US5665845A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electronic device with a spin-on glass dielectric layer
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
•
Filing: 1996-03-01
•
Granted: 1997-09-09
•
Expires: 2016-03-01
Abstract
Abstract There is provided electronic devices with dielectric layers obtained from boron-oxide doped, spin-on glass formulations which form glassy layers with high oxygen resistance. Suitable electronic devices include integrated circuits. With high oxygen resistance, the glassy layer formed maintains its integrity in subsequent processing. Also provided is a method for preparing boron-oxide doped, spin-on glass formulations with a high carbon content having a silane adhesion promoter and boron-dopant incorporated therein.
Inventors
- 👤 Derryl D. J. Allman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 23:03
CPC Classifications
H; H10; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; H10P76/2043; G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/091; G03F7/094; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6342; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6923; H10W; H10W20/00; H10W20/40; H10W20/45; H10W20/48; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31652; Y10T428/31663
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
35 words
An electronic device having a dielectric layer, comprised of a boron-oxide substituted polyorganosiloxane polymer having greater than 1 wt. % boron-oxide, at least 30 atomic wt. % carbon and a silane adhesion promoter incorporated therein.
Claim 2
Dependent Claim
35 words
An electronic device having a dielectric layer, comprised of a boron-oxide substituted polyorganosiloxane polymer having greater than 1 wt. % boron-oxide, at least 30 atomic wt. % carbon and a silane adhesion promoter incorporated therein.
Claim 3
Dependent Claim
38 words
An electronic device as in claim 1, wherein the dielectric layer is an interlayer derived from a boron-oxide substituted polyorganosiloxane polymer formulation containing between 2 and 5 wt. % boron-oxide, based on the total weight of the formulation.
Claim 4
Dependent Claim
16 words
An electronic device as in claim 2 having said dielectric interlayer disposed between two metal layers.
Claim 5
Dependent Claim
17 words
An electronic device as in claim 3, wherein said dielectric interlayer is encapsulated by two oxide layers.
Claim 6
Dependent Claim
22 words
A electronic device as in claim 4, wherein said dielectric interlayer has a thickness within the range of 0.1 to 10 microns.
Claim 7
Dependent Claim
28 words
An electronic device as in claim 1, wherein the dielectric layer is encapsulated by a plasma enhanced chemically vapor deposited oxide under-layer and a silicon dioxide capping layer.
Claim 8
Dependent Claim
46 words
An electronic device having a dielectric interlayer comprised of a boron-oxide substituted polyorganosiloxane polymer having at least 2 wt. % boron-oxide and at least 15 atomic wt. % carbon, having a thickness of from 0.1 to 10 microns and having a silane adhesion promoter incorporated therein.
Claim 9
Dependent Claim
46 words
An electronic device having a dielectric interlayer comprised of a boron-oxide substituted polyorganosiloxane polymer having at least 2 wt. % boron-oxide and at least 15 atomic wt. % carbon, having a thickness of from 0.1 to 10 microns and having a silane adhesion promoter incorporated therein.
Claim 10
Dependent Claim
31 words
An electronic device as in claim 7, wherein the boron-oxide substituted polyorganosiloxane used to form the dielectric interlayer is boron-oxide substituted polymethylsiloxane having a weight average molecular weight of from 500-200,000.
References Cited (Backward Citations)
US2842521A
Cited
US3258477A
Cited
US3402191A
Cited
US3544498A
Cited
US3615943A
Cited
US3928225A
Cited
US3837873A
Cited
US3915766A
Cited
US3832202A
Cited
US3789023A
Cited
US3905823A
Cited
US3975294A
Cited
US3969168A
Cited
US3892608A
Cited
US3986997A
Cited
US4152286A
Cited
US4173490A
Cited
US4338375A
Cited
DE3014675A1
Cited
US4447498A
Cited
US4619719A
Cited
US4571366A
Cited
US4605450A
Cited
US4493886A
Cited
US4439239A
Cited
SU1097576A1
Cited
EP0112168A2
Cited
US4509981A
Cited
US4563241A
Cited
US4557797A
Cited
US4835089A
Cited
US4620986A
Cited
US4587138A
Cited
US4652618A
Cited
US4663414A
Cited
US4935095A
Cited
US4621042A
Cited
US4847120A
Cited
US4865649A
Cited
US4898907A
Cited
US4808653A
Cited
US4842901A
Cited
US4798629A
Cited
US4885262A
Cited
US5037777A
Cited
US5100503A
Cited
US5152834A
Cited
US5186745A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-09-08 | 2001-03-10 | 2001-09-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-09-08 | 2005-03-10 | 2005-09-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-09-08 | 2009-03-10 | 2009-09-09 | $7700.00 | Window Closed / Lapsed |