US6124633A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vertical interconnect process for silicon segments with thermally conductive epoxy preform
Assignee: VERTICAL CIRCUITS SOLUTIONS Inc
•
Filing: 1997-08-22
•
Granted: 2000-09-26
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Expires: 2017-08-22
Abstract
Abstract An apparatus for vertically interconnecting stacks of silicon segments. Each segment includes a plurality of adjacent die on a semiconductor wafer. The plurality of die on a segment are interconnected on the segment using one or more layers of metal interconnects which extend to all four sides of the segment to provide edge bonding pads for external electrical connection points. After the die are interconnected, each segment is cut from the backside of the wafer using a bevel cut to provide four inwardly sloping edge walls on each of the segments. After the segments are cut from the wafer, the segments are placed on top of one another to form a stack. Vertically adjacent segments in the stack are electrically interconnected by applying electrically conductive epoxy to one or more sides of the stack. The inwardly sloping edge walls of each of the segments in the stack provide a recess which allows the electrically conductive epoxy to access the edge bonding pads and lateral circuits on each of the segments once the segments are stacked. A thermally conductive epoxy preform is provided between the stack of segments so that the stack of segments are epoxied together. In one embodiment, the thermally conductive epoxy preform includes a plurality of glass, spheres randomly distributed within the preform to maintain a distance between the stack of segments.
Inventors
- 👤 Alfons Vindasius
- 👤 Kenneth M. Sautter
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 13:19
CPC Classifications
H; H10; H10W; H10W40/00; H10W40/20; H10W40/25; H10W40/251; H01; H01R; H01R29/00; H01R4/00; H01R4/04; H05; H05K; H05K3/00; H05K3/30; H05K3/303; H05K3/305; H05K3/32; H05K3/321; H05K7/00; H05K7/02; H05K7/023; H10D; H10D62/00; H10D62/10; H10D62/117; H10W20/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4473; H10W20/482; H10W20/484; H10W20/49; H10W20/493; H10W70/00; H10W70/60; H10W70/611; H10W70/62; H10W70/641; H10W72/00; H10W72/20; H10W90/00; H10W90/401; H05K2201/00; H05K2201/09; H05K2201/09209; H05K2201/09372; H05K2201/09472; H05K2201/10; H05K2201/10431; H05K2201/10439; H05K2201/10477; H05K2201/10613; H05K2201/10621; H05K2201/10674; H05K2201/10719; H05K2201/10727; H10W46/00; H10W72/01; H10W72/071; H10W72/0711; H10W72/07141; H10W72/072; H10W72/07231; H10W72/07236; H10W72/073; H10W72/07331; H10W72/251; H10W72/30; H10W72/321; H10W72/325; H10W72/351; H10W72/353; H10W72/354; H10W72/834; H10W90/20; H10W90/22; H10W90/284; H10W90/701; H10W90/721; H10W90/722; H10W90/731; H10W90/732; H10W90/751; H10W90/754; Y; Y02; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
156 words
A stack of electrical circuitry, comprising: a stack of segments vertically placed on top of one another, each of said segments including a plurality of edges, a plurality of die having circuitry therein, and electrically conductive contact points; first interconnecting means for interconnecting said plurality of die on each of said segments and for connecting one or more of said plurality of die to one or more of said electrically conductive contact points on each of said segments; access means for providing access to said electrically conductive contact points on each of said segments; second interconnecting means adaptive to said access means for electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and for providing a lateral electrical connection to said plurality of die located in each of said segments in said stack, and a thermally conductive epoxy preform disposed between each of said segments for epoxying said segments together.
Claim 2
Dependent Claim
156 words
A stack of electrical circuitry, comprising: a stack of segments vertically placed on top of one another, each of said segments including a plurality of edges, a plurality of die having circuitry therein, and electrically conductive contact points; first interconnecting means for interconnecting said plurality of die on each of said segments and for connecting one or more of said plurality of die to one or more of said electrically conductive contact points on each of said segments; access means for providing access to said electrically conductive contact points on each of said segments; second interconnecting means adaptive to said access means for electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and for providing a lateral electrical connection to said plurality of die located in each of said segments in said stack, and a thermally conductive epoxy preform disposed between each of said segments for epoxying said segments together.
Claim 3
Dependent Claim
23 words
A stack of electrical circuitry as in claim 1 wherein said preform includes a plurality of glass spheres randomly distributed within said preform.
Claim 4
Dependent Claim
29 words
A stack of electrical circuitry as in claim 2 wherein said electrically conductive contact points are located along one or more of said edges on each of said segments.
Claim 5
Dependent Claim
22 words
A stack of electrical circuitry as in claim 3 wherein said first interconnecting means includes one or more layers of metal traces.
Claim 6
Dependent Claim
23 words
A stack of electrical circuitry as in claim 4 wherein said layer of metal traces includes a sandwich of chrome, titanium-tungsten, and gold.
Claim 7
Dependent Claim
26 words
A stack of electrical circuitry as in claim 5 wherein said access means includes inwardly sloping edge walls along each of said edges of said segments.
Claim 8
Dependent Claim
17 words
A stack of electrical circuitry as in claim 6 wherein said interconnecting means includes electrically conductive epoxy.
Claim 9
Dependent Claim
46 words
A stack of electrical circuitry as in claim 7 wherein each of said segments include control bond pads and wherein said segments are made unique with respect to one another by having a unique pattern formed onto said control bond pads on each of said segments.
Claim 10
Dependent Claim
53 words
A stack of electrical circuitry as in claim 8 wherein said segments include interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on each of said segments are routed so that particular ones of said functioning die replace said non-functioning die.
Claim 11
Dependent Claim
50 words
A stack of electrical circuitry as in claim 9 wherein said stack includes at least two of said segments, each of said two segments includes at least one of said die, said stack having at least one vertical column of said die being of two of said die in height.
Claim 12
Dependent Claim
86 words
A stack of electrical circuitry as in claim 10 wherein said stack includes at least six of said segments, each of said six segments includes at least four of said die, said stack having four vertical columns of said die, each of said vertical columns being six of said die in height, and wherein said electrically conductive epoxy is applied to said six segments such that four of said functioning die are connected in each of said four vertical columns of said die in said stack.
Claim 13
Dependent Claim
41 words
A stack of electrical circuitry as in claim 11 wherein said stack includes between eight and twelve of said segments and each of said segments includes four vertical columns of die so as to form four stacks of eight functioning die.
Claim 14
Dependent Claim
135 words
A stack of electrical circuitry comprising: a stack of segments placed on top of one another, each of said segments having at least three edges defining each one of said segments; a plurality of die on each of said segments, each of said die including a plurality of first bond pads; a plurality of edge bond pads located on one or more of said edges of each of said segments for external electrical connections; a layer of metal traces connected between said plurality of first bond pads to interconnect said die, said metal traces further connected between said plurality of edge bond pads and said plurality of first bond pads to connect said die to said external connections and a thermally conductive epoxy preform disposed between each of said segments for epoxying said segments together.
Claim 15
Dependent Claim
135 words
A stack of electrical circuitry comprising: a stack of segments placed on top of one another, each of said segments having at least three edges defining each one of said segments; a plurality of die on each of said segments, each of said die including a plurality of first bond pads; a plurality of edge bond pads located on one or more of said edges of each of said segments for external electrical connections; a layer of metal traces connected between said plurality of first bond pads to interconnect said die, said metal traces further connected between said plurality of edge bond pads and said plurality of first bond pads to connect said die to said external connections and a thermally conductive epoxy preform disposed between each of said segments for epoxying said segments together.
Claim 16
Dependent Claim
23 words
A stack of electrical circuitry as in claim 13 wherein said preform includes a plurality of glass spheres randomly distributed within said preform.
Claim 17
Dependent Claim
199 words
A stack of electrical circuitry, comprising: a stack of segments placed on top of one another, each of said segments including at least three edges, a plurality of die having circuitry therein, and electrically conductive contact points; first interconnecting means for interconnecting said plurality of die on each of said segments and for connecting one or more of said plurality of die to one or more of said electrically conductive contact points on each of said segments; access means for providing access to said electrically conductive contact points on each of said segments; second interconnecting means adaptive to said access means for electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and for providing a lateral electrical connection to said plurality of die located in each of said segments in said stack, wherein said segments include interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on each of said segments are routed so that particular ones of said functioning die replace said non-functioning die and a thermally conductive epoxy preform disposed between each of said segments for epoxying said segments together.
Claim 18
Dependent Claim
199 words
A stack of electrical circuitry, comprising: a stack of segments placed on top of one another, each of said segments including at least three edges, a plurality of die having circuitry therein, and electrically conductive contact points; first interconnecting means for interconnecting said plurality of die on each of said segments and for connecting one or more of said plurality of die to one or more of said electrically conductive contact points on each of said segments; access means for providing access to said electrically conductive contact points on each of said segments; second interconnecting means adaptive to said access means for electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and for providing a lateral electrical connection to said plurality of die located in each of said segments in said stack, wherein said segments include interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on each of said segments are routed so that particular ones of said functioning die replace said non-functioning die and a thermally conductive epoxy preform disposed between each of said segments for epoxying said segments together.
Claim 19
Dependent Claim
23 words
A stack of electrical circuitry as in claim 15 wherein said preform includes a plurality of glass spheres randomly distributed within said preform.
Claim 20
Dependent Claim
195 words
A stack of electrical circuitry, comprising: a stack of segments placed on top of one another, each of said segments including a plurality of edges, at least one die having circuitry therein, and electrically conductive contact points; first interconnecting means for interconnecting said die on each of said segments and for connecting at least one of said die to at least one of said electrically conductive contact points on each of said segments; access means for providing access to said electrically conductive contact points on each of said segments; and second interconnecting means adaptive to said access means for electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and for providing a lateral electrical connection to said die located in each of said segments in said stack, wherein said segments include interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on each of said segments are routed so that particular ones of said functioning die replace said non-functioning die and a thermally conductive epoxy preform sheet disposed between each of said segments for epoxying said segments together.
Claim 21
Dependent Claim
195 words
A stack of electrical circuitry, comprising: a stack of segments placed on top of one another, each of said segments including a plurality of edges, at least one die having circuitry therein, and electrically conductive contact points; first interconnecting means for interconnecting said die on each of said segments and for connecting at least one of said die to at least one of said electrically conductive contact points on each of said segments; access means for providing access to said electrically conductive contact points on each of said segments; and second interconnecting means adaptive to said access means for electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and for providing a lateral electrical connection to said die located in each of said segments in said stack, wherein said segments include interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on each of said segments are routed so that particular ones of said functioning die replace said non-functioning die and a thermally conductive epoxy preform sheet disposed between each of said segments for epoxying said segments together.
Claim 22
Dependent Claim
25 words
A stack of electrical circuitry as in claim 17 wherein said preform sheet includes a plurality of glass spheres randomly distributed within said preform sheet.
Claim 23
Dependent Claim
166 words
A stack of electrical circuitry, comprising: a stack of segments placed on top of one another, each of said segments including a plurality of edges, at least one die having circuitry therein, and electrically conductive contact points; first interconnecting means for interconnecting said die on each of said segments and for connecting at least one of said die to at least one of said electrically conductive contact points on each of said segments; access means for providing access to said electrically conductive contact points on each of said segments; and second interconnecting means adaptive to said access means for electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and for providing a lateral electrical connection to said die located in each of said segments in said stack, and a thermally conductive epoxy preform sheet disposed between each of said segments for epoxying said segments together, said preform sheet including a plurality of glass spheres randomly distributed within said preform sheet.
Claim 24
Dependent Claim
166 words
A stack of electrical circuitry, comprising: a stack of segments placed on top of one another, each of said segments including a plurality of edges, at least one die having circuitry therein, and electrically conductive contact points; first interconnecting means for interconnecting said die on each of said segments and for connecting at least one of said die to at least one of said electrically conductive contact points on each of said segments; access means for providing access to said electrically conductive contact points on each of said segments; and second interconnecting means adaptive to said access means for electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and for providing a lateral electrical connection to said die located in each of said segments in said stack, and a thermally conductive epoxy preform sheet disposed between each of said segments for epoxying said segments together, said preform sheet including a plurality of glass spheres randomly distributed within said preform sheet.
Claim 25
Dependent Claim
74 words
A stack of electrical circuitry, comprising: a stack of die placed on top of one another, each of said die including one or more edges and electrically conductive contact points; interconnecting means for electrically interconnecting at least one of said die to at least one of said electrically conductive contact points; and a thermally conductive epoxy preform sheet disposed between each of said die in said stack of die for epoxying said die together.
Claim 26
Dependent Claim
74 words
A stack of electrical circuitry, comprising: a stack of die placed on top of one another, each of said die including one or more edges and electrically conductive contact points; interconnecting means for electrically interconnecting at least one of said die to at least one of said electrically conductive contact points; and a thermally conductive epoxy preform sheet disposed between each of said die in said stack of die for epoxying said die together.
Claim 27
Dependent Claim
25 words
A stack of electrical circuitry as in claim 20 wherein said preform sheet includes a plurality of glass spheres randomly distributed within said preform sheet.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-09-26 | 2004-03-27 | 2004-09-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-09-26 | 2008-03-27 | 2008-09-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-09-26 | 2012-03-27 | 2012-09-26 | $7700.00 | Window Closed / Lapsed |