US3789023A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Liquid diffusion dopant source for semiconductors
Assignee: Motorola Solutions Inc
•
Filing: 1972-08-09
•
Granted: 1974-01-29
•
Expires: 1992-08-09
Abstract
Abstract THERE IS DISCLOSED A LIQUID DIFFUSION DOPANT SOURCE FOR SEMICONDUCTOR DIFFUSIONS WHICH COMPRISES IN COMBINATION 54-64% ETHYL ALCOHOL, 15-25% ETHYL ACETATE, 7-17% TETRAETHYLSILICATE, 3-10% WATER AND 0.1-10% OF A DOPING ATOM SORUCE SELECTED FROM THE GROUP CONSISTING OF THE COMPOUNDS OF ARSENIC, PHOSPHORUS, BORON ANTIMONY, ZINC, ALUMINUM, PLATINUM, GOLD AND GALLIUM. THE LIQUID DOPANT SOURCE MAY BE READILY COATED ONTO THE SEMICONDUCTOR WAFER EITHER BY PAINTING, SPRAYING OR PREFERABLY SPINNING. AFTER DRYING OF THE COATING, DIFFUSION OF THE DOPANT ATOMS INTO THE WAFER IS READILY CONDUCTED IN A STANDARD DIFFUSION FURNACE.
Inventors
- 👤 K Ritchie
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 08:41
CPC Classifications
H; H10; H10P; H10P32/00; H10P32/10; H10P32/14; H10P32/1408; H10P32/141; H10P32/17; H10P32/171; H10P32/19; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/118; Y10S148/151; Y10S252/00; Y10S252/95
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-01-28 | 1977-07-30 | 1978-01-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-01-28 | 1981-07-30 | 1982-01-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-01-28 | 1985-07-30 | 1986-01-29 | $7700.00 | Window Closed / Lapsed |