US5374832A
Expired / Lapsed
US
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Antifuse having TiW oxide film between two metal layers
Assignee: Texas Instruments Inc
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Filing: 1993-08-25
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Granted: 1994-12-20
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Expires: 2013-08-25
Abstract
Abstract An antifuse (42) is formed by forming a layer of titanium tungsten (34) overlying a portion of a first metal layer (28). The titanium tungsten layer (34) is oxidized to form a film of oxide (36) on its surface. Insulating regions (30) are formed adjacent the titanium tungsten layer (34) and overlying the first metal layer (28). A second metal layer (40) is formed overlying the titanium tungsten layer (34). Applying a break down voltage across the first and second metal layers (28), (40) will break down the oxide film (36), thereby causing a connection between the first and second metal layers (28), (40).
Inventors
- 👤 Yingsheng Tung
- 👤 Scott Montgomery
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 05:43
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/491; Y; Y10; Y10S; Y10S148/00; Y10S148/055
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
42 words
An antifuse, comprising: a first metal interconnect layer; a layer of titanium tungsten on said first metal interconnect layer; a titanium tungsten oxide film on said layer of titanium tungsten; and a second metal interconnect layer on said titanium tungsten oxide film.
Claim 2
Dependent Claim
42 words
An antifuse, comprising: a first metal interconnect layer; a layer of titanium tungsten on said first metal interconnect layer; a titanium tungsten oxide film on said layer of titanium tungsten; and a second metal interconnect layer on said titanium tungsten oxide film.
Claim 3
Dependent Claim
24 words
The antifuse of claim 1, wherein the titanium tungsten layer comprises 45 to 55 percent titanium and 45 to 55 percent tungsten by volume.
Claim 4
Dependent Claim
61 words
The antifuse of claim 1, wherein the titanium tungsten layer forms a plug having a head portion with an upper surface and a shaft portion, the oxide film being formed on the upper surface of the head portion, the head portion being disposed against one of the metal interconnect layers, and the shaft portion being disposed against the other interconnect layer.
Claim 5
Dependent Claim
44 words
The antifuse of claim 1, wherein the titanium tungsten layer forms a cylinder having generally parallel first and second opposite ends, the oxide film being formed on one of the ends, each end being disposed against a different one of the metal interconnect layers.
Claim 6
Dependent Claim
28 words
The antifuse of claim 1, and further comprising a metal oxide semiconductor transistor having a gate, the antifuse forming a programmable contact to the gate of the transistor.
Claim 7
Dependent Claim
20 words
The antifuse of claim 1, wherein at least one of the first and the second metal interconnect layers comprises aluminum.
Claim 8
Dependent Claim
22 words
The antifuse of claim 6, wherein at least one of the first and second metal interconnect layers comprises an aluminum copper compound.
Claim 9
Dependent Claim
22 words
The antifuse of claim 6, wherein at least one of the first and second metal interconnect layers comprises an aluminum silicon alloy.
Claim 10
Dependent Claim
23 words
The antifuse of claim 1, further comprising planar insulating regions disposed adjacent the titanium tungsten layer and overlying the first metal interconnect layer.
Claim 11
Dependent Claim
61 words
A programmable gate array comprising: a plurality of circuit elements; a plurality of antifuses selectively coupling the circuit elements, the antifuses comprising: a first metal interconnect layer; a layer of titanium tungsten on said first metal interconnect layer; a titanium tungsten oxide film on said layer of titanium tungsten; and a second metal interconnect layer on said titanium tungsten oxide film.
Claim 12
Dependent Claim
61 words
A programmable gate array comprising: a plurality of circuit elements; a plurality of antifuses selectively coupling the circuit elements, the antifuses comprising: a first metal interconnect layer; a layer of titanium tungsten on said first metal interconnect layer; a titanium tungsten oxide film on said layer of titanium tungsten; and a second metal interconnect layer on said titanium tungsten oxide film.
Claim 13
Dependent Claim
20 words
The gate array of claim 10, wherein at least one of the first and second metal interconnect layers comprises aluminum.
Claim 14
Dependent Claim
23 words
The gate array of claim 11, wherein at least one of the first and second metal interconnect layers comprises an aluminum copper compound.
Claim 15
Dependent Claim
23 words
The gate array of claim 11, wherein at least one of the first and second metal interconnect layers comprises an aluminum silicon alloy.
Claim 16
Dependent Claim
25 words
The gate array of claim 10, and further comprising planar insulating regions disposed adjacent the titanium tungsten layer and overlying the first metal interconnect layer.
Claim 17
Dependent Claim
31 words
An antifuse, comprising: a layer of titanium tungsten; a titanium tungsten oxide film on said layer of titanium tungsten; and a first metal interconnect layer on said titanium tungsten oxide film.
Claim 18
Dependent Claim
31 words
An antifuse, comprising: a layer of titanium tungsten; a titanium tungsten oxide film on said layer of titanium tungsten; and a first metal interconnect layer on said titanium tungsten oxide film.
Claim 19
Dependent Claim
24 words
The antifuse of claim 15 further comprising: a second metal interconnect layer, said layer of titanium tungsten formed on said second metal interconnect layer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-12-19 | 1998-06-20 | 1998-12-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-12-19 | 2002-06-20 | 2002-12-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-12-19 | 2006-06-20 | 2006-12-20 | $7700.00 | Window Closed / Lapsed |