US4916828A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of producing saturated vapor of solid metal organic compounds in the metal organic chemical vapor deposition method
Assignee: Tosoh Finechem Corp
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Filing: 1989-07-05
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Granted: 1990-04-17
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Expires: 2009-07-05
Abstract
Abstract A method of producing saturated vapor of solid metal organic compounds in the metal organic chemical vapor deposition method is disclosed, which is characterized in that, into a cylinder for metal organic chemical vapor deposition having a structure that an introducing port and a discharging port of carrier gas are provided respectively to the cylinder for metal organic chemical vapor deposition and a tube directly connected to either of these is inserted into the cylinder, a solid metal organic compound and a packing material are charged and a carrier gas fed from introducing port into cylinder is discharged from discharging port to outside of cylinder.
Inventors
- 👤 Akira Yamane
- 👤 Masao Fujisawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 23:07
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/14; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C23C16/4481; Y; Y10; Y10T; Y10T137/00; Y10T137/4891
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
100 words
A method of producing saturated vapor of solid metal organic compounds in the metal organic chemical vapor deposition method, characterized in that, into a cylinder for metal organic chemical deposition having a structure that an introducing port and a discharging port of carrier gas are provided respectively to the cylinder for metal organic chemical vapor deposition and a tube directly connected to either of these is inserted into the cylinder, a solid metal organic compound and a packing material are charged and a carrier gas fed from introducing port into cylinder is discharged from discharging port to outside of cylinder.
Claim 2
Independent Claim
100 words
A method of producing saturated vapor of solid metal organic compounds in the metal organic chemical vapor deposition method, characterized in that, into a cylinder for metal organic chemical deposition having a structure that an introducing port and a discharging port of carrier gas are provided respectively to the cylinder for metal organic chemical vapor deposition and a tube directly connected to either of these is inserted into the cylinder, a solid metal organic compound and a packing material are charged and a carrier gas fed from introducing port into cylinder is discharged from discharging port to outside of cylinder.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-04-16 | 1993-10-16 | 1994-04-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-04-16 | 1997-10-16 | 1998-04-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-04-16 | 2001-10-16 | 2002-04-17 | $7700.00 | Window Closed / Lapsed |