US5908947A
Expired / Lapsed
US
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Difunctional amino precursors for the deposition of films comprising metals
Assignee: Micron Technology Inc
•
Filing: 1997-08-21
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Granted: 1999-06-01
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Expires: 2017-08-21
Abstract
Abstract Improved precursors for use in chemical vapor deposition of thin films of low-valent metals are provided, which are sterically saturated and protected from attack of the coreactant in the gas phase. Specific precursors have the formulae: (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y N(R.sup.4 R 5 )) z (I) (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y O(R 4 )) z (II) (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y S(R 4 )) z (III) wherein L is an auxiliary ligand; x is 0-6; M is a metal of valence 1 to 5; n is the oxidation state of the metal; R 1 , R 2 , R 3 , R 4 and R 5 are hydrogen or (C 1 -C 12 ) alkyl groups; y is 1-5, z is 1-n.
Inventors
- 👤 Brian A. Vaartstra
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 07:21
CPC Classifications
C; C07; C07F; C07F7/00; C07F7/003
Claims Analysis
Total Claims: 44
Claim 1
Independent Claim
73 words
A compound of formula (I) (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y N(R.sup.4 R.sup.5)).sub.z (I) wherein (a) L is an auxiliary ligand; (b) x is 0-6; (c) M is a low-valent metal; (d) n is the oxidation state of the metal; (e) each of R 1 , R 2 , R 3 , R 4 and R 5 are hydrogen or (C 1 -C 12 ) alkyl; (f) y is 1-5; and (g) z is 1-n.
Claim 2
Dependent Claim
73 words
A compound of formula (I) (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y N(R.sup.4 R.sup.5)).sub.z (I) wherein (a) L is an auxiliary ligand; (b) x is 0-6; (c) M is a low-valent metal; (d) n is the oxidation state of the metal; (e) each of R 1 , R 2 , R 3 , R 4 and R 5 are hydrogen or (C 1 -C 12 ) alkyl; (f) y is 1-5; and (g) z is 1-n.
Claim 3
Dependent Claim
31 words
The compound of claim 1 wherein M is aluminum, barium, calcium, chromium, gallium, hafnium, indium, lanthanide, lanthanum, magnesium, molybdenum, niobium potassium, scandium, sodium, strontium, tantalum, titanium, tungsten, vanadium, yttrium or zirconium.
Claim 4
Dependent Claim
11 words
The compound of claim 2 wherein M is tantalum or aluminum.
Claim 5
Dependent Claim
9 words
The compound of claim 3 wherein M is tantalum.
Claim 6
Dependent Claim
14 words
The compound of claim 1 wherein L is a neutral, monoanionic or dianionic ligand.
Claim 7
Dependent Claim
11 words
The compound of claim 5 wherein L is a neutral ligand.
Claim 8
Dependent Claim
29 words
The compound of claim 6 wherein L is a trialkylamine, an alkene, a diene, a cyclic diene, a cyclic triene, an ether, a polyether, a polyamine or an alkyne.
Claim 9
Dependent Claim
11 words
The compound of claim 5 wherein L is a monoanionic ligand.
Claim 10
Dependent Claim
29 words
The compound of claim 8 wherein L is a dialkylamino, an alkoxy, a thiolate, a selenolate, an alkyl or cyclic alkyl, an alkenyl or cyclic alkenyl, or a trialkylsilyl.
Claim 11
Dependent Claim
22 words
The compound of claim 9 wherein L is a dialkylamino, an alkoxy, an alkyl or cyclic alkyl, an alkenyl or cyclic alkenyl.
Claim 12
Dependent Claim
11 words
The compound of claim 5 wherein L is a dianionic ligand.
Claim 13
Dependent Claim
17 words
The compound of claim 11 wherein L is an oxy, a sulfido, a selenido, or an imido.
Claim 14
Dependent Claim
10 words
The compound of claim 12 wherein L is an oxy.
Claim 15
Dependent Claim
42 words
The compound of claim 1 wherein R 1 , R 4 and R 5 are each CH 3 , R 2 and R 3 are hydrogen, x is 4, y is 3, z is 1, M is tantalum and L is ethoxy.
Claim 16
Dependent Claim
42 words
The compound of claim 1 wherein R 1 , R 4 and R 5 are each CH 3 , R 2 and R 3 are hydrogen, x is 2, y is 2, z is 1, M is aluminum and L is dimethylamino.
Claim 17
Dependent Claim
69 words
A compound of formula (II) (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y O(R.sup.4)).sub.z(II) wherein (a) L is an auxiliary ligand; (b) x is 0-6; (c) M is a low-valent metal; (d) n is the oxidation state of the metal; (e) each of R 1 , R 2 , R 3 , and R 4 are hydrogen or (C 1 -C 12 ) alkyl; (f) y is 1-5; and (g) z is 1-n.
Claim 18
Dependent Claim
69 words
A compound of formula (II) (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y O(R.sup.4)).sub.z(II) wherein (a) L is an auxiliary ligand; (b) x is 0-6; (c) M is a low-valent metal; (d) n is the oxidation state of the metal; (e) each of R 1 , R 2 , R 3 , and R 4 are hydrogen or (C 1 -C 12 ) alkyl; (f) y is 1-5; and (g) z is 1-n.
Claim 19
Dependent Claim
30 words
The compound of claim 16 wherein M is aluminum, barium, calcium, chromium, gallium, hafnium, indium, lanthanide, lanthanum, magnesium, molybdenum, niobium, potassium, scandium, sodium, strontium, tantalum, titanium, tungsten, yttrium or zirconium.
Claim 20
Dependent Claim
11 words
The compound of claim 17 wherein M is tantalum or aluminum.
Claim 21
Dependent Claim
9 words
The compound of claim 18 wherein M is tantalum.
Claim 22
Dependent Claim
14 words
The compound of claim 16 wherein L is a neutral, monoanionic or dianionic ligand.
Claim 23
Dependent Claim
11 words
The compound of claim 20 wherein L is a neutral ligand.
Claim 24
Dependent Claim
29 words
The compound of claim 21 wherein L is a trialkylamine, an alkene, a diene, a cyclic diene, a cyclic triene, an ether, a polyether, a polyamine or an alkyne.
Claim 25
Dependent Claim
11 words
The compound of claim 20 wherein L is a monoanionic ligand.
Claim 26
Dependent Claim
29 words
The compound of claim 23 wherein L is a dialkylamino, an alkoxy, a thiolate, a selenolate, an alkyl or cyclic alkyl, an alkenyl or cyclic alkenyl, or a trialkylsilyl.
Claim 27
Dependent Claim
22 words
The compound of claim 24 wherein L is a dialkylamino, an alkoxy, an alkyl or cyclic alkyl, an alkenyl or cyclic alkenyl.
Claim 28
Dependent Claim
11 words
The compound of claim 20 wherein L is a dianionic ligand.
Claim 29
Dependent Claim
17 words
The compound of claim 26 wherein L is an oxy, a sulfido, a selenido, or an imido.
Claim 30
Dependent Claim
10 words
The compound of claim 27 wherein L is an oxy.
Claim 31
Dependent Claim
69 words
A compound of formula (III) (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y S(R.sup.4)).sub.z(III) wherein (a) L is an auxiliary ligand; (b) x is 0-6; (c) M is a low-valent metal; (d) n is the oxidation state of the metal; (e) each of R 1 , R 2 , R 3 , and R 4 are hydrogen or (C 1 -C 12 ) alkyl; (f) y is 1-5; and (g) z is 1-n.
Claim 32
Dependent Claim
69 words
A compound of formula (III) (L).sub.x M.sup.n+ (N(R.sup.1)(C(R.sup.2 R.sup.3)).sub.y S(R.sup.4)).sub.z(III) wherein (a) L is an auxiliary ligand; (b) x is 0-6; (c) M is a low-valent metal; (d) n is the oxidation state of the metal; (e) each of R 1 , R 2 , R 3 , and R 4 are hydrogen or (C 1 -C 12 ) alkyl; (f) y is 1-5; and (g) z is 1-n.
Claim 33
Dependent Claim
31 words
The compound of claim 29 wherein M is aluminum, barium, calcium, chromium, gallium, hafnium, indium, lanthanide, lanthanum, magnesium, molybdenum, niobium, potassium, scandium, sodium, strontium, tantalum, titanium, tungsten, vanadium, yttrium or zirconium.
Claim 34
Dependent Claim
11 words
The compound of claim 30 wherein M is tantalum or aluminum.
Claim 35
Dependent Claim
9 words
The compound of claim 31 wherein M is tantalum.
Claim 36
Dependent Claim
14 words
The compound of claim 29 wherein L is a neutral, monoanionic or dianionic ligand.
Claim 37
Dependent Claim
11 words
The compound of claim 33 wherein L is a neutral ligand.
Claim 38
Dependent Claim
29 words
The compound of claim 34 wherein L is a trialkylamine, an alkene, a diene, a cyclic diene, a cyclic triene, an ether, a polyether, a polyamine or an alkyne.
Claim 39
Dependent Claim
11 words
The compound of claim 33 wherein L is a monoanionic ligand.
Claim 40
Dependent Claim
29 words
The compound of claim 36 wherein L is a dialkylamino, an alkoxy, a thiolate, a selenolate, an alkyl or cyclic alkyl, an alkenyl or cyclic alkenyl, or a trialkylsilyl.
Claim 41
Dependent Claim
22 words
The compound of claim 37 wherein L is a dialkylamino, an alkoxy, an alkyl or cyclic alkyl, an alkenyl or cyclic alkenyl.
Claim 42
Dependent Claim
11 words
The compound of claim 33 wherein L is a dianionic ligand.
Claim 43
Dependent Claim
17 words
The compound of claim 39 wherein L is an oxy, a sulfido, a selenido, or an imido.
Claim 44
Dependent Claim
10 words
The compound of claim 40 wherein L is an oxy.
References Cited (Backward Citations)
US4340617A
Cited
US4713258A
Cited
US4721631A
Cited
US4868005A
Cited
US4876112A
Cited
US5022905A
Cited
US4923717A
Cited
US5139825A
Cited
US5005519A
Cited
US5147819A
Cited
US5173327A
Cited
US5227334A
Cited
US5231056A
Cited
US5275715A
Cited
US5464656A
Cited
US5252518A
Cited
US5300321A
Cited
US5254499A
Cited
US5314727A
Cited
US5240739A
Cited
US5376405A
Cited
US5348587A
Cited
US5344792A
Cited
US5377429A
Cited
US5393564A
Cited
US5378501A
Cited
US5591483A
Cited
US5603988A
Cited
US5607722A
Cited
US5659057A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-05-31 | 2002-11-30 | 2003-06-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-05-31 | 2006-11-30 | 2007-06-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-05-31 | 2010-11-30 | 2011-06-01 | $7700.00 | Window Closed / Lapsed |