; (b) dispensing said precursor solution onto said substrate to form a templated film; and (c) substantially removing said aqueous solvent, said catalyst and said surfactant from said templated film to form a mesoporous film having porosity; wherein said porosity is disordered as indicated by an absence of a major x-ray diffraction peak in the range of 2 to 6 degrees 2-theta.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2004-12-10	2005-06-11	2005-12-11	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2008-12-10	2009-06-11	2009-12-11	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2012-12-10	2013-06-11	2013-12-11	$7700.00	Window Closed / Lapsed

Mesoporous silica film from a solution containing a surfactant and methods of making same

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