Patent US5838530A successfully refreshed from Google Patents.
US5838530A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Applications of protective ceramics
Assignee: Individual
•
Filing: 1996-10-17
•
Granted: 1998-11-17
•
Expires: 2016-10-17
Abstract
Abstract It is beneficial for an FPGA, PROM, DRAM and superconductive circuit to use a protective ceramic as its insulating material. This protective ceramic can densely cover metal surface and is free of defects. As a result, a high yield can be ensured. The Pilling-Bedworth ratio is a good indicator of the protective nature of an insulating material. It is desirable to limit the Pilling-Bedworth ratio larger than 1 and preferably smaller than 2. Multiple layers of ceramics can be used to further reduce the defect density and improve yield.
Inventors
- 👤 Guobiao Zhang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 20:45
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/66; H10P14/662; H10D; H10D1/00; H10D1/60; H10D1/68; H10N; H10N60/00; H10N60/10; H10N60/12; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6314; H10P14/6316; H10P14/6319; H10P14/6322; H10P14/6324; H10P14/6326; H10P14/6328; H10P14/6329; H10P14/6334; H10P14/69; H10P14/692; H10P14/6938; H10P14/6939; H10P14/69391; H10P14/69393; H10P14/69394; H10P14/69395; H10P14/69397
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
90 words
A capacitor-like device in an integrated circuit comprising a first bottom electrode, said first bottom electrode comprising conductive materials, said first bottom electrode having a top surface; a second top electrode, said second top electrode comprising conductive materials; an insulating layer interposed between said first bottom electrode and said second top electrode, said insulating layer comprising at least one layer of a protective ceramic which is a compound of at least one metallic element and at least one non-metallic element from a group consisting of C, N, O, P, S.
Claim 2
Dependent Claim
90 words
A capacitor-like device in an integrated circuit comprising a first bottom electrode, said first bottom electrode comprising conductive materials, said first bottom electrode having a top surface; a second top electrode, said second top electrode comprising conductive materials; an insulating layer interposed between said first bottom electrode and said second top electrode, said insulating layer comprising at least one layer of a protective ceramic which is a compound of at least one metallic element and at least one non-metallic element from a group consisting of C, N, O, P, S.
Claim 3
Dependent Claim
17 words
The capacitor-like device of claim 1, wherein said protective ceramic has a Piling-Bedworth ratio larger than 1.
Claim 4
Dependent Claim
17 words
The capacitor-like device of claim 2, wherein said protective ceramic has a Pilling-Bedworth ratio smaller than 2.
Claim 5
Dependent Claim
15 words
The capacitor-like device of claim 1, wherein said protective ceramic comprises a protective metal oxide.
Claim 6
Dependent Claim
43 words
The capacitor-like device of claim 4, wherein said protective metal oxide is an oxide of at least one element from a group including Be, Cu, Al, Cr, Mn, Fe, Co, Ni, Pd, Pb, Ce, Sc, Zn, Zr, La, Y, Nb, Rh and Pt.
Claim 7
Dependent Claim
15 words
The capacitor-like device of claim 1, wherein said protective ceramic comprises a protective metal nitride.
Claim 8
Dependent Claim
35 words
The capacitor-like device of claim 6, wherein said protective metal nitride is a nitride of at least one element from a group including Ti, V, Cr, Fe, Cu, Zn, Zr, Nb, Ta, Al and Ge.
Claim 9
Dependent Claim
15 words
The capacitor-like device of claim 1, wherein said protective ceramic comprises a protective metal carbide.
Claim 10
Dependent Claim
40 words
The capacitor-like device of claim 8, wherein said protective metal carbide is a carbide of at least one element from a group including Ti, Si, V, Cr, Mn, Fe, Ni, Y, Zr, Nb, Mo, La, Hf, Ta, W and Al.
Claim 11
Dependent Claim
15 words
The capacitor-like device of claim 1, wherein said protective ceramic comprises a protective metal phosphide.
Claim 12
Dependent Claim
31 words
The capacitor-like device of claim 10, wherein said protective metal phosphide is a phosphide of at least one element from a group including Ti, Fe, Co, Ni, Cu, Cd and Sn.
Claim 13
Dependent Claim
15 words
The capacitor-like device of claim 1, wherein said protective ceramic comprises a protective metal sulfide.
Claim 14
Dependent Claim
31 words
The capacitor-like device of claim 12, wherein said protective metal sulfide is a sulfide of at least one element from a group including Cu, Ag, I, Sn, Tl, Pb and Bi.
Claim 15
Dependent Claim
73 words
The capacitor-like device of claim 22, wherein: said top surface of said first bottom electrode comprises at least one metallic element, said metallic element being a metallic component of said protective ceramic; at least one portion of said protective ceramic is formed by a growing means, whereby at least one non-metallic element from a group consisting of C, N, O, P, S is incorporated into said top surface of said first bottom electrode.
Claim 16
Dependent Claim
52 words
The capacitor-like device of claim 1, wherein: said protective ceramic is a protective metal oxide; said top surface of said first bottom electrode comprises at least one element from a group including Be, Cu, Al, Cr, Mn, Fe, Co, Ni, Pd, Pb, Ce, Sc, Zn, Zr, La, Y, Nb, Rh and Pt.
Claim 17
Dependent Claim
44 words
The capacitor-like device of claim 14, wherein: said protective ceramic is a protective metal nitride; said top surface of said first bottom electrode comprising at least one element from a group including Ti, V, Cr, Fe, Cu, Zn, Zr, Nb, Ta, Al and Ge.
Claim 18
Dependent Claim
22 words
The capacitor-like device of claim 14, wherein: said growing means includes thermal oxidation, thermal nitridation, plasma oxidation, plasma nitridation, anodization, and implantation.
Claim 19
Dependent Claim
30 words
The capacitor-like device of claim 1, wherein: at least one portion of said protective ceramic is formed by a depositing means above said top surface of said first bottom electrode.
Claim 20
Dependent Claim
19 words
The capacitor-like device of claim 18, wherein: said depositing means includes direct sputtering, reactive sputtering and chemical vapor deposition.
Claim 21
Dependent Claim
21 words
The capacitor-like device of claim 1, wherein: at least one portion of said bottom electrode is formed by an evaporating means.
Claim 22
Dependent Claim
14 words
The capacitor-like device of claim 1, wherein said protective ceramic has a polycrystalline structure.
Claim 23
Dependent Claim
14 words
The capacitor-like device of claim 1, wherein said protective ceramic has an amorphous structure.
Claim 24
Dependent Claim
17 words
The capacitor-like device of claim 1 further being an antifuse for applications including FPGA and PROM applications.
Claim 25
Dependent Claim
26 words
The capacitor-like device of claim 1 further being a capacitor, whereby electrical charge can be accumulated on at least one of said first and second electrodes.
Claim 26
Dependent Claim
14 words
The capacitor of claim 24 further being a storage capacitor for applications including DRAM.
Claim 27
Dependent Claim
16 words
The capacitor-like device of claim 1 further being a Josephson Junction for applications including superconductive circuit.
References Cited (Backward Citations)
US4200474A
Cited
US4288470A
Cited
US4333808A
Cited
US4495219A
Cited
US4432035A
Cited
US4589056A
Cited
US4742025A
Cited
US4937650A
Cited
US5079191A
Cited
US4899205A
Cited
US5412244A
Cited
US5266829A
Cited
US5061971A
Cited
US5070384A
Cited
US5552627A
Cited
US5111355A
Cited
US5432732A
Cited
US5142438A
Cited
US5569619A
Cited
US5552337A
Cited
US5374832A
Cited
US5444006A
Cited
US5373169A
Cited
US5482884A
Cited
US5521423A
Cited
US5439840A
Cited
US5463244A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-11-16 | 2002-05-18 | 2002-11-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-16 | 2006-05-18 | 2006-11-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-16 | 2010-05-18 | 2010-11-17 | $7700.00 | Window Closed / Lapsed |