US5377429A
Expired / Lapsed
US
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Method and appartus for subliming precursors
Assignee: Micron Technology Inc
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Filing: 1993-04-19
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Granted: 1995-01-03
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Expires: 2013-04-19
Abstract
Abstract An improved method and apparatus are provided for subliming solid precursors, and especially organometallic precursors, for use in a chemical vapor deposition (CVD) process. The sublimation apparatus includes a sealed vessel having a vacuum chamber. A quantity of the solid precursor is mixed with a loosely packed particulate material, such as ceramic beads, placed within the vacuum chamber. The vacuum chamber and particulate material are heated. A supply of a carrier gas is directed through the particulate material (particularly through pockets formed in the particulate material) to sublime the precursor which coats the individual particles of particulate material. By agitating the particulate material, a relatively constant sublimation area is maintained. Agitation of the particulate material may be with a mechanical stirrer or by directing an a.c. field through a piezoelectric particulate material.
Inventors
- 👤 Gurtej S. Sandhu
- 👤 Scott G. Meikle
- 👤 Donald L. Westmoreland
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:59
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C23C16/4481; B; B01; B01D; B01D7/00
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
145 words
An apparatus for subliming a solid precursor comprising: a sealable container having a vacuum chamber connected to a vacuum source and to a supply of a carrier gas; a particulate material placed within the container and formed of individual particles of a size and shape to provide a large total sublimation area for a precursor material which coats the individual particles and with the individual particles loosely packed together to provide pockets between adjacent particles; gas flow means associated with the container for directly the carrier gas through the particulate material and for directing a precursor gas from the vacuum chamber; heating means associated with the container for heating the vacuum chamber and particulate material; and agitating means associated with the container for agitating the particulate material so that the carrier gas can move through the particulate material to provide a relatively constant sublimation area.
Claim 2
Independent Claim
145 words
An apparatus for subliming a solid precursor comprising: a sealable container having a vacuum chamber connected to a vacuum source and to a supply of a carrier gas; a particulate material placed within the container and formed of individual particles of a size and shape to provide a large total sublimation area for a precursor material which coats the individual particles and with the individual particles loosely packed together to provide pockets between adjacent particles; gas flow means associated with the container for directly the carrier gas through the particulate material and for directing a precursor gas from the vacuum chamber; heating means associated with the container for heating the vacuum chamber and particulate material; and agitating means associated with the container for agitating the particulate material so that the carrier gas can move through the particulate material to provide a relatively constant sublimation area.
Claim 3
Dependent Claim
34 words
The apparatus as claimed in claim 1 and wherein the agitating means comprises a rotatable impeller in contact with the particulate material for moving the particulate material back and forth and up and down.
Claim 4
Dependent Claim
17 words
The apparatus as claimed in claim 1 and wherein the particulate material is formed of ceramic beads.
Claim 5
Dependent Claim
43 words
The apparatus as claimed in claim 1 and wherein the particulate material is formed of piezoelectric particles and the agitating means comprises electrodes connected to an a.c. power supply for generating an a.c. field through the piezoelectric particles for vibrating the piezoelectric particles.
Claim 6
Dependent Claim
23 words
The apparatus as claimed in claim 1 and wherein the heating means comprises an induction heating coil coupled to an rf power supply.
Claim 7
Independent Claim
128 words
An apparatus for subliming an organometallic precursor comprising: a container having a sealable vacuum chamber connected to a vacuum source, to a supply of a carrier gas and to an outlet for directing a precursor gas out of the vacuum chamber; a particulate material placed within the vacuum chamber and formed of separate particles with pockets between adjacent particles for circulating the carrier gas through the particulate material; an organometallic precursor placed within the particulate material and adapted to coat the particulate material to provide a relatively large surface area for sublimation; agitating means for agitating the particulate material to allow the carrier gas to circulate through the precursor coated particulate material and contact the precursor; and heating means for heating the vacuum chamber, particulate material and precursor.
Claim 8
Independent Claim
128 words
An apparatus for subliming an organometallic precursor comprising: a container having a sealable vacuum chamber connected to a vacuum source, to a supply of a carrier gas and to an outlet for directing a precursor gas out of the vacuum chamber; a particulate material placed within the vacuum chamber and formed of separate particles with pockets between adjacent particles for circulating the carrier gas through the particulate material; an organometallic precursor placed within the particulate material and adapted to coat the particulate material to provide a relatively large surface area for sublimation; agitating means for agitating the particulate material to allow the carrier gas to circulate through the precursor coated particulate material and contact the precursor; and heating means for heating the vacuum chamber, particulate material and precursor.
Claim 9
Dependent Claim
15 words
The apparatus as claimed in claim 6 and wherein the particulate material comprises ceramic beads.
Claim 10
Dependent Claim
25 words
The apparatus as claimed in claim 7 and wherein the ceramic beads are generally spherical in shape and have a diameter of about 1-2 mm.
Claim 11
Dependent Claim
23 words
The apparatus as claimed in claim 6 and wherein the agitating means comprises a motorized rotatable impeller in contact with the particulate material.
Claim 12
Dependent Claim
21 words
The apparatus as claimed in claim 6 and wherein the agitating means comprises a vibrating means for vibrating the particulate material.
Claim 13
Dependent Claim
39 words
The apparatus as claimed in claim 10 and wherein the particulate material comprises piezoelectric particles and the vibrating means comprises electrodes connected to an a.c. power supply and adapted to generate an a.c. field for vibrating the piezoelectric particles.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-02 | 1998-07-04 | 1999-01-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-02 | 2002-07-04 | 2003-01-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-02 | 2006-07-04 | 2007-01-03 | $7700.00 | Window Closed / Lapsed |