US5314727A
Expired / Lapsed
US
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Chemical vapor deposition of iron, ruthenium, and osmium
Assignee: MINNESOTA MINING and Manufacturing CO /REGENTS OF UNIVERSITY OF MINNESOTA
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Filing: 1992-07-28
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Granted: 1994-05-24
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Expires: 2012-07-28
Abstract
Abstract A method is provided for forming films comprising Fe, Ru or Os employing the techniques of chemical vapor deposition to decompose a vapor comprising an organometallic compound of the formula (a): (CO) 4 ML or (b): M 2 [μ-η:η 4 -C 4 ](CO) 6 ; wherein L is a two-electron donor ligand and each R is H, halo, OH, alkyl, perfluoroalkyl or aryl; so as to deposit a coating comprising one or more of said metals on the surface of a substrate.
Inventors
- 👤 Fred B. McCormick
- 👤 Wayne L. Gladfelter
- 👤 Yoshihide Senzaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 05:35
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/06; C23C16/18
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
87 words
A method for applying a metal film on the surface of a substrate comprising employing the techniques of chemical vapor deposition to decompose a vapor comprising a compound of the formula: ##STR2## wherein (a) each M is Fe, Ru or Os; and (b) each R is H, OH, halo, (C 1 -C 10 )alkyl, (C 1 -C 10 )perfluoroalkyl, (C 6 -C 10 )aryl or two R taken together are benzo; so as to deposit a film comprising Fe, Ru, Os or mixtures thereof on said surface.
Claim 2
Independent Claim
87 words
A method for applying a metal film on the surface of a substrate comprising employing the techniques of chemical vapor deposition to decompose a vapor comprising a compound of the formula: ##STR2## wherein (a) each M is Fe, Ru or Os; and (b) each R is H, OH, halo, (C 1 -C 10 )alkyl, (C 1 -C 10 )perfluoroalkyl, (C 6 -C 10 )aryl or two R taken together are benzo; so as to deposit a film comprising Fe, Ru, Os or mixtures thereof on said surface.
Claim 3
Dependent Claim
13 words
The method of claim 1 wherein both M are Fe, Ru or Os.
Claim 4
Dependent Claim
12 words
The method of claim 2 wherein both M are Ru or Os.
Claim 5
Independent Claim
25 words
The method of claims 2 or 3 wherein R is H, OH, halo, (C 1 -C 6 )alkyl, (C 1 -C 6 )perfluoroalkyl and phenyl.
Claim 6
Dependent Claim
13 words
The method of claim 4 wherein R is H, trifluoromethyl, phenyl or methyl.
Claim 7
Dependent Claim
15 words
The method of claim 1 wherein the deposition is carried out at about 150°-700° C.
Claim 8
Dependent Claim
15 words
The method of claim 6 wherein the deposition is carried out at about 300°-600° C.
Claim 9
Dependent Claim
18 words
The method of claim 1 wherein the deposition is carried out under a vacuum of about 1-100 mtorr.
Claim 10
Dependent Claim
20 words
The method of claim 1 wherein the decomposition of the vapor is induced thermally, photolytically or both thermally and photolytically.
Claim 11
Dependent Claim
21 words
The method of claim 1 further comprising employing a carrier gas to transport the vapor to the surface of the substrate.
Claim 12
Dependent Claim
15 words
The method of claim 1 wherein the film consists essentially of Ru, Os or Fe.
Claim 13
Dependent Claim
14 words
The method of claim 11 wherein the film consists essentially of Ru or Os.
Claim 14
Dependent Claim
32 words
The method of claim 1 wherein the vapor further comprises an amount of an oxidizing agent effective to deposit a film of ruthenium oxide, osmium oxide or iron oxide on said surface.
Claim 15
Dependent Claim
23 words
The method of claim 13 wherein the oxidizing agent is provided by CO 2 , N 2 O, tetrahydrofuran, oxygen, air or steam.
Claim 16
Dependent Claim
15 words
The method of claim 13 wherein the oxidizing agent is mixed with a carrier gas.
Claim 17
Dependent Claim
23 words
The method of claim 1 wherein a coherent conformal film comprising Ru, Os or Fe is deposited on a substrate of irregular topography.
Claim 18
Dependent Claim
15 words
The method of claim 1 wherein the film consists essentially of Ru, Os or Fe.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-23 | 1997-11-22 | 1998-05-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-23 | 2001-11-22 | 2002-05-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-23 | 2005-11-22 | 2006-05-24 | $7700.00 | Window Closed / Lapsed |