US4589056A
Expired / Lapsed
US
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Tantalum silicide capacitor
Assignee: National Semiconductor Corp
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Filing: 1984-10-15
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Granted: 1986-05-13
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Expires: 2004-10-15
Abstract
Abstract A high capacitance/low leakage capacitor for use in a dynamic RAM cell fabricated from a metal silicide or metal silicide/poly capacitor plate structure, with formation of an anodic metal/silicon/oxygen insulating film over that structure.
Inventors
- 👤 James B. Stimmell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:51
CPC Classifications
H; H01; H01G; H01G4/00; H01G4/002; H01G4/005; H01G4/008; H01G4/018; H01G4/06; H01G4/08; H01G4/10; H10; H10D; H10D1/00; H10D1/60; H10D1/68; Y; Y10; Y10T; Y10T29/00; Y10T29/43; Y10T29/435
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
60 words
A capacitor for an integrated circuit comprising: a first electrically conductive layer composed of a silicide bearing material; a dielectric layer disposed over said first electrically conductive layer, said dielectric layer including oxides of said silicide components whereby said dielectric layer comprises a compound of metal, silicon and oxygen; and a second electrically conductive layer disposed over said dielectric layer.
Claim 2
Dependent Claim
60 words
A capacitor for an integrated circuit comprising: a first electrically conductive layer composed of a silicide bearing material; a dielectric layer disposed over said first electrically conductive layer, said dielectric layer including oxides of said silicide components whereby said dielectric layer comprises a compound of metal, silicon and oxygen; and a second electrically conductive layer disposed over said dielectric layer.
Claim 3
Dependent Claim
19 words
The capacitor of claim 1 wherein said dielectric layer comprises an oxidized portion of said first electrically conductive region.
Claim 4
Dependent Claim
20 words
The capacitor of claim 2 wherein said first electrically conductive region is composed of the silicide of an anodizable metal.
Claim 5
Dependent Claim
30 words
The capacitor of claim 3 wherein said first electrically conductive region is composed of the silicide of one of the group of valve metals including tantalum, niobium, zirconium, or titanium.
Claim 6
Dependent Claim
14 words
The capacitor of claim 1 wherein said first electrically conductive region comprises tantalum silicide.
Claim 7
Dependent Claim
20 words
The capacitor of claim 1 wherein said second electrically conductive layer comprises one of polycrystalline silicon, aluminum or a silicide.
Claim 8
Dependent Claim
24 words
The capacitor of claim 6 wherein said second electrically conductive layer comprises polycrystalline silicon and is doped with an impurity to increase electrical conductivity.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-05-12 | 1989-11-11 | 1990-05-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-05-12 | 1993-11-11 | 1994-05-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-05-12 | 1997-11-11 | 1998-05-13 | $7700.00 | Window Closed / Lapsed |