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US5908947A
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Difunctional amino precursors for the deposition of films comprising metals
Assignee: Micron Technology Inc
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Filing: 1997-08-21
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Granted: 1999-06-01
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Expires: 2017-08-21
Abstract
Abstract Improved precursors for use in chemical vapor deposition of thin films of low-valent metals are provided, which are sterically saturated and protected from attack of the coreactant in the gas phase. Specific precursors have the formulae: (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y N(R.sup.4 R 5 )) z (I) (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y O(R 4 )) z (II) (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y S(R 4 )) z (III) wherein L is an auxiliary ligand; x is 0-6; M is a metal of valence 1 to 5; n is the oxidation state of the metal; R 1 , R 2 , R 3 , R 4 and R 5 are hydrogen or (C 1 -C 12 ) alkyl groups; y is 1-5, z is 1-n.
Inventors
- 👤 Brian A. Vaartstra
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 07:31
CPC Classifications
C; C07; C07F; C07F7/00; C07F7/003
Claims Analysis
Total Claims: 44
Claim 1
Independent Claim
73 words
A compound of formula (I) (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y N(R.sup.4 R.sup.5)).sub.z (I) wherein (a) L is an auxiliary ligand; (b) x is 0-6; (c) M is a low-valent metal; (d) n is the oxidation state of the metal; (e) each of R 1 , R 2 , R 3 , R 4 and R 5 are hydrogen or (C 1 -C 12 ) alkyl; (f) y is 1-5; and (g) z is 1-n.
Claim 2
Dependent Claim
73 words
A compound of formula (I) (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y N(R.sup.4 R.sup.5)).sub.z (I) wherein (a) L is an auxiliary ligand; (b) x is 0-6; (c) M is a low-valent metal; (d) n is the oxidation state of the metal; (e) each of R 1 , R 2 , R 3 , R 4 and R 5 are hydrogen or (C 1 -C 12 ) alkyl; (f) y is 1-5; and (g) z is 1-n.
Claim 3
Dependent Claim
31 words
The compound of claim 1 wherein M is aluminum, barium, calcium, chromium, gallium, hafnium, indium, lanthanide, lanthanum, magnesium, molybdenum, niobium potassium, scandium, sodium, strontium, tantalum, titanium, tungsten, vanadium, yttrium or zirconium.
Claim 4
Dependent Claim
11 words
The compound of claim 2 wherein M is tantalum or aluminum.
Claim 5
Dependent Claim
9 words
The compound of claim 3 wherein M is tantalum.
Claim 6
Dependent Claim
14 words
The compound of claim 1 wherein L is a neutral, monoanionic or dianionic ligand.
Claim 7
Dependent Claim
11 words
The compound of claim 5 wherein L is a neutral ligand.
Claim 8
Dependent Claim
29 words
The compound of claim 6 wherein L is a trialkylamine, an alkene, a diene, a cyclic diene, a cyclic triene, an ether, a polyether, a polyamine or an alkyne.
Claim 9
Dependent Claim
11 words
The compound of claim 5 wherein L is a monoanionic ligand.
Claim 10
Dependent Claim
29 words
The compound of claim 8 wherein L is a dialkylamino, an alkoxy, a thiolate, a selenolate, an alkyl or cyclic alkyl, an alkenyl or cyclic alkenyl, or a trialkylsilyl.
Claim 11
Dependent Claim
22 words
The compound of claim 9 wherein L is a dialkylamino, an alkoxy, an alkyl or cyclic alkyl, an alkenyl or cyclic alkenyl.
Claim 12
Dependent Claim
11 words
The compound of claim 5 wherein L is a dianionic ligand.
Claim 13
Dependent Claim
17 words
The compound of claim 11 wherein L is an oxy, a sulfido, a selenido, or an imido.
Claim 14
Dependent Claim
10 words
The compound of claim 12 wherein L is an oxy.
Claim 15
Dependent Claim
42 words
The compound of claim 1 wherein R 1 , R 4 and R 5 are each CH 3 , R 2 and R 3 are hydrogen, x is 4, y is 3, z is 1, M is tantalum and L is ethoxy.
Claim 16
Dependent Claim
42 words
The compound of claim 1 wherein R 1 , R 4 and R 5 are each CH 3 , R 2 and R 3 are hydrogen, x is 2, y is 2, z is 1, M is aluminum and L is dimethylamino.
Claim 17
Dependent Claim
69 words
A compound of formula (II) (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y O(R.sup.4)).sub.z(II) wherein (a) L is an auxiliary ligand; (b) x is 0-6; (c) M is a low-valent metal; (d) n is the oxidation state of the metal; (e) each of R 1 , R 2 , R 3 , and R 4 are hydrogen or (C 1 -C 12 ) alkyl; (f) y is 1-5; and (g) z is 1-n.
Claim 18
Dependent Claim
69 words
A compound of formula (II) (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y O(R.sup.4)).sub.z(II) wherein (a) L is an auxiliary ligand; (b) x is 0-6; (c) M is a low-valent metal; (d) n is the oxidation state of the metal; (e) each of R 1 , R 2 , R 3 , and R 4 are hydrogen or (C 1 -C 12 ) alkyl; (f) y is 1-5; and (g) z is 1-n.
Claim 19
Dependent Claim
30 words
The compound of claim 16 wherein M is aluminum, barium, calcium, chromium, gallium, hafnium, indium, lanthanide, lanthanum, magnesium, molybdenum, niobium, potassium, scandium, sodium, strontium, tantalum, titanium, tungsten, yttrium or zirconium.
Claim 20
Dependent Claim
11 words
The compound of claim 17 wherein M is tantalum or aluminum.
Claim 21
Dependent Claim
9 words
The compound of claim 18 wherein M is tantalum.
Claim 22
Dependent Claim
14 words
The compound of claim 16 wherein L is a neutral, monoanionic or dianionic ligand.
Claim 23
Dependent Claim
11 words
The compound of claim 20 wherein L is a neutral ligand.
Claim 24
Dependent Claim
29 words
The compound of claim 21 wherein L is a trialkylamine, an alkene, a diene, a cyclic diene, a cyclic triene, an ether, a polyether, a polyamine or an alkyne.
Claim 25
Dependent Claim
11 words
The compound of claim 20 wherein L is a monoanionic ligand.
Claim 26
Dependent Claim
29 words
The compound of claim 23 wherein L is a dialkylamino, an alkoxy, a thiolate, a selenolate, an alkyl or cyclic alkyl, an alkenyl or cyclic alkenyl, or a trialkylsilyl.
Claim 27
Dependent Claim
22 words
The compound of claim 24 wherein L is a dialkylamino, an alkoxy, an alkyl or cyclic alkyl, an alkenyl or cyclic alkenyl.
Claim 28
Dependent Claim
11 words
The compound of claim 20 wherein L is a dianionic ligand.
Claim 29
Dependent Claim
17 words
The compound of claim 26 wherein L is an oxy, a sulfido, a selenido, or an imido.
Claim 30
Dependent Claim
10 words
The compound of claim 27 wherein L is an oxy.
Claim 31
Dependent Claim
69 words
A compound of formula (III) (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y S(R.sup.4)).sub.z(III) wherein (a) L is an auxiliary ligand; (b) x is 0-6; (c) M is a low-valent metal; (d) n is the oxidation state of the metal; (e) each of R 1 , R 2 , R 3 , and R 4 are hydrogen or (C 1 -C 12 ) alkyl; (f) y is 1-5; and (g) z is 1-n.
Claim 32
Dependent Claim
69 words
A compound of formula (III) (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y S(R.sup.4)).sub.z(III) wherein (a) L is an auxiliary ligand; (b) x is 0-6; (c) M is a low-valent metal; (d) n is the oxidation state of the metal; (e) each of R 1 , R 2 , R 3 , and R 4 are hydrogen or (C 1 -C 12 ) alkyl; (f) y is 1-5; and (g) z is 1-n.
Claim 33
Dependent Claim
31 words
The compound of claim 29 wherein M is aluminum, barium, calcium, chromium, gallium, hafnium, indium, lanthanide, lanthanum, magnesium, molybdenum, niobium, potassium, scandium, sodium, strontium, tantalum, titanium, tungsten, vanadium, yttrium or zirconium.
Claim 34
Dependent Claim
11 words
The compound of claim 30 wherein M is tantalum or aluminum.
Claim 35
Dependent Claim
9 words
The compound of claim 31 wherein M is tantalum.
Claim 36
Dependent Claim
14 words
The compound of claim 29 wherein L is a neutral, monoanionic or dianionic ligand.
Claim 37
Dependent Claim
11 words
The compound of claim 33 wherein L is a neutral ligand.
Claim 38
Dependent Claim
29 words
The compound of claim 34 wherein L is a trialkylamine, an alkene, a diene, a cyclic diene, a cyclic triene, an ether, a polyether, a polyamine or an alkyne.
Claim 39
Dependent Claim
11 words
The compound of claim 33 wherein L is a monoanionic ligand.
Claim 40
Dependent Claim
29 words
The compound of claim 36 wherein L is a dialkylamino, an alkoxy, a thiolate, a selenolate, an alkyl or cyclic alkyl, an alkenyl or cyclic alkenyl, or a trialkylsilyl.
Claim 41
Dependent Claim
22 words
The compound of claim 37 wherein L is a dialkylamino, an alkoxy, an alkyl or cyclic alkyl, an alkenyl or cyclic alkenyl.
Claim 42
Dependent Claim
11 words
The compound of claim 33 wherein L is a dianionic ligand.
Claim 43
Dependent Claim
17 words
The compound of claim 39 wherein L is an oxy, a sulfido, a selenido, or an imido.
Claim 44
Dependent Claim
10 words
The compound of claim 40 wherein L is an oxy.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-05-31 | 2002-11-30 | 2003-06-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-05-31 | 2006-11-30 | 2007-06-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-05-31 | 2010-11-30 | 2011-06-01 | $7700.00 | Window Closed / Lapsed |