US5675180A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vertical interconnect process for silicon segments
Assignee: VERTICAL CIRCUITS SOLUTIONS Inc
•
Filing: 1994-06-23
•
Granted: 1997-10-07
•
Expires: 2014-06-23
Abstract
Abstract A method and apparatus for vertically interconnecting stacks of silicon segments. Each segment includes a plurality of adjacent die on a semiconductor wafer. The plurality of die on a segment are interconnected on the segment using one or more layers of metal interconnects which extend to all four sides of the segment to provide edge bonding pads for external electrical connection points. After the die are interconnected, each segment is cut from the backside of the wafer using a bevel cut to provide four inwardly sloping edge walls on each of the segments. After the segments are cut from the wafer, the segments are placed on top of one another to form a stack. Vertically adjacent segments in the stack are electrically interconnected by applying electrically conductive epoxy to all four sides of the stack. The inwardly sloping edge walls of each of the segments in the stack provide a recess which allows the electrically conductive epoxy to access the edge bonding pads and lateral circuits on each of the segments once the segments are stacked. The stack of electrically interconnected segments is then mounted below the surface of a circuit board and electrically connected to circuits on the board by applying traces of electrically conductive epoxy between the bonding pads on the top segment of the stack and the circuit board.
Inventors
- 👤 David V. Pedersen
- 👤 Michael G. Finley
- 👤 Kenneth M. Sautter
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 09:35
CPC Classifications
H; H01; H01R; H01R29/00; H01R4/00; H01R4/04; H05; H05K; H05K3/00; H05K3/30; H05K3/303; H05K3/305; H05K3/32; H05K3/321; H05K7/00; H05K7/02; H05K7/023; H10; H10D; H10D62/00; H10D62/10; H10D62/117; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4473; H10W20/482; H10W20/484; H10W20/49; H10W20/493; H10W40/00; H10W40/20; H10W40/25; H10W40/251; H10W70/00; H10W70/60; H10W70/611; H10W70/62; H10W70/641; H10W72/00; H10W72/20; H10W90/00; H10W90/401; H05K2201/00; H05K2201/09; H05K2201/09209; H05K2201/09372; H05K2201/09472; H05K2201/10; H05K2201/10431; H05K2201/10439; H05K2201/10477; H05K2201/10613; H05K2201/10621; H05K2201/10674; H05K2201/10719; H05K2201/10727; H10W46/00; H10W70/099; H10W72/01; H10W72/071; H10W72/0711; H10W72/072; H10W72/07231; H10W72/07236; H10W72/073; H10W72/07331; H10W72/251; H10W72/30; H10W72/321; H10W72/325; H10W72/351; H10W72/353; H10W72/354; H10W72/834; H10W90/20; H10W90/22; H10W90/284; H10W90/701; H10W90/721; H10W90/722; H10W90/731; H10W90/732; H10W90/751; H10W90/754; Y; Y02; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
97 words
A segment of silicon having at least three edges defining said segment, comprising: a plurality of die on said segment, each of said die including a plurality of first bond pads; a plurality of edge bond pads located on more than one of said edges of said segment for external electrical connections; and a layer of metal traces connected between said plurality of first bond pads to interconnect said die, said metal traces further connected between said plurality of edge bond pads and said plurality of first bond pads to connect said die to said external connections.
Claim 2
Dependent Claim
97 words
A segment of silicon having at least three edges defining said segment, comprising: a plurality of die on said segment, each of said die including a plurality of first bond pads; a plurality of edge bond pads located on more than one of said edges of said segment for external electrical connections; and a layer of metal traces connected between said plurality of first bond pads to interconnect said die, said metal traces further connected between said plurality of edge bond pads and said plurality of first bond pads to connect said die to said external connections.
Claim 3
Dependent Claim
20 words
A segment of silicon as in claim 1 wherein said metal traces include a sandwich of chrome, titanium-tungsten, and gold.
Claim 4
Dependent Claim
48 words
A segment of silicon as in claim 2 wherein said segment further includes a front side and a backside, and wherein said plurality of first bond pads, said plurality of edge bond pads, and said layer of metal traces are located on said front side of said segment.
Claim 5
Dependent Claim
34 words
A segment of silicon as in claim 3 wherein said edges defining said segment further include edge walls, and wherein said edge walls and said backside of said segment are insulated with silicon nitride.
Claim 6
Dependent Claim
14 words
A segment of silicon as in claim 4 wherein said edge walls are beveled.
Claim 7
Dependent Claim
140 words
A stack of electrical circuitry, comprising: a stack of segments vertically placed on top of one another, each of said segments including at least three edges, a plurality of die having circuitry therein, and electrically conductive contact points; first interconnecting means for interconnecting said plurality of die on each of said segments and for connecting one or more of said plurality of die to one or more of said electrically conductive contact points on each of said segments; access means for providing access to said electrically conductive contact points on each of said segments; and second interconnecting means adaptive to said access means for electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and for providing a lateral electrical connection to said plurality of die located in each of said segments in said stack.
Claim 8
Dependent Claim
140 words
A stack of electrical circuitry, comprising: a stack of segments vertically placed on top of one another, each of said segments including at least three edges, a plurality of die having circuitry therein, and electrically conductive contact points; first interconnecting means for interconnecting said plurality of die on each of said segments and for connecting one or more of said plurality of die to one or more of said electrically conductive contact points on each of said segments; access means for providing access to said electrically conductive contact points on each of said segments; and second interconnecting means adaptive to said access means for electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and for providing a lateral electrical connection to said plurality of die located in each of said segments in said stack.
Claim 9
Dependent Claim
29 words
A stack of electrical circuitry as in claim 6 wherein said electrically conductive contact points are located along more than one of said edges on each of said segments.
Claim 10
Dependent Claim
22 words
A stack of electrical circuitry as in claim 7 wherein said first interconnecting means includes more than one layer of metal traces.
Claim 11
Dependent Claim
23 words
A stack of electrical circuitry as in claim 8 wherein said layer of metal traces includes a sandwich of chrome, titanium-tungsten, and gold.
Claim 12
Dependent Claim
26 words
A stack of electrical circuitry as in claim 9 wherein said access means includes inwardly sloping edge walls along each of said edges of said segments.
Claim 13
Dependent Claim
17 words
A stack of electrical circuitry as in claim 10 wherein said interconnecting means includes electrically conductive epoxy.
Claim 14
Dependent Claim
46 words
A stack of electrical circuitry as in claim 11 wherein each of said segments include control bond pads and wherein said segments are made unique with respect to one another by having a unique pattern burned into said control bond pads on each of said segments.
Claim 15
Dependent Claim
53 words
A stack of electrical circuitry as in claim 11 wherein said segments include interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on each of said segments are routed so that particular ones of said functioning die replace said non-functioning die.
Claim 16
Dependent Claim
82 words
A stack of electrical circuitry as in claim 12 wherein said stack includes six of said segments, each of said six segments includes four of said die, said stack having four vertical columns of said die, each of said vertical columns being six of said die in height, and wherein said electrically conductive epoxy is applied to said six segments such that four of said functioning die are connected in each of said four vertical columns of said die in said stack.
Claim 17
Dependent Claim
99 words
At least one segment of silicon having at least three edges defining said segment, comprising: a plurality of die on said segment, each of said die including a plurality of first bond pads; a plurality of edge bond pads located on more than one of said edges of said segment for external electrical connections; and a layer of metal traces connected between said plurality of first bond pads to interconnect said die, said metal traces further connected between said plurality of edge bond pads and said plurality of first bond pads to connect said die to said external connections.
Claim 18
Dependent Claim
99 words
At least one segment of silicon having at least three edges defining said segment, comprising: a plurality of die on said segment, each of said die including a plurality of first bond pads; a plurality of edge bond pads located on more than one of said edges of said segment for external electrical connections; and a layer of metal traces connected between said plurality of first bond pads to interconnect said die, said metal traces further connected between said plurality of edge bond pads and said plurality of first bond pads to connect said die to said external connections.
Claim 19
Dependent Claim
141 words
At least one segment of silicon having at least three edges defining said segment, comprising: a plurality of die on said segment, each of said die including a plurality of first bond pads; a plurality of edge bond pads located on more than one of said edges of said segment for external electrical connections; and a layer of metal traces connected between said plurality of first bond pads to interconnect said die, said metal traces further connected between said plurality of edge bond pads and said plurality of first bond pads to connect said die to said external connections, and wherein said segment includes interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on segment are routed so that particular ones of said functioning die replace said non-functioning die.
Claim 20
Dependent Claim
141 words
At least one segment of silicon having at least three edges defining said segment, comprising: a plurality of die on said segment, each of said die including a plurality of first bond pads; a plurality of edge bond pads located on more than one of said edges of said segment for external electrical connections; and a layer of metal traces connected between said plurality of first bond pads to interconnect said die, said metal traces further connected between said plurality of edge bond pads and said plurality of first bond pads to connect said die to said external connections, and wherein said segment includes interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on segment are routed so that particular ones of said functioning die replace said non-functioning die.
Claim 21
Dependent Claim
119 words
A stack of electrical circuitry comprising: a stack of segments placed on top of one another, each of said segments having at least three edges defining each one of said segments; a plurality of die on each of said segments, each of said die including a plurality of first bond pads; a plurality of edge bond pads located on more than one of said edges of each of said segments for external electrical connections; and a layer of metal traces connected between said plurality of first bond pads to interconnect said die, said metal traces further connected between said plurality of edge bond pads and said plurality of first bond pads to connect said die to said external connections.
Claim 22
Dependent Claim
119 words
A stack of electrical circuitry comprising: a stack of segments placed on top of one another, each of said segments having at least three edges defining each one of said segments; a plurality of die on each of said segments, each of said die including a plurality of first bond pads; a plurality of edge bond pads located on more than one of said edges of each of said segments for external electrical connections; and a layer of metal traces connected between said plurality of first bond pads to interconnect said die, said metal traces further connected between said plurality of edge bond pads and said plurality of first bond pads to connect said die to said external connections.
Claim 23
Dependent Claim
183 words
a stack of electrical circuitry, comprising: a stack of segments placed on top of one another, each of said segments including at least three edges, a plurality of die having circuitry therein, and electrically conductive contact points; first interconnecting means for interconnecting said plurality of die on each of said segments and for connecting one or more of said plurality of die to one or more of said electrically conductive contact points on each of said segments; access means for providing access to said electrically conductive contact points on each of said segments; and second interconnecting means adaptive to said access means for electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and for providing a lateral electrical connection to said plurality of die located in each of said segments in said stack, wherein said segments include interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on each of said segments are routed so that particular ones of said functioning die replace said non-functioning die.
Claim 24
Dependent Claim
183 words
a stack of electrical circuitry, comprising: a stack of segments placed on top of one another, each of said segments including at least three edges, a plurality of die having circuitry therein, and electrically conductive contact points; first interconnecting means for interconnecting said plurality of die on each of said segments and for connecting one or more of said plurality of die to one or more of said electrically conductive contact points on each of said segments; access means for providing access to said electrically conductive contact points on each of said segments; and second interconnecting means adaptive to said access means for electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and for providing a lateral electrical connection to said plurality of die located in each of said segments in said stack, wherein said segments include interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on each of said segments are routed so that particular ones of said functioning die replace said non-functioning die.
Claim 25
Dependent Claim
45 words
At least one segment of silicon having a plurality of edges defining said segment, comprising: at least one die on said segment, and at least one edge bond pad located on more than one of said edges of said segments for vertical external electrical connections.
Claim 26
Dependent Claim
45 words
At least one segment of silicon having a plurality of edges defining said segment, comprising: at least one die on said segment, and at least one edge bond pad located on more than one of said edges of said segments for vertical external electrical connections.
Claim 27
Dependent Claim
131 words
At least one segment of silicon having a plurality of edges defining said segment, comprising: at least one die on said segment, said die including at least one first bond pad; one edge bond pad located on more than one of said edges of said segment for external electrical connections; a layer of metal traces connected between said first bond pad to interconnect said die, said metal traces further connected between said edge bond pad and said first bond pad to connect said die to said external connections, and wherein said segment includes interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on said segment are routed so that particular ones of said functioning die replace said non-functioning die.
Claim 28
Dependent Claim
131 words
At least one segment of silicon having a plurality of edges defining said segment, comprising: at least one die on said segment, said die including at least one first bond pad; one edge bond pad located on more than one of said edges of said segment for external electrical connections; a layer of metal traces connected between said first bond pad to interconnect said die, said metal traces further connected between said edge bond pad and said first bond pad to connect said die to said external connections, and wherein said segment includes interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on said segment are routed so that particular ones of said functioning die replace said non-functioning die.
Claim 29
Dependent Claim
176 words
A stack of electrical circuitry, comprising: a stack of segments placed on top of one another, each of said segments including a plurality of edges, at least one die having circuitry therein, and electrically conductive contact points; first interconnecting means for interconnecting said die on each of said segments and for connecting at least one of said die to at least of said electrically conductive contact points on each of said segments; access means for providing access to said electrically conductive contact points on each of said segments; and second interconnecting means adaptive to said access means for electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and for providing a lateral electrical connection to said die located in each of said segments in said stack, wherein said segments include interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on each of said segments are routed so that particular ones of said functioning die replace said non-functioning die.
Claim 30
Dependent Claim
176 words
A stack of electrical circuitry, comprising: a stack of segments placed on top of one another, each of said segments including a plurality of edges, at least one die having circuitry therein, and electrically conductive contact points; first interconnecting means for interconnecting said die on each of said segments and for connecting at least one of said die to at least of said electrically conductive contact points on each of said segments; access means for providing access to said electrically conductive contact points on each of said segments; and second interconnecting means adaptive to said access means for electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and for providing a lateral electrical connection to said die located in each of said segments in said stack, wherein said segments include interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on each of said segments are routed so that particular ones of said functioning die replace said non-functioning die.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-10-06 | 2001-04-07 | 2001-10-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-10-06 | 2005-04-07 | 2005-10-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-10-06 | 2009-04-07 | 2009-10-07 | $7700.00 | Window Closed / Lapsed |