US3832202A
Expired / Lapsed
US
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Liquid silica source for semiconductors liquid silica source for semiconductors
Assignee: Motorola Solutions Inc
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Filing: 1972-08-08
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Granted: 1974-08-27
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Expires: 1992-08-08
Abstract
Abstract THERE IS DISCLOSED A LIQUID SILICA SOURCE FOR SEMICONDUCTOR DIFFUSIONS WHICH COMPRISES IN COMBINATION 54-64% ETHYL ALCOHOL, 11-21% ETHYL ACETATE, 13-63% TETRAETHYLORTHOSILICATE, AND 3-10% WATER AND 1-8% VINYL TRICHLOROSILANE, SAID PERCENTAGES BEING BY WEIGHT. THE LIQUID SILICA SOURCE MAY BE READILY COATED ONTO THE SEMICONDUCTOR WAFER EITHER BY PAINTING, SPRAYING OR PERFERABLY SPINNING.
Inventors
- 👤 K Ritchie
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 00:50
CPC Classifications
C; C01; C01B; C01B33/00; C01B33/113; C01B33/12; C01B33/14; C01B33/145; H; H10; H10H; H10H20/00; H10H20/80; H10P; H10P14/00; H10P14/60; Y; Y10; Y10S; Y10S148/00; Y10S148/043; Y10S148/118
Claims Analysis
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-08-26 | 1978-02-25 | 1978-08-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-08-26 | 1982-02-25 | 1982-08-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-08-26 | 1986-02-25 | 1986-08-27 | $7700.00 | Window Closed / Lapsed |