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EP0178227A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Integrated circuit semiconductor device formed on a wafer

Assignee: Fujitsu Ltd
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Filing: 1985-10-04
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Granted: —
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Expires: 2005-10-04
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Abstract

Abstract An integrated circuit semiconductor device of very large scale (VLSI) formed in a wafer, namely a wafer IC, is disclosed having circuit blocks (2) arranged in a matrix fashion and isolated from each other by an intermediate area locating between the circuit blocks. The circuit blocks are connected to interconnecting circuitformed on an insulative film (10) in order to complete the wafer lC. The connection is performed by bonding corresponding bonding pads (4, 9, 6B, 11B) disposed on the circuit blocks (2), repair chip (8) and interconnecting circuit (6) by a conventional bonding process. With this structure of the wafer lC, the individual circuit blocks can be easily accessed in advance by a computer aided testing apparatus and the defective circuit blocks can be replaced by repair chips prepared in advance, without needing any additional work on the interconnecting circuits. The bonding pads disposed on the circuit blocks and repair chips are arranged in a predetermined layout pattern to allow interchangeability, the replacement of a defective circuit block being possible regardless of its location. The flexibility of the interconnecting film allows the protruding top surface of the repair chip to be accommodated to.

Inventors

  • 👤 Tetsu Tanizawa

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-24 11:19
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/611; H10W70/67; H10W70/688; H10W72/00; H10W72/071; H10W72/072; H10W72/07251; H10W72/20; H10W72/50; H10W72/531; H10W72/5363; H10W90/00; H10W90/701; H10W90/721; H10W90/724; H10W90/751; H10W90/754

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 99 words
An integrated circuit semiconductor device characterized in that it comprises : a semiconductor wafer (1) having a plurality of circuit blocks (2) formed therein and an intermediate area (3) formed in said semiconductor wafer between said circuit blocks, electrically isolating said circuit blocks from each other; and an interconnecting film comprising an insulating film (5;10;15) and an interconnecting circuit (6) formed on a surface of said insulative film, said interconnecting film being placed on said semiconductor wafer in alignment with each other, and said interconnecting circuit being connected to said circuit blocks to complete said integrated circuit semiconductor device.
Claim 2
Dependent Claim 99 words
An integrated circuit semiconductor device characterized in that it comprises : a semiconductor wafer (1) having a plurality of circuit blocks (2) formed therein and an intermediate area (3) formed in said semiconductor wafer between said circuit blocks, electrically isolating said circuit blocks from each other; and an interconnecting film comprising an insulating film (5;10;15) and an interconnecting circuit (6) formed on a surface of said insulative film, said interconnecting film being placed on said semiconductor wafer in alignment with each other, and said interconnecting circuit being connected to said circuit blocks to complete said integrated circuit semiconductor device.
Claim 3
Dependent Claim 82 words
An integrated circuit semiconductor device according to claim 1, characterized in that each of said circuit blocks (2) has a plurality of first bonding means (4) having a predetermined layout pattern thereon, said interconnecting circuit (6) has a plurality of second bonding means (6B) on a surface of said insulative film arranged to correspond to said first bonding means, and said second bonding means are bonded respectively to said corresponding first bonding means, thus connecting said circuit blocks to said interconnecting circuit.
Claim 4
Dependent Claim 26 words
An integrated circuit semiconductor device according to any one of claims 1 and 2, characterized in that said circuit blocks are arranged in a matrix fashion.
Claim 5
Dependent Claim 165 words
An integrated circuit semiconductor device, characterized in that it comprises : a semiconductor wafer (1) having a plurality of circuit blocks (2) formed therein containing a defective circuit block and an intermediate area (3) formed in said semiconductor wafer between said circuit blocks, electrically isolating said circuit blocks from each other ; a flexible interconnecting film comprising a flexible insulative film (10) and an interconnecting circuit (6) formed on said flexible insulative film; and a repair chip (8) bonded on said defective circuit block, said repair chip having a replaceable circuit with that of said defective circuit block, said flexible interconnecting film being placed on said semiconductor wafer and said repair chip in alignment with each other and said interconnecting circuit being connected to said circuit blocks and to said repair chip to complete said integrated circuit semiconductor device, the protruding top surface of said repair chip being wrapped by said flexible interconnecting film by the aid of the deformation of said flexible insulative film.
Claim 6
Dependent Claim 165 words
An integrated circuit semiconductor device, characterized in that it comprises : a semiconductor wafer (1) having a plurality of circuit blocks (2) formed therein containing a defective circuit block and an intermediate area (3) formed in said semiconductor wafer between said circuit blocks, electrically isolating said circuit blocks from each other ; a flexible interconnecting film comprising a flexible insulative film (10) and an interconnecting circuit (6) formed on said flexible insulative film; and a repair chip (8) bonded on said defective circuit block, said repair chip having a replaceable circuit with that of said defective circuit block, said flexible interconnecting film being placed on said semiconductor wafer and said repair chip in alignment with each other and said interconnecting circuit being connected to said circuit blocks and to said repair chip to complete said integrated circuit semiconductor device, the protruding top surface of said repair chip being wrapped by said flexible interconnecting film by the aid of the deformation of said flexible insulative film.
Claim 7
Dependent Claim 99 words
An integrated circuit semiconductor device according to claim 4, characterized in that each of said circuit blocks (2) and said repair chip (8) has a plurality of first bonding means (4,9) arranged in a predetermined layout pattern thereon, said interconnecting circuit (6) formed on said flexible insulative film has a plurality of second bonding means (6B, 11B) on a surface of said insulative film corresponding to said first bonding means, and said corresponding first bonding means and said second bonding means are bonded to each other, thus connecting said circuit blocks and said repair chip to said interconnecting circuit.
Claim 8
Dependent Claim 30 words
An integrated circuit semiconductor device according to any one of claims 4 and 5, characterized in that said circuit blocks and said repair chip are arranged in a matrix fashion.
Claim 9
Dependent Claim 222 words
An integrated circuit semiconductor device characterized in that it comprises : a semiconductor wafer (1) having a plurality of circuit blocks (2) formed therein containing a defective circuit block and an intermediate area (3) formed in said semiconductor wafer between said circuit blocks, electrically isolating said circuit blocks from each other; a repair chip (8) bonded on said defective circuit block, said repair chip having a replaceable circuit with that of said defective one; an interconnecting film comprising an insulative film (15) and an interconnecting circuit (6) formed thereon, said interconnecting film having a hole (7) opened at the location corresponding to said defective circuit block in said semiconductor wafer, said hole having a size slightly larger than that of said repair chip; and a repair film comprising an insulative film (20) and a plurality of connecting means (16A, 16B) formed on a surface of said insulative film for connecting said repair chip to said interconnecting circuit (6) of said interconnecting film, said interconnecting film being placed on said semiconductor wafer in alignment with said circuit blocks of said semiconductor wafer, and said interconnecting circuit thereon being connected to said circuit blocks of said semiconductor wafer except said repair chip, and said repair film being placed on said repair chip in alignment therewith for connecting said repair chip to said interconnecting circuit.
Claim 10
Dependent Claim 222 words
An integrated circuit semiconductor device characterized in that it comprises : a semiconductor wafer (1) having a plurality of circuit blocks (2) formed therein containing a defective circuit block and an intermediate area (3) formed in said semiconductor wafer between said circuit blocks, electrically isolating said circuit blocks from each other; a repair chip (8) bonded on said defective circuit block, said repair chip having a replaceable circuit with that of said defective one; an interconnecting film comprising an insulative film (15) and an interconnecting circuit (6) formed thereon, said interconnecting film having a hole (7) opened at the location corresponding to said defective circuit block in said semiconductor wafer, said hole having a size slightly larger than that of said repair chip; and a repair film comprising an insulative film (20) and a plurality of connecting means (16A, 16B) formed on a surface of said insulative film for connecting said repair chip to said interconnecting circuit (6) of said interconnecting film, said interconnecting film being placed on said semiconductor wafer in alignment with said circuit blocks of said semiconductor wafer, and said interconnecting circuit thereon being connected to said circuit blocks of said semiconductor wafer except said repair chip, and said repair film being placed on said repair chip in alignment therewith for connecting said repair chip to said interconnecting circuit.
Claim 11
Dependent Claim 208 words
An integrated circuit semiconductor device according to claim 7, characterized in that each of said circuit blocks and said repair chip has a plurality of first bonding means (4,9) arranged in a first predetermined layout pattern, said interconnecting circuit formed on said insulative film has a plurality of second bonding means (6B) arranged in said first predetermined layout pattern corresponding to said first bonding means, and a plurality of third bonding means (6A) arranged in a second predetermined layout pattern, each of said second bonding means being connected to a corresponding one of said third bonding means, each of said connecting means formed on said repair film comprises a fourth bonding means (16A), fifth bonding means (16B) and a conductor connecting said fourth bonding means to said fifth bonding means, said fourth bonding means being arranged in said first predetermined layout pattern and said fifth bonding means being arranged in said second predetermined layout pattern, said second bonding means (6B) are bonded to said corresponding first bonding means (4), thus connecting circuit blocks to said interconnecting circuit, said fourth bonding means (16A) are bonded to said corresponding first bonding means (9) of said repair chip, said fifth bonding means (16B) are bonded to said third bonding means (6A).
Claim 12
Dependent Claim 30 words
An integrated circuit semiconductor device according to any one of claims 7 and 8, characterized in that said circuit blocks and said repair chip are arranged in a matrix fashion.
Claim 13
Dependent Claim 41 words
An integrated circuit semiconductor device according to any one of claims 7 to 9, characterized in that said interconnecting wiring (6) is formed only on a portion of said surface of said insulating film facing said intermediate area of said wafer.
Claim 14
Dependent Claim 39 words
An integrated circuit semiconductor according to any one of claims 8 to 10, characterized in that said repair film has a plurality of said connecting means corresponding to each one of all the circuit blocks of said semiconductor wafer.
Claim 15
Dependent Claim 29 words
An integrated circuit semiconductor device according to any one of the preceding claims, characterized in that said insulative film (5;10;15) is made of a macromolecular compound such as polyimide.
Claim 16
Dependent Claim 22 words
An integrated circuit semiconductor device according to any one of the preceding claims, characterized in that said insulative film (5;10;15) is transparent.

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