US5659057A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Five- and six-coordinate precursors for titanium nitride deposition
Assignee: Micron Technology Inc
•
Filing: 1996-02-09
•
Granted: 1997-08-19
•
Expires: 2016-02-09
Abstract
Abstract Improved precursors for use in chemical vapor deposition of thin films of titanium-based materials are provided, which are either 5- or 6-coordinate and thus sterically saturated and protected from attack of the coreactant in the gas phase. Specific precursors have the formula Ti[N(R 1 )(R 2 )] x [(R 3 )N--C(R 4 )(R 5 )--C(R 6 )(R 7 )--N(R 8 )(R 9 )] y wherein each of R 1 , R 2 , R 3 , R 8 and R 9 are (C 1 -C 4 ) alkyl, each of R 4 , R 5 , R 6 , and R 7 are each H or (C 1 -C 4 ) alkyl and x and y are 1-3. The thin films produced include titanium nitride and amorphous titanium-silicon-nitride.
Inventors
- 👤 Brian A. Vaartstra
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:18
CPC Classifications
C; C07; C07F; C07F7/00; C07F7/003
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
66 words
A compound of formula (I): Ti[N(R.sup.1)(R.sup.2)].sub.x [(R.sup.3)N--C(R.sup.4)(R.sup.5)--C(R.sup.6)(R.sup.7)--N(R.sup.8)(R.sup.9)].sub.y wherein (a) each of R 1 , R 2 , R 3 , R 8 and R 9 are (C 1 -C 4 ) alkyl; (b) each of R 4 , R 5 , R 6 , and R 7 are each H or (C 1 -C 4 ) alkyl; and (c) each of x and y are 1-3.
Claim 2
Dependent Claim
66 words
A compound of formula (I): Ti[N(R.sup.1)(R.sup.2)].sub.x [(R.sup.3)N--C(R.sup.4)(R.sup.5)--C(R.sup.6)(R.sup.7)--N(R.sup.8)(R.sup.9)].sub.y wherein (a) each of R 1 , R 2 , R 3 , R 8 and R 9 are (C 1 -C 4 ) alkyl; (b) each of R 4 , R 5 , R 6 , and R 7 are each H or (C 1 -C 4 ) alkyl; and (c) each of x and y are 1-3.
Claim 3
Dependent Claim
44 words
The compound of claim 1 wherein R 4 , R 5 , R 6 , and R 7 are each H and wherein R 1 , R 2 , R 3 , R 8 and R 9 are (C 1 -C 4 ) alkyl.
Claim 4
Dependent Claim
25 words
The compound of claim 2 wherein R 1 , R 2 , R 3 , R 8 and R 9 are each CH 3 .
Claim 5
Dependent Claim
13 words
The compound of claim 3 wherein x is 2 and y is 2.
Claim 6
Dependent Claim
13 words
The compound of claim 3 wherein x is 3 and y is 1.
Claim 7
Dependent Claim
90 words
A compound of formula (I) Ti[N(R.sup.1)(R.sup.2)].sub.x [(R.sup.3)N--C(R.sup.4)(R.sup.5)--C(R.sup.6)(R.sup.7)--N(R.sup.8)(R.sup.9)].sub.y wherein (a) each of R 1 , R 2 , R 3 , R 8 and R 9 are (C 1 -C 4 ) alkyl; (b) cash of R 4 , R 5 , R 6 , and R 7 are each H or (C 1 -C 4 ) alkyl; (c) each of x and y are 1-3; and (d) wherein, optionally, the carbon chain of each (C 1 -C 4 ) alkyl is interrupted by 1-3N, non-peroxide O, Si or mixtures thereof.
Claim 8
Dependent Claim
90 words
A compound of formula (I) Ti[N(R.sup.1)(R.sup.2)].sub.x [(R.sup.3)N--C(R.sup.4)(R.sup.5)--C(R.sup.6)(R.sup.7)--N(R.sup.8)(R.sup.9)].sub.y wherein (a) each of R 1 , R 2 , R 3 , R 8 and R 9 are (C 1 -C 4 ) alkyl; (b) cash of R 4 , R 5 , R 6 , and R 7 are each H or (C 1 -C 4 ) alkyl; (c) each of x and y are 1-3; and (d) wherein, optionally, the carbon chain of each (C 1 -C 4 ) alkyl is interrupted by 1-3N, non-peroxide O, Si or mixtures thereof.
References Cited (Backward Citations)
US4340617A
Cited
US4713258A
Cited
US4721631A
Cited
US4868005A
Cited
US4876112A
Cited
US5022905A
Cited
US4923717A
Cited
US5151009A
Cited
US5139825A
Cited
US5005519A
Cited
US5227334A
Cited
US5464656A
Cited
US5300321A
Cited
US5254499A
Cited
US5314727A
Cited
US5348587A
Cited
US5378501A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-08-18 | 2001-02-17 | 2001-08-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-08-18 | 2005-02-17 | 2005-08-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-08-18 | 2009-02-17 | 2009-08-19 | $7700.00 | Window Closed / Lapsed |