US4842901A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Coating solution and process for producing glassy layers
Assignee: Hoechst AG
•
Filing: 1988-02-02
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Granted: 1989-06-27
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Expires: 2008-02-02
Abstract
Abstract A coating solution for producing glassy layers on a substrate comprises a silicic acid ester, an aliphatic alcohol as a solvent, an acid in a catalytically active quantity, and water. The alcohol contains at least 4 carbon atoms and the acid has a pKa of less than +3. The viscosity of the coating solution is table even at elevated temperatures and the amount of water added is increased. The glassy layers produced from the coating solution exhibit no striations.
Inventors
- 👤 Hans-Joachim Merrem
- 👤 Werner Graf
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 13:02
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; C; C09; C09D; C09D183/00; C09D183/02; G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/094; H10P14/63; H10P14/6326; H10P14/6342; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
52 words
A coating solution for producing glassy layers on a substrate, consisting essentially of a silicic acid ester, a solvent comprised of an aliphatic alcohol, a catalytically active quantity of acid, and water, wherein the alcohol has at least 4 carbon atoms and the acid has a pK a of less than +3.
Claim 2
Dependent Claim
52 words
A coating solution for producing glassy layers on a substrate, consisting essentially of a silicic acid ester, a solvent comprised of an aliphatic alcohol, a catalytically active quantity of acid, and water, wherein the alcohol has at least 4 carbon atoms and the acid has a pK a of less than +3.
Claim 3
Dependent Claim
30 words
A coating solution as claimed in claim 1, wherein the silicic acid ester is at least one selected from the group consisting of a tetraalkoxysilane, a tetra(alkoxyalkoxy)silane, and a poly(alkoxysiloxane).
Claim 4
Dependent Claim
19 words
A coating solution as claimed in claim 2, wherein the silicic acid ester comprises a poly(alkoxysiloxane) that is prehydrolyzed.
Claim 5
Dependent Claim
34 words
A coating solution as claimed in claim 1, wherein the silicic acid ester is present in the coating solution in an amount between about 2% to 50% by weight, based on the coating solution.
Claim 6
Dependent Claim
28 words
A coating solution as claimed in claim 4, wherein the amount of silicic acid ester is between about 5% and 25% by weight, based on the coating solution.
Claim 7
Dependent Claim
24 words
A coating solution as claimed in claim 1, wherein the solvent is a mixture which contalns at least 50% by weight of the alcohol.
Claim 8
Dependent Claim
18 words
A coating solution as claimed in claim 1, wherein the alcohol is a monohydric or a polyhydric alcohol.
Claim 9
Dependent Claim
13 words
A coating solution as claimed in claim 7, wherein the alcohol is dihydric.
Claim 10
Dependent Claim
15 words
A coating solution as claimed in claim 7, wherein the alcohol is dimeric or trimeric.
Claim 11
Dependent Claim
20 words
A coating solution as claimed in claim 7, wherein the alcohol is partially etherified or is an oligomerically etherified alcohol.
Claim 12
Dependent Claim
23 words
A coating solution as claimed in claim 1, wherein the pK a of the acid is in the range from +2 to -6.
Claim 13
Dependent Claim
15 words
A coating solution as claimed in claim 1, wherein the acid is an organic acid.
Claim 14
Dependent Claim
36 words
A coating solution as claimed in claim 1, wherein water is present in a quantity of between about 90% and 200%, based on the quantity of water necessary for complete hydrolysis of the silicic acid ester.
Claim 15
Dependent Claim
79 words
A process for producing a striation-free glassy layer on a substrate with a coating solution as claimed in claim 1, comprising the steps of producing a homogeneous mixture consisting essentially of the silicic acid ester, the solvent, the acid and water; polycondensing the silicic acid ester at a temperature between about 0° and 120° C.; thereafter depositing and drying the coating solution on a substate, such that a glassy layer is produced thereon; and then heat-treating the glassy layer.
Claim 16
Dependent Claim
19 words
A process claimed in claim 14, further comprising the step of depositing a photoresist layer on the glassy layer.
Claim 17
Dependent Claim
20 words
A process as claimed in claim 14, wherein the substrate is a metal, a metal oxide or a polymer layer.
Claim 18
Dependent Claim
19 words
A process as claimed in claim 16, wherein the substrate is a semiconductor substrate or a liquid crystal display.
Claim 19
Dependent Claim
24 words
A process as claimed in claim 14, wherein the glassy layer has a thickness of between about 20 nm and 5.0 μm, after heat-treatment.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-06-26 | 1992-12-26 | 1993-06-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-06-26 | 1996-12-26 | 1997-06-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-06-26 | 2000-12-26 | 2001-06-27 | $7700.00 | Window Closed / Lapsed |