Abstract This invention provides an improved porous structure for semiconductor devices and a process for making the same. This process may be applied to an existing porous structure 28, which may be deposited, for example, between patterned conductors 24. The method may comprise providing a substrate comprising a microelectronic circuit and a porous silica layer, the porous silica layer having an average pore diameter between 2 and 80 nm; and heating the substrate to one or more temperatures between 100 and 490 degrees C. in a substantially halogen-free atmosphere, whereby one or more dielectric properties of the porous dielectric are improved. In some embodiments, the atmosphere comprises a phenyl-containing atmosphere, such as hexaphenyldisilazane. In some embodiments, the method further comprises cooling the substrate and exposing the substrate to a substantially halogen-free atmosphere comprising either a phenyl-containing compound, such as hexaphenyldisilazane; or a methyl-containing compound, such as hexamethyldisilazane. It has been found that a porous structure treated in such a manner generally exhibits improved dielectric properties relative to an untreated sample.
A semiconductor device which comprises: a layer of patterned conductors formed on a substrate; and a porous dielectric layer disposed at least partially between at least one pair of said patterned conductors, said porous dielectric layer having a porosity of at least 20%, an average pore diameter of between 2 nm and 80 nm, and an hydroxyl concentration of less than 1.5 hydroxyl groups per square nm of pore surface area; wherein phenyl groups are bonded to the pore surfaces of said porous dielectric and said phenyl groups exist in a concentration of greater than 0.8 groups per square nm.
Claim 2
Dependent Claim
100 words
A semiconductor device which comprises: a layer of patterned conductors formed on a substrate; and a porous dielectric layer disposed at least partially between at least one pair of said patterned conductors, said porous dielectric layer having a porosity of at least 20%, an average pore diameter of between 2 nm and 80 nm, and an hydroxyl concentration of less than 1.5 hydroxyl groups per square nm of pore surface area; wherein phenyl groups are bonded to the pore surfaces of said porous dielectric and said phenyl groups exist in a concentration of greater than 0.8 groups per square nm.
Claim 3
Dependent Claim
24 words
The semiconductor device of claim 1, wherein said hydroxyl concentration of said porous dielectric layer is less than 0.5 hydroxyl groups per square nm.
Claim 4
Dependent Claim
16 words
The semiconductor device of claim 1, wherein said porous dielectric is comprised substantially of silicon dioxide.
Claim 5
Dependent Claim
18 words
The semiconductor device of claim 1, further comprising a substantially solid cap layer deposited over said porous dielectric.
Claim 6
Dependent Claim
14 words
The semiconductor device of claim 1, wherein the semiconductor device is an integrated circuit.